• Title/Summary/Keyword: 최적설치 각도

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Deposition of thick free-standing diamond wafer by multi(7)-cathode DC PACVD method

  • 이재갑;이욱성;백영준;은광용;채희백;박종완
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.214-214
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    • 1999
  • 다이아몬드를 반도체용 열방산용기판 등으로 사용하기 위해서는 수백 $\mu\textrm{m}$ 두께의 대면적 웨이퍼가 요구된다. 이를 위해서 DC are jet CVD, MW PACVD, DC PACVD 등이 개발되어, 현재 4"에서 8"까지의 많은 문제를 일으키고 있다. 본 연구에서는 multi-cathode DC PACVD법에 의한 4" 다이아몬드 웨이퍼의 합성과 합성된 막의 특성변화에 대한 연구를 수행하였다. 또한, 웨이퍼의 휨과 crack 발생거동과 대한 고찰을 통래 휨과 crack이 없는 웨이퍼의 제작방법을 고안하였다. 사용된 음극의 수는 일곱 개이며, 투입된 power는 각 음극 당 약 2.5kW(4.1 A-600V)이었다. 사용된 기판의 크기는 직경 4"이었다. 합성압력은 100Torr, 가스유량은 150sccm, 증착온도는 125$0^{\circ}C$~131$0^{\circ}C$, 수소가스네 메탄조성은 5%~8%이었다. 합성 중 막에 인가되는 응력은 합성 중 증착온도의 변화에 의해 제어하였다. 막의 결정도는 Raman spectroscopy 및 열전도도를 측정을 통해 분석하였다. 성장속도 및 다이아몬드 peak의 반가폭은 메탄조성 증가(5%~8%)에 따라 증가하여 각각 6.6~10.5$\mu\textrm{m}$/h 및 3.8~5.2 cm-1의 분포를 보였다. 6%CH4 및 7%CH4에서 합성된 웨이퍼에서 측정된 막의 열전도도는 11W/cmK~13W/cmK 정도로 높게 나타났다. 막두께의 uniformity는 최대 3.5%로 매우 균일하였다. 막에 인가되는 응력의 제어로 직경 4"k 합성면적에서 두께 1mm 이상의 균열 및 휨이 없는 다이아몬드 자유막 웨이퍼를 합성할 수 있었다.다이아몬드 자유막 웨이퍼를 합성할 수 있었다.active ion에 의해 sputtering 이 된다. 이때 plasma 처리기의 polymer 기판 후면에 magnet를 설치하여 높은 ionization을 발생시켜 처리 효과를 한층 높여 주었다. 이 plasma 처리는 표면 청정화, 표면 etching 이 동시에 행하는 것과 함께 장시간 처리에 의해 표면에서는 미세한 과, C=C기, -C-O-의 극성기의 도입에 의한 표면 개량이 된다는 것을 관찰할 수 있다. OPP polymer 표면을 Ar 100%로 plasma 처리한 경우 C-O, C=O 등의 carbonyl가 발생됨을 알 수 있었다. C-O, C=O 등의 carbynyl polor group이 도입됨에 따라 sputter된 Al의 접착력이 향상됨을 알 수 있으며, TEM 관찰 결과 grain size도 상당히 작아짐을 알 수 있었다.onte-Carlo 방법으로 처리하였다. 정지기장해석의 경우 상용 S/W인 Vector Fields를 사용하였다. 이를 통해 sputter 내 플라즈마 특성, target으로 입사하는 이온에너지 및 각 분포, 이들이 target erosion 형상에 미치는 영향을 살펴보았다. 또한 이들 결과로부터 간단한 sputtering 모델을 사용하여 target으로부터 sputter된 입자들이 substrate에 부착되는 현상을 Monte-Carlo 방법으로 추적하여 성막특성도 살펴보았다.다.다양한 기능을 가진 신소재 제조에 있다. 또한 경제적인 측면에서도 고부가 가치의 제품 개발에 따른 새로운 수요 창출과 수익률 향상, 기존의 기능성 안료를 나노(nano)화하여 나노 입자를 제조, 기존의 기능성 안료에 대한 비용 절감 효과등을 유도 할 수 있다. 역시 기술적인 측면에서도 특수소재 개발에 있어 최적의 나노 입자 제어기술 개발 및 나노입자를 기능성 소재로 사용하여 새로운 제품의 제조와 고압 기상

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Emission spectroscopic diagnostics of argon arc Plasma in Plasma focus device for advanced lithography light source (차세대 리소그래피 빛샘 발생을 위한 플라스마 집속장치의 아르곤 아크 플라스마의 방출 스펙트럼 진단)

  • Hong, Y.J.;Moon, M.W.;Lee, S.B.;Oh, P.Y.;Song, K.B.;Hong, B.H.;Seo, Y.H.;Yi, W.J.;Shin, H.M.;Choi, E.H.
    • Journal of the Korean Vacuum Society
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    • v.15 no.6
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    • pp.581-586
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    • 2006
  • We have generated the argon plasma in the diode chamber based on the established coaxial electrode type and investigated the emitted visible light for emission spectroscopy. We applied various voltages $2\sim3.5kV$ to the device by 0.5kV, and obtained the emission spectrum data for the focused plasma in the diode chamber on the argon pressure of 330 mTorr. The Ar I and Ar II emission line are observed. The electron temperature and ion density have been measured by the Boltzmann plot and Saha equation from assumption of local thermodynamic equilibrium (LTE) The Ar I and Ar II ion densities have been calculated to be $\sim10^{15}/cc\;and\;~10^{13}/cc$, respectively, from Saha equation.

A Study on the ICT Policy Governance in Historical Context (역사적 맥락에서 본 정보통신정책 추진체계 연구)

  • Sung, Wookjoon
    • Asia-pacific Journal of Multimedia Services Convergent with Art, Humanities, and Sociology
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    • v.7 no.5
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    • pp.861-871
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    • 2017
  • There is a Korean proverb that learns old things and learns new things from it. This study analyzes the change of the policy governance system in the field of information and communication since 2008 and outlines the future directions. The launch of the Korea Communications Commission (KCC), which combines the Ministry of Information and Communication and the Korea Broadcasting Commission in 2008, and the separation of the Korea Communications Commission and Ministry of Science, ICT and Future Planning in 2013, were systematic responses to the policy environment. Recent changes in the ICT environment, such as the advent of the fourth industrial revolution and the intelligence information society, call for an organizational timely response. In the future, it will be very important to set the scope of ICT policy, the establishment of a dedicated organization, the strengthening of the regulatory system, and the role of the government and the market.

Optimization of Microalgae-Based Biodiesel Supply Chain Network Under the Uncertainty in Supplying Carbon Dioxide (이산화탄소 원료 공급의 불확실성을 고려한 미세조류 기반 바이오 디젤 공급 네트워크 최적화)

  • Ahn, Yuchan;Kim, Junghwan;Han, Jeehoon
    • Korean Chemical Engineering Research
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    • v.58 no.3
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    • pp.396-407
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    • 2020
  • As fossil fuels are depleted worldwide, alternative resources is required to replace fossil fuels, and biofuels are in the spotlight as alternative resources. Biofuels are produced from biomass, which is a renewable resource to produce biofuels or bio-chemicals. Especially, in order to substitute fossil fuels, the research focusing the biofuel (biodiesel) production based on CO2 and biomass achieves more attention recently. To produce biomass-based biodiesel, the development of a supply chain network is required considering the amounts of feedstocks (ex, CO2 and water) required producing biodiesel, potential locations and capacities of bio-refineries, and transportations of biodiesel produced at biorefineries to demand cities. Although many studies of the biomass-based biodiesel supply chain network are performed, there are few types of research handled the uncertainty in CO2 supply which influences the optimal strategies of microalgae-based biodiesel production. Because CO2, which is used in the production of microalgae-based biodiesel as one of important resources, is captured from the off-gases emitted in power plants, the uncertainty in CO2 supply from power plants has big impacts on the optimal configuration of the biodiesel supply chain network. Therefore, in this study, to handle those issues, we develop the two-stage stochastic model to determine the optimal strategies of the biodiesel supply chain network considering the uncertainty in CO2 supply. The goal of the proposed model is to minimize the expected total cost of the biodiesel supply chain network considering the uncertain CO2 supply as well as satisfy diesel demands at each city. This model conducted a case study satisfying 10% diesel demand in the Republic of Korea. The overall cost of the stochastic model (US$ 12.9/gallon·y) is slightly higher (23%) than that of the deterministic model (US$ 10.5/gallon·y). Fluctuations in CO2 supply (stochastic model) had a significant impact on the optimal strategies of the biodiesel supply network.

A Study on the Optimal Process Parameters for Recycling of Electric Arc Furnace Dust (EAFD) by Rotary Kiln (Rotary Kiln에 의한 전기로 제강분진(EAFD)의 재활용을 위한 최적의 공정변수에 관한 연구)

  • Jae-hong Yoon;Chi-hyun Yoon;Myoung-won Lee
    • Resources Recycling
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    • v.33 no.4
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    • pp.47-61
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    • 2024
  • As a recycling technology for recovering zinc contained in large amounts in electric arc furnace dust (EAFD), the most commercialized technology in the world is the Wealz Kiln Process. The Wealz Kiln Process is a process in which components such as Zn and Pb in EAFD are reduced/volatile (endothermic reaction) in high-temperature Kiln and then re-oxidized (exothermic reaction) in the gas phase and recovered in the form of Crude zinc oxide (60wt%Zn) in the Bag Filter installed at the rear end of Kiln. In this study, an experimental Wealz kiln was produced to investigate the optimal process variable value for practical application to the recycling process of large-scale kiln on a commercial scale. Additionally, Pellets containing EAFD, reducing agents, and limestone were continuously loaded into Kiln, and the amount of input, heating temperature, and residence time were examined to obtain the optimal crude zinc oxide recovery rate. In addition, the optimal manufacturing conditions of Pellets (drum tilt angle, moisture addition, mixing time, etc.) were also investigated. In addition, referring to the SiO2-CaO-FeO ternary system diagram, the formation behavior of a low melting point compound, a reaction product inside Kiln according to the change in the basicity of Pellet, and the reactivity (adhesion) with the castable constructed on the inner wall of Kiln were investigated. In addition, in order to quantitatively investigate the possibility of using anthracite as a substitute for Coke, a reducing agent, changes in the temperature distribution inside Kiln, where oxidation/reduction reactions occur due to an increase in the amount of anthracite, the quality of Crude zinc oxide, and the behavior of tar in anthracite were also investigated.

A Feasibility Study on the Deep Soil Mixing Barrier to Control Contaminated Groundwater (오염지하수의 확산방지를 위한 대체 혼합차수재의 적용에 관한 연구)

  • 김윤희;임동희;이재영
    • Journal of Soil and Groundwater Environment
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    • v.6 no.3
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    • pp.53-59
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    • 2001
  • There is a lot of method to manage the insanitary landfill but vertical cutoff walls have been widespreadly used and were installed into the subsurface to act as a barrier to horizontal groundwater flow, The stabilized material such as specialized cement or mixed soil with additives has been generally applied for the materials of the deep soil mixing barrier in korea. The amount of the stabilized material is dependent on the field conditions, because the mixing ratio of the material and the field soil should achieve a requirement in the coefficient of permeability, lower than 1.0$\times$$10^{7}$cm/sec. This study determined the quantity and optimized function ratio of the stabilized material in the formation process of the mixed barrier that was added with stabilized material on the field soil classified into SW-SC under USCS (Unified Soil Classification System). After that the fly ash and lime were selected as an additives an that could improve the function of the stabilized material and then the method to improve the functional progress in the usage of putting into the stabilized material as an appropriate ratio was studied and reviewed. The author used the flexible-wall permeameter for measuring the permeability and unconfined compressive strength tester for compressive strength, and in the view of environmental engineering the absorption test of heavy metals and leaching test regulated by Korean Waste Management Act were performed. As the results, the suitable mixing ratio of the stabilized material in the deep soil mixing barrier was determined as 13 percent. To make workability easy, the ratio of stabilized material and water was proven to be 1 : 1.5. With the results, the range of the portion of the additives(fly ash : lime= 70 : 30) was proven to be 20-40% for improving the function of the stabilized material, lowering of permeability. In heavy metal absorption assessment of the mixing barrier system with the additives, the result of heavy metal absorption was proved to be almost same with the case of the original stabilized material; high removal efficiency of heavy metals. In addition, the leaching concentration of heavy metals from the leaching test for the environmental hazard assessment showed lower than the regulated criteria.

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Evaluation of Incident Detection Algorithms focused on APID, DES, DELOS and McMaster (돌발상황 검지알고리즘의 실증적 평가 (APID, DES, DELOS, McMaster를 중심으로))

  • Nam, Doo-Hee;Baek, Seung-Kirl;Kim, Sang-Gu
    • Journal of Korean Society of Transportation
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    • v.22 no.7 s.78
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    • pp.119-129
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    • 2004
  • This paper is designed to report the results of development and validation procedures in relation to the Freeway Incident Management System (FIMS) prototype development as part of Intelligent Transportation Systems Research and Development program. The central core of the FIMS is an integration of the component parts and the modular, but the integrated system for freeway management. The whole approach has been component-orientated, with a secondary emphasis being placed on the traffic characteristics at the sites. The first action taken during the development process was the selection of the required data for each components within the existing infrastructure of Korean freeway system. After through review and analysis of vehicle detection data, the pilot site led to the utilization of different technologies in relation to the specific needs and character of the implementation. This meant that the existing system was tested in a different configuration at different sections of freeway, thereby increasing the validity and scope of the overall findings. The incident detection module has been performed according to predefined system validation specifications. The system validation specifications have identified two component data collection and analysis patterns which were outlined in the validation specifications; the on-line and off-line testing procedural frameworks. The off-line testing was achieved using asynchronous analysis, commonly in conjunction with simulation of device input data to take full advantage of the opportunity to test and calibrate the incident detection algorithms focused on APID, DES, DELOS and McMaster. The simulation was done with the use of synchronous analysis, thereby providing a means for testing the incident detection module.

Bearing Capacity of a Monopod Bucket Foundation for Offshore Wind Towers - Centrifuge and Numerical Modeling (해상풍력 모노포드 버켓기초의 지지력 거동 - 원심모형실험 및 수치해석)

  • Kim, Dong-Joon;Choo, Yun Wook;Kim, Surin;Kim, Jae-Hyun;Choi, Ho-Young;Kim, Dong-Soo;Lee, Man-Soo;Park, Yung-Ho
    • Journal of the Korean Geotechnical Society
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    • v.29 no.4
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    • pp.23-32
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    • 2013
  • In order to evaluate the bearing capacity behaviour of a monopod suction bucket foundation for an offshore wind tower at the western sea of Korea, a centrifuge load test and numerical analyses were performed. The monopod bucket foundation was designed to be installed in a silty sand layer. The model soil was prepared to simulate a target site by using soil samples having similar properties and controlling relative density. In-flight miniature cone penetration test and bender element array were used to confirm that the model soil had represented the target site conditions. The load - rotation curve of the centrifuge load test was analysed. A series of numerical analyses were performed to validate the experimental conditions. Self-weight of the model, distance to the boundary and elastic modulus of the soil layer were varied to study their effects on the load - rotation curves.

Reliability Analysis of Monopile for a Offshore Wind Turbine Using Response Surface Method (응답면 기법을 이용한 해상풍력용 모노파일의 신뢰성 해석)

  • Yoon, Gil Lim;Kim, Kwang Jin;Kim, Hong Yeon
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.33 no.6
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    • pp.2401-2409
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    • 2013
  • Reliability analysis with response surface method (RSM) was peformed for a offshore wind turbine (OWT) monopile, which is one of mostly used foundations under 25m seawater depth in the world. The behaviors of a real OWT monopile installed into sandy soils subjected to offshore environmental loads such as wind and wave were analysed using reliability design program (HSRBD) developed in KIOST. Sensitivity analysis of design variables for a OWT monopile with 6m diameter showed that the larger in pile diameter the smaller in probability of failure ($P_f$) of a horizontal deflection and a rotational angle at a pile top, but at a greater than 7m of pile diameter, the reduction rate of $P_f$ was almost constant. It is a necessary that appropriate local design criteria should be designated as soon as possible because there were significant differences on horizontal deflections; $P_f$ was 60% at a minimum criteria 15mm deflection, however, 1.5% $P_f$ when 60mm deflection using 1% of pile diameter from local design criterion standard. Finally, friction angle of sand among many design variables was found most influential design factor in OWT monopile design, and a sensitivity analysis is found an important process to understand which design variables can mostly reduce $P_f$ with a optimum design for maintaining OWT stability.

Performance of Northern Exposure Index in Reducing Estimation Error for Daily Maximum Temperature over a Rugged Terrain (북향개방지수가 복잡지형의 일 최고기온 추정오차 저감에 미치는 영향)

  • Chung, U-Ran;Lee, Kwang-Hoe;Yun, Jin-I.
    • Korean Journal of Agricultural and Forest Meteorology
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    • v.9 no.3
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    • pp.195-202
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    • 2007
  • The normalized difference in incident solar energy between a target surface and a level surface (overheating index, OHI) is useful in eliminating estimation error of site-specific maximum temperature in complex terrain. Due to the complexity in its calculation, however, an empirical proxy variable called northern exposure index (NEI) which combines slope and aspect has been used to estimate OHI based on empirical relationships between the two. An experiment with real-world landscape and temperature data was carried out to evaluate performance of the NEI - derived OHI (N-OHI) in reduction of spatial interpolation error for daily maximum temperature compared with that by the original OHI. We collected daily maximum temperature data from 7 sites in a mountainous watershed with a $149 km^2$ area and a 795m elevation range ($651{\sim}1,445m$) in Pyongchang, Kangwon province. Northern exposure index was calculated for the entire 166,050 grid cells constituting the watershed based on a 30-m digital elevation model. Daily OHI was calculated for the same watershed ana regressed to the variation of NEI. The regression equations were used to estimate N-OHI for 15th of each month. Deviations in daily maximum temperature at 7 sites from those measured at the nearby synoptic station were calculated from June 2006 to February 2007 and regressed to the N-OHI. The same procedure was repeated with the original OHI values. The ratio sum of square errors contributable by the N-OHI were 0.46 (winter), 0.24 (fall), and 0.01 (summer), while those by the original OHI were 0.52, 0.37 and 0.15, respectively.