• Title/Summary/Keyword: 초크랄스키

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Effects of a Macroscopic Fluctuation in Pulling Rate on the Formation of Grown-in Defects in Cz-Si Single Crystal (초크랄스키 실리콘 단결정에서 인상 속도의 거시적 변동이 성장 결함 형성에 미치는 영향)

  • Park, Bong-Mo;Seo, Gyeong-Ho;Kim, Gun
    • Korean Journal of Crystallography
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    • v.11 no.4
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    • pp.200-206
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    • 2000
  • In a 200 mm Cz-Si crystal, a macroscopic fluctuation in pulling rate was intentionally introduced then the variations of the pulling rate and the formation behaviors of grow-in defects were compared. The diameters of the OSF-ring and the FPD area were affected by the fluctuation in the region above 1100℃. The COP density depended on the diameter of the OSF-ring. ΔOi and BMD were affected by the fluctuation in the region near 1000Δ. As the result, when a macroscopic fluctuation in pulling rate is introduced, the quality of crystal in the region of 150 mm from the growth interface should be reviewed carefully because it can be affected by the fluctuation.

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Relation Between the Growth Twin and the Morphology of a Czochralski Silicon Single Crystal (초크랄스키 실리콘 단결정에서 성장 쌍정과 결정 외형의 관계)

  • 박봉모
    • Korean Journal of Crystallography
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    • v.11 no.4
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    • pp.207-211
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    • 2000
  • In a Czochralski silicon single crystal, the relation between the growth twin and the crystal morphology was investigated. The growth twin is nucleated on the {111} facet planes near the growth ridges. When a {111} growth twin is formed in the <100> silicon crystal, the growth ridge where twin is nucleated will continuous through the twin plane. Other two ridges at the 90。 apart will be displaced about 33° and be deformed to facets. The ridge on the opposite side of twin nucleation will disappear by forming a slight hill. Because the growth ridges of silicon is due to the {111} planes, the variation in the growth ridge formation can be predicted clearly by considering the change of the {111} plane traces in the stereographic projection after twining.

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Effect of mechanical backside damage upon minority carrier recombination lifetime measurement by laser/microwave photoconductance technique (기계적 후면 손상이 레이저/극초단파 광전도 기법에 의한 소수 반송자 재결합 수명 측정에 미치는 영향)

  • 조상희;최치영;조기현
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.5 no.4
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    • pp.408-413
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    • 1995
  • We investigated the effect of mechanical backside damage upon minority carrier recombination lifetime measurement in Czochralski silicon substrate by laser excitation/microwave reflection photoconductance decay method. The intensity of mechanical damage was evaluated by X-ray double crystal rocking curve, X-ray section topography and wet oxidation/preferential etch methods. The data indicate that the higher the mechanical damage intensity, the lower the minority carrier lifetime, and the threshold full width at half maximum value which affect minority carrier lifetime measurement is about 13 secs.

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Effect of a Macroscopic Fluctuation in Pulling Rate on the Formation of OSF-ring Cz-Si SIngle Crystal (초크랄스키 실리콘 단결정에서 인상 속도의 거시적 변동이 OSF-링 형성에 미치는 영향)

  • Park, Bong-Mo;Seo, Gyeong-Ho;Kim, Gun
    • Korean Journal of Crystallography
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    • v.11 no.3
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    • pp.157-161
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    • 2000
  • In a 200nm Cz-Si crystal, a macroscopic fluctuation in pulling rate was intentionally introduced an then the variations of the pulling rate and the position of OSF-ring were compared each other. The formation behavior of OSF-ring in the effective volume, defined as the region between the growth interface position -α and the growth interface position +α, is most affected by the pulling rate fluctuation. To understand the correct effect of a macroscopic pulling rate fluctuation, its cumulative effect in the effective volume should be considered. A new concept of modeling for it was proposed here.

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Estimation of mechanical damage by minority carrier recombination lifetime and near surface micro defect in silicon wafer (실리콘 웨이퍼에서 소수 반송자 재결합 수명과 표면 부위 미세 결함에 의한 기계적 손상 평가)

  • 최치영;조상희
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.9 no.2
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    • pp.157-161
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    • 1999
  • We investigated the effect of mechanical back side damage in Czochralski silicon wafer. The intensity of mechanical damage was evaluated by minority carrier recombination lifetime by laser excitation/microwave reflection photoconductance decay ($\mu$-PCD) technique, wet oxidation/preferential etching methods, near surface micro defect (NSMD) analysis, and X-ray section topography. The data indicate that the higher the mechanical damage intensity, the lower the minority carrier lifetime, and NSMD density increased proportionally, also correlated to the oxidation induced stacking fault (OISF) density. Thus, NSMD technique can be used separately from conventional etching method in OISF measurement.

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Optimal Water-cooling Tube Design for both Defect Free Process Operation and Energy Minimization in Czochralski Process (무결정결함영역을 유지하면서 에너지를 절감하는 초크랄스키 실리콘 단결정 성장로 수냉관 최적 설계)

  • Chae, Kang Ho;Cho, Na Yeong;Cho, Min Je;Jung, Hyeon Jun;Jung, Jae Hak;Sung, Su Whan;Yook, Young Jin
    • Current Photovoltaic Research
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    • v.6 no.2
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    • pp.49-55
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    • 2018
  • Recently solar cell industry needs the optimal design of Czochralski process for low cost high quality silicon mono crystalline ingot. Because market needs both high efficient solar cell and similar cost with multi-crystalline Si ingot. For cost reduction in Czochralski process, first of all energy reduction should be completed because Czochralski process is high energy consumption process. For this purpose we studied optimal water-cooling tube design and simultaneously we also check the quality of ingot with Von mises stress and V(pull speed of ingot)/G(temperature gradient to the crystallization) values. At this research we used $CG-Sim^{(R)}$ S/W package and finally we got improved water-cooling tube design than normally used process in present industry. The optimal water-cooling tube length should be 200mm. The result will be adopted at real industry.

Evaluation of mechanical backside damage by minority carrier recombination lifetime and photo-acoustic displacement method in silicon wafer (실리콘 웨이퍼에서 광열 변위법과 소수 반송자 재결합 수명 측정에 의한 기계적 후면 손상 평가)

  • 최치영;조상희
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.8 no.1
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    • pp.117-123
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    • 1998
  • We investigated the effect of mechanical backside damage in Czochralski grown silicon wafer. The intensity of mechanical damage was evaluated by minority carrier recombination lifetime by laser excitation/microwave reflection photoconductivity decay method, photo-acoustic displacement method, X-ray section topography, and wet oxidation/preferential etching methods. The data indicate that the higher the mechanical damage intensity, the lower the minority carrier lifetime, and the photo-acoustic displacement values increased proportionally, and it was at Grade 1: Grade 2:Grade 3 = 1:19.6:41 that the normalized relative quantization ratio of excess photo-acoustic displacement in damaged wafer was calculated, which are normalized to the excess PAD from sample Grade 1.

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Relative quantitative evaluation of mechanical damage layer by X-ray diffuse scattering in silicon wafer surface (실리콘 웨이퍼 표면에서 X-선 산만산란에 의한 기계적 손상층의 상대 정량 평가)

  • 최치영;조상희
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.8 no.4
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    • pp.581-586
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    • 1998
  • We investigated the effect of mechanical back side damage in Czochralski grown silicon wafer. The intensity of mechanical damage was evaluated by minority carrier recombination lifetime by laser excitation/microwave reflection photoconductivity decay method, degree of X-ray diffuse scattering, X-ray section topography, and wet oxidation/preferential etching methods. The data indicate that the higher the mechanical damage intensity, the lower the minority carrier lifetime, and the magnitude of diffuse scattering and X-ray excess intensity increased proportionally, and it was at Grade 1:Grade 2:Grade 3=1:7:18.4 that the normalized relative quantization ratio of excess intensity in damaged wafer was calculated, which are normalized to the excess intensity from sample Grade 1.

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KCl Crystal Growth and High Energy X Ray Expose of Properties (KCl 단결정의 성장 및 고 에너지 X선 조사 특성)

  • Park, Cheol-Woo
    • The Journal of Korean Society for Radiation Therapy
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    • v.20 no.1
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    • pp.31-36
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    • 2008
  • Purpose: X ray irradiates material for dose distribution confirmation through material color variation to evaluate about possibility. Materials and Methods: That is rare earth material to pure KCl and KCl impurity Eu adding 0.5mol% by Czochralski method each single crystal grow and observed color variation of KCl X ray irradiation use of linear accelerator. Results: High energy X ray irradiation KCl:Eu show the blue fluorescence with purple color that pure KCl single crystal can confirm by show was not observed, but was colored violet. Conclusion: Colors variation of KCl founds stable color center from radiation and this color variation will be used usefully to X ray measurement material and phantom.

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A NUMERICAL ANALYSIS OF CZOCHRALSKI SINGLE CRYSTAL GROWTH OF SILICON WITH MISALIGNED CUSP MAGNETIC FIELDS (Misaligned된 비균일자장이 인가된 초크랄스키 실리콘 단결정성장에 대한 수치적 해석)

  • Kim, Chang Nyung
    • Journal of the Korean Society for Industrial and Applied Mathematics
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    • v.4 no.1
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    • pp.121-131
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    • 2000
  • Melt flow, heat and mass transfer of oxygen have been analyzed numerically in the process of Czochralski single crystal growth of silicon under the influence of misaligned cusp magnetic fields. Since the silicon melt in a crucible for crystal growth is of high temperature and of highly electrical-conducting, experimentation method has difficulty in analyzing the behavior of the melt flow. A set of simultaneous nonlinear equations including Navier-Stokes and Maxwell equations has been used for the modelling of the melt flow which can be regarded as a liquid metal. Together with the melt flow which forms the Marangoni convection, a flow circulation is observed near the comer close both to the crucible wall and the free surface. The melt flow tends to follow the magnetic lines instead of traversing the lines. These flow characteristics helps the flow circulation exist. Mass transfer characteristics influenced by the melt flow has been analyzed and the oxygen absorption rate to the crystal has been calculated and turned out to be rather uniform than in the case of an aligned magnetic field.

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