• Title/Summary/Keyword: 전해물

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Effect of Surface Pretreatment on Film Properties Deposited by Electro-/Electroless Deposition in Cu Interconnection (반도체 구리 배선공정에서 표면 전처리가 이후 구리 전해/무전해 전착 박막에 미치는 영향)

  • Lim, Taeho;Kim, Jae Jeong
    • Journal of the Korean Electrochemical Society
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    • v.20 no.1
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    • pp.1-6
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    • 2017
  • This study investigated the effect of surface pretreatment, which removes native Cu oxides on Cu seed layer, on subsequent Cu electro-/electroless deposition in Cu interconnection. The native Cu oxides were removed by using citric acid-based solution frequently used in Cu chemical mechanical polishing process and the selective Cu oxide removal was successfully achieved by controlling the solution composition. The characterization of electro-/electrolessly deposited Cu films after the oxide removal was then performed in terms of film resistivity, surface roughness, etc. It was observed that the lowest film resistivity and surface roughness were obtained from the substrate whose native Cu oxides were selectively removed.

다상 금속재료의 EBSD 분석

  • Gang, Ju-Hui;Kim, Su-Hyeon;Park, Chan-Hui
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2012.05a
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    • pp.106.1-106.1
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    • 2012
  • EBSD(Electron BackScattered Diffraction)분석은 주사전자현미경에서 관찰되는 비교적 넓은 영역의 결정 방위를 측정하여 집합조직을 해석하는 동시에 결정 방위의 변화를 기준으로 결정립계를 구분 지어 미세조직의 정량 분석도 가능하기 때문에 많은 연구자들이 사용하고 있다. 그러나 EBSD의 Kikuchi 패턴은 시편 표면으로부터 30~50nm 깊이 범위의 표면층으로부터 방출되기 때문에 EBSD 분석 결과는 시편의 표면 처리 상태에 크게 영향을 받아 적절한 시편준비법이 요구된다. 시편 준비 과정 중에 생기는 변형층, 산화층이나 오염층이 10nm 이내로 제어되지 못하면 명확한 패턴을 얻지 못하여 분석이 어려운 경우가 많으므로, 시료의 절단과 연마 과정 중에 변형층을 되도록 적게 만들고 표면의 산화나 오염을 최대한 방지해야 한다. 또한 EBSD 분석 특성상 시편을 70도로 기울이기 때문에 시편의 요철이 심하면 볼록한 영역에 의해 오목한 영역의 패턴이 가려져 결정방위 정보를 얻기 힘들다. 이런 이유로 시편을 최대한 평평하게 하고 요철이 생기지 않게 시편 준비를 하는 것이 관건이다. 금속재료의 EBSD 시편준비법으로는 일반적으로 기계적 연마법과 전해연마법이 주로 쓰인다. 경한 석출물이나 개재물이 연한 기지에 분산되어 있는 시편이나 이종 소재 접합재의 경우는 전해연마법을 사용하면 특정 상(혹은 합금)이 먼저 연마되어 큰 단차가 생기거나 석출물에 의해 요철이 심해져서 정량적인 EBSD 분석이 어렵게 된다. 이 연구에서는 시편 준비가 어렵다고 알려진 다상 금속재료에서의 EBSD 분석 사례를 소개한다. Ti-6Al-4Fe-0.25Si 시효처리합금, 알루미늄 기지 복합재료, 마찰교반용접한 알루미늄-타이타늄합금의 EBSD 시편준비법과 그 분석 결과를 고찰한다.

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Effects of Surfactants on the Growth of Anodic Nanoporous Niobium Oxide (양극산화를 통한 다공성 니오븀 산화물 성장의 계면활성제 영향)

  • Yoo, Jeong-Eun;Choi, Jin-Sub
    • Journal of the Korean Electrochemical Society
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    • v.13 no.3
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    • pp.163-168
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    • 2010
  • Effects of Cetyl Trimethyl Ammonium Bromide (CTAB), which is a kind of cationic surfactants, and Sodium Dodecyl Sulfate (SDS), which is a kind of anionic surfactants on the anodic formation of nanoporous niobium oxide were compared. The addition of SDS could protect the surface from dissolution for long time, leading to the formation of niobium oxide with a double thickness (~400 nm) compared to that prepared without surfactant, whereas dissolution seriously occurred in the solution containing CTAB. The different behaviors were attributed to the interaction between the surfactants with positive (or negative) charge and positively charged niobium oxide.

Recovery of Tin from Tin Oxide Resulted from Glass Manufacturing Process by Pyrometallurgy (유리생산공정 폐주석산화물에서 건식제련에 의한 주석회수기술)

  • Lee, Sang-Ro;Kim, Sang-Yeol;Lee, Man-Seung;Park, Man-Bok
    • Resources Recycling
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    • v.24 no.2
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    • pp.23-28
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    • 2015
  • Most of the domestic need for tin rely on imports. In this work, a pyrometallurgical process was investigated to recover pure tin from the tin oxides in tin bath which results from the production of flat glass and LCD panel. From the results on the effect of reaction temperature, the highest recovery percentage of tin was obtained at $1350^{\circ}C$. The recovery percentage of tin was improved to 88% by employing the first and second smelting step. Electrorefining of the crude tin thus obtained led to pure tin with purity higher than 99.9%.

Electrochemical Decontamination of Metallic Wastes Contaminated with Uranium Compounds (우라늄화합물로 오염된 금속폐기물의 전해제염)

  • 양영미;최왕규;오원진;유승곤
    • Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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    • v.1 no.1
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    • pp.11-23
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    • 2003
  • A study on the electrolytic dissolution of SUS-304 and Inconel-600 specimen was carried out in neutral salt electrolyte to evaluate the applicability of electrochemical decontamination process for recycle or self disposal with authorization of large amount of metallic wastes contaminated with uranium compounds generated by dismantling a retired uranium conversion plant in Korea. Although the best electrolytic dissolution performance for the specimens was observed in a Na2s04 electrolyte, a NaNO$_3$ neutral salt electrolyte, in which about 30% for SUS-304 and the same for Inconel-600 in the weight loss was shown in comparison with that in a Na$_2$SO$_4$ solution, was selected as an electrolyte for the electrochemical decontamination of metallic wastes with the consideration on the surface of system components contacted with nitric acid and the compatibility with lagoon wastes generated during the facility operation. The effects of current density, electrolytic dissolution time, and concentration of NaNO$_3$ on the electrolytic dissolution of the specimens were investigated. On the basis of the results obtained through the basic inactive experiments, electrochemical decontamination tests using the specimens contaminated with uranium compounds such as UO$_2$, AUC (ammonium uranyl carbonate) and ADU (ammonium diuranate) taken from an uranium conversion facility were performed in 1M NaNO$_3$ solution with the current density or In mA/$\textrm{cm}^2$. it was verified that the electrochemical decontamination of the metallic wastes contaminated uranium compounds was quite successful in a NaNO$_3$ neutral salt electrolyte by reducing $\alpha$ and $\beta$ radioactivities below the level of self disposal within 10 minutes regardless of the type of contaminants and the degree of contamination.

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Ion Conductivity of Membrane in Proton Exchange Membrane Fuel Cell (고분자전해질 연료전지에서 고분자 막의 이온 전도도)

  • Hwang, Byungchan;Chung, Hoi-Bum;Lee, Moo-Seok;Lee, Dong-Hoon;Park, Kwonpil
    • Korean Chemical Engineering Research
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    • v.54 no.5
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    • pp.593-597
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    • 2016
  • The effects of relative humidity, current density and temperature on the ionic conductivity were studied in PEMFC (Proton Exchange Membrane Fuel Cell). Water contents and water flux in the electrolyte membrane largely affected ion conductivity. The water flux was modelled and simulated by only electro-osmotic drag and back-diffusion of water. Ion conductivities were measured at membrane state out of cell and measured at MEA (Membrane and Electrode Assembly) state in condition of operation. The water contents in membrane increase as relative humidity increased in PEMFC, as a results of which ion conductivity increased. Current enhanced electro-osmotic drag and back diffusion and then water contents linearly increased. Enhancement of current density results in ion conductivity. Ion conductivity of about 40% increased as the temperature increased from $50^{\circ}C$ to $80^{\circ}C$.

Investigation on the Technology Trend in Electrolyzed Sterilizing Water by the Patent Analysis (특허분석을 통한 전해살균수의 기술 동향 연구)

  • Kang, Kyung-Seok;Kim, Tae-il;Lee, Ho-il;Han, Hye-jung;Park, Soo-gil;Kim, Han-ju;Han, Sam-Duck;Park, Kunyik;Rhee, Young-Woo
    • Applied Chemistry for Engineering
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    • v.21 no.2
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    • pp.188-194
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    • 2010
  • The electrolyzed sterilizing water is useful functional aqueous solution, which is produced by electrolyzing aqueous solution. Electrolytic supplement such as salt or hydrochloric acid is added into tap water. Electrolyzed sterilizing water is classified as three types; strongly acidic electrolyzed water, weakly acidic electrolyzed water, and sodium hypochlorite water. In this study, preparation principles, advantages, and disadvantages of electrolyzed sterilizing water were analyzed. The technology trend in electrolyzed sterilizing water was analyzed based on patent application year, countries, main applicants, and each technologies.

Electrical Properties of YSZ Electrolyte Film Prepared by Electron Beam PVD (EB-PVD법에 의해 제조된 YSZ 전해질의 전기적 특성)

  • Shin, Tae-Ho;Yu, Ji-Haeng;Lee, Shiwoo;Han, In-Sub;Woo, Sang-Kuk;Hyun, Sang-Hoon
    • Journal of the Korean Ceramic Society
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    • v.42 no.2 s.273
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    • pp.117-122
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    • 2005
  • Electron Beam Physical Vapor Deposition (EB-PVD) is a typical technology for thermal barrier coating with Yttria Stabilized Zirconia (YSZ) on aero gas turbine engine. In this study EB-PVD method was used to fabricate dense YSZ film on NiO-YSZ as a electrolyte of Solid Oxide Fuel Cell (SOFC). Dense YSZ films of -10 $\mu$m thickness showed nano surface structure depending on deposition temperature. Electrical conductivities of YSZ film and electric power density of the single cell were evaluated after screen- printing $LaSrCoO_3$ as a cathode.

Loss of Li2O Caused by ZrO2 During the Electrochemical Reduction of ZrO2 in Li2O-LiCl Molten Salt (Li2O-LiCl 용융염을 이용한 ZrO2의 전기화학적 환원과정에서 발생하는 Li2O의 손실)

  • Park, Wooshin;Hur, Jin-Mok;Choi, Eun-Young;Kim, Jong-Kook
    • Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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    • v.10 no.4
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    • pp.229-236
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    • 2012
  • A molten salt technology using $Li_2O$-LiCl has been extensively investigated to recover uranium metal from spent fuels in the field of nuclear energy. In the reduction process, it is an important point to maintain the concentration of $Li_2O$. $ZrO_2$ is inevitably contained in the spent fuels because Zr is one of the main components of fuel rod hulls. Therefore, the fate of $ZrO_2$ in $Li_2O$-LiCl molten salt has been investigated. It was found that $Li_2ZrO_3$ and $Li_4ZrO_4$ were formed chemically and electrochemically and they were not reduced to Zr. The recycling of $Li_2O$ is the key mechanism ruling the total reaction in the electrolytic reduction process. However, $ZrO_2$ will have a role as a $Li_2O$ sink.

Optimum Process Condition of Noodles with Sea Tangle Single Cell Detritus (SCD) (다시마 Single Cell Detritus(SCD)를 첨가한 국수의 최적화 가공조건)

  • Bang, Sang-Jin;Shin, Il-Shik;Kim, Sang-Moo
    • Korean Journal of Food Science and Technology
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    • v.38 no.1
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    • pp.68-74
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    • 2006
  • To utilize sea tangle single cell detritus (SCD) as food additive, SCD noodle was developed using mixture model. Flour improved, whereas water decreased texture of SCD noodles. Texture of SCD noodle decreased initially and then increased as SCD content increased. Flour and SCD increased, whereas water decreased $L^*$ and $b^*$ values of dried and cooked noodles. Flour decreased $a^*$ values of dried and cooked noodles, while SCD increased $a^*$ value of cooked noodle. Response constraint coefficient showed SCD influence on texture, and $L^*$ and $b^*$ values of dried and cooked noodles was higher than those of flour and water, whereas water influence on $a^*$ value was higher than those of flour and SCD. Texture and color values fitted nonlinear model with interaction terms for flour-water, flour-SCD, and water-SCD. Optimum mixing ratio value of flour : water : SCD was 63.3 : 31.0 : 3.7%. Sensory evaluation value of SCD noodles was lower than those of industrial and electrolyzed SCD noodles.