• Title/Summary/Keyword: 정해성

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The Behavior of Intrinsic Bubbles in Silicon Wafer Direct Bonding (실리콘 웨이퍼 직접접합에서 내인성 Bubble의 거동에 관한 연구)

  • Moon, Do-Min;Jeong, Hae-Do
    • Journal of the Korean Society for Precision Engineering
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    • v.16 no.3 s.96
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    • pp.78-83
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    • 1999
  • The bonding interface is dependent on the properties of surfaces prior to SDB(silicon wafer direct bonding). In this paper, we prepared silicon surfaces in several chemical solutions, and annealed bonding wafers which were combined with thermally oxidized wafers and bare silicon wafers in the temperature range of $600{\times}1000^{\circ}C$. After bonding, the bonding interface is investigated by an infrared(IR) topography system which uses the penetrability of infrared through silicon wafer. Using this procedure, we observed intrinsic bubbles at elevated temperatures. So, we verified that these bubbles are related to cleaning and drying conditions, and the interface oxides on silicon wafer reduce the formation of intrinsic bubbles.

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Tungsten CMP in Fixed Abrasive Pad using Hydrophilic Polymer (친수성 고분자를 이용한 고정입자패드의 텅스텐 CMP)

  • 박범영;김호윤;김형재;김구연;정해도
    • Journal of the Korean Society for Precision Engineering
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    • v.21 no.7
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    • pp.22-29
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    • 2004
  • As a result of high integration of semiconductor device, the global planarization of multi-layer structures is necessary. So the chemical mechanical polishing(CMP) is widely applied to manufacturing the dielectric layer and metal line in the semiconductor device. CMP process is under influence of polisher, pad, slurry, and process itself, etc. In comparison with the general CMP which uses the slurry including abrasives, fixed abrasive pad takes advantage of planarity, resulting from decreasing pattern selectivity and defects such as dishing & erosion due to the reduction of abrasive concentration especially. This paper introduces the manufacturing technique of fixed abrasive pad using hydrophilic polymers with swelling characteristic in water and explains the self-conditioning phenomenon. And the tungsten CMP using fixed abrasive pad achieved the good conclusion in terms of the removal rate, non-uniformity, surface roughness, material selectivity, micro-scratch free contemporary with the pad life-time.

연안 이용자 안전 확보를 위한 안전장비 착용 의무화에 관한 연구

  • Ha, Min-Jae;Lee, Yeong-Chan;Lee, Su-Jin;Ha, Sin-Yeong;Jeong, Hae-Sang;Guk, Seung-Gi
    • Proceedings of the Korean Institute of Navigation and Port Research Conference
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    • 2020.11a
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    • pp.93-95
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    • 2020
  • 주 5일제 근무, 개인 여가문화 확산, 국민 소득 증대 등으로 인해 해양을 레저의 목적으로 이용하는 사람들이 증가하고 있으며, 이러한 이용객의 증가에 따라 사고 발생의 개연성도 함께 증가하고 있는 상황이다. 우리나라에서는 선박을 이용한 레저활동의 경우에는 안정장비의 착용을 의무화하고 있지만, 연안 해역에서의 해양활동에 대하여는 안전장비 착용 의무화가 시행되지 않고 있다. 따라서, 본 연구에서는 연안 이용객에 의한 사고통계 데이터 분석을 바탕으로 연안 이용객의 안전장비 착용의 필요성에 대하여 고찰하였다. 또한, 분석된 내용을 바탕으로 안정장비 착용 의무화 방안에 대하여 제안하였다.

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The Commercialization & Optimization of its Production Process in Warp-Knitted Fabric containing Silver Nano-Particles through Textile Stream Project (섬유스트림사업을 통한 은나노입자함유 경편파일편성물의 생산공정 확립 및 상품화 전개에 관한 연구)

  • Shin, Yu-Shik;Son, Eun-Jong;Jung, Gi-Hoon;Jung, Hae-Rim;Hwang, Young-Gu;Jeong, Sung-Hoon
    • Proceedings of the Korean Society of Dyers and Finishers Conference
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    • 2011.03a
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    • pp.86-86
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    • 2011
  • 나노소재기술은 기존 소재로는 얻을 수 없는 새로운 기능 및 특성을 나타낼 수 있어 산업전반에 적용할 수 있는 최첨단집적기술이다. 그러나 나노입자를 섬유에 첨가하여 기능성 섬유를 생산하는 경우 응집이 발생하는 등의 다양한 문제점이 발생하는데 이를 극복하기 위해서는 사이즈 분포를 제어하는 기술, 표면처리를 통해 분산성을 향상시키는 기술, 나노입자와 섬유와의 상용성을 개선하는 기술 등이 해결되어야 한다. 본 연구에서는 고기능성 및 고부가가치 경편파일 니트 원단을 개발하기 위해 은(Silver) 나노입자가 균일하게 분산된 M/B(Master Batch)를 제조하였으며, 이를 PET와의 용융 혼합 방사함으로써 0.5denier(75D/144F)급 원사에 99.9%의 영구적인 항균/소취 기능을 부여하였다. 또한 개발된 극세사를 이용하여 다양한 경편파일 원단을 설계하고, 기모, 염색 및 날염 등의 공정을 거쳐 나노기술융합형 화학섬유소재를 이용한 기능성 침장 제품을 개발하였다.

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A Study on Uncertainty in the Probable Precipitation According to Precipitation Recording Methods (강수량 기록방식에 따른 확률강수량 산정의 불확실성 고찰)

  • Heeseong Park;Hyoung Seop Kim
    • Proceedings of the Korea Water Resources Association Conference
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    • 2023.05a
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    • pp.259-259
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    • 2023
  • 강수량자료는 기초 수문자료의 하나로서 자료 수집시 기록방식에 따라 자료의 정확도가 달라질 수 있다. 주로 많이 사용되는 기록방식은 정시 기록방식이지만 실제 강수계에서는 강수이벤트의 기록이 먼저 이루어진다. 정시 기록 방식은 관측을 하기로 정해 놓은 시각(정시)에 강수계에 집계된 강수량을 읽어 그대로 기록하는 방식이고, 강수이벤트의 기록은 최저관측해상도에 도달하는 강수가 발생한 시각을 기록하는 방식이다. 동일한 강수가 발생하더라도 기록 방식에 따라 이후에 분석에서 다른 결과를 보여줄 수 있다. 특히 확률강수량 산정에 불확실성을 키우는 방향으로 영향을 줄 수 있다. 이에 본 연구에서는 이러한 기록방식에 따른 불확실성을 분석하기 위해 강우모의 발생기법을 이용하여 대규모의 강우를 모의하고 이를 앞서의 두 가지 기록방식으로 기록한 후 기록된 자료를 이용해 확률강수량을 산정하고 기록으로 변환하지 않은 자료를 직접 이용하여 확률강수량을 산정하는 방법으로 각 방법의 불확실성을 비교해 보았다. 또한 측정의 최소단위를 변화시켜 기록한 다음 다시 분석하여 측정의 최소단위가 기록방식에 따라 어떻게 불확실성에 영향을 주는지 알아보았다. 이러한 결과가 향후 강수량의 기록 관리방법의 개선에 반영된다면 좀 더 정확한 수문 분석에 도움이 될 것이다.

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Region and Movement Based Adaptive Location Management for Wire/Wireless Convergent Networks based-on Cognitive Networking (인지 네트워킹기반 유무선 융합망에서의 영역과 이동 임계치를 기반으로 한 적응형 이동성 관리)

  • Kwon, Eun-Mi;Kim, Jeong-Ho
    • Journal of the Institute of Electronics Engineers of Korea TC
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    • v.49 no.6
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    • pp.77-82
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    • 2012
  • In this paper, the new location management scheme based on region and movement threshold has been proposed in order to minimize the required cost to handle the resource location management signaling traffics under the wire/wireless convergent networks when the users are moving around the cold and hot regions. In this scheme, the sequential paging is supposed to be performed according to the movement threshold which can be changed in accordance with the number of movements that each mobile user had made while it is moving around the resource regions. With the proposed scheme, the cost of managing the location management traffics and efficient spectrum assignment overhead can be minimized by placing signaling traffics for location managements and also allocating radio spectrum considering individual movement behaviors.

A Study on the Reinforcement Effects of Fully-Grouted Rock Bolts (전면접착형 록볼트의 보강효과에 관한 연구)

  • 정해성;문현구
    • Tunnel and Underground Space
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    • v.9 no.3
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    • pp.194-203
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    • 1999
  • The axial stress in rock bolt, the shear stress at the bolt-grout interface and the neutral point are analyzed to understand the mechanical behavior of rook bolt. To analyze the support effects of rock bolt in various geological conditions, numerical analyses are performed with regard to bolt spacing and bolt length in several geological conditions and tunnel sizes. Through the numerical analyses, the distributions of maximum tensile stress and shear stress are determined. And the excavation width of underground opening affects the position of the neutral point. In the circular opening supported by pattern bolting, the increase of confining pressure, the reduction of plastic zone, and that of ground displacement are determined by using the radial stress increase ratio, the plastic zone reduction ratio and the displacement reduction ratio respectively. The results of this study can be applied to a practical tunnel design through understanding of the trends of these support effects.

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A Fast ICI Suppression Algorithm with Adaptive Channel Estimation for the LTE-Advanced Uplink System (LTE-Advanced 상향 링크 시스템을 위한 적응적 채널 추정을 통한 고속 ICI 제거 방법 연구)

  • Jeong, Hae-Seong;Ryu, Heung-Gyoon
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.22 no.1
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    • pp.30-37
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    • 2011
  • In this paper, we propose a fast ICI suppression algorithm with adaptive channel estimation for the LTE-Advanced uplink system. In order to effectively remove phase noise and carrier frequency offset at time varying channel, we use the comb type pilot. The purpose is to improve performance by reducing computational complexity than conventional PNFS(Phase Noise & Frequency offset Suppression) algorithm. We reduce computational complexity by decreasing overlapping computation or unnecessary computation at conventional PNFS algorithm. Also, we propose an effective channel estimation method. We estimate and compensate multipath channel through the proposed adaptive channel estimation method. The BER performance of the proposed method is better about 0.5 dB than the conventional method at the Vehicular A channel.

Dynamic Analysis of Prestressed Liquid Storage Tanks Considering Fluid Effect (유체의 영향을 고려한 프리스트레스트 액체저장 탱크의 동적해석)

  • 황철성;백인열
    • Journal of the Earthquake Engineering Society of Korea
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    • v.3 no.4
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    • pp.71-82
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    • 1999
  • An axisymmetric shell element which includes the effects of the meridional and circumferential cable prestresses is developed. The fluid-structure interaction is expressed as added mass effect which is in proportion to the acceleration of the structure in interface surface. The added mass is obtained by using finite element method under the assumption that the fluid is invicid, incompressible and irrotational. It is coded for personal computer by the maximum use of axisymmetic properties and the dynamic analysis are performed under seismic exitations. A ring element makes the characteristics of the axisymmetric shell to be fully utilized. The elgenvalue solutons under the initial prestresses and the internal fluid are well agreed with the exact solutions and references by using under 20 elements. The eigenvalues are decreased along the increasing the height of internal fluid and these effects are dominant under the lower wave numbers. The results of the seismic analysis show that the radial deflection under the meridional prestress is a little larger than that under the circumferential prestress.

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A Study on Design and Implementation of an Analog Addressable Detector and a Fire Alarm System (아날로그 주소형 감지기와 자동화재탐지 시스템의 설계 및 구현사례에 대한 고찰)

  • Kim, Chong-Tai;Hong, Se-Kwun;Yoo, Young-Shin;Jung, Hae-Sung
    • Fire Science and Engineering
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    • v.24 no.4
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    • pp.1-11
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    • 2010
  • This paper describes a design and implementation of an analog detector and a fire alarm system with recent technology on information and communication. A hierarchical architecture design from the detector to the main system enables to accommodate medium to large size buildings located nearby or far-away. And a software design from communication protocol to application program handles large amount of events efficiently to show information on a large LCD. A PC-based alarm system provides higher speed and larger capacity in a large LCD screen compared with foreign microprocessor-based small screen systems. Thus, very large buildings with several thousands of analog detectors can be easily covered in a single system. When an alarm occurs, a staff alarm scenario specially attempted only in the system is considered to play a major role to distinguish a real fire from unwanted alarms.