• 제목/요약/키워드: 패턴 스탬퍼

검색결과 17건 처리시간 0.026초

미세 패턴 응용 도광판 제작에 관한 연구 (A study on fabrication of a micro patterned LGP)

  • 유영은;김태훈;김성곤;서영호;제태진;최두선
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2006년도 춘계학술대회 논문집
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    • pp.533-534
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    • 2006
  • Micro pyramid pattern and its array are designed to enhance the brightness and its uniformity of LGP which is one of key parts in LCD. The designed micro pyramid patterns are fabricated on a Si-wafer first through MEMS process and then a Ni-stamper is electro-plated from the Si pattern master. Adopting the fabricated Ni-stamper, LGPs are injection molded at different mold temperatures and the fidelity of the pattern replication is estimated for each molding conditions and pattern locations. The replicated patterns are found to have some defect such as local short shot or micro weld line which are believed to have negative effect on the performance of the LGP.

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Anodic Aluminum Oxide 기반 니켈 스탬퍼를 이용한 나노패턴 성형에 관한 연구 (A Study on the Fabrication of Nano Pattern using a Nickel Stamper Replicated from Anodic Aluminum Oxide)

  • 김신;김종선;홍석관;김현종;윤경환;강정진
    • 소성∙가공
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    • 제20권1호
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    • pp.23-28
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    • 2011
  • For the fabrication of nano patterned products manufacturing a nano patterned mold is needed in advance. The nano patterned stamper was fabricated by electroforming the AAO master with nickel. The surface of nickel-plated stamper had nano-patterned holes with the diameter of 73 nm and the depth of 83 nm. Hot embossing was used for forming P3HT sheet and the process factors of hot embossing were closer as pressure, temperature and time. In the present paper hot embossing experiments were performed to find the main process conditions to affect the replication ratio of nano patterns on surface of P3HT sheet. As a result, main contributing factors for the replication ratio of hot embossed pattern could be sequentially enumerated as pressure, temperature and time.

Sub-micrometer 크기의 패턴의 복제시 발생되는 이형 특성의 분석 (Analysis of anti-adhesion property in replication of patterns of sub-micrometers)

  • 이남석;강신일
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2003년도 춘계학술대회
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    • pp.940-944
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    • 2003
  • With the increasing demand for plastic micro components, micro-/nano-molding using the mother stamper has received much attention. If the replication temperature is too high, the adhesion between the stamper and the polymer melt may deteriorate the surface quality of the replicated part, excessively wearing down the stamper. In this paper, an experimental method analyzes the temperature dependency of the anti-adhesion property between the actual stamper with patterns of sub-micrometer and the polymer melt. As a practical example, a correlation between the contact angle of the stamper and the surface quality of the molded substrates as a function of the replication temperature, respectively, was obtained quantitatively.

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미세 패턴 제품 마스터 제작 및 성형 공정 기술 개발 (Fabrication of a stamper and injection molding for micro pattern product)

  • 유영은;서영호;제태진;최두선
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 춘계학술대회 논문집
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    • pp.216-219
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    • 2005
  • In recent, LCD becomes one of the main display devices and expected to have quite good market share during the next couple of years. The demand for low cost and high performance, however, is becoming severe as the competition among other display devices like PDP, OLED increases. To satisfy this demand from market, we need to optimize the parts or modules of the LCD, reduce the number of the assemble and enhance the process for the high brightness and uniformity of the LCD. The LCD consists mainly of LCD panel and Backlight unit(BLU). BLU, which takes big portion of the cost for LCD, consists of light source, light guide panel and many kinds of functional film. Recently light guide panel or film for BLU has micro patterns on its surface and consequently to reduce the number of parts and enhace the brightness and its uniformity. In this study, some methodologies for the fabrication of the master/stamper and molding the light quide panel are introduced for 50um pitch of prizm patterned substrate. Mechanical machining process is adapted and optimized to fabricate micro patterned stamper using the micro cutting tool. Injection molding technology is also developed to obtain uniformly replicated micro patterned products.

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재사용 가능한 100nm급 패턴의 퀄츠 마스터 제작 및 퀄츠 마스터를 사용한 사출성형실험 (Fabrication of Nanoscale Reusable Quartz Master for Nano Injection Molding Process)

  • 최두선;이준형;유영은;제태진;황경현;서영호
    • 대한기계학회논문집A
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    • 제29권2호
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    • pp.228-231
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    • 2005
  • In this paper, we present reusable quartz master fabricated by electron-beam lithography and dry etching process of quartz, and results of injection molding based on the reusable quartz master for the manufacturing of nano-scale information media. Since patterned structures of photoresist can be easily damaged by separation (demolding) process of nickel stamper and master, a master with photoresist cannot be reused in stamper fabrication process. In this work, we have made it possible of the repeated use of master by directly patterning on quart in nickel stamper fabrication process. We have designed and fabricated four different specimens including 100nm, 140nm 200nm and 400nm pit patterns. In addition, both intaglio and embossed carving patterns are fabricated for each specimen. In the preliminary test of injection molding, we have fabricated polycarbonate patterns with varying mold temperature. We have experimentally verified the fabrication process of the reusable quart master and possibility of quartz master as direct stamper.

나노패턴을 갖는 DVD용 스템퍼의 표면가열방식이 COC, PMMA 수지를 이용한 사출성형품의 전사성에 미치는 영향 (Effects of the mold surface heating methods for the DVD stamper with nano pattern on the transcription of the injection molded parts using COC and PMMA plastics)

  • 김동학;유홍진;김태완
    • 한국산학기술학회논문지
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    • 제5권3호
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    • pp.218-222
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    • 2004
  • 본 연구에서는 분리형 이동코어 방식의 스탬퍼 금형을 개발하였고, 사출성형품 품질에 영향을 주는 인자 중에 이동코어 표면 가열 방식이 미세구조를 갖는 성형품 전사성에 미치는 영향에 대해 알아보았다. 이동코어 표면 가열방식은 이동코어를 가열하지 않는 일반사출방식, 할로겐램프를 이용한 복사형 가열방식과 기체화염을 이용해 가열하는 MmSH 방식을 사용했다. COC, PMMA 두 종류의 열가소성 수지를 사용하여 성형품을 제작한 결과, 이동코어 표면온도가 가장 높은 MmSH 방식에서 나노패턴 전사성이 가장 우수했고, 일반사출성형 방식으로 제작한 성형품에서 전사성이 가장 저조했다.

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마이크로 피라미드 패턴 응용 도광판 제작을 위한 니켈 스탬퍼 제작에 관한 연구 (Fabrication of Ni Stamper based on Micro-Pyramid Structures for High Uniformity Light Guide Panel (LGP))

  • 김성곤;유영은;서영호;제태진;황경현;최두선
    • 한국정밀공학회지
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    • 제23권9호
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    • pp.174-178
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    • 2006
  • Pyramid shape of micro pattern is applied to the light guide panel (LGP) to enhance the uniformity of the brightness of the LCD. The micro pyramids are molded in intaglio on the surface of the LGP. The size of each pyramid is 5$\mu$m $\times$ 5$\mu$m on bottom and the height is about 3.5$\mu$m. The pyramids are distributed on the LGP surface randomly to be sparser where the light comes in and denser at the opposite side as a result of a simulation using lightools$^{TM}$ Based on this design, a silicon pattern master and a nickel stamper are fabricated by MEMS process and electro plating process. Intaglio micro pyramids are fabricated on the 6' of silicon wafer from the anisotropic etching using KOH and the process time, temperature of the KOH solution, etc are optimized to obtain precise shape of the pattern. A Wi stamper is fabricated from this pattern master by electro plating process and the embossed pyramid patterns turns out to be well defined on the stamper. Adopting this stamper to the mold base with two cavities, 1.8' and 3.6' LGPs are injection molded.