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KOH 이방성 식각을 이용한 Ti-실리사이드 전계방출 소자 연구

  • 김성배;전형탁;최성수
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.61-61
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    • 1999
  • 저항이 5$\Omega$-cm인 n-type Si(100) 웨이퍼를 실리콘 식각시 마스크로 사용하기 위하여 습식 열산화법을 이용하여 100$0^{\circ}C$에서 SiO2을 2400$\AA$ 성장시킨 후, OPCVD 공정을 통해 785$^{\circ}C$서 SiH2Cl2 가스 30sccm과 NH3가스 100sccm을 이용하여 Si3N4를 3000$\AA$ 증착시켰다. 이 웨이퍼를 포토-리쏘그라피 공정을 거쳐 지름 2$\mu\textrm{m}$의 포토레지스트 패턴을 제작한 후 600W의 RF power하에서 CF4 가스 10sccm, CHF3 가스 15sccm, O2가스 8sccm 및 Ar가스 10sccm을 이용하여 MERIE 방법으로 Si3N4를 식각한 다음, 7:1 BHF 용액내에서 30초간의 습식식각을 통해 40wt.%의 KOH 용액내에 8$0^{\circ}C$에서 30초간의 이방성 식각을 통해 피라미드 모양의 Si FEA(field emitter array)를 제작하였다. 본 실험은 다음과 같이 완성된 Si FEA를 샤프닝 산화 후 산화막 식각을 통해 마스크를 제거한 다음, tip의 열화학적 내구성을 증가시키고 장시간 구동시 안정성과 전계방출 전류밀도를 높이기 위해 tip의 표면에 Ti를 sputter 방법으로 약 300$\AA$ 증착시킨 후, RTA 장비를 이용하여 2단계 열처리 (first annealing:$600^{\circ}C$/30sec, second annealing : 85$0^{\circ}C$/15sec)를 통해 Si FEA의 경우보다 낮은 turn-on 전압과 높은 전계방출 특성을 나타낼 것으로 기대된다.

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금속-절연체-반도체 구조를 이용한 Graphene Oxide의 특성분석

  • Park, In-Gyu;Jeong, Yun-Ho;No, Yong-Han
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.464-464
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    • 2013
  • 그래핀 옥사이드(Graphene Oxide)는 그래핀과 마찬가지로 많은 분야로의 응용 가능성을 보이는 소자중 하나로 각광받고 있다. 그래핀 옥사이드가 가지는 유전체 특징은 전하 트랩층(charge trap layer)으로 사용을 가능하게 하고 또한 물에 녹는 수용성 특징은 스핀코터(spin coator)를 이용한 간단한 도포과정을 통하여 저비용으로 간단하게 소자를 제작 가능하게 한다. 이 연구에서 우리는 금속-절연체-반도체 구조를 가지는 메모리 소자를 제작하여 0.4 mg/ml의 농도로 DI에 용해된 그래핀 옥사이드가 플로팅게이트(floating gate)로써 사용되었을 때의 특성을 알아보기 위해 Boonton 720를 사용하여 C-V (hysteresis) 커브와 C-T(Capacitance-Time)를 측정하여 그래핀 옥사이드의 유무에 따른 메모리 윈도우 폭의 증가 및 저장된 정보가 손실되지 않고 얼마나 길게 유지 되는지를 살펴봄으로 플로팅게이트로써 그래핀 옥사이드의 특성을 살펴보았다. 먼저 터널링층으로 쓰이는 SiO2가 5 nm 증착된 P타입 Si기판위에 플로팅게이트로 쓰이는 그래핀 옥사이드층을 쉽게 쌓기 위하여 APTES 자기조립 단분자막 코팅을 한 후 그래핀 옥사이드를 3,000 rpm으로 40초간 스핀코팅을 하였다. 그 후 블로킹층으로 쓰이는 400 nm 두께의 폴리비닐페놀(PVP)를 3,000 rpm으로 40초간 스핀코팅을 하고 $130^{\circ}C$에서 열처리를 하였으며 $10^{-5}$ Torr의 압력에서 진공 열증착으로 알루미늄 게이트 전극을 증착했다.

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The effects of blocking the oxygen in the air during the polymerization of sealant (광중합 시 공기 중 산소의 차단이 치면열구전색제의 중합에 미치는 영향)

  • Oh, You-Hyang;Lee, Nan-Young;Lee, Sang-Ho
    • Journal of the korean academy of Pediatric Dentistry
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    • v.33 no.3
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    • pp.365-376
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    • 2006
  • The purpose of this study was to evaluate the efficacy of blocking the oxygen in the air during the polymerization of sealant. All curing were performed with various light curing units under the application of oxygen gel barrier, stream of nitrogen and carbon dioxide gas for inhibition of oxygen diffusion into sealant surface. The results of present study can be summarized as follows : 1. The amount of eluted TEGDMA form the specimens cured with all the three different light units in the stream of $N_2$ and $CO_2$ gas and application of Oxygen gel barrier($DeOx^{(R)}$) were significantly lower than in the room-air atmosphere (Control) (p<0.05). 2. In the $DeOx^{(R)}$ application, the amount of eluted TEGDMA the specimen cured with PAC light for 10seconds was less than that cured in the stream of $N_2$ and $CO_2$ atmospheric conditions (p<0.05) 3. In the LED using 10 or 20sec irradiation times under the stream of $N_2$ and $CO_2$, the eluted TEGDMA showed to be no statistically significant difference (p>0.05). 4. The microhardness from the specimens cured with all the three different light units under each treated conditions were significantly higher than in the room-air atmosphere (p<0.05). 5. The surface treatment by $DeOx^{(R)}$, $N_2$ and $CO_2$ reduces the thickness of oxygen inhibited layer by sp proximately 49% of the untreated control value.

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EFFECT OF LIGHT IRRADIATION MODES ON THE MARGINAL LEAKAGE OF COMPOSITE RESIN RESTORATION (광조사 방식이 복합레진 수복물의 변연누출에 미치는 영향)

  • 박은숙;김기옥;김성교
    • Restorative Dentistry and Endodontics
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    • v.26 no.4
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    • pp.263-272
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    • 2001
  • The aim of this study was to investigate the influence of four different light curing modes on the marginal leakage of Class V composite resin restoration. Eighty extracted human premolars were used. Wedge-shaped class Y cavities were prepared on the buccal surface of the tooth with high-speed diamond bur without bevel. The cavities were positioned half of the cavity above and half beyond the cemento-enamel junction. The depth, height, and width of the cavity were 2 mm, 3 mm and 2 mm respectively. The specimens were divided into 4 groups of 20 teeth each. All the specimen cavities were treated with Prime & Bond$^{R}$ NT dental adhesive system (Dentsply DeTrey GmbH, Germany) according to the manufacturer's instructions and cured for 10 seconds except group VI which were cured for 3 seconds. All the cavities were restored with resin composite Spectrum$^{TM}$ TPH A2 (Dentsply DeTrey GmbH, Germany) in a bulk. Resin composites were light-cured under 4 different modes. A regular intensity group (600 mW/${cm}^2$, group I) was irradiated for 30 s, a low intensity group (300 mW/${cm}^2$, group II) for 60 s and a ultra-high intensity group (1930 mW/${cm}^2$, group IV) for 3 s. A pulse-delay group (group III) was irradiated with 400 mW/${cm}^2$ for 2 s followed by 800 mW/${cm}^2$ for 10 s after 5 minutes delay. The Spectrum$^{TM}$ 800 (Dentsply DeTrey GmbH, Germany) light-curing units were used for groups I, II and III and Apollo 95E (DMD, U.S.A.) was used for group IV. The composite resin specimens were finished and polished immediately after light curing except group III which were finished and polished during delaying time. Specimens were stored in a physiologic saline solution at 37$^{\circ}C$ for 24 hours. After thermocycling (500$\times$, 5-55$^{\circ}C$), all teeth were covered with nail varnish up to 0.5 mm from the margins of the restorations, immersed in 37$^{\circ}C$, 2% methylene blue solution for 24 hours, and rinsed with tap water for 24 hours. After embedding in clear resin, the specimens were sectioned with a water-cooled diamond saw (Isomet$^{TM}$, Buehler Co., Lake Bluff, IL, U.S.A.) along the longitudinal axis of the tooth so as to pass the center of the restorations. The cut surfaces were examined under a stereomicroscope (SZ-PT Olympus, Japan) at ${\times}$25 magnification, and the images were captured with a CCD camera (GP-KR222, Panasonic, Japan) and stored in a computer with Studio Grabber program. Dye penetration depth at the restoration/dentin and the restoration/enamel interfaces was measured as a rate of the entire depth of the restoration using a software (Scion image, Scion Corp., U.S.A.) The data were analysed statistically using One-way ANOVA and Tukey's method. The results were as follows : 1. Pulse-Delay group did not show any significant difference in dye penetration rate from other groups at enamel and dentin margins (p>0.05) 2. At dentin margin, ultra-high intensity group showed significantly higher dye penetration rate than both regular intensity group and low intensity group (p<0.05). 3. At enamel margin, there were no statistically significant difference among four groups (p>0.05). 4. Dentin margin showed significantly higher dye penetration rate than enamel margin in all groups (p<0.05).

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THE ANTICARIOGENIC EFFECT OF RESIN INFILTRATION ACCORDING TO THE PRETREATMENT OF SURFACE LAYERS IN NATURAL INCIPIENT CARIES LESIONS (초기 우식 병소의 표층 처리에 따른 Resin infiltration의 우식 저지 능력 평가)

  • Kim, Min-Jeong;Lee, Dong-Soo;Kim, Shin;Jeong, Tae-Sung
    • Journal of the korean academy of Pediatric Dentistry
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    • v.37 no.4
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    • pp.412-421
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    • 2010
  • As a most conservative, minimally invasive trial against early caries lesions, resin infiltration concept has been introduced and studied mainly about effective materials and pre-treatment methods of surface layers to arrest the lesion effectively, which is still going on. This study was performed with an aim of evaluating the efficacy of arresting the caries process in the natural incipient lesions in spite of removing the surface layers and we obtained the results as follows: 1. It was revealed that infiltration groups(1, 3, 5) showed lower radio-density decline between pre- and posttreatment than control groups(2, 4, 6)(p<0.05). 2. Group 5, in which the surface layer was removed with hydrochloric acid, showed the most significant anticariogenic effect(p<0.05). 3. Under SEM evaluation after infiltration, group 1 and 3 showed more irregular destruction and intensive loss of surface layers than group 5. In conclusion, it was thought resin infiltration can be an effective tool against the early caries lesions although surface layers are removed.

Removal Effects of Organic-Phosphorus Pesticide Residue in lettuce by washing methods (세척방법에 따른 상추중 유기인 잔류농약의 제거효과)

  • Ko, Bok-Sil;Jeon, Tae-Hwan;Jung, Kyu-Saeng;Lee, Sung-Kook
    • Journal of agricultural medicine and community health
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    • v.21 no.2
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    • pp.159-171
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    • 1996
  • It is investigated to determine the removal efficiency of organic - phosphorus insecticide residues in lettuce by washing processes, the 5 washing solution (stagnant tap water, flowing tap water, alkaline solution, acidic solution) were used with the washing time(10, 30, 50sec) and frequencies(1, 2, 3 washing, 2 rinsing). The removal efficiency of residual pesticides by 5 washing methods was increased on the more washing time and frequency, and also was the highest on the 3 times washing for each 50 sec. The removal rate with stagnant tap water was 33.7% of Diazinon, 45.7% of Dimethoate and 24.6% of Fenitrothion, but 29.4% of Diazinon, 37.7% of Dimethoate and 24.5% of Fenitrothion with flowing tap water. Therefore, the former was significantly higher effective than the latter one. The removal rate of residual pesticides with alkaline solution showed 32.1% of Diazinon, 49.5% of Dimethoate and 29.9% of Fenitrothion, and 30.4% of Diazinon, 36.4% of Dimethoate and 21.0% of Fenitrothion with acidic solution. The washing efficiency of neutral detergent showed the most effective result than others with 47.1% of Diazinon, 58.0% of Dimethoate and 39.5% of Fenitrothion. Consequently, it's appeared that the neural detergent washing was the most effective method on the 3 times washing for each 50 sec.

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The Killing Effect of Candida albicans on Hairless Mouse-2 Mouse Tissues by Non-Thermal Atmospheric Pressure Plasma (저온 상압플라즈마에 의한 Hairless Mouse-2 마우스 조직의 Candida albicans 사멸 효과)

  • Park, Sang-Rye;Kim, Gyoo-Cheon
    • Journal of dental hygiene science
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    • v.14 no.1
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    • pp.1-6
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    • 2014
  • The purpose of this study was to investigate the killing effect of Candida albicans on hairless mouse-2 (HRM-2) mouse tissues. We tested the effectiveness of a non-thermal atmospheric pressure plasma in killing C. albicans strains. The viability of C. albicans was determined by counting the colony forming units (CFU), after non-thermal atmospheric pressure plasma treatment. When non-thermal atmospheric pressure plasma was repeatedly treated on mouse skin which inoculated with C. albicans. The C. albicans cells were planted on skin tissue, and then the infected mouse tissue was exposed to non-thermal atmospheric pressure plasma for 0 sec, 60 sec, 180 sec and 300 sec. The death rate of C. albicans was increased in dependent with treatment times. The three times of non-thermal atmospheric pressure plasma at the interval of 10 minutes significantly showed the 6 log CFU/ml reduction of death rate on HRM-2 mouse tissues. Thus, non-thermal atmospheric pressure plasma could be used for the disinfection of C. albicans on oral surface.

Difference in Lung Functions according to Genetic Polymorphism of Tobacco Substance Metabolizing Enzymes of Korean Smokers (한국인 흡연자들의 담배 물질 대사 효소의 유전자 다형성에 따른 폐기능 차이)

  • Kang, Yun-Jung
    • Journal of Convergence for Information Technology
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    • v.10 no.5
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    • pp.134-142
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    • 2020
  • This study aimed to determine whether there was a difference in lung functions of smokers according to the presence of carcinogenic genetic-metabolizing enzymes by comparing the results of lung functions and the presence of genetic metabolizing enzymes that metabolize tobacco substances. To achieve this, 31 smokers without no illness and no psychiatric history were selected (28 males and 3 females); they were aged 20 to 27 years and were physically and mentally healthy students attending K University. Their lung functions were measured, and gene polymorphisms of cytochrome P-450 1A1 (CYP1A1) related to metabolic activation of tobacco components and gene polymorphism of tumor protein 53 (TP53) related to lung cancer were analyzed. As a result, the mean values of lung function of TT and Arg / Arg without genetic mutations were the highest, and ANOVA analysis of CYP1A1 and lung functions showed that the P-value of FVC was 0.049, which was different between groups. In other words, there is no high mutation in Cytochrome P-450 1A1 (CYP1A1) gene, which is associated with the metabolic activation of tobacco components. In other words, In the absence of the mutant Cytochrome P-450 1A1 (CYP1A1) gene, which is associated with the metabolic activation of tobacco components, the value of FVC was high.

Exfoliation of abalone, Haliotis discus hannai using organic acid (유기산을 이용한 전복박리)

  • Kim, Wi-Sik;Lee, Si-Woo;Kim, Jung;Choi, Dong-Ik;Oh, Myung-Joo;Hwang, Doo-Jin
    • Journal of fish pathology
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    • v.26 no.1
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    • pp.51-56
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    • 2013
  • It is reported that abalone, Haliotis discus hannai, was detached from shelters by commercial oxytetracycline (OTC) dissolved in hydrochloric acid (HCl). In the present study, we investigated the exfoliation effect of fouling abalone by organic acids instead of OTC or HCl. Organic acids (malic acid, citric acid, lactic acid and formic acid) of pH 2.6 and pH 2.1-2.3 exfoliated over 67.6% and 91.7% of abalone, respectively; while OTC of pH 2.6 and pH 2.1-2.3 exfoliated 25.9% and over 74.1% of abalone, respectively. These results indicate that the exfoliation effect of organic acid is better than that of OTC dissolved in HCl at the same pH. However, a lower pH and longer treatment of organic acids resulted in delayed recovery of the detached abalone; abalone immersed in pH 2.3 for 10 second was recovered within 5 min, but took 12 min to recover after 30 second immersion. Moreover, recovery period for abalone exposed to pH 2.1 for 30 second was at least 15 min 45 second. In conclusion, though acids need to be cautiously handled, organic acids may be a better candidate to detach abalone instead of OTC or HCl.

SEM EVALUATION AND SHEAR BOND STRENGTH OF ER : YAG LASER IRRADIATION ON ENAMEL SURFACE (Er : YAG 레이저 조사가 법랑질 표면 변화와 전단강도에 미치는 영향)

  • Lim, Hyoung-Soo;Lee, Chang-Seop;Lee, Sang-Ho
    • Journal of the korean academy of Pediatric Dentistry
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    • v.28 no.3
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    • pp.374-382
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    • 2001
  • The purpose of this study was to investigate the surface morphology and measure shear bond strength of Er : YAG lased enamel. To determine the most effective energy density of laser for improving bonding strength of human enamel, 24 specimen were lased from 30mJ to 150mJ at 1Hz used focused, defocused beam. After irradiation, the lased specimen were observed scanning electron microscope. To determine the resin shear bond strength of Er : YAG lased enamel, the 90 specimen were divided into 3 groups. The Control group was etched with 37% phosphoric acid for 15seconds and rinsed. Group 1 was only laser irradiaton(60mJ, 10Hz), Group 2 was irradiated as Group 1 regimen, followed 37% phosphoric acid etching. The following results were obtained: 1. In both focused and defocused Er : YAG lased enamel surface are similar to acid-etched enamel more than 60mJ in SEM evaluation. 2. The more increased laser energy, the more observed fissuring surface. 3. The highest mean shear bond strength value was observed in control group with the statistical significance(p<0.05) between all the other groups and the shear bond strength in group 1 was the lowest with significant difference among the other groups.

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