• Korean Chemical Engineering Research
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• v.47 no.4
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• pp.395-402
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• 2009

The atomic force microscopy(AFM) has been used, as a powerful tool, to investigate physical properties of supported-lipid layers. Prior to the advent of the AFM, no observation was performed for the physical phenomena at the nanometer-scale. This microscope provides nanometer-scale morphology by scanning surfaces with the cantilever and presents force curve by monitoring the behavior of the cantilever that approaches to surface and retracts from the surface. From the morphology, the structures of the supported lipid layer and the effect of other molecules on the structures have been investigated. From the force curve, the surface properties-electrostatic and mechanical properties-of the supported lipid layers have been studied. In this article, characterization of the structure and surface properties of the supported lipid layer is explained. Future perspectives and direction are also discussed.

• Korean Journal of Materials Research
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• v.34 no.2
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• pp.105-110
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• 2024

Scanning probe microscopy (SPM) has become an indispensable tool in efforts to develop the next generation of nanoelectronic devices, given its achievable nanometer spatial resolution and highly versatile ability to measure a variety of properties. Recently a new scanning probe microscope was developed to overcome the tip degradation problem of the classic SPM. The main advantage of this new method, called Reverse tip sample (RTS) SPM, is that a single tip can be replaced by a chip containing hundreds to thousands of tips. Generally for use in RTS SPM, pyramid-shaped diamond tips are made by molding on a silicon substrate. Combining RTS SPM with Scanning spreading resistance microscopy (SSRM) using the diamond tip offers the potential to perform 3D profiling of semiconductor materials. However, damage frequently occurs to the completed tips because of the complex manufacturing process. In this work, we design, fabricate, and evaluate an RTS tip chip prototype to simplify the complex manufacturing process, prevent tip damage, and shorten manufacturing time.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.6 no.3
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• pp.261-264
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• 2005

The 90 nm gate pattern technology have been virtualized by employing the hard mask and the planarization of fate poly silicon. We fabricated 70nm poly-Si on $200 nm-SiO_2/p-Si(100)$ substrates using low pressure chemical vapor deposition (LPCVD) to investigate roughness evolution by varying rapid annealing temperatures. The samples were annealed at the temperatures of $700^{\circ}C\~1100^{\circ}C$ for 40 seconds with a rapid thermal annealer. The surface image and the surface roughness were measured by a field emission scanning electron microscopy (FESEM) and an atomic force microscopy (AFM), respectively. The poly silicon surface became more rough as temperature increased due to surface agglomeration. The optimum conditions of poly silicon planarization were achieved by annealed at $700^{\circ}C$ for 40 seconds.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.11a
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• pp.40-40
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• 2003

최근 나노기술의 발달과 더불어 나노재료에 대한 특성평가 요구가 높아지고 있고, 따라서 나노스케일에서 재료의 기계적 거동을 분석할 수 있는 나노인덴테이션 기법이 심도있게 연구되고 있다. 본 연구에서는 나노인덴테이션, 주사탐침현미경(SPM), 투과전자현미경(TEM) 기법을 이용하여 여러가지 재료의 탄성 소성 변형 거동과 팝인/괍아웃 현상을 조사하고 해석하였다. 나노인덴테이션 기법으로는 50 마이크로뉴턴 (5 mg) 이하의 매우 작은 하중 하에서는 접촉 응력조건이라도 인장시험에서 관찰되는 영구변형이 제로인 완전탄성 변형 거동을 관찰할 수 있었다. 또한, 50-250 마이크로 뉴턴의 하중 범위에서 재료는 탄성변형 이후에 갑작스런 항복거동과 더불어 수십-수백 나노미터를 미끌어지듯 변형하는 팝인(pop-in), 또는 탈선(excursion) 현상을 관찰할 수 있었다. 이 현상은 하중을 가하는 동안에 여러 번 발생하였으며 재료의 표면상태와 전위밀도와 밀접한 상관관계를 보였다. 반복 압입 시험에서는 전형적인 가공경화 현상으로 항복점이 높아지고 새로운 항복점 이후에야 다시 팝인 발생함을 보였다. 한편, 하중을 가할 때 발생하는 팝인과는 달리 하중을 제거할 때 급격히 회복하는 팝아웃 현상 또한 관찰되었다.

• Journal of the Mineralogical Society of Korea
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• v.13 no.2
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• pp.96-114
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• 2000

춘천 연옥은 색깔에 따라 세가지 유형 (연녹색, 암녹색, 및 회색 연옥)으로 구분되고 이들은 각기 서로 다른 조직과 조성을 나타낸다. 연녹색 연옥이 이중에서 가장 일반적인 유형이다. 연옥은 주로 극미립의 연옥질 투각섬석으로 구성되고 여기에 미량의 휘석, Mg-녹니석 및 방해석이 불순물로서 수반된다. 연옥질 투각섬석 결정들은 그 폭이 5$\mu\textrm{m}$ 이하의 극미립질 침상 결정형을 이루며 서로 치밀하게 얽혀있는 연옥 특유의 조직을 나타낸다. 주사전자현미경 하에서 (110)의 벽개면의 발달이 현저하고, 주사탐침현미경 하에서는 벽개면을 가로지르는 방향으로 특징적인 조선이 나타나는 것이 특징이다. 연옥질 투각섬석은 투과전자현미경 하에서 흔히 단쇄형과 복쇄형이 결합한 3중쇄형 격자가 복쇄형의 투각섬석 구조 내에서 불규칙적으로 협재되는 혼성격자 구조가 발달하는 것이 특징이다. 드물지만 5중쇄형 격자와 4중쇄형 격자도 관찰되는데, 이 같은 불규칙한 격자 혼재상은 회색 연옥에서 보다 현저한 경향을 보인다. 이와 같은 혼성격자 구조형의 존재는 춘천 연옥이 열역학적으로 비평형 상태에서 형성되었음을 시사하는 것으로 여겨진다. 리트벨트법에 의한 구조검증을 통해서 구해진 연옥질 투각섬석들의 격자상수 값들은 X-선회절의 경우, a=9.837(1)~9.9804(4)$\AA$, b=18.046(2)~18.062(1)$\AA$. c=5.2765(7)~5.2803(3)$\AA$, $\beta$=104.717(9)~104.786(3)$^{\circ}$로 계산되었다. 이에 비해서 중성자 회절법에 의해서 측정되 격자 상수 값은 a=9.8841(6)~9.8933(7)$\AA$, b=18.1429(7)~18.161(2)$\AA$, c=5.3024(3)~5.3060(7)$\AA$, $\beta$=104.698(7)~104.771(4)$^{\circ}$로서 X-선회절에 의한 값들과 약간의 차이를 보인다. 연옥질 투각섬석은 Ca에 대한 Mg의 치환에 의해 M(4) 자라의 크기가 작아지면서 b축의 단위포도 함께 줄어드는 결정화학적 특징을 나타낸다. 이는 중성자 회절분석에 의해서 구해진 M(4)의 자리점유율과 M(4)-O의 원자간 거리에 의해서도 확인된다. 그러나 연옥질 투각섬석에 대한 리트벨트법에 구조검증 결과는 연옥의 유형별 미시적 광물상과 혼성격자 구조형의 특징에 별다른 연계성이 없는 것으로 나타났다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.326-329
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• 2005

As a flexible method to fabricate sub-micrometer patterns, Focused Ion Beam (FIB) instrument and Self-Assembled Monolayer (SAM) resist are introduced in this work. FIB instrument is known to be a very precise processing machine that is able to fabricate micro-scale structures or patterns, and SAM is known as a good etch resistance resist material. If SAM is applied as a resist in FIB processing fur fabricating nano-scale patterns, there will be much benefit. For instance, low energy ion beam is only needed for machining SAM material selectively, since ultra thin SAM is very sensitive to $Ga^+$ ion beam irradiation. Also, minimized beam spot radius (sub-tens nanometer) can be applied to FIB processing. With the ultimate goal of optimizing nano-scale pattern fabrication process, interaction between SAM coated specimen and $Ga^+$ ion dose during FIB processing was observed. From the experimental results, adequate ion dose for machining SAM material was identified.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.373-378
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• 2004

Recently the electrostatic 2-axis MEMS stages have been fabricated for the purpose of an application to PSD (Probebased Storage Device). However, most of them have low area efficiency, which is undesirable as data storage devices, since all of the components (springs, comb electrodes, anchors, platform, etc.) are placed in-plane. In this paper, we present a novel structure of electrostatic 2-axis MEMS stage that is characterized by having large area platform. For large area efficiency, the actuator part consisting of mainly comb electrodes and springs is placed right below the platform. In this article, the structures and operational principle of the MEMS stages are described, followed by design procedure, structural and modal analysis using FEM(Finite Element Method). The area efficiency of the MEMS stage was designed to be about 55％, that is very large compared with conventional ones having a few percentage.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.11 s.176
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• pp.173-181
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• 2005

We report on the design and fabrication of an electrostatic 2-axis MEMS stage possessing a platform with a size of $5{times}5mm^2$. The stage, as a key component, would be used in developing probe-based storage devices in the future. It was fabricated by forming numerous $5{\times}5{\mu}m^2$ etching holes in the central platform, as a result, reducing the total number of masks to 1, thereby simplifying the whole fabrication process. Experimental results show that the driving range of the stage was $32{\mu}m$ at the supplied voltage of 20V and the natural frequency was approximately 300Hz. The mechanical coupling between x- and y-motion was also measured and verified to be $25\%$.

• Proceedings of the KIEE Conference
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• 1995.11a
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• pp.555-557
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• 1995

In near field optics, optical fiber probe is smaller than the wavelength of light. This small probe makes it possible to overcome the diffraction limit due to wave property of light. In conventional optical systems, the image resolution is governed by wavelength. But in NSOM, it is determined by probe tip size and probe shape. Therefore probe tip size and shape are very important points in near field optics. In this paper, we will suggest the new fabrication methods of optical fiber probe and show that the probe tip size is sub-micrometer using SEM.

• Journal of the Korean Graphic Arts Communication Society
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• v.29 no.3
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• pp.97-104
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• 2011

The storing ability of information of optical disks directly depends on the physical property of recording unit cells. It means that the degradation of optical disks ultimately causes the loss of the physical and chemical properties of recording unit cells and leads also information, too. We investigated the degradation and life time of optical disks which tell us the longevity of the preservation of information. Optical disks were aged using the accelerated aging system and studied by optical reflectivity spectroscopy and atomic force microscopy(AFM), and the preservation environment of electronic media in National central library of Korea also were analysed. Results show that the double reflective coated optical disks have good preservation of recording information but revealed some deformation of dye area in the AFM images. It means that we should include the mechanical and chemical degradation of the optical disks in the life time expectation evaluation.