• Journal of the Korean Vacuum Society
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• v.19 no.5
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• pp.331-340
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• 2010

3D fluid based numerical modelling is done for a VHF multi hollow cathode array plasma enhanced chemical vapor deposition system. In order to understand the fundamental characteristics of it, Ar plasma is analyzed with a condition of 40 MHz, 100 Vrf and 1 Torr. For hole array of 6 mm diameter and 20 mm inter-hole distance, plasma is well confined within the hole at an electrode gap of 10 mm. The peak plasma density was $5{\times}10^{11}#/cm^3$ at the center of the hole. When the substrate was assumed at ground potential, electron temperature showed a peak at the vicinity of the grounded walls including the substrate and chamber walls. The reaction rate of metastable based two step ionization was 10 times higher than the direct electron impact ionization at this condition. For $H_2$, the spatial localization of discharge is harder to get than Ar due to various pathways of electron impact reactions other than ionization.

• Korean Journal of Materials Research
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• v.4 no.2
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• pp.136-142
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• 1994

Epitaxial TiSiz films have been grown by UHV deposition of Ti on atomically clean Si(ll1)- orientated substrates. The Ti film of 50$\AA$ was deposited on the reconstructed Si(ll1) surface at room temperature. The sample was annealed up to $800^{\circ}C$ in $100^{\circ}C$ increments. The structure of the TiSiL films have been identified as the C49 metastable phase by electron diffraction patterns. Scanning electron microscopy( SEM) shows three different types of Tiksilicide island morphologies. The individual island structures are single crystal and are considered to be epitaxy with different crystallographic orientations. The orientational relationships of the $TiSi_{2}$ islands is given by [ 172 1 C49 $TiSi_{2}$//[110] Si and (021) C49 $TiSi_{2}$// (111)Si.

• Journal of the Korean Magnetics Society
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• v.5 no.1
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• pp.34-37
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• 1995

$Nd_{x}Fe_{77}B_{23-x}(x=4,\;6,\;8,\;11,\;13)$ alloys were prepared by rapid quenching technique. They were crystallized at higher than $650^{\circ}C$ and subsequently the magnetic properties were investigated The melt-spun alloy of x=8 consisted of nearly single metastable compound $Nd_{2}Fe_{23}B_{3}$ and showed the soft magnetic property. In $8{\leq}x{\leq}13$ alloys, the coercivities were increased according to the increase of Nd content but the remanences decreased. In $4{\leq}x{\leq}6$ alloys, the coercivities and the remanences were increased by lowering Nd content. In x=4 alloy, the ratio of soft to hard magnetic phase was 70:30 and the energy product was $96kJ/m^{3}(12MG.Oe)$.

• Journal of the Korean Magnetics Society
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• v.5 no.1
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• pp.48-53
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• 1995

The structure, magnetic properties and magnetoresistance phenorrena of Ag-Co nano-granular alloy films prepared by a thermal co-evaporation were studied. Supersaturated fee Ag-Co solid solution and fee Co clusters coexisted in the as-deposited state. As Co content increases from 20 to 55 at.% Co, the grain size of the Ag matrix decreases from 147 to $67{\AA}$, and the Co solubility in the Ag matrix increases from 2.5 to 6.7%. Ag-Co alloy films having composition below 25 at.% Co showed mainly superparamagnetic behavior and above that composition, they showed both paramagnetic and ferromagnetic l::ehavior in the as-deposited state. The maximum magnetoresistance of 19% at R. T. and 10 kOe was obtained in the as-deposited 30 at.% Co alloy film. Heat treatment did not improve the MR ratio tecause most of the Co was already precipitated in the as-deposited state.

• Korean Journal of Materials Research
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• v.23 no.7
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• pp.385-391
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• 2013

The influence of Cu and Ni on the ductile-brittle transition behavior of metastable austenitic Fe-18Cr-10Mn-N alloys with N contents below 0.5 wt.% was investigated in terms of austenite stability and microstructure. All the metastable austenitic Fe-18Cr-10Mn-N alloys exhibited a ductile-brittle transition behavior by unusual low-temperature brittle fracture, irrespective of Cu and/or Ni addition, and deformation-induced martensitic transformation occasionally occurred during Charpy impact testing at lower temperatures due to reduced austenite stability resulting from insufficient N content. The formation of deformation-induced martensite substantially increased the ductile-brittle transition temperature(DBTT) by deteriorating low-temperature toughness because the martensite was more brittle than the parent austenite phase beyond the energy absorbed during transformation, and its volume fraction was too small. On the other hand, the Cu addition to the metastable austenitic Fe-18Cr-10Mn-N alloy increased DBTT because the presence of ${\delta}$-ferrite had a negative effect on low-temperature toughness. However, the combined addition of Cu and Ni to the metastable austenitic Fe-18Cr-10Mn-N alloy decreased DBTT, compared to the sole addtion of Ni or Cu. This could be explained by the fact that the combined addition of Cu and Ni largely enhanced austenite stability, and suppressed the formation of deformation-induced martensite and ${\delta}$-ferrite in conjunction with the beneficial effect of Cu which may increase stacking fault energy, so that it allows cross-slip to occur and thus reduces the planarity of the deformation mechanism.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.9 no.5
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• pp.516-520
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• 1999

Mechanical alloying (MA) by planetary type ball mill of pure iron powders was carried out under the ammonia gas atmosphere. The powders of metastable iron nitrides was synthesized up to the nitrogen content of 23 at% N. The observed phases are identified as the super-saturated bcc solid solution for the nitrogen concentration below 14.5 at% N and the non-equilibrium hcp phase stable at high temperature for 20.8 at.% N. Magnetization of Fe-N powders gradually decreases with increasing the N concentration on contrast to the enhancement reported for the bct iron nitrides. Neutron diffraction experiments also provide detailed information concerning the local atomic structure surrounding the nitrogen atoms. The coordination number of Fe atom around a nitrogen atom for the iron nitride containing 9.5 at% N turns out to be 3.9 atoms. This suggests that a nitrogen atom is situated at a center of the tetrahedron formed by iron atoms.

• Journal of the Korean Ceramic Society
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• v.21 no.2
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• pp.149-155
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• 1984

The effect of $ZrO_2$ dispersed phase on the mechanical properties in $Al_2O_3$-$ZrO_2$system has been studied. There are both metastable tetragonal phase and stable monoclinic phase of $ZrO_2$particles diespersed in Al2O3 matrix at room temperature. Metastable tetragonal $ZrO_2$ changes to the stable monoclinic structure within the stress field of the crack. And microcracks are formed by the expansion of $ZrO_2$during the tetragonal-monoclinic transformation on cooling. Therefore stress-induced phase transformation and inclusion-induced microcracking contribute to the mec-hanical properties of $Al_2O_3$-$ZrO_2$system. Sintered composites containing 10m/o $ZrO_2$ yield KiC values of 6.5MN/$m^{3/2}$ much greater than that of pure $Al_2O_3$ This increase results from microcrack extension and stress-induced phase transformation absor-bing energy by crack propagation. Flexural strength of composites is decreased considerably in comparison with pure $Al_2O_3$ This decrease results from microcrack as a crack former and higher porosity than pure $Al_2O_3$.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.105-105
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• 2000

현재 급격히발전하는 이동통신기술로 미루어 보아 앞으로는 모든 정보통신이 무선통신으로 이루어질 것이다. 그런데 무선통신은 이동성과 대용량의 정보전송에 초점을 맞추어 발전하고 있다. 많은 정보량을 전달하기 위해서 현재 사용되는 주파수 대역보다 고주파의 전파가 사용되어야 한다. 또한 이동성을 향상시키기 위해서는 통신기기의 소형화를 이루어야 하고 그러기 위해서 궁극적으로 모든 소자를 하나의 칩(chip)으로 집적화하는 것이 필요하다. 따라서 벌크상태로 사용되고 있는 유전체 공진기를 소형화, 즉 박막화해야만 한다. 결국 유전체 박막의 마이크로파 대역에서의 유전특성을 연구하고 그 특성을 향상시켜야만 한다. 통신기기에서 사용되는 유전체 공진기는 소형화를 위해 높은 유전율과 낮은 유전손실(tan$\delta$), 즉 높은 품질계수 (Q)를 가져야 한다. 마이크로파 대역에서 사용되고 있는 유전체 중에서 TiO2는 벌크 상태의 rutile 상에서 100정도의 높은 유전율과, 4 GHz에서 10,000 정도의 높은 품질계수를 나타낸다고 보고되어 있다. 따라서 본 연궁서는 TiO2 박막의 마이크로파 유전특성을 연구하였고 anatase 박막의 유전특성도 측정하였다. TiO2 박막을 RF magnetron reactive sputtering 방법으로 Ar (15 sccm)과 O2 (1.5 sccm) 기체를 사용하여 상온에서 증착하였다. 4mTorr의 증착압력에서 안정한 rutile 박막을 얻었고, 15 mTorrdo서 준안정한 anatase 박막을 얻을 수 있었다. 그리고 그 중간의 압력에서 두 상이 혼합된 박막이 증착되었다. 위와 같은 방법으로 형성한 TiO2 박막의 마이크로파 유전특성을 측정하기 위해 마이크로스트립 링공진기 (microstrip ring resonator)를 제작하였다. 마이크로스트립 링 공진기는 링의 원주길이가 전자기파 파장길이의 정수배가 되면 공진이 일어나는 구조이다. Fused quartz를 기판으로 하여 증착압력을 변수로 하여 TiO2 박막을 증착하였다. 그리고 그 위에 은 (silver)을 사용하여 링 패턴을 형성하였다. 이와 같이 공진기를 제작하여 network analyzer (HP 8510C)로 마이크로파 대역에서의 공진특서을 측정하였다. 공진특성으로부터 전체 품질계수와 유효유전율, 그리고 TiO2 박막의 품질계수를 얻어내었다. 측정결과 rutile에서 anatase로 박막의 상이 변할수록 유전율은 감소하고 유전손실은 증가하는 결과를 나타내었다.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.230-230
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• 2010

유기물 반도체 화합물인 Cu-Pc(copper(II)-phthalocyanine)는 우수한 전기적 광학적 특성을 가지며, OLED, MISFET등 소자로서의 활용도가 높다. Cu-Pc 화합물은 $\alpha$-phase, $\beta$-phase, $\gamma$-phase를 포함하는 여러 가지 다결정 polymer로 존재할 수 있다. 가장 잘 알려진 구조로는 열적으로 준안정적인 $\alpha$-phase와 열적으로 안정적인 $\beta$-phase가 있다. Cu-Pc 박막의 구조 및 흡수 특성과 전기적 특성에 대한 기술이 확실히 규명되지 않아 본 연구에서는 두께와 열처리 조건에 따른 결정성 및 방향성을 조사하기 위하여 $\alpha$-phase와 $\beta$-phase의 phase transition 현상 및 전기적 광학적 특성을 규명 하고자 한다. 진공증착 방법 중 하나인 PVD 방법의 thermal evaporation deposition을 이용하여 glass, ITO 기판위에 두께와 열처리에 따른 전기적?광학적 특성을 연구하였다. Cu-Pc 박막의 성장두께는 5nm~50nm 이내로 fluxmeter 및 thickness monitor를 이용하여 제어하였다. 5nm~50nm의 두께에 따른 기판온도를 $200^{\circ}C$로 고정하여 전열 처리 및 후열 처리하여 온도에 따른 박막을 성장한 후, 결정 구조 및 특성 변화와 phase transition 분석하였다. 제작된 Cu-Pc의 박막은 $\alpha$-phase와 $\beta$-phase로 구분할 수 있으며, 열처리에 따른 phase transition 현상이 뚜렷함을 알 수 있다. XRD(X-ray diffraction)를 통하여 박막에 대한 결정 구조 분석 및 FE-SEM(field emission scanning electron microscopy)와 AFM(atomic force microscopy)을 이용하여 Cu-Pc 박막의 구조적 결정성과 방향성 등, 표면 상태와 형상구조에 대해 표면의 특성을 측정하며, 광 흡수도(UV-visible absorption spectra)을 이용하여 phase transition 현상에 따른 I-V 특성을 비교분석 하였다.

• Korean Journal of Materials Research
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• v.2 no.5
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• pp.320-329
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• 1992

In 2Y-TZP powders calcined at temperature range of 80$0^{\circ}C$0 to 150$0^{\circ}C$, the effect of stabilization and the transformability of tetragonal phase on the tetragonal to monoclinic transformation have been investigated. The transformability of tetragonal phase in calcined powders shows maximum at the calcination temperature of 130$0^{\circ}C$. This result is explained by a combined effect of the increase of particle size and of constrained force among the particles with increasing the calcination temperature. The amount of transformed monoclinic phase with calcination temperature after quenching in liquid nitrogen, stress induction and isothermal aging at 25$0^{\circ}C$is also explained by the transformability of tetragonal phase determined by the sum of particle size effect and constraint effect.