• Proceedings of the Korean Vacuum Society Conference
• /
• 2011.02a
• /
• pp.196-196
• /
• 2011

팔라듐-구리 합금 분리막은 세륨산화물로 전처리된 다공성 니켈 지지체 위에 마그네트론 스퍼터 공정과 구리리플로우 공정에 의해 제조되었다. 스퍼터 공정은 얇고 치밀한 팔라듐 합금 분리막 증착을 위해 아주 효과적이다. 본 연구에서는 고온 스퍼터 공정에 의해 증착된 팔라듐 상부에 유동성과 열적확산이 우수한 구리를 코팅한 후, 반도체 분야에서 기가 패턴 매립시 사용하는 구리리플로우 공정을 도입하였다. 구리리플로우 공정은 치밀하고 미세기공이 존재하지 않는 표면을 구현하고 무한대의 수소 투과도를 가능하게 한다. 이로써 마그네트론 스퍼터에 의해 $200^{\circ}C$에서 팔라듐과 구리를 순차적으로 코팅한 후, $700^{\circ}C$에서 2시간 구리리플로우 공정을 실시하여 $7.5{\mu}m$ 두께의 팔라듐-구리 합금 분리막이 제조되었다. 세륨산화물(CeO2)은 고온에서 장시간 운전하는 동안 다공성 니켈 지지체의 금속성분이 팔라듐 합금층으로 확산하는 금속의 확산 문제를 개선하고자 지지체와 코팅층 사이에 확산방지막으로 도입되었으며, 균일한 스퍼터 증착을 위해 평탄한 표면의 지지체를 구현하였다. 투과도 테스트는 100-400kPa 의 압력차, 673-773K 의 온도 조건에서 순수한 수소가스로 실시하였다. 표면 미세기공이 없는 치밀한 팔라듐-구리 합금 분리막은 혼합가스에서 질소의 투과 없이 수소만을 투과하는 무한대의 우수한 분리도를 나타내었으며, 상용온도 $500^{\circ}C$에서 12.6ml/$cm^2{\cdot}min{\cdot}atm$의 수소 투과 능력을 보였다. 본 연구에 의해 제조된 팔라듐-구리 합금 분리막은 표면 미세기공이 없는 치밀한 분리막 제조를 가능하게 하였으며 열팽창계수가 팔라듐과 매우 비슷한 세륨산화물($CeO_2$)로 인해 지지체층과 코팅층과의 접합력이 향상되고 수소취성에 강하고 높은 열적 안정성을 갖는다.

• Resources Recycling
• /
• v.26 no.6
• /
• pp.97-101
• /
• 2017

Metal foams have a cellular structure consisting of a solid metal containing a large volume fraction of pores. In particular, open pores which are penetrable pores are necessary for industrial applications such as in high temperature filters and as support for catalysts. In this study, Fe foam with greater than 90% porosity and 2-mm pore size was successfully fabricated using a slurry coating process and the pore properties were characterized. The Fe and $Fe_2O_3$ powder mixing ratios were controlled to produce Fe foam samples with different pore sizes and porosity. First, the slurry was prepared through the uniform mixing of powders, distilled water, and polyvinyl alcohol(PVA). The amount of slurry coated with the PU foam increased with increasing $Fe_2O_3$ mixing powder ratio, but the shrinkage and porosity of the Fe foams decreased, respectively, with increasing $Fe_2O_3$ mixing powder ratio.

• Journal of the Microelectronics and Packaging Society
• /
• v.21 no.4
• /
• pp.133-137
• /
• 2014

As a preceding process for preparing several micrometer sized Ag-coated Cu flakes, ball milling of submicrometer-sized Cu particles synthesized through a wet chemical method was performed in order to convert the particles into flakes. To suppress oxidation and aggregation of the particles during ball milling, ethylene glycol and ethyl acetate were used as a medium and a surface modifying agent, respectively. Results obtained with different rotation speeds of a jar indicated that the rotation speed changes a rotating mode, and strikingly alters the final shapes and shape uniformity of Cu particles after milling. The diameter of zirconia ball was also confirmed. Although there was aggregates in the initial submicrometer-sized Cu particles, therefore, well-dispersed Cu flakes with a size of several micrometers were successfully prepared by ball milling through optimization of rotation speed, amount of ethyl acetate, and diameter of zirconia ball.

• Membrane Journal
• /
• v.25 no.5
• /
• pp.422-430
• /
• 2015

The present study announces that the pH value of seed coating solution makes a significant effect on the microstructure of silicalite-1 zeolite layer formed on ${\alpha}$-alumina support. Seed with an average diameter of 75 nm was dispersed in ethanol to prepare three kinds of seed coating solutions with different pH values, and dip-coated on the support. The pH value was controlled to be 2.2, 7.0, and 9.3, respectively. In the secondary growth process, pH 7 seed solution resulted an uniform, 3 to $4{\mu}m$ thick, completely covered, and 100 nm grained silicalite-1 zeolite separation layer. The uniformity and completeness were explained by a uniform, closely packed, multi-layered, and completely covered seed coating in the pH 7 condition. In the condition, ${\alpha}$-alumina support and seed are oppositely charged: support is positively charged (8.4 mV) and seed, negatively (-1.7 mV). The opposite charging induced a strong electrostatic attraction between seed and support, which made the good seed coating state. On the other hand, pH 2.2 and pH 9.3 seed solutions resulted non-uniform, partially covered, and around $1{\mu}m$ grained zeolite separation layer, since seed and support are the same sign charged in the conditions. The same sign charging induced a strong electrostatic repulsion between seed and support which caused a low coverage of seed. It could be concluded that the pH value of seed coating solution is a key parameter to determine the microstructure of silicalite-1 zeolite separation layer.

• Journal of Korean Ophthalmic Optics Society
• /
• v.13 no.1
• /
• pp.53-58
• /
• 2008

Purpose: To design and fabricate the small sputter coating system for the Ophthalmic lens. Methods: The design of sputter target was done using macleod program for AR coating and mirror coating of Ophthalmic lens with Si target and then the sputter system was fabricated. Results: The optimum condition of AR coating with Si target was [air|$SiO_2$(81.3)|$Si_3N_4$ (102)|$SiO_2$(19.21)|$Si_3N_4$(15.95)|$SiO_2$(102)|glass], for blue color mirror coating [air|$SiO_2$(56.61)|$Si_3N_4$(135.86)|$SiO_2$(67.64)|$Si_3N_4$(55.4)|$SiO_2$(53.53)|$Si_3N_4$(51.28)|glass], for green color coating [air|$SiO_2$(66.2)|$Si_3N_4$(22.76)|$SiO_2$(56.58)|$Si_3N_4$(140.35)|$SiO_2$(152.35)|$Si_3N_4$(70.16)|$SiO_2$(121.87)|glass], for gold color [air|$SiO_2$(83.59)|$Si_3N_4$(144.86)|$SiO_2$(11.82)|$Si_3N_4$(129.93)|$SiO_2$(90.01)|$Si_3N_4$(88.37)|glass]. Conclusions: In the fabrication of sputtering coating apparatus, Dual cathode with same Ti target were coated at the same time on both sides of Ophthalmic lens to lessen the time of coating on Ophthalmic Lens and save the cost of the lens. The distance of target-substrate of cathode was variable from 12.5 cm to 20 cm. Turbo pump was used to take the whole coating process about 15 min. instead of diffusion pump. The lens holder was made to coat 2 pairs lens every coating and was rotated to get the uniformity of thin film.

• The Journal of Korean Academy of Prosthodontics
• /
• v.46 no.5
• /
• pp.500-510
• /
• 2008

Statement of problem: Recently researches about WC/C (Tungsten Carbide/Carbon) or TiN (Titanium Nitride) coating on abutment screws are going on. It decreases friction coefficient, resistance against corrosion and withdrawal of physical fragility when the coating is applied to the metal surfaces. It is reported that coated abutment screws improved abrasion, adaptability and detorque force. Purpose: This study is about the effects of coated abutment screws on loosening of screw and for the purpose of solving the loosening phenomenon of abutment screws which is clinical problem. Material and methods: Detorque force and surface changes are compared when 10 times of repeated closing and opening are applied to both uncoated titanium abutment screws (Group A) and coated abutment screws with WC/C (Group B) and TiN (Group C). Each group was made up of 10 abutment screws. Results: 1. Before repeated closing and opening, Somewhat rough surface with regular direction was observed in Group A. Coated granules were observed in group B and group C and overall coated layer appeared in regular and smooth form. 2. Before repeated closing and opening, The coated surface showed bigger and thicker size of coated granules in Group C than Group B. 3. After repeated closing and opening, abrasion and deformation of abutment screw surface was observed in Group A and Group B. Exfoliation phenomenon was observed in Group B. 4. Group A showed biggest range of decrease when the weight changes of abutment screws were measured before and after repeated closing and opening. Group C showed less weight changes than Group B but there was no statistical difference between two groups. 5. Group B and Group C showed higher average detorque force than Group A and there was statistical difference. 6. Group A showed more prominent decrease tendency of average detorque force than Group B and Group C. Conclusion: Coated abutment screws with WC/C or TiN did not show prominent surface changes than uncoated titanium abutment screws even though they were repeatedly used. And they showed excellent resistance against friction and high detorque force. Thus it is considered that adaptation of WC/C or TiN coating on abutment screws will improve the screw loosening problem.

• Journal of Adhesion and Interface
• /
• v.20 no.1
• /
• pp.1-8
• /
• 2019

Fabrication of monolayer is important method for enhancing physical and chemical characteristics such as light shielding and antireflection while maintaining thin film properties. In previous studies, monolayers were fabricated by various methods on small substrates, but processes were complicated and difficult to form monolayers with large area. We used rod coating equipment with a small amount of coating liquid to form a HCP (hexagonal closed packing) coating of PMMA beads on PET(poly(ethylene terephthalate)) substrate with $20cm{\times}20cm$ size. We observed that changes in morphologies of monolayers by using the solvents with different boiling points and vapor pressures, by adapting surfactants on particles and by applying plasma treatment on substrates. The coverage was increased by 20% by optimizing the coating conditions including meniscus of beads, control of the attraction - repulsion forces and surface energy. This result can potentially be applied to optical films and sensors because it is possible to make a uniform and large-scale monolayer in a simple and rapid manner when it is compared to the methods in previous studies.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.08a
• /
• pp.185-185
• /
• 2012

중공 발광 나노 물질은 특유의 구조적 특성(낮은 밀도, 높은 비표면적, 다공성 물질, 낮은 열팽창계수 등)과 광학적 성질을 이용하여 디스플레이 패널, 광결정, 약물전달체, 바이오 이미징 라벨 등의 다양한 적용이 가능하다. 이러한 적용에 있어 균일한 크기와 형태의 중공 입자는 필수 조건으로 여겨진다. 지금까지 합성된 중공 발광 입자에는 BaMgAl10O17 : Eu2+-Nd3+, Gd2O3 : Eu3+, $EuPO_4{\cdot}H_2O$과 같은 것들이 있으나 크기 조절이 어렵고, 그 균일성이 확보되지 못하였다. 균일한 크기의 중공 발광 입자를 만들기 위해 SiO2나 emulsion을 템플릿으로 이용하여 황화카드뮴, 카드뮴 셀레나이드 중공 입자를 합성한 예가 있으나, 양자점의 독성으로 인하여 바이오분야 응용에는 적합하지 않다. YAG는 모체로써 형광체에서 가장 많이 이용되는 물질로, 화학적 안정성과 낮은 독성, 높은 양자 효율 등 많은 장점을 갖고 있다. 특히 세륨이 도핑된 YAG형광체의 경우 WLED, 신틸레이터, 바이오산업에 적용이 가능하다. 그러나 지금까지 중공 YAG:Ce3+형광체를 합성한 예가 없었다. 본 연구에서는 단분산 수화 알루미늄 (Al(OH)3) 입자 위에 세륨이 도핑 된 이트륨 베이직 카보네이트 ($Y(OH)CO_3$)를 균일하게 코팅한 후 열처리를 하여 균일한 크기의 Y3Al5O12:Ce3+(YAG) 중공 입자를 합성하였다. 열처리 온도에 따른 고분해능 투과 전자 현미경(HRTEM), X-선 회절(XRD), 고분해능 에너지 분광법(HREDX) 분석결과, 중공 YAG: Ce3+입자는 Kirkendall 효과에 의해 형성됨을 확인하였다. 전계방사형 주사 전자 현미경(FE-SEM) 측정을 통해, 열처리 후에도 입자의 크기와 형태가 균일함을 확인하였으며, 공초점 현미경 관찰을 통해 중공 형태를 명확히 확인 할 수 있었다. Photoluminescence (PL) 분광법과 형광 수명 이미징 현미경(FLIM)을 이용한 광 특성 분석결과, 합성된 입자는 400-500 nm에서 흡수 파장 (456 nm에서 최대 강도)과 500-700 nm 범위의 발광 파장(544 nm에서 최대 강도)을 나타냈고, 상용 YAG: Ce3+(70 ns)에 준하는 74 ns의 잔광 시간(decay time)이 측정되었다. 단분산 수화 알루미늄 입자의 크기를 조절하여 최종 합성된 YAG: Ce3+의 크기를 조절할 수 있었다. 지름 약 600 nm의 Al(OH)3를 사용한 경우, $1,300^{\circ}C$에서 열처리를 한 후 평균 지름 590 nm의 중공입자를 합성하였고, 약 170 nm의 Al(OH)3를 이용하여, 더 낮은 온도인 $1,100^{\circ}C$에서의 열처리를 통해 평균지름 140 nm의 중공 YAG: Ce3+입자를 합성하였다. 본 연구를 통하여 합성된 균일한 크기의 YAG 중공입자는 LED와 같은 광전변환 소자 및 다기능성 바이오 이미징 등의 나노바이오 소자 분야에 활용될 수 있음이 기대된다.

• Applied Chemistry for Engineering
• /
• v.21 no.1
• /
• pp.76-80
• /
• 2010

In this study, YDC powders with uniform composition and particle size were synthesized by a citrate method and their thin film deposition was conducted by electrospray deposition method. Polymeric precursor was prepared first by reaction of metal salts with citrate acid and ethylene glycol. Fluorite crystalline YDC powders were obtained by calcining the precursor at $750^{\circ}C$ for 3 h. The electrospray deposited films prepared at the optimum conditions became dense and defect-free after heat treatment at $1400^{\circ}C$ for 3 h. The film thickness was linearly varied with the deposition time.

• Proceedings of the KIEE Conference
• /
• 2004.07c
• /
• pp.1740-1742
• /
• 2004

산소 과전압이 낮은 $MnO_2$를 촉매로 사용하여 반도체 산화물계의 산소선택성 전극을 제조하고 산화물 코팅층의 미세구조와 전기화학적 특성을 분석하였다. Ti 기판에 열분해 법을 이용하여 $MnO_2$ 피막을 형성하였고, 또한 binder를 이용한 코팅 방법을 이용하여 Ti, Fb 기판에 $MnO_2$ 피막층을 형성하였다. 450$^{\circ}C$에서 1시간 열분해하여 약 1 ${\mu}m$의 $MnO_2$ 피막층을 형성 시켰으나 Ti 기판과의 접착력이 약하여 피막자체에 대한 전기화학적 특성은 관찰할 수 없었다. PVDF : $MnO_2$의 함량비가 1:1에서 1:6 까지는 DMF의 함량에 무관하게 전극 특성이 나타나지 않았지만 20:1 이상의 조성에서는 균일한 C-V 특성을 나타냈고, 산소 발생 과전압도 약 1.4V 정도로 감소되었다. 그러나 Ti 기판의 경우 열분해법을 이용하여 제조된 전극과 같이 낮은 기판과의 접착력 때문에 $MnO_2$ 피막층의 촉매효과가 현저하게 감소하였다.