• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.288-291
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• 2003

This paper presents an extended Twyman-Green interferometry that enables simultaneous and real-time measurement of 5-DOF motion errors of the translational moving stage. This method uses a null balancing technique in which two plane mirrors are used as target mirrors to generate an interferometric fringe utilizing the optical principles of Twyman-Green interferometry. Fringe is detected by 2D photodiode array for high-speed measurement. Errors are then independently suppressed by activation of piezoelectric actuators through real-time feedback control while the machine axis is moving. Experimental results demonstrate that a machine axis can be controlled with motion errors about 10 nm in linear displacement, 0.15 arcsec in angular displacement

• Journal of the Korean Society for Precision Engineering
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• v.20 no.10
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• pp.112-119
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• 2003

This paper presents an extended Twyman-Green interferometry that enables simultaneous and real-time measurement of 5-DOF motion errors of the translational moving stage. This method uses a null balancing technique in which two plane mirrors are used as target mirrors to generate an interferometric fringe utilizing the optical principles of Twyman-Green interferometry. Fringe is detected by 2D photodiode array for high-speed measurement. Errors are then independently suppressed by activation of piezoelectric actuators through real-time feedback control while the machine axis is moving. Experimental results demonstrate that a machine axis can be controlled with motion errors about 10 nm in linear displacement, 0.15 arcsec in angular displacement.

• Proceedings of the Optical Society of Korea Conference
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• 2003.02a
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• pp.90-91
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• 2003

대부분의 가공기 혹은 측정기에 있어 이송테이블은 그 기능수행의 기본을 담당하고 있으며 이송테이블의 운동 정밀도와 고속화는 목표하는 정밀도와 생산성으로 직결된다. 종래에는 형상특성, 열변형 등의 계통 오차만을 오프라인(Off-line)으로 측정하고 소프트웨어적으로 보상하는 방법을 사용하였으나 초정밀 분야에서 요구되는 테이블의 운동정밀도는 기계적 강성한계를 넘는 정밀도이므로, 테이블 이송 시 발생하는 운동오차를 실시간으로 측정하고, 보상할 수 있는 온라인(On-line)개념의 능동형 보상이 필요하다. (중략)

• Proceedings of the KSME Conference
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• 2007.05a
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• pp.1673-1678
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• 2007

The use of flip-chip type electronic package offers numerous advantages such as reduced thickness, improved environmental compatibility, and downed cost. Despite numerous benefits, flip-chip type packages bare several reliability problems. The most critical issue among them is their electrical performance deterioration upon consecutive thermal cycles attributed to gradual delamination growth through chip and adhesive film interface induced by CTE mismatch driven shear and peel stresses. The electronic package in use is heated continuously by itself. When the crack at a weak site of the electronic package occurs, thermal deformationon the chip side is changed. Therefore, we can measure these micro deformations by using Moire interferometry and find out the crack length.

• Korean Journal of Optics and Photonics
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• v.15 no.3
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• pp.248-253
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• 2004

We propose a near- field scanning optical interferometer (NSOI) based on the facet reflection of a nano-sized moveable tapered optical fiber. The interferometer can measure the position and the wave-front of a focused spot simultaneously. The interfering fringes are generated by the reflected beams from the sample surface and from the fiber facet. The wave-front analysis at the focusing position is obtained by using a phase shifting technique with a four-step algorithm. It is found that the resolution for controlling the focal position of our proposed NSOI is less than λ/3 and the measured wave-front aberration at the focal position is in good agreement with the ones obtained by a Twyman-Green interferometer.

• Proceedings of the Optical Society of Korea Conference
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• 2003.07a
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• pp.28-29
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• 2003

각종 렌즈 및 카메라, 망원경, 현미경 등 다양한 광학계들이 설계 및 개발 되고 있는 시점에서 그 성능을 정확하게 평가하는 것이 매우 중요하다. 광학계의 성능 평가를 위해서는 크게 정성적인 방법과 정량적인 방법으로 나눌 수 있는데, 정성적인 방법에 의한 평가는 분해능 표판이나 주기적인 격자의 상을 스크린 등에 결상시킨 후 사람의 눈을 통해서 한계 분해능을 평가하는 방법이다. 정량적인 방법에 의한 평가는 OTF(Optical Transfer Function)를 측정하거나 설계 자료를 통해 계산해 내는 것이다. (중략)

• Korean Journal of Optics and Photonics
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• v.18 no.2
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• pp.130-134
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• 2007

I present a novel curvature profilometer devised fur the profile measurement of aspheric and free-form surfaces on the nanometer scale. A profile is reconstructed from measuring the curvature of a test part of the surface at several locations along a line. For profile measurement of free-farm surfaces, methods based on local part curvature sensing have strong appeal. Unlike full-aperture interferometry they do not require customized null optics. The measurement accuracy of the curvature profilometer was assessed by comparison with a well-calibrated interferometer in NIST. Experimental results prove that the maximum discrepancy turns out to be 37 nm on the 28 mm measurement range for the spherical mirror.