• Proceedings of the Membrane Society of Korea Conference
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• 1994.04a
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• pp.57-57
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• 1994

졸-겔 침지코팅 (dipcoating) 또는 가압 졸-겔 코팅 (pressurized coating) 법으로 제조한 $\gamma-Al_2O_3, SiO_2, TiO_2$ 및 aluminosilicate 복합막에 대하여 $CO_2$, He, $N_2$, 및 $O_2$ 기체 투과율과 $CO_2$ 분리계수를 측정하였다. 이들 막을 통한 모든 기체의 이동은 Knudsen 유동이 지배적이었으며 $CO_2/N_2$의 분리계수는 0.9 ~ 1.1 정도로 Knudsen 분리계수 ($CO_2/N_2$의 경우 0.8)보다 약간 높은 값을 보여주었다. $CO_2$ 분리계수를 향상시키기 위하여 silane coupling 및 산화물 도핑법에 의한 복합막의 표면개질을 시도하였으며 분리막의 재질 및 표면개질 조건에 따른 $CO_2/N_2$ 분리계수 변화를 측정 비교하였다. Silane coupling에 의한 표면개질이 $CO_2$의 표면 친화성 (affinity)에 의한 표면확산속도를 증가시키기 때문에 $CO_2$ 분리에 있어서 산화물 도핑에 의한 표면개질보다 더욱 효과적이었다.

• Korean Chemical Engineering Research
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• v.54 no.5
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• pp.653-658
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• 2016

Poly(ether-block-amide)(PEBAX$_{(R)}$) resin is a thermoplastic elastomer combining linear chains of hard-rigid polyamide block interspaced soft-flexible polyether block. It was believed that the hard polyamide block provides the mechanical strength and permselectivity, whereas gas transport occurs primarily through the soft polyether block. The objective of this work was to investigate the gas permeation properties of carbon dioxide and methane for PEBAX$^{(R)}$-1657 membrane, and compare with those obtained for other grade of pure PEBAX$^{(R)}$, PEBAX$^{(R)}$-2533 and PEBAX$^{(R)}$ based hybrid membranes. The hybrid membranes based PEBAX$^{(R)}$ were obtained by a sol-gel process using GPTMS ((3-glycidoxypropyl) trimethoxysilane) as the only inorganic precursor. Molecular structure and morphology of membrane were analyzed by $^{29}Si$-NMR, DSC and SEM. PEBAX$_{(R)}$-2533 membrane exhibited higher gas permeability coefficients than PEBAX$^{(R)}$-1657 membrane. This was explained by the increase of chain mobility. In contrast, ideal separation factor of $CO_2/CH_4$ for PEBAX$^{(R)}$-1657 membrane was higher than PEBAX$^{(R)}$-2533 membrane. It was explained by the decrease of diffusion selectivity caused by increase of chain mobility. For PEBAX$^{(R)}$/GPTMS hybrid membrane, gas permeability coefficients were decreased with reaction time. Gas permeability coefficient of $CH_4$ was more significantly decreased than $CO_2$. It can be explained by the reduction of chain mobility caused by the sol-gel process, and strong affinity of PEO segment with $CO_2$. Comparing with pure PEBAX$^{(R)}$-1657 membrane, ideal separation factor of $CO_2/CH_4$ for PEBAX$^{(R)}$/GPTMS hybrid membrane has decreased to 4.5%, and gas permeability coefficient of $CO_2$ has increased 3.5 times.

• The Journal of Korean Society for Radiation Therapy
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• v.28 no.1
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• pp.47-55
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• 2016

To evaluate the position accuracy of the MLC. This study analyzed the variations of the dosimetric leaf gap(DLG) and MLC transmission factor to reflect the location of the MLC leaves according to the dose rate variation for dynamic IMRT. We used the 6 MV and 10 MV X-ray beams from linear accelerator with a Millennium 120 MLC system. We measured the variation of DLG and MLC transmission factor at depth of 10 cm for the water phantom by varying the dose rate to 200, 300, 400, 500 and 600 MU/min using the CC13 and FC-65G chambers. For 6 MV X-ray beam, a result of measuring based on a dose rate 400 MU/min by varying the dose rate to 200, 300, 400, 500 and 600 MU/min of the difference rate was respectively -2.59, -1.89, 0.00, -0.58, -2.89%. For 10 MV X-ray beam, the difference rate was respectively ?2.52, -1.69, 0.00, +1.28, -1.98%. The difference rate of MLC transmission factor was in the range of about ${\pm}1%$ of the measured values at the two types of energy and all of the dose rates. This study evaluated the variation of DLG and MLC transmission factor for the dose rate variation for dynamic IMRT. The difference of the MLC transmission factor according to the dose rate variation is negligible, but, the difference of the DLG was found to be large. Therefore, when randomly changing the dose rate dynamic IMRT, it may significantly affect the dose delivered to the tumor. Unless you change the dose rate during dynamic IMRT, it is thought that is to be the more accurate radiation therapy.

• Journal of Korean Society of Coastal and Ocean Engineers
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• v.25 no.5
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• pp.327-334
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• 2013

The interaction of oblique incident waves with a surface-mounted horizontal porous plate is investigated using matched eigenfunction expansion method under the assumption of linear potential theory. The new boundary condition on the porous plate suggested by Zhao et al.(2010) when it is situated at the still water surface is used. The imaginary part of the first propagating-mode eigenvalue in the fluid region under a horizontal porous plate, is closely related to the energy dissipation across the porous plate. By changing the porosity, plate width, wave frequencies, and incidence angles, the reflection and transmission coefficients as well as the wave loads on the porous plate are obtained. It is found that the transmission coefficients can be significantly reduced by selecting optimal porous parameter b = 5.0, also increasing the plate width and incidence angle.

• Polymer(Korea)
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• v.36 no.6
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• pp.733-738
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• 2012

The effect of glass bead and glass fiber on the enhancement of dimensional stability in poly(ethylene naphthalate) (PEN) flexible substrate for photovoltaic devices has been studied. It was found that the coefficient of thermal expansion (CTE) and the optical transmittance decreased with increasing inorganic filler content. In addition to filler contents, the size and size distribution of fillers are the other important factors to improve CTE and optical transmittance of PEN film. Our results showed that the optimum filler content was found to be about 5 wt% to enhance the dimensional stability of PEN by more than 50% with maintaining the optical transmittance over 85% for the flexible substrate.

• Membrane Journal
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• v.3 no.2
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• pp.79-82
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• 1993

The sorption equilibria and permeabilities for $CO_2$ in a homogeneous membrane of polystyrene with the glass transition temperature of $95^{\circ}C$ were measured at a temperature of $60^{\circ}C$ and gas pressures up to 1.6 MPa and 2.5 MPa, respectively. The sorption isotherm had the form af dual-mode sorption model at low gas pressures, but became linear at pressures above 1.3 MPa. The linear portion of the isotherm extrapolated to the origin. The pressure dependence of the rnean permeability coefficient deviated upward from the dualsrhode mobility model prediction. It was found that the glass transition was brought out by the plasticization action of sotbed $CO_2$ at a gas pressure of 1.3 MPa from the sorption isotherm. And this result was consistent with an increase in the mean permeability coefficient with applied gas pressure.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.370-370
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• 2008

ITO 박막은 현재 차세대 디스플레이인 LCD, PDP, ELD 등의 평판 디스플레이의 화소전극 및 공통전극으로 가장 많이 적용되고 있는 소재이며, 최근에는 태양전지의 투명전극으로 그 용도가 더욱 증가되고 있다. 이러한 소자들의 투명 전도막으로 사용되기 위해서는 가시광선 영역에서 80% 이상의 높은 투과도와 낮은 면 저항을 가져야 한다. 광 투과도와 면 저항은 ITO 박막의 증착조건에 따라 변하게 되는데 본 연구에서는 DC 마그네트론 스퍼터링법을 이용하여 Indium-Tin Oxide (ITO) 박막을 제작하고, 제작된 ITO 박막의 전기적 특성과 광학적 특성을 측정하여 공정조건에 따른 박막의 특성 변화를 평가하였다. 증착 조건은 주로 기판 온도와 증착 시간을 변화시켰다. 본 실험에서는 $In_2O_3$ : $SnO_2$의 조성비가 9:1 비율의 순도 99.99% ITO 타겟을 사용하였으며, coming 1737 glass를 30$\times$30 mm 크기로 가공하여 기판온도와 증착시간을 변화시키면서 ITO 박막을 제조하였다. 예비실험을 통해 인가전력 50W, 초기 진공 $2\times10^{-6}$ Torr, 작업 진공 $3.5\times10^{-2}$ Torr, 기판과 타겟 사이의 거리를 10 cm로 고정하였다. 기판 온도는 히터를 가열하지 않은 상온 ($25^{\circ}C$)에서 $400^{\circ}C$까지의 범위에서 변화시켰고, 증착시간은 5분에서 30분까지의 범위에서 변화시켰다. 증착된 박막의 면 저항 촉정을 위해 4 point probe를 사용하였고, 홀 (hall) 계수 측정기 (HMS-300)를 이용하여 홀 계수를 측정하였으며, 또한 박막의 두께는 $\alpha$-step을 사용하여 측정하였다. ITO 박막의 상분석을 위해 XRD를 사용 하였고, SEM을 이용하여 미세구조를 관찰하였다. 실험 결과로는 기판온도 $400^{\circ}C$, 증착시간 15분 이상에서는 면 저항이 모두 $8\Omega$/$\Box$이하로 낮게 나왔으며, 투과율 또한 모두 80% 이상의 높은 투과도를 보였다. 또한 ITO박막의 전기 전도도는 캐리어 농도와 이동도의 측정을 통해 두 가지 인자들에 의해 비례되는 것을 확인하였다.

• Journal of Korea Water Resources Association
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• v.31 no.3
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• pp.223-234
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• 1998

Recently, the interests of the construction of the permeable submerged breakwaters have been increased to preserve and to improve the coastal environment, and to control the incident waves and littoral transport. It is very important to predict the wave transformation precisely over the permeable submerged breakwaters. This study discusses nonlinear wave transformation and characteristics by using BEM based on the frequency domain method of the 3rd-order Stokes waves. The Dupuit-Forchheimer formula is applied to the analysis of the fluid resistance of rubble stones, and the equation about equivalent linear frictional coefficient is newly modified based on the Lorentz's condition for the equivalent work. The numerical results are compared with the experimental ones for verification. These two results give a close agreement each other. It is confirmed that the present method of the 3rd-order Stokes waves estimates more precisely than that of the 2nd-order Stokes waves.

• Applied Chemistry for Engineering
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• v.9 no.5
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• pp.698-703
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• 1998

The pervaporation experiments of aqueous solutions of trichloroethylene (TCE) and chlorobenzene (CB) through the silicone rubber (polydimethylsiloxane, PDMS) membrane were carried out and the effect of concentration polarization on the separation characteristics was investigated. The resistance-in-series model was used to explain the boundary layer resistance. It was clear that the concentration polarization phenomenon had a significant effect on the permeation behavior in the pervaporation separation of the trace organic chlorides from aqueous solutions. With the same membrane thickness, the permeation of TCE, which has a stronger affinity for the PDMS, appeared to be more influenced by the boundary layer resistance than that of CB. The effect of boundary layer resistance was reduced and the membrane resistance became dominant with increasing membrane thickness at a given hydrodynamic condition. The separation factor was increased to approach the intrinsic separation factor of the membrane with its thickness.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.76-76
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• 2000

최근 비정질 SiC 박막은 열과 광안정도면에서 비정질 Si 박막에 비해 우수하며 공정변수들을조절함으로써 비교적 쉽고 다양하게 광학적.전기적 특성을 얻을 수 있고, 낮은 광흡수계수 및 105($\Omega$cm)1 이상의 높은 전도도를 가지고 있어 Plasma Enhanced Chemical Vapor Deposition(PECVD)을 통해 가전자제어 (Valency electron control)가 가능한 비정질 SiC 박막이 제작된 이래 대한 많은 연구가 진행되고 있다. 결정성이 없는 비정질 물질은 상대적으로 낮은 온도에서 성장이 가능하며, 특히 glow-sidcharge 방식으로 저온에서 성장시킬 수 있음에 따라 유리등과 같은 다른 저렴한 물질을 기판으로 이용, 넓은 면적의 비정질 SiC 박막을 성장시켜 여러 분야의 소자에 응용되고 있다. 비정질 SiC 박막이 넓은 에너지띠 간격을 갖는 물질이라는 점과 화학적 안정성 및 높은 경도, 비정질성에 기인한 대면적 성장의 용이성 등의 장점이외에, 원자의 성분비 변화에 의해 에너지띠 간격(1.7~3.1eV)을 조절할 수 있다는 점은 광전소자의 응용에 큰 잠재성이 있음을 나타낸다. PECVD 방식으로 성장된 비정질 SiC 박막은 태양전지의 Window층이나 발광다이오드, 광센서, 광트랜지스터 등에 응용되어 오고 있다. 본 연구에서는, RF-PECVD(ULVAC CPD-6018) 방법에 의하여 비정질 Si1-xCx 박막을 2.73Torr의 고정된 압력에서 RF 전력(50~300W), 증착온도(150~30$0^{\circ}C$), 주입 가스량 (SiH4:CH4)등의 조건을 다양하게 변화시켜가며 증착된 막의 특성을 평가하였다. 성장된 박막을 X-ray Photoelectron Spectroscopy(XPS), UV-VIS spectrophotometer, Ellipsometry, Atomic Force Microscopy(AFM)등을 이용하여 광학적 밴드갭, 광흡수 계수, Tauc Plot, 그리고 파장대별 빛의 투과도의 변화를 분석하였으며 각 변수가 변화함에 따라 광학적 밴드갭의 변화를 정량적으로 조사함으로써 분자결합상태와 밴드갭과 광 흡수 계수간의상관관계를 규명하였고, 각 변수에 따른 표면의 조도를 확인하였다. 비정질 Si1-xCx 박막을 증착하여 특성을 분석한 결과 성장된 박막의 성장률은 Carbonfid의 증가에 따라 다른 성장특성을 보였고, Silcne(SiH4) 가스량의 감소와 함께 박막의 성장률이 둔화됨을 볼 수 있다. 또한 Silane 가스량이 적어지는 영역에서는 가스량의 감소에 의해 성장속도가 둔화됨을 볼 수 있다. 또한 Silane 가스량이 적어지는 영역에서는 가스량의 감소에 의해 성장속도가 줄어들어 성장률이 Silane가스량에 의해 지배됨을 볼 수 있다. UV-VIS spectrophotometer에 의한 비정질 SiC 박막의 투과도와 파장과의 관계에 있어 유리를 기판으로 사용했으므로 유리의투과도를 감안했으며, 유리에 대한 상대적인 비율 관계로 투과도를 나타냈었다. 또한 비저질 SiC 박막의 흡수계수는 Ellipsometry에 의해 측정된 Δ과 Ψ값을 이용하여 시뮬레이션한 결과로 비정질 SiC 박막의 두께를 이용하여 구하였다. 또한 Tauc Plot을 통해 박막의 optical band gap을 2.6~3.7eV로 조절할 수 있었다.