• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.301-301
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• 2011

최근 고밀도 메모리 반도체의 재료와 빠른 응답을 요구하는 나노입자를 이용한 비휘발성 메모리 소자의 제작에 대한 연구가 활발히 진행되고 있다. 그에 따른 기존의 플래쉬 메모리가 가지는 문제점을 개선하기 위해서 균일하고 규칙적으로 분포하는 새로운 나노소재의 개발과 비휘발성, 고속 동작, 고집적도, 저전력 소자의 공정기술이 요구되고 있다. 또한 부유게이트에 축적되는 저장되는 전하량을 증가시키기 위한 새로운 소자구조 개발이 필요하다. 한편, 실리 사이드 계열의 나노입자는 금속 나노입자와 달리 현 실리콘 기반의 반도체 공정에서 장점을 가지고 있다. 따라서 본 연구에서는 화합물 중에서 비휘발성 메모리 장치의 전기적 특성을 향상 시킬 수 있는 실리사이드 계열의 바나듐 실리사이드(V3Si) 박막을 열처리 과정을 통하여 수 nm 크기의 나노입자로 제작하였다. 소자의 제작은 p-Si기판에 실리콘산화막 터널층(5 nm 두께)을 건식 산화법으로 성장 후, 바나듐 실리사이드 금속박막을 RF 마그네트론 스퍼터 시스템을 이용하여 4~6 nm 두께로 터널 베리어 위에 증착하고, 그 위에 초고진공 마그네트론 스퍼터링을 이용하여 SiO2 컨트롤 산화막층 (20 nm)을 형성시켰다. 여기서 V3Si 나노입자 형성을 위해 급속 열처리법으로 질소 분위기에서 800$^{\circ}C$로 5초 동안 열처리하여 하였으며, 마지막으로 열 기화 시스템을 통하여 알루미늄 전극(직경 200 ${\mu}m$, 두께 200 nm)을 증착하여 소자를 제작하였다. 제작된 구조는 금속 산화막 반도체구조를 가지는 나노 부유게이트 커패시터이며, 제작된 시편은 투사전자현미경을 이용하여 나노입자의 크기와 균일성을 확인했다. 소자의 전기적인 측정을 E4980A capacitor parameter analyzer와 Agilent 81104A pulse pattern generator system을 이용한 전기용량-전압 측정을 통해 전하저장 효과 및 메모리 동작 특성들을 분석하고, 열처리 조건에 따라 형성되는 V3Si 의 조성을 엑스선 광전자 분광법을 이용하여 확인하였다.

• Journal of Korean Tunnelling and Underground Space Association
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• v.25 no.2
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• pp.141-155
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• 2023

Monitoring technology based on electrical resistivity is widely used for non-destructive data collection and health analysis of underground structures and tunnels. Vulnerable sections such as fault zone generates many problems during construction of the tunnel. These problems cause displacement and stress changes of the ground. Therefore, it is necessary to predict the state of the fault zone section to ensure the mechanical stability of the underground structure. Monitoring the size of joints and the porosity of the fillings is essential for rocks. Previous studies have not considered the variety of fillings in rock joints. In this study, electrical resistivity tests were conducted according to the particle mixing state of the sandy fillings. When the size of fillings is decreased at the constant porosity, the electrical resistivity tends to increase. The results of this study are expected to be useful as basic electrical resistivity data for predicting the ground conditions and evaluation of the ground behavior that is containing sandy fillings in the rock joint for tunnels.

• Tunnel and Underground Space
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• v.15 no.1 s.54
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• pp.1-8
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• 2005

Measurement of convergence was/is carried out manually throughout the world for tunnels under construction. However, manual method has certain limitations in terms of applicability for the tunnels in operation. This paper describes state of the art of convergence monitoring systems which are available for measuring displacement of existing tunnels. These technologies are analyzed as follows: 1 The Sofo system using the fiber optic sensors has been applied to the stress measurement of the tunnel lining. It has not yet been used for the monitoring of tunnel convergence because of its cost and reliability 2. A TPMS(Tunnel Profile Monitoring System) using tilt sensors and displacement sensors is used for the convergence monitoring of highway tunnels, subway tunnels and underground ducts. 3. A BCS(Bassett Convergence System) using a pair of tilt sensors can be used for the convergence monitoring of tunnels, however the accuracy of the measurement has to be improved because it uses AC input voltage during data acquisition. The system has to be validated before it can be applied to the tunnels in operation. Convergence monitoring systems using TPMS and/or BCS are recommended to be evaluated and improved by a series or tests in tunnels under construction in order to be applied to the main measuring section and the tunnels in operation.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.31 no.6
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• pp.359-366
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• 2018

Social infrastructure facilities that have been under construction since the country's high-growth period are undergoing rapid aging, and safety assessments of large structures such as bridge tunnels, which can be directly linked to large-scale casualties in the event of an accident, are necessary. Wireless smart sensor networks that improve SHM(Structural Health Monitoring) based on existing wire sensors are difficult to construct economical and efficient system due to short signal reach. The LPWAN, Low Power Wide Area Network, is becoming popular with the Internet of Things and it is possible to construct economical and efficient SHM by applying it to structural health monitoring. This study examines the applicability of LoRa LPWAN to structural health monitoring and proposes a channel usage pre-planning based LoRa network operation method that can efficiently utilize bandwidth while resolving conflicts between channels caused by using license - exempt communication band.

• Journal of Korean Tunnelling and Underground Space Association
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• v.21 no.3
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• pp.419-432
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• 2019

Most of deep learning model training was proceeded by supervised learning, which is to train labeling data composed by inputs and corresponding outputs. Labeling data was directly generated manually, so labeling accuracy of data is relatively high. However, it requires heavy efforts in securing data because of cost and time. Additionally, the main goal of supervised learning is to improve detection performance for 'True Positive' data but not to reduce occurrence of 'False Positive' data. In this paper, the occurrence of unpredictable 'False Positive' appears by trained modes with labeling data and 'True Positive' data in monitoring of deep learning-based CCTV accident detection system, which is under operation at a tunnel monitoring center. Those types of 'False Positive' to 'fire' or 'person' objects were frequently taking place for lights of working vehicle, reflecting sunlight at tunnel entrance, long black feature which occurs to the part of lane or car, etc. To solve this problem, a deep learning model was developed by simultaneously training the 'False Positive' data generated in the field and the labeling data. As a result, in comparison with the model that was trained only by the existing labeling data, the re-inference performance with respect to the labeling data was improved. In addition, re-inference of the 'False Positive' data shows that the number of 'False Positive' for the persons were more reduced in case of training model including many 'False Positive' data. By training of the 'False Positive' data, the capability of field application of the deep learning model was improved automatically.

• Journal of Korean Tunnelling and Underground Space Association
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• v.26 no.2
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• pp.91-111
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• 2024

Most of utility cable tunnels are constructed utilizing shield TBM as part of the underground transmission line project. The TBM chamber is the only space inside the tunnel that encounters rock and soil, and is the place with the highest frequency of accident exposure, such as collapse and collision accidents. Since there is currently no way to measure the disc cutter wear from outside the chamber, frequent inspection by workers is essential. Accordingly, in this study, in order to prevent safety accidents inside the TBM chamber and expect the effect of shortening the construction period by reducing the number of chamber openings, the concept of disk cutter wear measurement technology was established and a prototype was produced. By considering prior technology and determining that magnetic sensors are most suitable for the excavation environment, wear measurement sensor package were developed integrating magnetic sensors, wireless communication modules, power supply, external casing, and monitoring systems. To verify the performance of the prototype in an actual excavation environment, a full-scale tunnelling test was performed using a 3.6 m EPB shield TBM. Based on the full-scale tests, five prototypes were operated normally among eight prototypes. It was analyzed that sensor measurement, wireless communication, and durability performance were secured within a maximum thrust of 3,000 kN and a rotation speed of 1.5 RPM.

• The Journal of Korea Institute of Information, Electronics, and Communication Technology
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• v.13 no.1
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• pp.48-57
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• 2020

MCU used in applications such as wireless chargers and USB type-C require MTP memory with a small cell size and a small additional process mask. Conventional double poly EEPROM cells are small in size, but additional processing masks of about 3 to 5 sheets are required, and FN tunneling type single poly EEPROM cells have a large cell size. In this paper, a 110nm MTP cell using a vertical PIP capacitor is proposed. The erase operation of the proposed MTP cell uses FN tunneling between FG and EG, and the program operation uses CHEI injection method, which reduces the MTP cell size to 1.09㎛2 by sharing the PW of the MTP cell array. Meanwhile, MTP memory IP required for applications such as USB type-C needs to operate over a wide voltage range of 2.5V to 5.5V. However, the pumping current of the VPP charge pump is the lowest when the VCC voltage is the minimum 2.5V, while the ripple voltage is large when the VCC voltage is 5.5V. Therefore, in this paper, the VPP ripple voltage is reduced to within 0.19V through SPICE simulation because the pumping current is suppressed to 474.6㎂ even when VCC is increased by controlling the number of charge pumps turned on by using the VCC detector circuit.

• Tunnel and Underground Space
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• v.29 no.6
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• pp.367-378
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• 2019

As the development of IT technology, the way to manage the underground construction site in real time using wireless network communication is being considered. Underground space is limited area compared to the ground site due to the enclosed communication environment and spatial characteristics. BMN (Bluetooth Mesh Networking) technology is a recently introduced wireless communication technology that bluetooth device acts as a repeater to form a networking mesh and monitor individual devices. This article examines the areas to be considered for analyzing the applicability of BMN technology to underground spaces, and the cases studies of wireless communication monitoring systems currently being developed. And the BMN technology which is being developed for the underground application is also introduced.

• 한국지구물리탐사학회:학술대회논문집
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• 1999.08a
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• pp.1-20
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• 1999

In Japan, geophysical exploration methods have been widely applied to civil engineering and construction fields for a long time. In particular, seismic refraction has long played a significant role in geotechnical site investigations for tunnels, dams and landslides. However, our growing interest on the social and natural environment makes the methods available and its application fields diversify. Digital technologies such as personal computer have revolutionized our ability to acquire large volumes of data rapidly, and to produce more reliable results for subsurface image. Also, color graphics easily visualizes survey results In a more understandable manner, These days geophysical methods are essential to assessing grouting effects, predicting the front of tunnel cutting face, monitoring the movement, pollution and purification process of groundwater. Now three-dimensional exploration techniques have developed for the site characterization in civil engineering and construction needs.

• Tunnel and Underground Space
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• v.13 no.5
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• pp.344-352
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• 2003

The procedures to correct sampling biases for discontinuity data obtained from 1D survey line(borehole or scanline) is addressed. The Probability of intersection between the survey line and a circular discontinuity is considered, and a correction far orientation bias is developed assuming discontinuities as equivalent circular disks. The correction incorporates the effect of the angle between the direction of survey line and each discontinuity plane belonging to the discontinuity cluster, size of each discontinuity and length of the survey line. A procedure is provided to estimate unbiased discontinuity spacing parameters using the discontinuity spacing data based on the measurements carried out on a finite length of the survey line.