• Title/Summary/Keyword: 질화처리

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Effects of Wet Chemical Treatment and Thermal Cycle Conditions on the Interfacial Adhesion Energy of Cu/SiNx thin Film Interfaces (습식표면처리 및 열 사이클에 따른 Cu/SiNx 계면접착에너지 평가 및 분석)

  • Jeong, Minsu;Kim, Jeong-Kyu;Kang, Hee-Oh;Hwang, Wook-Jung;Park, Young-Bae
    • Journal of the Microelectronics and Packaging Society
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    • v.21 no.1
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    • pp.45-50
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    • 2014
  • Effects of wet chemical treatment and thermal cycle conditions on the quantitative interfacial adhesion energy of $Cu/SiN_x$ thin film interfaces were evaluated by 4-point bending test method. The test samples were cleaned by chemical treatment after Cu chemical-mechanical polishing (CMP). The thermal cycle test between Cu and $SiN_x$ capping layer was experimented at the temperature, -45 to $175^{\circ}C$ for 250 cycles. The measured interfacial adhesion energy increased from 10.57 to $14.87J/m^2$ after surface chemical treatment. After 250 thermal cycles, the interfacial adhesion energy decreased to $5.64J/m^2$ and $7.34J/m^2$ for without chemical treatment and with chemical treatment, respectively. The delaminated interfaces were confirmed as $Cu/SiN_x$ interface by using the scanning electron microscope and energy dispersive spectroscopy. From X-ray photoelectron spectroscopy analysis results, the relative Cu oxide amounts between $SiN_x$ and Cu decreased by chemical treatment and increased after thermal cycle. The thermal stress due to the mismatch of thermal expansion coefficient during thermal cycle seemed to weaken the $Cu/SiN_x$ interface adhesion, which led to increased CuO amounts at Cu film surface.

A Study on the fatigue Strength of SACM 645 Steel under Various Nitriding Methods and Times (질화처리 방법 및 시간에 따른 SACM 645강의 피로 강도 변화에 대한 연구)

  • 원성준;임병수;하재용;남기석
    • Transactions of the Korean Society of Automotive Engineers
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    • v.9 no.1
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    • pp.216-221
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    • 2001
  • In this study, the effects of nitriding methods and times on the fatigue strength of SACM 645 steel were investigated. The rotary bending tests were carried out to obtain and compare the fatigue strengths of plasma ion nitrided specimens and gas nitride specimen. The 70 hr. gas nitrided specimen had the highest fatigue strength of 1.05$\times$$10^3$ MPa over the 40 hr., 70 hr. and 90 hr. plasma ion nitrided specimens, which had the fatigue strength of 3.48$\times$$10^2$, 4.57$\times$$10^2$ and 4.64$\times$$10^2$ respectively. Also, the microhardness tests were conducted to measure the effective case depths. The plasma ion nitrided specimens showed much higher surface hardness values than the gas nitrided specimen overall.

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A Study on Plasma Surface Treatment Process of Injection Mold for Automotive Parts (자동차 부품용 사출금형의 플라즈마 표면처리 공정기술에 관한 연구)

  • Lee, Yeong-Min;Lee, Sin-Sik;Go, Min-Seong
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2014.11a
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    • pp.209-210
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    • 2014
  • 사출금형은 자동차의 경량화 요구에 따라 일반 엔지니어링 플라스틱에서 고강도 플라스틱 성형을 위한 사용 환경으로 변해가고 있다. 이에, 사출금형의 표면은 마모에 대한 내력을 갖는 고경도 특성과 수지의 유동성을 양호하게 하기 위한 저마찰 특성의 요구가 점차 증가하고 있다. 본 연구는 사출금형 소재 표면의 고경도 저마찰 특성 부여를 위하여 대형 플라즈마 표면처리 공정을 이용하여 각각 질화처리와 비정질 탄소 코팅 공정기술에 관한 연구를 수행하였다. 각각의 플라즈마 처리된 샘플은 표면처리 공정 변수에 따른 경도 및 마찰계수 평가를 통하여 사출금형 소재 표면의 물리적 특성 변화를 관찰하였다.

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A Study on Plasma Surface Treatment Process for Injection Mold Material (사출금형 소재 표면의 플라즈마 표면처리 공정기술에 관한 연구)

  • Lee, Yeong-Min;Lee, Ha-Yong;Choe, Gyu-Nam;Lee, Gyeong-Hwang
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2011.05a
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    • pp.100-101
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    • 2011
  • 사출금형은 자동차의 경량화 요구에 따라 일반 엔지니어링 플라스틱에서 고강도 플라스틱 성형을 위한 사용 환경으로 변해가고 있다. 이에, 사출금형의 표면은 마모에 대한 내력을 갖는 고경도 특성과 수지의 유동성을 양호하게 하기 위한 저마찰 특성의 요구가 점차 증가하고 있다. 본 연구는 사출금형 소재 표면의 고경도 저마찰 특성 부여를 위하여 대형 플라즈마 표면처리 공정을 이용하여 각각 질화처리와 비정질 탄소 코팅 공정기술에 관한 연구를 수행하였다. 각각의 플라즈마 처리된 샘플은 표면처리 공정 변수에 따른 경도 및 마찰계수 평가를 통하여 사출금형 소재 표면의 물리적 특성 변화를 관찰하였다.

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Sintering and Mechanical Properties of Silicon Nitride Prepared with a Low-cost Silicon Nitride Powder (저가의 $\beta$-상 분말을 사용한 질화규소의 소결 및 기계적 특성)

  • 박우윤;박동수;김해두;한병동
    • Journal of the Korean Ceramic Society
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    • v.38 no.11
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    • pp.987-992
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    • 2001
  • A refractory grade low-cost silicon nitride powder was chemically analyzed, purified, and gas pressure sintered with the sintering additives. As-received powder contained a significant amount of free-Si, 0.72 wt% of Fe, 0.5 wt% of al and 0.31 wt% of Ca. Oxygen and carbon contents of the powder were 3.3 wt% and 0.4 wt%, respectively, and it consisted of 96% of $\beta$-phase and 4% of $\alpha$-phase. After lowering the Fe content and nitriding treatment, the powder was sintered with 6 wt% yttria and 2 wt% alumina for 1 h between 1823 K and 2123 K in order to examine the sintering behavior. Fully dense samples were obtained by sintering at 2123k for 2h. For comparison, a commercially available high-grade powder was also sintered at the same time. The low-cost powder showed much slower densification rate than the high-grade powder. Fully dense sample prepared from the low-cost powder contained a number of coarse grains with a low aspect ratio, and its hardness, fracture toughness, flexural strength and thermal shock resistance were not as good as those of the sample prepared with the high-grade powder.

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Nitrogenation Process and Magnetic Properties of $Sm_{2}Fe_{17}$-Nitride ($Sm_{2}Fe_{17}N_{x}$의 질화과정 및 자기특성)

  • 김동환;권혁무;김택기;김희태;김윤배
    • Journal of the Korean Magnetics Society
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    • v.5 no.5
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    • pp.858-863
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    • 1995
  • The nitrogenation process and magnetic properties of $Sm_{2}Fe_{17}N_{x}\;(0{\leq}x{\leq}3)$ were investigated. During the initial nitrogenation process, the nitrogen content had linear relation with the square root of nitrogenation time, and the activation energy for the process was calculated to be 102.4 kJ/mol. The magnetic properties of $Sm_{2}Fe_{17}N_{x}$ were strongly dependent on the nitrogen content and the composition having $Sm_{2}Fe_{17}N_{2.8}$ showed optimum magnetic properties with a Curie temperature of 450 oC. The intrinsic magnetic properties of the nitride at room temperature were $M_{s}=1147\;emu/cm^{3},\;K_{1}=4.6{\times}10^{7}erg/cm^{3},\;K_{2}=6.0{\times}10^{7}erg/cm^{3}\;and\;H_{A}=290\;kOe$, respectively.

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Study on Surface Treatment and Test over the Barrel of Small Arms (개인화기 총열 표면처리 및 시험에 관한 연구)

  • Chae, Je-Wook;Kim, In-Woo;Lee, Young-Shin
    • Proceedings of the KSME Conference
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    • 2004.04a
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    • pp.722-727
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    • 2004
  • This paper includes the comparative study between Cr plating and nitriding process with an aim at improving corrosion, wear and maintainability for KNR(Korean Next Generation Rifle) 5.56mm barrel. The endurance test was conducted to compare the performance of standard barrel, Cr plating barrel and nitriding barrel. Main activities are described as follows; optimal Cr plating and nitriding process set-up for KNR 5.56mm barrel; durability test of each barrel(20,000 rounds); salt water immersion test; dispersion, initial velocity, inner diameter data acquisition. According to the results of this firing test, Cr plating barrel is superior to standard barrel and nitriding barrel in view of corrosion, wear and maintainability

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Study on Surface Treatment over the Barrel of Small Arms (소구경 총열 표면처리에 관한 연구)

  • 채제욱;김인우;이영신
    • Journal of the Korea Institute of Military Science and Technology
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    • v.7 no.1
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    • pp.5-12
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    • 2004
  • This paper includes the comparative study between Cr plating and nitriding process with an aim at improving corrosion, wear and maintainability for KNR(Korean Next Generation Rifle) 5.5mm barrel. The endurance test was conducted to compare the performance of standard barrel, Cr plating barrel and nitriding barrel. Main activities are described as follows; optimal Cr plating and nitriding process set-up for KNR 5.56mm barrel; durability test of each barrel(20,000 rounds); salt water immersion test; dispersion, initial velocity, inner diameter data acquisition. According to the results of this firing test, Cr plating barrel is superior to standard barrel and nitriding barrel in view of corrosion, wear and maintainability.