• 제목/요약/키워드: 펄스형$CO_2$ 레이저

검색결과 23건 처리시간 0.026초

고분자 공중합체와 알루미늄 양극 산화막 템플레이트를 이용한 나노점 배열 형성 (Fabrication of Nanodot Arrays Via Pulsed Laser Deposition Technique Using (PS-b-PMMA) Diblock Copolymer and Anodic Aluminum Oxide Templates)

  • 박성찬;배창현;박승민;하정숙
    • 한국진공학회지
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    • 제15권4호
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    • pp.427-433
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    • 2006
  • 자발적인 미세상 분리에 의해 실린더형의 규칙적인 배열을 형성하는 고분자 공중합체와 알루미늄의 양극산화에 의해 실린더형 기공 배열이 형성되는 알루미나 템플레이트를 이용하여 다양한 물질의 나노점 배열을 형성하였다. 펄스형 레이저 기상 증착법을 이용하여 은, 니켈, 산화아연, 실리콘, 코발트 / 백금 나노점 배열을 얻었는데, 나노점의 크기와 배열은 템플레이트의 기공 크기와 배열을 보여주었다. 이러한 템플레이트 기법을 이용하면 나노점의 밀도는 고 분자 공중합체와 알루미나의 경우 각각 $6{\times}10^{11}/cm^2$$1{\times}10^{10}/cm^2$ 이다. 이중 에르븀이 도핑된 실리콘 나노점과 ZnO 나노점 배열은 PL 측정을 통하여 물질의 광학성질에 관해 알아보았다. 에르븀이 도핑된 실리콘 나노점 배열은 $1.54{\mu}m$에서 강한 빛을 내며 ZnO 나노점 배열은 380 nm 에서 강한 PL 세기를 나타낸다.

능동적 다중 펄스 중첩법(AMPS)을 적용한 펄스형 $CO_2$ 레이저의 펄스 성형에 대한 연구 (A study on the pulse forming of pulsed $CO_2$ laser using active multi-pulse superposition)

  • 정현주;박성준;정용호;송건주;김희제;김휘영
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2001년도 하계학술대회 논문집 C
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    • pp.1631-1633
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    • 2001
  • In manufacturing processes, various and suitable pulse shapes are required for the purpose of material processing and the pulseshape is regarded as a dominant factor due to the specific property of processing materials. Therefore, in this study, a variable pulse width, high duty cycle Pulse Forming Network(PFN) is constructed by time sequently. The power supply for this experiment consists of three switching circuits. The PFN elements operate at low voltage and drive the primary of HV leakage transformer. The secondary of the transformer has a full-wave rectifier, which passes the pulse energy to the load in a continuous sequence of properly phased and nested increments. We investigated laser pulse width as various delay time among three switching circuit. As a result, we tan obtain various laser pulse width from about 4ms to 10ms. The maximum laser pulse width obtained at this experiment was about 10ms at delay time of 4ms among each switching circuit.

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누설변압기 1차측의 스위칭 제어에 의한 펄스형 $CO_2$레이저에 관한 연구 (A Study on the Pulsed $CO_2$ Laser by the Switching Control of Leakage Transformer Primary)

  • 정현주;이동훈;김희제
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제49권9호
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    • pp.541-545
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    • 2000
  • We propose a pulsed $CO_2$laser below 30W by the AC(60Hz) switching control of leakage transformer primary which has some advantages of cost and size compared to a typical pulsed power supply. Pulse repetition rate is adjusted from 5 Hz to 60 to Hz control laser output. In this laser a low voltage open loop control for high voltage pulse discharge circuit is employed to aviod the Hv sampling or switching and high voltage leakage transformer is used to convert low voltage pulse rectified from AC to high voltage one. A ZCS(Zero Crossing Switch) circuit and a PIC(programble one-chip microprocessor are used to control gate signal of SCR precisely. The pulse repetition rate is limited by 60Hz due to the frequency of AC line and a high leadkage inductance. The maximum laser output was about 23 W at pulse repetition rate of 60Hz total gas mixture of $CO_2$ : $N_2$ : He=1: 9: 15 and total pressure of 18 Torr

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삼중수소 활용을 위한 자발광유리관 (SLGT) 제조기술 (Manufacturing Process of Self-Luminous Glass Tube (SLGT) Utilizing Tritium Gas (I))

  • 김광신;김경숙;정은수;손순환;남기중
    • 한국방사성폐기물학회:학술대회논문집
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    • 한국방사성폐기물학회 2005년도 추계 학술대회 논문집
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    • pp.87-95
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    • 2005
  • 삼중수소를 사용하는 자발광유리관의 제조에 필요한 4가지 핵심 기술 중 레이저를 이용한 밀봉/절단기술을 개발하였다. 상용 제품을 분석한 결과 유리관의 재질은 pyrex 이었고 레이저는 유리가공에 적절한 펄스형 이산화탄소 레이저를 사용하였다 유리관의 밀봉/절단에 영향을 미치는 인자들로는 레이저빔의 강도 지속시간 조사 방법, 유리관 내부의 압력 등이었다. 전 공정은 2단계로 이루어져 1단계에서는 삼중수소를 주입하고 유리관의 양단을 밀봉하였으며 2단계에서는 삼중수소가 봉입된 유리관을 원하는 길이로 밀봉/절단하였다. 각 공정에서 유리관의 밀봉은 defocusing된 레이저빔을 사용하였으며 절단은 focusing된 빔을 사용하였다. 밀봉/절단 후에는 잔여 열응력에 의한 파열을 방지하기 위하여 열처리를 하였다.

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SMPS 방식의 고반복 펄스형 $CO_2$레이저의 출력특성 최적화 (The Optimization of Output Characteristics with High Repetition Rate Pulsed $CO_2$ Laser Using SMPS)

  • 이동훈;정현주;김도완;김휘영;김희제;조정수
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1999년도 하계학술대회 논문집 E
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    • pp.2192-2194
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    • 1999
  • In this study, We have accomplished a new approach to develope a cheap and compact pulsed $CO_2$ laser system. We used a fast SCR as switching device instead of a thyatron in the pulsed power supply. Using the Pulse transformer, energy in the condenser is tranferred to the secondary, electrodes of discharge tube, from the primary. An axial and water cooled type was adopted as the laser cavity. The laser performance characteristics as various parameters, such as gas pressure and pulse repetition rate, have been investigated. As a result, the maxium laser output was 12.3[W] at a pulse repetition rate of 120[pps] and a filling pressure of 12[Torr].

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AIN 기판의 수동 소자 특성 (The Characteristic of Passive Elements on Aluminum Nitride Substrate)

  • 김승용;육종민;남충모
    • 한국전자파학회논문지
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    • 제19권2호
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    • pp.257-262
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    • 2008
  • 본 논문에서는 열전도도가 우수한 AIN 기판에 $CO_2$ Laser 장비 를 이용하여 Thru-hole과 scribing line을 형성하기 위해 $CO_2$ laser의 파라미터(촛점 거리, 공기량, 레이저 빔 시간, 펄스 개수)를 실험하고, 자체 정렬 마스킹 기법을 이용한 5 um 두께의 Cu 도금으로 AIN 기판에 전송 선로와 나선형 평면 인덕터를 제작하였다. AIN 기판에서의 마이크로스트립 라인의 전송 손실은 10 GHz에서 0.1 dB/mm, 6 nH 나선형 평면 인덕터는 1 GHz에서 56의 품질 계수를 얻었고, 이를 통해 열전도도가 우수한 AIN 기판의 고전력 RF 응용이 가능할 것으로 기대한다.

링 블로우를 이용한 펄스형 $CO_2$ 레이저 시스템의 효율 향상과 동작 특성에 관한 연구 (A Study on Efficiency Improvement and Optimization of Operating Characteristics of Pulsed $CO_2$ Laser System using Ring Blower)

  • 김도완;정현주;박성준;정종한;이동훈;김희제;조정수
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 영호남학술대회 논문집
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    • pp.57-60
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    • 2000
  • In this paper, it is purpose to develop a pulsed $CO_2$ laser with stable output at pulse repetition rate range of 2 KHz. We used a IGBT as a switching device. The laser cavity was fabricated as an axial and water cooled type. It was used a ring blower to increase a cooling effect The laser performance characteristics as parameters, such as pulse repetition rate, gas pressure have been investigated. The experiment was done under 3 electrode-type instead of 2 electrode-type. To achieve 3 electrode-type, we used two pulse-transformers which is operated parallel. As a result, the maximum output was about 28 W at the total pressure of 20 Torr, the gas mixture $Co_2$:$N_2$:He=1:9:15 and the pulse repetition rate of 1300 Hz.

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IGBT를 이용한 고반복 펄스형 $CO_2$ 레이저 개발에 관한 연구 (A Study on the High Repetition Rate Pulsed $CO_2$ Laser Using IGBT)

  • 정현주;김도완;이동훈;윤성호;이유수;김희제;조정수
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1999년도 추계학술대회 논문집 학회본부 C
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    • pp.1072-1074
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    • 1999
  • In this study, it is the purpose to develope a cheap and compact pulsed $CO_2$ laser with pulse repetition rate range of 1 kHz. We used a IGBT switched power supply as a power supply, which is cheap and simple comparing to others. PIC one-chip microprocessor was used for precise control of a laser power supply on the control part. And the laser cavity was fabricated as an axial and water cooled type. The laser performance characteristics as various parameters, such as pulse repetition rate gas pressure, and gas mixture rate have been investigated. The experiment was done under the condition of total pressure of $CO_2:N_2$:He = 1.3:10, 1:1.5:5 1:9:15 from 6 Torr to 15 Torr and pulse repetition rate from 100 Hz to 900 Hz. As a result, the maximum average output was about 20.5 W at the total pressure of 15 Torr, the gas mixture $CO_2:N_2$:He = 1:9:15 and the pulse repetition rate of 700 Hz.

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3전극 방식과 링 블로우를 이용한 펄스형 $CO_2$ 레이저 시스템의 효율 향상과 동작 특성에 관한 연구 (A Study on Efficiency Improvement and Optimization of Operating Characteristics of Pulsed $CO_2$ Laser System using 3 Electrode-type and Ring Blower)

  • 김도완;정현주;박성준;이유수;이동훈;김희제;조정수
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2000년도 하계학술대회 논문집 C
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    • pp.2101-2103
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    • 2000
  • In this paper, it is purpose to develop a pulsed $CO_2$ laser with stable output at pulse repetition rate range of 2 kHz. We used a IGBT as a switching device. The laser cavity was fabricated as an axial and water cooled type. It was used a ring blower to increase a cooling effect. The laser performance characteristics as parameters, such as pulse repetition rate, gas pressure have been investigated. The experiment was done under 3 electrode-type instead of 2 electrode-type. To achieve 3 electrode-type, we used two pulse-transformers which is operated parallel. As a result. the maximum output was about 28 W at the total pressure, of 20 Torr(the gas mixture $CO_2$:$N_2$:He=1:9:15 and the pulse repetition rate of 1300 Hz).

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위상각와 주파수 제어에 따른 상용주파 AC 여기 방식의 펄스형 $CO_2$ 레이저 전원장치 개발에 관한 연구 (Output characteristics of ac excited $CO_2$ laser as a adjusting a phase angle and frequency)

  • 정현주;김도완;이동훈;김중만;김희제;조정수
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2000년도 하계학술대회 논문집 C
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    • pp.2098-2100
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    • 2000
  • We propose pulsed $CO_2$ laser below 30W by the AC(60Hz) switching control of leakage transformer primary which has some advantage of cost and size compared to a typical pulsed power supply. Pulse repetition rate is adjusted from 5Hz to 60Hz to control laser output. In this laser, a low voltage open loop control for high voltage discharge circuit is employed to avoid the HV sampling or switching and high voltage leakage transformer is used to convert rectified low voltage pulse to high voltage one. A ZCS(Zero Cross Switch) circuit and a PIC one-chip microprocessor are used to control gate signal of SCR precisely. The pulse repetition rate is limited by 60Hz due to the frequency of AC line and a high leakage inductance. The maximum laser output was obtained about 23W at pulse repetition rate of 60Hz, total gas mixture of $CO_{2}/N_{2}$/He = 1/9/15, SCR gate trigger angle 90$^{\circ}$, and total pressure of 18Torr.

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