• Title/Summary/Keyword: 주요이온분석

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PECVD 내에서 수소 펄스를 이용하여 생성되는 실리콘 입자의 변수에 따른 입경 분포 특성 실시간 분석에 관한 연구

  • Kim, Dong-Bin;Choe, Hu-Mi;An, Chi-Seong;Kim, Tae-Seong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.113-113
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    • 2012
  • 플라즈마 내에서 발생하는 입자는 플라즈마 내 전기적 및 화학적 특성으로 인해 응집이 적고 균일한 특성을 가진다. 이에 따라 도포성이 좋으며 낮은 응력을 가지는 박막의 형성이 가능하다. 이러한 특성을 가지는 나노입자는 메모리, 고효율 박막형 태양전지 등에 이용될 수 있다. 특히, PECVD (Plasma enhanced chemical vapor deposition) 공정 중 플라즈마가 켜져있는 동안 수소 가스를 펄스형태로 추가 주입하는 방법은 실리콘 이온 사이의 결합을 통한 표면 성장을 일부 방해하여 이를 통해 최종적으로 생성되는 실리콘 입자의 크기제어를 가능하게 한다. 이러한 과정으로 PECVD내에서 생성된 입자의 입경 분포는 기존의 경우 공정 중 포집을 한 후 전자현미경을 이용하였지만 실시간 측정이 불가능한 한계가 있었고, 레이저를 이용한 실시간 측정은 그 측정범위의 한계로 인해 적용에 어려움이 있었다. 이에 따라 본 연구에서는 저압에서 실시간으로 나노입자 크기분포 측정이 가능한 PBMS (particle beam mass spectrometer)를 이용하여 PECVD 내에서 수소가스 펄스를 이용하여 발생되는 실리콘 입자를 공정 변수별로 측정하여 각 변수에 따른 입자 생성 경향을 분석하였다. 실리콘 나노 입자의 측정은 PBMS 장비의 전단 부분을 PECVD 장치 내부에 연결하여 진행하였다. 수소 가스 펄스를 이용한 실리콘 입자 생성의 주요 변수는 RF pulse, $H_2$ pulse, 가스 유량 (Ar, $SiH_4$, $H_2$), Plasma power, 공정 압력 등이 있다. 이와 같이 주어진 변수들의 제어를 통해 생성된 나노입자의 입경분포를 PBMS에서 실시간으로 측정하고, 동일한 조건에서 포집한 입자를 TEM 분석 결과와 비교하였다. 측정 결과 각각의 변수에 대하여 생성되는 입자의 크기분포 경향을 얻을 수 있었으며, 이는 추후 생성 입자의 응용 분야에 적합한 크기 분포 특성을 가지는 실리콘 입자를 제조하기 위한 조건을 정립하는데 중요한 역할을 할 것을 기대할 수 있다.

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Appearance Contamination of EPDM Article from Water Solution (EPDM 소재의 수용액으로부터의 외관 오염)

  • Choi, Sung-Seen;Chung, Hye-Seung;Joo, Yong-Tae;Yang, Kyung-Mo;Lee, Seong-Hoon
    • Elastomers and Composites
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    • v.45 no.2
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    • pp.100-105
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    • 2010
  • An EPDM article was aged in air, distilled water, tap water, NaCl/$CaCl_2$ solution, and $CaCl_2/FeCl_3$ solution for 7 days. The aging temperature was $90^{\circ}C$. The samples aged in air and distilled water did not appear the whitening, those aged in tap water, NaCl/$CaCl_2$ solution, and $CaCl_2/FeCl_3$ solution showed the whitening. Soluble organic materials were analyzed using GC/MS to identify the whitening materials, surface morphology of the aged sample surface was examined using image analyzer and SEM, and elemental analysis of the materials accumulated on the sample surface was performed using EDX. Principal reason to cause whitening might be formation of metal salt of fatty acid by reaction between metal cation and fatty acid.

Hydrolysis Stability of Sulfonated Phthalic and Naphthalenic Polyimide with Ester Bond (에스테르기를 도입한 술폰화 프탈계 폴리이미드와 나프탈렌계 폴리이미드의 수화안정성에 관한 연구)

  • 이영무;이창현;손준용;박호범
    • Membrane Journal
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    • v.13 no.2
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    • pp.110-117
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    • 2003
  • Sulfonated polyimides had been utilized and studied widely as available materials in chloro-alkali electrolysis, cationic exchange resins, and so on. However, a slow decrease in performance during experiments had been reported, which could be attributed to a loss of ionic conductivity related to either a continuous dehydration or polymer degradation. One of main reasons to account for the degradation of sulfonated polymers is the hydrolysis leading to polymer chain scission and decrement of molecular weight. Therefore, the objective of our study was to investigate possible imide cycle and additional ester bond cleavage connected with $SO_3$H presence under hydrated condition. In order to confirm and obtain as clear information as possible about breakages of bonds via $^1H\; and \;^{13}C$ NMR and IR spectroscopic analyses, our study was performed by model compound. Consequently, model compounds with both phthalic and naphthalenic imide ring and ester bonds were synthesized to evaluate the hydrolysis stability of sulfonated polyimide. The experiments were performed for prepared model compounds before and after aging in deionized water at $80^{\circ}C$ and were terminated by lyophilization technique. The aging products were finally analyzed by NMR and IR spectroscopy.

Mineral Products and Characteristics of Phase Transformation after Hydrothermal Treatment according to the Synthetic Method and Cation Combination during Birnessite Synthesis (버네사이트 합성 시 합성 방법 및 양이온 조건에 따른 생성 광물 및 열수처리 후 상전이 특성)

  • Min, Soyoung;Kim, Yeongkyoo
    • Economic and Environmental Geology
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    • v.52 no.6
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    • pp.509-517
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    • 2019
  • The birnessite (7Å manganate, δ-MnO2) which is a manganese oxide and comprises manganese nodules, is a major manganese mineral on the earth surface and a precursor in the synthesis of todorokite. In this study birnessite was synthesized by three different methods: Feng et al. (2004) and Luo et al. (1998) based on redox reaction and Ma et al. (1999) based on reduction reaction. 12 birnessite samples were synthesized by different combinations of Na+ and K+ cations based on the base (OH-) and permanganate (MnO4-) reagents in the synthesis. The mineral compositions of synthesized birnessite were identified by XRD, and the two cation ratio in the mineral was measured by ICP. The products obtained after hydrothermal treatment of Mg-buserite, by the precursor of birnessite, was examined by XRD, and then phase transition to todorokite and their characteristics were compared. Our results show that the byproducts and the characteristics of phase transition by each synthetic method have different trends. Hausmannite (γ-Mn3O4) and feitknechtite (β-MnOOH) were formed by both methods in the redox reaction mechanism. By Feng et al. (2004)'s method, manganite (γ-MnOOH) phase only appeared when cation was predominantly Na+. Two birnessite samples synthesized by redox reaction mechanism showed phase transition to todorokite (10Å manganate, OMS-1) when both NaOH and KMnO4 were used together. However, single-phase birnessite was formed by Ma et al. (1999)'s method, and phase transition was confirmed only for the sample when the cation was only composed of Na+.

Study on the Morphological Change and Reduction Plan of Nitrogen and Phosphorous in Litter and Manure of Cow House (우사의 깔짚과 퇴비에 있는 질소와 인의 형태적 변화와 저감 방안에 관한 연구)

  • Kim, Younjung;Ryoo, Keon Sang
    • Journal of the Korean Chemical Society
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    • v.65 no.4
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    • pp.249-253
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    • 2021
  • Litter and manure were obtained at a cow house of a livestock farm in Andondg city. We examined the change of formation of nitrogen and phosphorous from these samples and tried to suggest a more useful and realistic way for removing them. Constituent and its content of sample were identified by XRF. NO2-, NO3-, and PO43- ions and NH4+, T-P and T-N released from sample were analyzed using ion chromatograph and UV/Vis spectrometry, respectively. As the results of this study, the ammonia nitrogen in the early stage of cow excretion is a need to make an ammonia gas state that can be immediately volatile by increasing the pH. Nitrogen and phosphorous, the main source of nutrition in green algal bloom can be removed by transforming insoluble salts such as calcium phosphate (CaHPO4·3H2O) and struvite (NH4MgPO4·6H2O), respectively, with addition of Ca and Mg after stimulating fermentation of manure.

Low-temperature Hydrothermal Synthesis of Organic Smectite from Siliceous Mudstone (규질 이암으로부터 유기 스멕타이트의 저온 수열합성)

  • 노진환
    • Journal of the Mineralogical Society of Korea
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    • v.17 no.1
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    • pp.49-59
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    • 2004
  • Organic smectite was hydrothermally synthesized by treating the opal-rich siliceous mudstone from the Pohang area with TMAOH solutions and 1:1 solutions of TMAOH+NaOH at $80^{\circ}C$ and concentrations ranging 10∼15%. Smectite was solely formed without accompanying any mineral products in case of TMAOH, whereas NaP and hydroxysodalite was synthesized together with smectite under the blending solution of TMAOH+NaOH. The synthesized smectite is identified as an organic smectite intercalating $TMA^{+}$ within its interlayer site, specifically corresponding to monmorillonite species, through mineralogical characterization by XRD, DTA, and IR analyses. The experimental results indicate that main precursor of the synthesized smectite is undoubtedly opal-CT, and the original sedimentary smectite included as considerable amounts in the mudstone seems to play a major role as Al-sources necessary far the smectite formation. Original inert components such as quartz and mica do not affect mostly to the synthesis reaction, and thus, are resultantly found as impurities in the synthetic products. These experimental results may imply that a new effective method for the low-temperature (less than $100^{\circ}C$) hydrothermal synthesis of organic smectite will be established if some Al-sources adequate for this synthetic system are available.

A Study on Chemical Composition of Fine Particles in the Sungdong Area, Seoul, Korea (서울 성동구 지역 미세먼지의 화학적 조성에 관한 연구)

  • 조용성;이홍석;김윤신;이종태;박진수
    • Journal of Environmental Science International
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    • v.12 no.6
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    • pp.665-676
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    • 2003
  • To investigate the chemical characteristics of PM$\_$2.5/ in Seoul, Korea, atmospheric particulate matters were collected using a PM$\_$10/ dichotomous sampler including PM$\_$10/ and PM$\_$2.5/ inlet during the period of October 2000 to September 2001. The Inductively Coupled Plasma-Mass Spectromety (ICP-MS), ion Chromatography (IC) methods were used to determine the concentration of both metal and ionic species. A statistical analysis was performed for the heavy metals data set using a principal component analysis (PCA) to derived important factors inherent in the interactions among the variables. The mean concentrations of ambient PM$\_$2.5/ and PM/sub10/ were 24.47 and 45.27 $\mu\textrm{g}$/㎥, respectively. PM$\_$2.5/ masses also showed temporal variations both yearly and seasonally. The ratios of PM$\_$2.5/PM$\_$10/ was 0.54, which similar to the value of 0.60 in North America. Soil-related chemical components (such as Al, Ca, Fe, Si, and Mn) were abundant in PM$\_$10/, while anthropogenic components (such as As, Cd, Cr, V, Zn and Pb) were abundant in PM2s. Total water soluble ions constituted 30∼50 % of PM$\_$2.5/ mass, and sulfate, nitrate and ammonium were main components in water soluble ions. Reactive farms of NH$_4$$\^$+/were considered as NH$_4$NO$_3$ and (NH$_4$)$_2$SO$_4$ during the sampling periods. In the results of PCA for PM$\_$2.5/, we identified three principal components. Major contribution to PM$\_$2.5/ seemed to be soil, oil combustion, unidentified source. Further study, the detailed interpretation of these data will need efforts in order to identify emission sources.

Determination of the Concentration of Panaxynol, Panaxydol and Panaxytrio1 by Capillary-GC(FID) (Capillary-GC(FID)에 의한 panaxynol, panaxydol 및 panaxytriol의 정량)

  • 노길봉;손현주
    • Journal of Ginseng Research
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    • v.13 no.2
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    • pp.183-188
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    • 1989
  • A gas chromatographic method was developed for determination of the concentration of three major polyacetylene compounds in ginseng roots---panaxynol, panaxydol and panaxytriol. The column and the detector used were an SPB-1 fused silica capillary (0.2mm i.d.$\times$30m, Supelco) and a flame ionization detector (FID). The column oven temperature was kept at $250^{\circ}C$ isothermally The retention times of panaxynol, panaxydol and panaxytriol peaks were 4.2,5.1 and 6.9 min before TMS-derivatitration and 4.5,5.4 and 7.4 min after TMS-derivatization, respectively. The minimum determinable concentrations of panaxynol, panaxydol and panaxytriol before TMS-derivatiEation were at the 20, 50 and 100 ppm levels, while the concentrations of panaxydol and panaxytriol as well as panaxynol after TMS- derivatisation could be towered to the 5 ppm level. The panaxynol, panaxydol and panaxytriol contents in red ginseng were determined by use of this method after TMS-derivatization : the amounts obtained were 724, 721 and 71$\mu\textrm{g}$/g, respectively.

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Study on the Nanofiltration of Various Dye Solutions (NF막에 의한 다양한 염료용액의 막분리 특성)

  • Yang, Jeongmok;Kim, Tak-Hyun;Park, Cheolhwan;Kim, Jeehyeong;Kim, Sangyong
    • Clean Technology
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    • v.10 no.1
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    • pp.37-45
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    • 2004
  • This study examined the separation characteristics of some of the most commonly used disperse, reactive and acid dyes by nanofiltration membrane. The chemical characteristics of three major dye solutions such as chemical oxygen demand, total nitrogen, total organic carbon, color, suspended solids, total dissolved solids, conductivity were investigated in this work. Experiments showed that the types of dye had a significant effect on both permeate flux and rejection efficiencies mainly due to the differences among their chemical structures and natures. Especially, the nanofiltration of reactive dye solutions showed higher permeate flux, lower total dissolved solid rejection efficiency and higher organics rejection efficiency than those of disperse dye solutions.

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A design of radiation hardened common signal processing module for sensors in NPP (내방사선 원전센서 공통 신호처리 모듈 설계)

  • Lee, Nam-ho;Hwang, Young-gwan;Kim, Jong-yeol;Lee, Seung-min
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.19 no.6
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    • pp.1405-1410
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    • 2015
  • In this study we designed the radiation-hardened sensor signal processing modules that can be commonly used for a variety of sensors during normal operation and even in high-radiation environments caused by an accident. First development module was designed to receive the change of the R and C value from the sensors and to process the signal as a PWM modulation scheme. This module was assessed to have ± 10% error to the Full-Scale in the radiation test in the range of 12 kGy TID. The main cause of the error was analyzed as the annealing of the common circuit in the switching element and the consequent increase in the duty ratio of the pulse width modulation circuit according to the radiation dose increasement. The redesigned module for higher radiation resistivity with Stub transistor circuit was found to have less than 5% error to the Full-scale from the radiation test results for 20.7 kGy TID range.