• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2004.05a
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• pp.268-271
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• 2004

반도체 가공공정에서 웨이퍼의 정렬이나 각종 초정밀 가공에서 가공물의 각도를 미체 조정하기 위한 초정밀 메커니즘을 제안하였다. 일반적으로 각도를 결정하는 메커니즘은 기어를 이용한다. 기어를 이용할 경우 회전 분해능을 높일 수 있으나 기어의 백래쉬에 의한 오차가 있어 보다 높은 정밀도를 구현하기가 어렵다. 본 논문에서는 직접구동(direct drive) 방식과 이중서보(dual servo) 방식을 이용하여 기어를 사용하지 않고 회전 스테이지를 구현하였다.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.15 no.2
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• pp.22-30
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• 2016

It is very important to obtain the net shape of the product to maximize the shear cutting surface of fine blanking. In this paper, the fine blanking die was manufactured to achieve part characteristics, such as flatness and a fully sheared surface. The V-ring in the fine blanking die was designed to prevent lateral movement of the material. The fine blanking experiment was conducted with the fine blanking die. The material usage rate was increased by over 5.7% and that of the water-soluble lubricant was decreased by over 33% when the 2-cavity die technology was applied to fine blanking. The capacity of the existing press could lead to productivity improvement and cost reduction. Thus, 2-cavity die technology for fine blanking with a minute module of an accurate gear for producing seat recliner parts was developed.