• Title/Summary/Keyword: 컷오프 각

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컷오프 탐침과 량뮤어 탐침을 이용한 Ar/CF4 유도결합 플라즈마 특성 진단

  • Son, Ui-Jeong;Kim, Yun-Gi;Wi, Seong-Seok;Kim, Dong-Hyeon;Lee, Hae-Jun;Lee, Ho-Jun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.556-556
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    • 2013
  • 반도체 공정에서 널리 사용되고 있는 유도결합 플라즈마에서 전자밀도 분포특성이 컷오프탐침을 이용하여 측정되었다. 밀도측정에 일반적으로 많이 사용되고 있는 랭뮤어 탐침은 플루오르카본과 같은 반응성이 높은 가스를 사용하는 경우 탐침 끝부분이 증착 혹은 식각되거나 플라즈마전위 변동 때문에 V-I 곡선 특성이 왜곡되는 현상이 발생한다. 반면, 컷오프 탐침을 이용하는 경우 플라즈마 고유주파수를 실험적으로 결정하는데 여러 가지 제약이 있다. 본 연구에서는 두가지 측정방법의 비교를 통해 각 방법의 장단점을 실증적으로 비교하고 대면적 유도 결합플라즈마에서 전자밀도균일도를 조사하였다. 량뮤어 탐침법에서는 플라즈마와 탐침사이의 임피던스를 최소화 하는 튜닝회로의 최적화가 이루어 졌으며 컷오프 탐침에서는 안테나 구조에 따른 수신안테나의 신호전달 및 주파수특성에 대해 연구되었다.

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Implementation and Verification of Linear Phase filter with Variable Cutoff Frequency for PCM/FM transmission (PCM/FM 전송을 위한 가변 컷오프 주파수 특성의 선형위상 필터 구현 및 검증)

  • Lee Sang-Rae;Ra Sung-Woong
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.31 no.7C
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    • pp.713-724
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    • 2006
  • The purpose of this study is to design, implement and verify the pre-modulation filter with the variable -3dB cutoff frequency and linear phase response for bandlimiting the allocation of radio frequency bandwidth for PCM/FM transmission. For the design of this required filter, the digital FIR filter, DAC system and tuneable 2nd order LPF have been constructed and simulated according to the attenuation characteristic requirement of the amplitude frequency response by each stage. From these results, we have implemented the filter and verified the analog conversion hardware part which is composed of DAC system and tuneable 2nd order LPF for the interpolation of the discrete sequences. Especially this paper proposes and carries out the verification processes using the tone generator and the calibration procedures for more precise frequency response of the filter.

Effect of Cut-off Angle on Flow Pattern of Centrifugal Multi-blade Fan (원심 다익홴의 유동에 대한 컷 오프 각도의 영향)

  • Kang, Kyung-Jun;Shin, You-Hwan;Lee, Yoon-Pyo;Kim, Kwang-Ho
    • The KSFM Journal of Fluid Machinery
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    • v.13 no.3
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    • pp.37-42
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    • 2010
  • This study investigated on details of flow characteristics of a multi-blade fan for domestic ventilation. Experiments and analysis were carried out to describe on flow pattern with variations of cut-off angle near the scroll housing throat, which were performed by PIV measurement for the flow field and by total pressure probes. The stagnation point at cut-off region of the fan moves to the exit of the scroll housing as the cut-off angle increases. The movement of stagnation point and the variation of throat area of the scroll housing influence to the distribution of velocity magnitude at the exit of the fan. Furthermore, a large distortion of the velocity distribution at the scroll exit causes to increase mixing loss along the flow path.

A Study on Pulse Shaping of Linear Phase filter block with Variable Cutoff Frequency in PCM/FM transmission (PCM/FM 전송에서 가변 컷오프 특성을 갖는 선형위상 필터 블록의 펄스 성형에 관한 연구)

  • Lee Sang-Rae;Ra Sung-Woong
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.31 no.1C
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    • pp.65-73
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    • 2006
  • The purpose of this study is to design and analyze the pre-modulation filter with the variable -3dB cutoff frequency and linear phase response for bandlimiting the allocation of radio frequency bandwidth in PCM/FM transmission system. For the implementation of this required filter, the digital FIR filter, DAC and variable 2nd order LPF have been constructed with the filter block which designed and analyzed by each stage in order to satisfy the attenuation characteristic requirement of the analog 7th order bessel filter. The paper also concerned the linear phase properties for the filter block. Especially we have carried out the linear phase simulation with real parts for variable 2nd order LPF and compared this simulation results with the one of the fixed bandwidth 2nd order bessel filter for validating the linear phase requirement.

A Preliminary Cut-off Indoor Positioning Scheme Using Beacons (비콘을 활용하여 실내위치 찾는 사전 컷-오프 방식)

  • Kim, Dongjun;Park, Byoungkwan;Son, Jooyoung
    • KIISE Transactions on Computing Practices
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    • v.23 no.2
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    • pp.110-115
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    • 2017
  • We propose a new indoor positioning algorithm named Cut-off algorithm. This algorithm cuts off candidates of beacons and reference points in advance, before looking for K neighbor reference points which are guessed to be closest to the user's actual location. The algorithm consists of two phases: off-line phase, and on-line phase. In the off-line phase, RSSI and UUID data from beacons are gathered at reference points placed in the indoor environment, and construct a fingerprint map of the data. In the on-line phase, the map is reduced to a smaller one according to the RSSI data of beacons received from the user's device. The nearest K reference points are selected using the reduced map, which are used for estimating user's location. In both phases, relative ranks of the peak signals received from each beacon are used, which smoothen the fluctuations of the signals. The algorithm is shown to be more efficient in terms of accuracy and estimating time.

마이크로웨이브 기반 플라즈마 진단 기술

  • Yu, Gwang-Ho;Kim, Dae-Ung;Gwon, Ji-Hye;Yu, Sin-Jae;Kim, Jeong-Hyeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.91.2-91.2
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    • 2016
  • 반도체 및 디스플레이 등과 같은 전자산업분야에 플라즈마를 이용한 생산공정이 폭넓게 활용됨에 따라서 공정 결과를 예측하고 조절할 수 있는 플라즈마 변수 측정 및 진단기술의 중요성은 더욱 증가되고 있다. 플라즈마 진단을 위해 가장 많이 사용되고 있는 량뮤어 탐침(Langmuir Probe)은 수십 볼트(V)의 전압을 탐침에 인가하여 들어오는 전류(I)를 측정한 I-V curve의 해석을 바탕으로 플라즈마 변수들(전자밀도, 전자온도, 플라즈마 전위, ${\cdots}$)을 측정하는 방법으로 탐침에 인가한 전압으로 인하여 플라즈마가 영향을 받고 이로인하여 공정 결과에 변화를 줄 수 있다. 또한, 증착공정과 같이 공정과정 중에 탐침의 증착으로 인해 탐침으로 들어와야하는 전자 및 이온의 양이 감소하여 측정에 오차가 발생할 수 있어 공정 플라즈마 진단에 적합하지 않다. 따라서 공정 플라즈마의 정확한 측정을 위해서는 플라즈마에 대한 영향을 최소화하고 증착으로 인하여 탐침이 오염 되는 환경에서도 플라즈마 변수를 정확히 측정할 수 있는 진단 장치가 요구된다. 마이크로웨이브를 이용한 진단장치들은 1 mW 이하의 매우 작은 파워를 사용하기 때문에 플라즈마에 영향을 최소화하여 보다 정확한 플라즈마 진단이 가능하다. 또, 유전체 투과특성이 있는 마이크로웨이브를 이용하기 때문에 탐침이 유전체로 증착되었다 하더라도 측정에는 문제가 없어 공정 플라즈마 진단에 용이하다. 이런 장점들로 인하여 헤어핀 탐침(Hairpin probe), 컷오프 탐침(cutoff probe), 임피던스 탐침(Impedance probe) 등과 같이 마이크로웨이브를 이용하여 다양한 형태의 진단 장치들이 개발되었다. 본 발표에서는 마이크로웨이브를 이용한 다양한 형태의 진단 장치들을 소개하고 각각이 가지는 장단점을 정리하여 각 진단장치들이 측정이 적합한 영역을 소개할 예정이다.

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Color Filter Based on a Sub-Wavelength Patterned Poly-Silicon Grating Fabricated using Laser Interference Lithography (광파장 이하의 주기를 갖는 다결정 실리콘 격자 기반의 컬러필터)

  • Yoon, Yeo-Taek;Lee, Hong-Shik;Lee, Sang-Shin;Kim, Sang-Hoon;Park, Joo-Do;Lee, Ki-Dong
    • Korean Journal of Optics and Photonics
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    • v.19 no.1
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    • pp.20-24
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    • 2008
  • A color filter was proposed and demonstrated by incorporating a subwavelength patterned 1-dimensional grating in poly silicon. It was produced by employing the laser interference lithography method, providing much wider effective area compared to the conventional e-beam lithography. A $SiO_2$ layer was introduced on top of the silicon grating layer as a mask for the etching of the silicon, facilitating the etching of the silicon layer. It was theoretically found that the selectivity of the filter was also improved thanks to the oxide layer. The parameters for the designed device include the grating pitch of 450 nm, the grating height of 100 nm and the oxide-layer height of 200 nm. As for the fabricated filter, the spectral pass band corresponded to the blue color centered at 470 nm and the peak transmission was about 40%. Within the effective area of $3{\times}3mm^2$, the variation in the relative transmission efficiency and in the center wavelength was less than 10% and 2 nm respectively. Finally, the influence of the angle of the incident beam upon the transfer characteristics of the device was investigated in terms of the rate of the relative transmission efficiency, which was found to be equivalent to 1.5%/degree.

The Association between HbA1c and the Biological Exposure Index for Heavy Metals in Community (지역사회 주민의 당화혈색소와 중금속 생체표지자와의 관련성)

  • Min, Young-Sun;Lee, Kwan
    • Journal of agricultural medicine and community health
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    • v.47 no.3
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    • pp.181-188
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    • 2022
  • Objectives: The prevalence of diabetes mellitus was approximately 16% in populations of over age 30 years, and deaths from diabetes mellitus became the sixth most prevalent cause of death by disease. To assess the relationship between HbA1c and heavy metal level in blood and urine, targeted residents were evaluated in a vast steel industrial complex. Methods: We selected 414 subjects for analysis after applying the following exclusion criterion: 18 persons with diabetes mellitus. They took part in a questionnaire survey and underwent blood and urinary assessments. HbA1c and lead (Pb) level were measured in blood and, cadmium (Cd), inorganic arsenic (iAs) and mercury (Hg) were evaluated in urine. Two subgroups were divided by HbA1c 6.5%. Each subgroup was divided by 10th, 20th, 30th, 40th, 50th, 60th, 70th, 80th and 90th percentile levels of biological exposure index of the heavy metals for logistic regression. Results: Odd ratios have a tendency to increase as they go from the 90th to the 10th percentile of cadmium. However, lead, arsenic and mercury did not have significant relationships with HbA1c. In correction of age, region, gender and smoking history, a higher distribution in the subgroup with cadmium above 0.8318 ㎍/g creatinine (30th percentile) was demonstrated in the subgroup with HbA1c levels above the 6.5%, with an odds ratio of 5.26 (95% C.I. ; 1.44~19.17). Conclusion: This study found a significant correlation between urinary levels of cadmium and HbA1c in correction of several factors. It is meaningful that this outcome may be used as a basis for a study to establish the acceptable limit of urinary cadmium in Korea.