• Journal of the Korean Society of Manufacturing Process Engineers
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• v.13 no.6
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• pp.15-22
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• 2014

With a conventional positioning apparatus, it is very difficult simultaneously to achieve desired driving ranges and precision levels at the sub-micrometer level. Generally, a lead screw and friction drive have been used as servo control systems. These have large driving ranges, and high-speed positioning is feasible. In this study, we present a global servo system controlled by a laser interferometer acting as a displacement measurement sensor for achieving positioning accuracy at the sub-micrometer level.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2006.10a
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• pp.145-149
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• 2006

반도체의 고집적화와 LCD의 대형화로 인해 웨이퍼 및 LCD 검사용 스테이지의 성능 향상이 요구된다. 본 논문에서는 고속의 검사속도, 서브마이크론의 검사 정밀도, 그리고 대행정 구동을 위한 이중 서보 시스템을 제안하였다. 이중 서보 시스템은 선형모터로 구동되고 공기베어링으로 가이드 되는 조동 구동부와 보이스 코일 모터(VCM)로 구동되고 공기베어링으로 가이드 되는 미세 구동부로 구성된다. 검사 효율을 향상시키기 위한 고속 세틀링을 위한 제어기로서 시간 최적 제어 기법과 시간 지연 제어기를 결합한 모드 변경 제어기를 제안하고 이중 서보 시스템에 구현하여 성능을 평가하였다.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.11 no.5
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• pp.65-72
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• 2002

In this study, actuator, sensor, guide, power transmission element and control method are considered for ultra-precision positioning apparatus. Through previous process, single plane X-Y stage with ultra-precision positioning is manufactured. Global stage for the purpose of materialization with robust system, is combined by using AC servo motor and ball screw and rolling guide. And ultra-precision positioning system is developed by micro stage with elastic hinge type and piezo element. global servo and micro servo for the purpose of materialization positioning accuracy with nm(nanometer) are controlled simultaneously by using incremental encoder and laser interferometer as displacement measurement sensor. Through previous process, ultra-precision positioning system(100mm stroke and $\pm$ l0nm positioning accuracy) with single plane X-Y stage are materialized.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.1080-1083
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• 1997

Micro-stereolithography is a newly proposed technology as a means that can fabricate 3D micro-structures of free form. It makes a 3D structure by dividing the shape into many slices of relevant thickness along honzontal surfaces, hardening each layer of slice with a laser, and stacking them up to a des~red shape. Scale effect becomes important in this micro-fabrication process, d~fferently from the conventional stereolithography. To realize this micro-stereolithography technology, we developed an equipment using Ar+ laser, xyz stages, controllers and all the optic devices. Using the equipment, a number of micro-structures were successfully fabricated including a winecup of several tens of micrometers.

• Proceedings of the KIEE Conference
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• 2001.11a
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• pp.65-68
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• 2001

본 연구에서는 코움 드라이브에 비해 구동력은 크고 평행 판 구동 방식에 비해서는 선형 특성이 우수하며 안정된 구동거리가 증가하는 특성을 갖는 새로운 정전력(electrostatic force) 구동 방식을 제안한다. 운동 전극과 고정 전극을 기울어지게 배치하여 전극 면에 평행한 정전력 $F_x$와 전극 면에 수직인 정전력 $F_y$의 합력 $F_e$ 방향으로 전극을 운동시킴으로써 정전력의 방향과 전극의 운동 방향을 일치시킨다. 제안된 구동방식의 정전력 모델을 이용한 해석 결과 코움 드라이브에 비해서는 구동력이 50 % 이상 크며 평행 판 구동에 비해서는 안정된 구동 거리가 10 - 30 % 이상 증가하는 구동 특성을 얻을 수 있었다. 제안된 구동방식을 이용하여 HDD의 트랙 방향 저장 밀도를 증가시키기 위한 듀얼스테이지 서보(dual-stage servo)에 사용 될 마이크로 액츄에이터 (microactuator)를 설계하고 SoG(Silicon on Glass) 공정을 이용하여 제작하였다.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.2
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• pp.186-194
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• 2004

Micro-stereolithography is a newly proposed technology as a means that can fabricate a 3D micro-structure of free form. It makes a 3D micro-structure by dividing the shape into many slices of relevant thickness along horizontal surfaces, hardening each layer of slice with a focused laser beam, and stacking them up to a desired shape. In this technology, differently from the conventional stereolithography, scale effect is dominant. To realize micro-stereolithography technology, we developed the micro-stereolithography apparatus which is composed of an Ar+ laser, x-y-z stages. controllers. optical devices and scan path generation software. Related processes were developed, too. Using the system, a number of micro-structures were successfully fabricated. Some of these samples are shown for prove this system. Laser scan path generation algorithm and software considering photopolymer solidification phenomena as well as given 3D model were developed. Sample fabrication of developed software shows relatively high dimensional accuracy compared to the uncompensated result.

• The KIPS Transactions:PartD
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• v.12D no.3 s.99
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• pp.455-460
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• 2005

An improvement of a mobile game content production and a service technology are bringing an explosive increase of a mobile game market. Currently serviced mobile games are using a WAP method and a download method. Because of technical problems, we couldn't develop the mobile game content which sequentially linked WAP->download and download->WAP. In this study, we design and develop the mobile game content which sequentially linked WAP->download and download->WAP. In the proposed method, we can linked the stage and the ranking information as sharing a data on real time that it is impossible in the previous mobile game content.