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Properties of the interfacial oxide and high-k dielectrics in $HfO_2/Si$ system ($HfO_2/Si$시스템의 계면산화막 및 고유전박막의 특성연구)

  • 남서은;남석우;유정호;고대홍
    • Proceedings of the Korea Crystallographic Association Conference
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    • 2002.11a
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    • pp.45-47
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    • 2002
  • 반도체 소자의 고집적화 및 고속화가 요구됨에 따라 MOSFET 구조의 게이트 절연막으로 사용되고 있는 SiO₂ 박막의 두께를 감소시키려는 노력이 이루어지고 있다. 0.1㎛ 이하의 소자를 위해서는 15Å 이하의 두께를 갖는 SiO₂가 요구된다. 하지만 두께감소는 절연체의 두께와 지수적인 관계가 있는 누설전류를 증가시킨다[1-3]. 따라서 같은 게이트 개패시턴스를 유지하면서 누설전류를 감소시키기 위해서는 높은 유전상수를 갖는 두꺼운 박막이 요구되는 것이다. 그러므로 약 25정도의 높은 유전상수를 갖고 5.2~7.8 eV 정도의 비교적 높은 bandgap을 갖으며, 실리콘과 열역학적으로 안정한 물질로 알려진 HfO2[4-5]가 최근 큰 관심을 끌고 있다. 본 연구에서는 HfO₂ 박막을 실제 소자에 적용하기 위하여 전극 및 열처리에 따른 HfO₂ 박막의 미세구조 및 전기적 특성에 관한 연구를 수행하였다. 이를 위해, HfO₂ 박막을 reactive DC magnetron sputtering 방법으로 증착하고, XRD, TEM, XPS를 사용하여 ZrO₂ 박막의 미세구조를 관찰하였으며, MOS 캐패시터 구조의 C-V 및 I-V 특성을 측정하여 HfO₂ 박막의 전기적 특성을 관찰하였다. HfO₂ 타겟을 스퍼터링하면 Ar 스퍼터링에 의해 에너지를 가진 산소가 기판에 스퍼터링되어 Si 기판과 반응하기 때문에 HfO₂ 박막 형성과 더불어 Si 기판이 산화된다[6]. 그래서 HfO₂같은 금속 산화물 타겟 대신에 순수 금속인 Hf 타겟을 사용하고 반응성 기체로 O₂를 유입시켜 타겟이나 시편위에서 high-k 산화물을 만들면 SiO/sub X/ 계면층을 제어할 수 있다. 이때 저유전율을 갖는 계면층은 증착과 열처리 과정에서 형성되고 특히 500℃ 이상에서 high-k/Si를 열처리하면 계면 SiO₂층은 증가하는 데, 이것은 산소가 HfO₂의 high-k 박막층을 뚫고 확산하여 Si 기판을 급속히 산화시키기 때문이다. 본 방법은 증착에 앞서 Si 표면을 희석된 HF를 이용해 자연 산화막과 오염원을 제거한 후 Hf 금속층과 HfO₂ 박막을 직류 스퍼터링으로 증착하였다. 우선 Hf 긍속층이 Ar 가스 만의 분위기에서 증착되고 난 후 공기중에 노출되지 않고 연속으로 Ar/O₂ 가스 혼합 분위기에서 반응 스퍼터링 방법으로 HfO₂를 형성하였다. 일반적으로 Si 기판의 표면 위에 자연적으로 생기는 비정질 자연 산화막의 두께는 10~15Å이다. 그러나 Hf을 증착한 후 단면 TEM으로 HfO₂/Si 계면을 관찰하면 자연 산화막이 Hf 환원으로 제거되기 때문에 비정질 SiO₂ 층은 관찰되지 않았다. 본 실험에서는 HfO2의 두께를 고정하고 Hf층의 두께를 변수로 한 게이트 stack의 물리적 특성을 살펴보았다. 선증착되는 Hf 금속층을 0, 10, 25Å의 두께 (TEM 기준으로 한 실제 물리적 두께) 로 증착시키고 미세구조를 관찰하였다. Fig. 1(a)에서 볼 수 있듯이 Hf 금속층의 두께가 0Å일때 13Å의 HfO₂를 반응성 스퍼터링 방법으로 증착하면 HfO₂와 Si 기판 사이에는 25Å의 계면층이 생기며, 이것은 Ar/O₂의 혼합 분위기에서의 스퍼터링으로 인한 Si-rich 산화막 또는 SiO₂ 박막일 것이다. Hf 금속층의 두께를 증가시키면 계면층의 성장은 억제되는데 25Å의 Hf 금속을 증착시키면 HfO₂ 계면층은 10Å미만으로 관찰된다. 그러므로 Hf 금속층이 충분히 얇으면 플라즈마내 산소 라디칼, 이온, 그리고 분자가 HfO₂ 층을 뚫고 Si 기판으로 확산되어 SiO₂의 계면층을 성장시키고 Hf 금속층이 두꺼우면 SiO/sub X/ 계면층을 환원시키면서 Si 기판으로의 산소의 확산은 막기 때문에 계면층의 성장은 억제된다. 따라서 HfO₂/Hf(Variable)/Si 계에서 HfO₂ 박막이 Si 기판위에 직접 증착되면, 순수 HfO₂ 박막의 두께보다 높은 CET값을 보이고 Hf 금속층의 두께를 증가시키면 CET는 급격하게 감소한다. 그러므로 HfO₂/Hf 박막의 유효 유전율은 단순 반응성 스퍼터링에 의해 형성된 HfO₂ 박막의 유전율보다 크다. Fig. 2에서 볼 수 있듯이 Hf 금속층이 너무 얇으면 계면층의 두께가 두꺼워 지고 Hf 금속층이 두꺼우면 HfO₂층의 물리적 두께가 두꺼워지므로 CET나 EOT 곡선은 U자 형태를 그린다. Fig. 3에서 Hf 10초 (THf=25Å) 에서 정전 용량이 최대가 되고 CET가 20Å 이상일 때는 high-k 두께를 제어해야 하지만 20Å 미만의 두께를 유지하려면 계면층의 두께를 제어해야 한다.

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Strategies for Increasing the Value and Sustainability of Archaeological Education in the Post-COVID-19 Era (포스트 코로나 시대 고고유산 교육의 가치와 지속가능성을 위한 전략)

  • KIM, Eunkyung
    • Korean Journal of Heritage: History & Science
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    • v.55 no.2
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    • pp.82-100
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    • 2022
  • With the crisis of the COVID-19 pandemic and the era of the 4th industrial revolution, archaeological heritage education has entered a new phase. This article responds to the trends in the post-COVID-19 era, seeking ways to develop archaeological heritage education and sustainable strategies necessary in the era of the 4th industrial revolution. The program of archaeological heritage education required in the era of the 4th industrial revolution must cultivate creative talent, solve problems, and improve self-efficacy. It should also draw attention to archaeological heritage maker education. Such maker education should be delivered based on constructivism and be designed by setting specific learning goals in consideration of various age-specific characteristics. Moreover, various ICT-based contents applying VR, AR, cloud, and drone imaging technologies should be developed and expanded, and, above all, ontact digital education(real-time virtual learning) should seek ways to revitalize communities capable of interactive communication in non-face-to-face situations. The development of such ancient heritage content needs to add AI functions that consider learners' interests, learning abilities, and learning purposes while producing various convergent contents from the standpoint of "cultural collage." Online archaeological heritage content education should be delivered following prior learning or with supplementary learning in consideration of motivation or field learning to access the real thing in the future. Ultimately, archaeological ontact education will be delivered using cutting-edge technologies that reflect the current trends. In conjunction with this, continuous efforts are needed for constructive learning that enables discovery and question-exploration.

A Study on the Improvement of the Employee Stock Ownership Plans (우리사주제의 개선에 대한 연구)

  • Kwon, Yong-man;Shin, Won-chul
    • Journal of Venture Innovation
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    • v.3 no.2
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    • pp.95-109
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    • 2020
  • The source of value-added creation in modern times has been transformed from material to man's value-added generating power, and ownership of the means of production has been converted from a particular landlord, capitalist to a person with value-added capacity, and a system of capital participation is needed beyond the profit-sharing system or performance incentive system in which workers of an enterprise participate in simple profits if they significantly increase the added value of the company. It is also necessary to introduce our private stock system as a means of addressing the problem of capital bias and for the stable development of capitalism. The purpose of Employee Stock Ownership Plans is to improve the economic and social status of workers and promote labor-management cooperation by allowing workers to acquire and hold shares of the stock company in which the employee ownership association is established through the employee ownership association, but the reality is that our stock ownership system has failed to achieve its purpose due to insufficient protection against the employee. In terms of welfare, the acquisition of our company shares should include active government support for the welfare of workers' ownership on a social welfare level rather than on the logic of the capital market, and in terms of investment, it would not be appropriate to apply the regulation for investor protection to see workers' acquisition of our company shares as 'investment' in the view of workers' willingness to own shares on the stock market. Therefore, as a way to support and deregulate employee's stock acquisition, 1. Expanding direct support, such as tax support, 2. As employee's stock ownership association is being discussed as a division's nature, it is less effective in terms of various management, not investment, and 3. Those who own stocks with 1% of the company's shares and 300 million won in face value will be classified as major shareholders. As a way to reduce the risk of management of our company owners and cooperative funds, As a measure to reduce the risk of management of our company owners and cooperative funds, only our employee shareholders' association shall manage the fund in a long-term deposit, and even though our employee's stock is managed by the association or company after the end of the deposit period, the management of each employee shall be allowed and In terms of improving the utilization of our company's stock and fund, 1. Employee's stockholders are prohibited from lending during the deposit period, but it is necessary to improve profitability by allowing them to borrow under strict restrictions, 2. It is necessary to make the use of the employee's welfare funds available for the preservation of losses, and to stipulate the redemption obligations of unlisted companies in order to improve the redemption system of our company.

The Impact of Entrepreneurship Education on Entrepreneurial Intentions and Entrepreneurial Behavior of Continuing Education Enrolled Students in University: Focusing on the Mediating Effect of Self-efficacy (창업교육이 성인학습자의 창업의지와 창업행동에 미치는 영향: 자기효능감 매개효과를 중심으로)

  • Yu, So Young;Yang, Young Seok;Kim, Myung Seuk
    • Asia-Pacific Journal of Business Venturing and Entrepreneurship
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    • v.18 no.1
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    • pp.107-124
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    • 2023
  • As getting in 4th Industrial Revolution Times, Continuing Education Enrolled Students(CEES) trying to find loophole for jepordized current life and need job transfer have surged their interest significantly on starting new business to bring up their post career after retirement through self-improvement. Government and university have actively initiated diverse policies of promoting startup for CEES in kicking off entrepreneurship courses and programs. However, relevant main policy, 'The 2nd University Startup Education Five-Year Plan (draft)' have too chiefly focused on theoretical start-up education rather than practical courses, causing the problem of inappropriate support for implementing real startup and business (Ministry of Education, 2018). This study is brought to empirically investigate the effect of self-efficacy as perspective of the impact of entrepreneurship education on entrepreneurial intention and behavior to come up with problem of poor entrepreneurial environment and entrepreneurship education to CEES. As to empirical research, this paper deliver on-line survey to CEES from September to October 2022, collect 207 effective feedbacks, In order to verify the reliability of the scale, the Cronbach's Alpha Coefficient (Cronbach's α) was calculated, analyzed, and measured. For hypothesis test, this paper utilize the multiple regression analysis statistical analysis method and use the SPSS 22.0 statistical processing program. Empirical results show, first, it was found that self-efficacy had a significant effect on start-up education. Second, start-up education had a significant effect on the intention to start a business of adult learners. Third, start-up education had a significant effect on the start-up behavior of adult learners. Fourth, self-efficacy had a significant effect on the intention of adult learners to start a business. Fifth, self-efficacy had a significant effect on the start-up behavior of adult learners. Sixth, self-efficacy had a mediating effect in the relationship between entrepreneurship education and adult learners' intention to start a business. Seventh, self-efficacy had a complete mediating effect in the relationship between start-up education and adult learners' start-up behavior. This paper is brought three significant implications. First, main consideration developing entrepreneurship education tools for CEES need to falls on defining potential needs of CEES as segmenting as to coming up with diversity of CEES's characteristics such as gender, age, experience, education, and occupation. Second, as to design specific entrepreneurship education program, both practical training program of utilizing CEES's career field experience benchmarking best practice startup and venture cases from domestic and global, and professional startup program of CEES initiating directly startup from ideation to develop business plan with pitching and discussing. Third, entrepreneurship education for CEES should be designed to incubate self-efficacy to enhance entrepreneurial intention of implementing entrepreneurial behavior as a real, eventually leading solid support system of self-improvement for CEES' Retirement life planning.

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Analysis of the Effect of Corner Points and Image Resolution in a Mechanical Test Combining Digital Image Processing and Mesh-free Method (디지털 이미지 처리와 강형식 기반의 무요소법을 융합한 시험법의 모서리 점과 이미지 해상도의 영향 분석)

  • Junwon Park;Yeon-Suk Jeong;Young-Cheol Yoon
    • Journal of the Computational Structural Engineering Institute of Korea
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    • v.37 no.1
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    • pp.67-76
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    • 2024
  • In this paper, we present a DIP-MLS testing method that combines digital image processing with a rigid body-based MLS differencing approach to measure mechanical variables and analyze the impact of target location and image resolution. This method assesses the displacement of the target attached to the sample through digital image processing and allocates this displacement to the node displacement of the MLS differencing method, which solely employs nodes to calculate mechanical variables such as stress and strain of the studied object. We propose an effective method to measure the displacement of the target's center of gravity using digital image processing. The calculation of mechanical variables through the MLS differencing method, incorporating image-based target displacement, facilitates easy computation of mechanical variables at arbitrary positions without constraints from meshes or grids. This is achieved by acquiring the accurate displacement history of the test specimen and utilizing the displacement of tracking points with low rigidity. The developed testing method was validated by comparing the measurement results of the sensor with those of the DIP-MLS testing method in a three-point bending test of a rubber beam. Additionally, numerical analysis results simulated only by the MLS differencing method were compared, confirming that the developed method accurately reproduces the actual test and shows good agreement with numerical analysis results before significant deformation. Furthermore, we analyzed the effects of boundary points by applying 46 tracking points, including corner points, to the DIP-MLS testing method. This was compared with using only the internal points of the target, determining the optimal image resolution for this testing method. Through this, we demonstrated that the developed method efficiently addresses the limitations of direct experiments or existing mesh-based simulations. It also suggests that digitalization of the experimental-simulation process is achievable to a considerable extent.

A Study on Hydrogeological Characteristics of Deep-Depth Rock Aquifer by Rock Types in Korea (국내 암종별 고심도 암반대수층 수리지질특성 연구)

  • Hangbok Lee;Chan Park;Dae-Sung Cheon;Junhyung Choi;Eui-Seob Park
    • Tunnel and Underground Space
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    • v.34 no.4
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    • pp.374-392
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    • 2024
  • In order to successfully select a site for deep geological disposal of high-level radioactive waste, it is important to perform the stepwise approach along with the systematic selection and survey of evaluation parameters of geological environmental characteristics suitable for the domestic geological environment. In this study, we evaluated the characteristics of hydraulic conductivity, which is considered the most important evaluation parameter in the field of hydrogeology, targeting a deep-depth rock aquifer where actual disposal facilities are expected to be located. In particular, for the first time in Korea, we obtained in-situ pressure-flow data by directly conducting hydraulic tests in boreholes at depths ranging from 500 m to 750 m in various rock types distributed in Korea (granite/volcanic rock/gneiss/mudstone). And we derived hydraulic conductivity values by rock types and depth using verified analytical methods. For this purpose, precision hydraulic testing equipment developed in-house through this study was used, and detailed investigation procedures based on standard test methods were applied to field tests. As a result of the analysis, the average hydraulic conductivity value was found to be in the range of 10-9 m/s in all granite/volcanic rock/gneiss areas. In the mudstone area, an average hydraulic conductivity value of 10-11 m/s was derived, which was about 100 times (2 orders of magnitude) lower than that of the fractured rock aquifers. Moreover, permeability tended to slightly decrease with depth in fractured rock aquifers (granite and volcanic rock areas) containing many rock fractures. The gneiss area tended to have large local differences in permeability according to the composition of the stratum and the development of fracture zones rather than depth. In mudstone areas with weak fracture development, there was no significant variation in rock permeability according to depth. The hydraulic conductivity results by various rock types and depth presented in this study are expected to be utilized in building a foundational database for the site selection, design, and construction of disposal facilities in Korea.

Analysing the effect of impervious cover management techniques on the reduction of runoff and pollutant loads (불투수면 저감기법의 유출량 및 오염부하량 저감 효과 분석)

  • Park, Hyung Seok;Choi, Hwan Gyu;Chung, Se Woong
    • Journal of Environmental Impact Assessment
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    • v.24 no.1
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    • pp.16-34
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    • 2015
  • Impervious covers(IC) are artificial structures, such as driveways, sidewalks, building's roofs, and parking lots, through which water cannot infiltrate into the soil. IC is an environmental concern because the pavement materials seal the soil surface, decreasing rainwater infiltration and natural groundwater recharge, and consequently disturb the hydrological cycle in a watershed. Increase of IC in a watershed can cause more frequent flooding, higher flood peaks, groundwater drawdown, dry river, and decline of water quality and ecosystem health. There has been an increased public interest in the institutional adoption of LID(Low Impact Development) and GI(Green Infrastructure) techniques to address the adverse impact of IC. The objectives of this study were to construct the modeling site for a samll urban watershed with the Storm Water Management Model(SWMM), and to evaluate the effect of various LID techniques on the control of rainfall runoff processes and non-point pollutant load. The model was calibrated and validated using the field data collected during two flood events on July 17 and August 11, 2009, respectively, and applied to a complex area, where is consist of apartments, school, roads, park, etc. The LID techniques applied to the impervious area were decentralized rainwater management measures such as pervious cover and green roof. The results showed that the increase of perviousness land cover through LID applications decreases the runoff volume and pollutants loading during flood events. In particular, applications of pervious pavement for parking lots and sidewalk, green roof, and their combinations reduced the total volume of runoff by 15~61 % and non-point pollutant loads by TSS 22~72 %, BOD 23~71 %, COD 22~71 %, TN 15~79 %, TP 9~64 % in the study site.

Experimental Research on the Power Improvement by Increasing Intake pressure in a 1.4 L Turbocharged CNG Port Injection Spark Ignition Engine (1.4L 급 터보 CNG 엔진에서 흡기압력 상승에 따른 출력 증대 효과에 관한 연구)

  • Lee, Jeong-Woo;Park, Cheol-Woong;Bae, Jong-Won;Kim, Chang-Gi;Lee, Sun-Youp;Kim, Yong-Rae
    • Journal of the Korean Institute of Gas
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    • v.23 no.6
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    • pp.90-96
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    • 2019
  • Natural gas has been regarded as one of major alternative fuels, because of the increment of mining shale gas and supplying PNG(Pipeline Natural Gas) from Russia. Thus, it needs to broaden the usage of natural gas as the increasing its supplement. In this situation, application of natural gas on the transport area is a good suggestion to reduce exhaust emissions such as CO2(carbon dioxides) and soot from vehicles. For this reason, natural gas can be applied to SI(spark ignition) engines due to its anti-knocking and low auto-ignitibility characteristics. Recently, since turbocharged SI engine has been widely used, it needs to apply natural gas on the turbocharged SI engine. However, there is a major challenge for using natural gas on turbocharged SI engine, because it is hard to make natural gas direct injection in the cylinder, while gasoline is possible. As a result, there is a loss of fresh air when natural gas is injected by MPI (multi-point injection) method under the same intake pressure with gasoline-fueled condition. It brings the power reduction. Therefore, in this research, intake pressure was increased by controling the turbocharger system under natural gas-fueled condition to improve power output. The goal of improved power is the same level with that of gasoline-fueled condition under the maximum torque condition of each engine speed. As a result, the maximum power levels, which are the same with those of gasoline-fueled conditions, with improved brake thermal efficiency could be achieved for each engine speed (from 2,000 to 6,000 rpm) by increasing intake pressure 5-27 % compared to those of gasoline-fueled conditions.

Water Balance Projection Using Climate Change Scenarios in the Korean Peninsula (기후변화 시나리오를 활용한 미래 한반도 물수급 전망)

  • Kim, Cho-Rong;Kim, Young-Oh;Seo, Seung Beom;Choi, Su-Woong
    • Journal of Korea Water Resources Association
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    • v.46 no.8
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    • pp.807-819
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    • 2013
  • This study proposes a new methodology for future water balance projection considering climate change by assigning a weight to each scenario instead of inputting future streamflows based on GCMs into a water balance model directly. K-nearest neighbor algorithm was employed to assign weights and streamflows in non-flood period (October to the following June) was selected as the criterion for assigning weights. GCM-driven precipitation was input to TANK model to simulate future streamflow scenarios and Quantile Mapping was applied to correct bias between GCM hindcast and historical data. Based on these bias-corrected streamflows, different weights were assigned to each streamflow scenarios to calculate water shortage for the projection periods; 2020s (2010~2039), 2050s (2040~2069), and 2080s (2070~2099). As a result by applying the proposed methodology to project water shortage over the Korean Peninsula, average water shortage for 2020s is projected to increase to 10~32% comparing to the basis (1967~2003). In addition, according to getting decreased in streamflows in non-flood period gradually by 2080s, average water shortage for 2080s is projected to increase up to 97% (516.5 million $m^3/yr$) as maximum comparing to the basis. While the existing research on climate change gives radical increase in future water shortage, the results projected by the weighting method shows conservative change. This study has significance in the applicability of water balance projection regarding climate change, keeping the existing framework of national water resources planning and this lessens the confusion for decision-makers in water sectors.

Dentists' Opinions in The Dental Field of Present Health Insurance Claim and Review (건강보험중 구강요양급여의 청구 및 심사에 관한 치과의사의 견해)

  • Chang, Yong-Seog;Ahn, Yong-Woo;Park, June-Sang;Ko, Myung-Yun
    • Journal of Oral Medicine and Pain
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    • v.30 no.2
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    • pp.215-230
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    • 2005
  • The study was intended to investigate how dentists in private dental clinic thought on the present claim and review of dental insurance to reflect it in future establishing dental insurance policies. 1,465 dentists who were running own dental clinic in Pusan Metropolitan City and the south part of Kyungsang province were surveyed in February, 2004. A total of 406 copies of finished questionnaire were finally retrieved and analyzed. The findings are as follows. 1. About insurance claim affairs : Most of the subject of insurance claim was by dentist himself or dental hygienist(nurse). Agency claiming was carried under 20% of total insurance claim. 2. The degree of attendance on insurance lecture : The degree of attendance on insurance lecture was relatively low. 3. Filing a protest against insurance claim : Filing a protest against insurance claim was reavealed about half-and-half for "have been" or "have not been". 4. Private clinic dentist,s opinion about the regulations affecting review of dental insurance : Private clinic dentists opinion about current guide for insurance review of dental fee was“the guidance is difficult and unfair cutback of claim fee may be carried”. 5. The affairs about health insurance review agency : About 70% of private clinic dentists have dissatisfaction on health insurance review agency. 6. Standpoint of private clinic dentists about issuance of receipt for dental fee : About 70% of private clinic dentist have an difficulty in issuance of receipt for dental fee. 7. The affairs about change insurance noncoverage treatment to insurance coverage treatment : Most of private clinic dentists hoped that insurance coverage about full mouth scaling, pit and fissure sealant, fluoride application. But they do not hoped that insurance coverage about geriatric denture, prothodontic treatment except precious metal, photopolymerization resin treatment.