• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.40-40
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• 2011

반도체 소자의 미세화와 더불어 세정공정의 중요성이 차지하는 비중이 점점 커지고, 이에 따라 세정 기술 개발에 대한 요구가 증대되고 있다. 기존 세정 기술은 화학약품 위주의 습식 세정 방식으로 패턴 손상 및 대구경화에 따른 어려움이 있다. 따라서 건식세정 방식이 활발하게 도입되고 있으며 대표적인 것이 에어로졸 세정이다. 에어로졸 세정은 기체상의 작동기체를 이용하여 에어로졸을 형성하고 표면 오염물질과 직접 물리적 충돌을 함으로써 세정한다. 하지만 이 또한 생성되는 에어로졸 내 발생 입자로 인해 패턴 손상이 발생하며 이러한 문제점을 극복하기 위하여 대두되는 것이 가스클러스터 세정이다. 가스 클러스터란 작동기체의 분자가 수십에서 수백 개 뭉쳐 있는 형태를 뜻하며 이렇게 형성된 클러스터는 수 nm 크기를 형성하게 된다. 그리고 짧은 시간의 응축에 의해 수십 nm 크기까지 성장하게 된다. 에어로졸 세정과 다르게 클러스터가 성장할 환경과 시간을 형성하지 않음으로써 작은 클러스터를 형성하게 되며 이로 인해 패턴 손상 없이 오염입자를 제거하게 된다. 이러한 가스 클러스터 세정을 최적화하기 위해서는 설계 단계부터 노즐 내부 유동의 수치해석에 기반한 입자 크기 분포를 계산하여 반영하는 것이 필요하다. 따라서 본 연구에서는 상용 수치해석 프로그램을 이용하여 세정 환경을 조성하는 조건에서의 노즐 내부 유동을 해석하고, 이를 통해 얻어진 수치를 이용하여 aerosol general dynamic equation (GDE)를 계산하여 발생하는 클러스터의 크기 분포를 예측하였다. GDE 계산 시 입자의 크기 분포를 나타내기 위해서는 여러 가지 방법이 존재하나 본 연구에서는 각 입자 크기 노드별 개수 농도를 계산하였다. 노즐 출구에서의 가스 클러스터 크기를 예측하기 위하여 먼저, 노즐 내부 유속 및 온도 분포 변화를 해석하였다. 이를 통하여 온도가 급격하게 낮아져 생성된 클러스터의 효과적 가속 및 에너지 전달이 가능함을 확인할수 있었다. 이에 기반하여 GDE를 이용한 입자 크기를 예측한 결과 수 나노 크기의 초기 클러스터가 형성되어 온도가 낮아짐에 따라 성장하는 것을 확인할 수 있었으며, 최빈값의 분포가 실험적 측정값과 일치하는 경향을 가지는 것을 볼 수 있었다. 이는 향후 확장된 영역에서의 유동 해석과 증발 등 세부 요소를 고려한 계산을 통해 가스 클러스터 세정 공정의 최적화된 설계에 도움이 될 것이다.

• Journal of the Korean association of regional geographers
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• v.11 no.3
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• pp.351-366
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• 2005

In Joseon dynasty, national roads for mainly official trips, were designed to connect capital directly to each county seat or eupchi, and militarily strategic points. The entrance of county seat where national road reach to (sometimes there has been a gate of fortress), regarded as main entrance of the county seat Also the direction county office or gwan-a ordinally heads was regarded as main entrance. Therefore, starting point of national road from county seat was not always heading for capital, but south because most of county offices head south. Nevertheless, actual traffic often ignore such a symbolic rule, and formed another practical routes.

• Solar Energy
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• v.18 no.3
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• pp.217-228
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• 1998

The purpose of this research is to investigate the characteristics of static and total pressure distribution in the upward free water jet system impinged on a downward flat plate. The rectangular nozzle was used and its contraction and aspect ratio was five and about seven respectively. Experimental conditions considered were jet velocity, distance between nozzle and flat plate, height of supplementary water. It was founded that pressure distribution on the flat plate had the Gaussian curve when the pressure at stagnation point and impinging half width were chosen as the scaling parameters. The maximum pressure was shown at the stagnation point. The central impingement velocity decreased with the increment of distance between nozzle and flat plate, and its slop of decay was similar to that of chracteristics decay region in the three-dimensional free jet.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2003.05a
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• pp.258-261
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• 2003

The optimal design and combustion analysis of the gas generator for Liquid Rocket Engine (LRE) were performed. A fuel-rich gas generator in open cycle turbopump system was designed for 101on1 in thrust with RP-1/LOx combination. The optimal design was done for maximizing specific impulse of main combustion chamber with constraints of combustion temperature and power matching in turbopump system. Results of optimal design show the dimension of length, diameter, and contraction ratio of gas generator. The configuration of the gas generator and the condition for performance which can maximize the objective function were determined and found to meet the design constraints. Also, the combustion analysis was conducted to evaluate the performance of designed chamber and injector of gas generator. And the effect of the turbulence ring was investigated on the mixing enhancement in the chamber.

• Journal of the Korean Society of Propulsion Engineers
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• v.9 no.3
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• pp.127-132
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• 2005

In order to investigate transient behavior, of the CRW(Canard Rotor Wing) type UAV(Uninhabited Aerial Vehicle) propulsion system during flight mode transition considering flow control valve operation, the propulsion system was modelled using SIMULINK commercial program. The valve system is to control the gas flow of the rotary duct system and the main duct system, and the analysis was performed with an assumption that the total gas mass flow of the main engine is the same as summation of the rotary duct flow and the main duct flow, and with consideration of valve loss, flow rate and effective area in valve angle variation. The performance analysis was carried out during flight mode transitions from the rotary flight mode to the fixed wing flight mode and vice versa mode at altitude of 1km, flight Mach number 0.1 and maximum engine rpm.

• Journal of the Korean Institute of Gas
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• v.20 no.4
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• pp.1-6
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• 2016

A fuel supply system of heavy-duty CNG engine is composed as a module structure which is integrated by about 6 injectors. There are only one input and output passage for gas fuel supply in this injector module. The response performance for transient operation of an CNG engine is very poor because only one output fuel supply line is connected to the intake pipe after a throttle valve. In this study, a new guideline and internal flow design for the CNG injector module is suggested for the improvement of response performance by fluid dynamic simulations. As a result, the response performance of gas fuel supply can be improved by decreasing the total volume of internal flow passages and a same distance design from each injector to the exit of module shows good response performance and acquirement of linearity of fuel supply. But the injection order has little influence to injection performances.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.36 no.1
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• pp.1-8
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• 2012

Numerical analysis has been carried out to investigate the fully developed flow and heat transfer characteristics of a plate heat exchanger. Multi-cell models with an inlet part and outlet part are used to perform the numerical simulation. The plate heat exchanger is characterized by a chevron angle of $20^{\circ}$ and a P/H ratio of 2.0~4.0. The working fluid is water and the Reynolds numbers range from 300 to 1,500. The correlation is given in the form of $f=CRe^m$ for the friction factor and $j=CRe^m$ for the Colburn factor. It is found that the fully developed flow starts from the third cell and the Nusselt number increases with decreasing P/H ratios.

• Journal of the Korean Society of Propulsion Engineers
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• v.20 no.2
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• pp.24-30
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• 2016

An experimental study for the characteristics of the thrust-vectoring of a sonic jet utilizing the coanda flap installed at a rectangular nozzle exit is performed. Two side plates are installed at both sides of the flap to decrease the three dimensional effects of the jet on the flap surface. Schlieren flow visualizations and quantitative measurements of the deflection angle of thrusting vector show that the side plates are able to delay the separation of the jet at the downstream of the flap surface. Substantial increase in the deflection angle of the jet as high as $72^{\circ}$ and small thrust loss as low as 7% are obtained by the present thrust-vectoring technique using the side plates.

• The Journal of the Acoustical Society of Korea
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• v.37 no.2
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• pp.83-91
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• 2018

The noise sources of a tip-jet driven rotor can be separated by rotor blade noise and jet noise. The rotor blade noise consists of thickness noise, loading noise, nonlinear quadrupole noise, and jet noise is divided into nozzle momentum noise and jet radiation noise. The flow analysis for the prediction of rotor blade noise is performed by CFD (Computational Fluid Dynamics) analysis, and the noise source of the rotor blade noise is identified by simultaneously applying the permeable and impermeable surface based FW-H (Ffowcs Williams-Hawkings) acoustic analogy. The nozzle momentum noise is obtained by permeable surface FW-H, and jet radiation noise is predicted by using empirical method for the fixed-wing jet. Both of jet noises use nozzle exit condition for noise analysis. The accuracy of the technique is verified based on the noise measurements of the tip-jet driven rotor, and the unique noise characteristics of the tip-jet driven rotor is confirmed by spectrum analysis.

• Proceedings of the Korea Water Resources Association Conference
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• 2012.05a
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• pp.781-781
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• 2012

본 연구에서는 수문-수질 모의가 가능한 SWAT (Soil and Water Assessment Tool) 모형을 이용하여 경안천 상류의 별미천 유역($1.21km^2$)을 대상으로 최적관리기법(Best Management Practice, BMP) 적용에 따른 비점오염원 저감효과를 분석하고자 한다. 이를 위해, 별미천 유역내 논($0.049km^2$)과 밭($0.018km^2$) 지역에 대한 BMP 시나리오를 작성하였다. 먼저, 논에서는 계단식(Terrace) 재배 방법을 적용하였으며, 밭에서는 등고선(Contour farming) 재배 방법과 볏짚지표피복 시나리오를 적용하였다. 여기서, 볏짚지표피복 시나리오는 현재 $1276.6m^2$, 경사도 약 3.2%의 콩 재배가 이루어지고 있는 시험포장에서 수행된 결과를 이용하여 SWAT 모형의 지표유출관련 매개 변수를 조정하였다. SWAT 모형의 적용성 평가를 위해, 1:5,000 수치지도로부터 2m DEM(Digital Elevation Model) 및 QuickBird(2006.05.01) 위성영상으로부터 스크린 디지타이징기법(On-Screen Digitizing Method)을 이용하여 총 21개 토지이용항목의 1:5,000급 정밀토지이용도를 작성하고, 농촌진흥청에서 제공하는 1:25,000 정밀토양도를 구축하였다. 또한, 유역출구점에서 자동수위 및 강우량 계측기, 수질측정을 위한 오토샘플러를 설치하여 시간당 수위(유량), 강우 자료와 강우발생에 따른 수질자료(Sediment, Total Nitrogen, Total Phosphorus)를 이용하여 모형의 검보정(2011.06.08 ~ 2011.10.31)을 실시하였다. 모형의 검보정 후, 논에서의 Terrace 및 밭에서의 Contour farming, 밭 시험포장에서의 저감효과가 분석된 지표피복시나리오의 적용을 위한 SWAT 모형의 관련 매개변수를 정의하고, 각 BMP 시나리오별 비점오염원 저감효과를 분석하였다.