• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2009.10a
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• pp.217-218
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• 2009

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.21 no.5
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• pp.741-746
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• 2012

The increase of energetic efficiency in plane bearing is getting more important in the transfer mechanism of semi-conductor and display panel manufacturing processes. To accomplish this objective, the technique of surface texturing on bearing surface has recently emerged as one of the most effective candidates. In this study, the effects of various pattern parameters on two bearing performance indices(load carrying capacity and effective friction coefficient) are investigated through a semi-analytic method, i.e., the 2-dimensional Reynolds equation incorporated into the finite difference scheme. Here, cavitation effect is also taken into account by employing an appropriate numerical scheme. In this study, the patterns in the textured surface are composed of a series of semi-spheres or semi-ellipsoids in shape. The effects of their size and number density on the performance indices are examined through the performance of various numerical experiments. Also, the effects of the anisotropy of the semi-ellipsoidal pattern on the bearing's lubrication characteristics are investigated and discussed.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.141-142
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• 2006

This paper describes estimation method for 2D position error of planar XY stage from measured profiles of guide-ways. The XY stage usually moves along its guide ways. The motion error of each stage has effect on 2D position errors of XY stages and affected mainly by profiles of guide-ways. To estimate 2D position error and flatness of stages, the profiles of guide-ways were measured and used in motion error estimation.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.12
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• pp.82-88
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• 2008

This paper describes an application of sliding mode control to an active magnetic bearing(AMB) system. A sliding mode control is robust to model uncertainties and external disturbances. To ensure the authority of sliding mode control, model parameter uncertainties caused from linearization of electro-magnetic attractive force are analyzed and a domain of parameter uncertainties in which reachability to sliding surface is guaranteed is derived. The validity of the analysis is illustrated along with some simulation examples.

• Tribology and Lubricants
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• v.25 no.6
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• pp.414-420
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• 2009

In this study, using the general expressions predicting the pressure under a blade and the volume of coating fluid passing through the blade edge, it is predicted the change of the coating wet film thickness related with various parameters determining the characteristics of this blade coating process. Using the results of this research, it can be found the optimized coating wet film thickness taking into account the parameters related with various coating process on various metal surfaces will be able to be predicted.

• Tribology and Lubricants
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• v.26 no.2
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• pp.142-148
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• 2010

The purpose of this study is to find how to be formed the wet film thickness during the low friction coating process for a piston skirt with application to the theory of screen printing. In other words, in this research, it is to derive the general expressions predicting the pressure under a blade and the volume of coating fluid passing through the blade edge. Using these expressions, it is to be approved that the current operation characteristics of a screen printing system to a sample blade coating process for low friction coating on a piston skirt can be quantitatively assessed.

• Tribology and Lubricants
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• v.39 no.4
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• pp.139-147
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• 2023

Cavitation phenomena observed during the operation of a submerged plain journal bearing (PJB) can affect bearing performance parameters such as dynamic coefficients, whirl frequency ratio, and critical mass. This study presents numerical solutions of the Reynolds equation for steadily and dynamically loaded submerged PJBs with half-Sommerfeld (HS), Reynolds, and Jakobsson-Floberg-Olsson (JFO) cavitation models when the supply pressure is larger or equal to the cavitation pressure. The loads at various eccentricity ratios are identical; however, the attitude angle is approximately 6% smaller when the eccentricity ratio is between 0.2 and 0.7 and the JFO model is used, compared to that when the Reynolds model is used. Dynamic coefficients obtained with the HS and Reynolds model show good agreement with each other, except for k_xz, which is sensitive to changes in the force normal to the rotor weight, and is attributed to the difference in the attitude angle obtained with each cavitation model. Stiffness coefficients are determined using the pressure distribution in the film, and therefore, when the JFO model is used, the direct stiffness coefficients are affected and show opposite signs for most eccentricity ratios. The mass-conservative JFO model can predict at least a 30% smaller critical mass compared to that using the HS and Reynolds models. Thus, the instability analysis results can change based on the cavitation model used in a submerged PJB. The results of this research indicate that the JFO model should be used when designing a rotor system supported by submerged PJBs.

• Transactions of the Korean Society of Mechanical Engineers
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• v.16 no.12
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• pp.2261-2267
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• 1992

The equations are derived for the evaluation of the axial contact force. The contact forces for rubber seals are analyzed as a function of the ratio of real contact length, the thickness of seal lip, the inclined angle of seal lip, and the interference between the edge of seal lip and the rotating inner ring. The design data for rubber seals are presented in terms of the ratio of real contact length, initial inclined lip angle, lip thickness and the interference. The calculated results show that the deflected interference and the circumferential stress cause considerable change of contcat forces for the low sealed pressure.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.21 no.11
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• pp.554-560
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• 2020

In the manufacturing process of flat panel displays, a high-precision planar motion stage is used to position a specimen. Stages of this type typically use frictionless linear motors and air bearings, and laser interferometers. Real-time dynamic correction of the yaw motion error is very important because the inevitable yaw motion error of the stage means a change in the specimen orientation. Gantry control is generally used to compensate for yaw motion errors. Flexure units that allow rotational motion are applied to the stage to apply this method to a stage using an air-bearing guide. This paper proposes a method to improve the constant speed motion performance of a H-type XY stage equipped with air bearing and flexure units. When applying the gantry control to the stage, including the flexure units, the cause of the mutual ripple generated from the linear motors is analyzed, and adaptive learning control is proposed to compensate for the mutual ripple. A simulation was performed to verify the proposed method. The speed ripple was reduced to approximately the 22 % level. The ripple reduction was verified by simulating the stage state where yaw motion error occurs.

• Transactions of the Korean Society of Mechanical Engineers
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• v.16 no.4
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• pp.737-752
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• 1992

Analysis of elasto-dynamic deformation of flexible linkage mechanism is conducted using the finite element method. The equations of motion of the system are derived from the static structural problem in which dynamic inertia, gravitational and driving forces are treated as external loads. Linear spring model is included in the formulation of equation of motions to represent the effects of deformation of elastic bearings of revolute joints on the system behavior. A computer program is constructed and applied to analyze a specific crank-lever 4-bar mechanism. The algorithm of the program is as follows. First, the natural frequencies and the mode shapes of the system are calculated by solving the eigenproblem of the mechanism system which can be considered as a static structure by assuming the input shaft (crank shaft) to be fixed at any given configuration of mechanism. And finally, the elasto-dynamic deformation of the whole system is obtained using mode superposition method for the case of constant input speed. The effect of geometric stiffness on the mechamism is included in the program with the axial forces of links obtained through the quasi-static displacement analysis. It is found that the geometric stiffness exerts an important effect upon the elasto-dynamic behavior of the flexible linkage mechanism. Elastic deformation of bearing lowers the natural frequencies of the system, resulting smaller elastic displacement at the mid-point of the links and bigger elestic displacement at the ends of the links than rigid bearing. The above investigation of flexible linkage mechanism shows that the effects of the elastic deformation of bearing on the mechanism should be considered to design the mechanism which satisfies more preciously the purpose and the condition of design.