• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.148-148
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• 1999

다이아몬드에 버금가는 높은 경도뿐만 아니라 높은 화학적 안정성 및 열전도성 등 우수한 물리화학적 특성을 가진 입방정 질화붕소(cubic Boron Nitride)는 마찰.마모, 전자, 광학 등의 여러 분야에서의 산업적 응용이 크게 기대되는 자료이다. 특히 탄화물형성원소에 대해 안정하여 철계금속의 가공을 위한 공구재료로의 응용 또한 기대되는 재료이다. 특히 탄화물형성원소에 대해 안정하여 철계금속의 가공을 위한 공구재료로의 응용 또한 크게 기대된다. 이 때문에 각종의 PVD, CVD 공정을 이용하여 c-BN 박막의 합성에 대한 연구가 광범위하게 진행되어 많은 성공사례들이 보고되고 있다. 그러나 이러한 c-BN 박막의 유용성에도 불구하고 아직 실제적인 응용이 이루어지지 못한 것은 증착직후 급격한 박리현상을 보이는 c-BN 박막의 밀착력문제때문이다. 본 연구에서는 평행자기장을 부가한 ME-ARE(Magnetically Enhanced Activated Reactive Evaporation)법을 이용하여 c-BN 박막을 합성하고, 합성된 c-BN 박막의 밀착력에 미치는 공정인자의 영향을 규명하여, 급격한 박리현상을 보이는 c-BN 박막의 밀착력 향상을 위한 최적 공정을 도출하고자 하였다. BN 박막 합성은 전자총에 의해 증발된 보론과 (질소+아르곤) 플라즈마의 활성화반응증착(activated reactive evaporation)에 의해 이루어졌다. 기존의 ARE장치와 달리 열음극(hot cathode)과 양극(anode)사이에 평행자기장을 부여하여 플라즈마를 증대시켜 반응효율을 높혔다. 합성실험용 모재로는 p-type으로 도핑된 (100) Si웨이퍼를 30$\times$40 mm크기로 절단 후, 100%로 희석된 완충불산용액에 10분간 침적하여 표면의 산화층을 제거한후 사용하였다. c-BN 박막을 얻기 위한 주요공정변수는 기판바이어스 전압, discharge 전류, Ar/N가스유량비이었다. 증착공정 인자들을 변화시켜 다양한 조건에서 c-BN 박막의 합성하여 밀착력 변화를 조사하였다. 합성된 박막의 결정성 분석을 FTIR을 이용하였으며, Bn 박막의 상 및 미세구조관찰을 위해 투과전자현미경(TEM;Philips EM400T) 분석을 병행하였고, 박막의 기계적 물성 평가를 위해 미소경도를 측정하였다. 증착된 c-BN 박막은 3~10 GPa의 큰 잔류응력으로 인해 증착직후 급격한 박리현상을 보였다. 이의 개선을 위해 증착중 기판바이어스 제어 및 후열처리를 통해 밀착력을 수~수백배 향상시킬 수 있었다. c-BN 박막의 합성을 위해서는 증착중인 박막표면으로 큰 에너지를 갖는 이온의 충돌이 필요하기 때문에 기판 바이어스가 요구되는데, c-BN의 합성단계를 핵생성 단계와 성장 단계로 구분하여 인가한 기판바이어스를 달리하였다. 이 결과 그림 1에서 나타낸 것처럼 c-BN 박막의 핵생성에 필요한 기판바이어스의 50% 정도만을 인가하였을 때 잔류응력은 크게 경감되었으며, 밀착력이 크게 향상되었다.

• Journal of the Microelectronics and Packaging Society
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• v.18 no.1
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• pp.29-33
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• 2011

The current density in copper electroplating is directly related with the productivity and then to increase the productivity, the increase in current density is required. To obtain the high mass flow rate, rotating disk electrode(RDE) was employed. High rotational speed in RDE can increase the mass flow rate and then high speed electroplating was possible using RDE to control mass flow. Two types of cathode were used. One is RDE and another is rotating cylindrical electrode(RCE). A constant-current, constant-voltage and linear sweep voltammetry were applied to investigate current and voltage relationship. The maximum current density without evolution of hydrogen gas was increased with rotational speed. Over 400 rpm, maximum current density was higher than 1000 A/$m^2$. The diffusion coefficients of copper calculated from the slope of the plots are $5.5{\times}10^6\;cm^2\;s^{-1}$ at $25^{\circ}C$ and $10.5{\times}10^6\;cm^2\;s^{-1}$ at $62^{\circ}C$. The stable voltage without evolution of hydrogen gas was -0.05 V(vs Ag/AgCl). Additives were added to prevent dendritic growth on cathode deposits. The surface roughness was analyzed with UV-Vis Spectrophotometer. The reflectance of the copper surface over 600 nm was measured and was related with the surface roughness. As the surface roughness improved, the reflectance was also increased.

• Journal of the Institute of Electronics Engineers of Korea SC
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• v.44 no.1
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• pp.74-84
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• 2007

This paper presents a new dual-loop Delay Locked Loop(DLL) to expand the delay lock range of a conventional DLL. The proposed dual-loop DLL contains a Coarse_loop and a Fine_loop, and its operation utilizes one of the loops selected by comparing the initial time-difference among the reference clock and 2 internal clocks. The 2 internal clock signals are taken, respectively, at the midpoint and endpoint of a VCDL and thus are $180^{\circ}$ separated in phase. When the proposed DLL is out of the conventional lock range, the Coarse_loop is selected to push the DLL in the conventional lock range and then the Fine_loop is used to complete the locking process. Therefore, the proposed DLL is always stably locked in unless it is harmonically false-locked. Since the VCDL employed in the proposed DLL needs two control voltages to adjust the delay time, it uses TG-based inverters, instead of conventional, multi-stacked, current-starved inverters, to compose the delay line. The new VCDL provides a wider delay range than a conventional VCDL In overall, the proposed DLL demonstrates a more than 2 times wider lock range than a conventional DLL. The proposed DLL circuits have been designed, simulated and proved using 0.18um, 1.8V TSMC CMOS library and its operation frequency range is 100MHz${\sim}$1GHz. Finally, the maximum phase error of the DLL locked in at 1GHz is less than 11.2ps showing a high resolution and the simulated power consumption is 11.5mW.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.45 no.2
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• pp.21-27
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• 2008

This paper describes a CMOS 16:1 binary-tree multiplexer(MUX) using $0.18-{\mu}m$ technology. To provide immunity for wide frequency range and process-and-temperature variations, the MUX adopts several delay compensation techniques. Simulation results show that the proposed MUX maintains the setup margins and hold margins close to the optimal value, i.e., 0.5UI, in wide frequency-range and in wide process-and-temperature variations, with standard deviation of 0.05UI approximately. These results represent that these proposed delay compensations are effective and the reliability is much improved although CMOS logic circuits are sensitive to those variations. The MUX is fabricated using $0.18-{\mu}m$ CMOS process, and tested with a test board. At power supply voltage of 1.8-V, maximum data-rate and area of the MUX is 1.65-Gb/s and 0.858 $mm^2$, respectively. The MUX dissipates a power of 24.12 mW, and output eye opening is 272.53 mV, 266.55 ps at 1.65-Gb/s operation.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.45 no.5
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• pp.40-49
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• 2008

A Frequency synthesizer for mobile-DTV applications is implemented using $0.18{\mu}m$ CMOS process with 1.8V supply. PMOS transistors are chosen for VCO core to reduce phase noise. The measurement result of VCO frequency range is 800MHz-1.67GHz using switchable inductors, capacitors and varactors. We use varactor bias technique for the improvement of VCO gain linearity, and the number of varactor biasing are minimized as two. VCO gain deterioration is also improved by using the varactor switching technique. The VCO gain and interval of VCO gain are maintained as low and improved using the VCO frequency calibration block. The sigma-delta modulator for fractional divider is designed by the co-simualtion method for accuracy and efficiency improvement. The VCO, PFD, CP and LF are verified by Cadence Spectre, and the sigma-delta modulator is simulated using Matlab Simulink, ModelSim and HSPICE. The power consumption of the frequency synthesizer is 18mW, and the VCO has 52.1% tuning range according to the VCO maximum output frequency. The VCO phase noise is lower than -100dBc/Hz at 1MHz at 1MHz offset for 1GHz, 1.5GHz, and 2GHz output frequencies.

• Journal of the Institute of Electronics and Information Engineers
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• v.50 no.9
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• pp.68-73
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• 2013

In this paper, we proposed a readout circuit of pulse waveform and rate for a U-health system to monitor health condition. For long-time operation without replacing or charging a battery, either pulse waveform or pulse rate is selected as the output data of the proposed readout circuit according to health condition of a user. The proposed readout circuit consists of a simple digital logic discriminator and a dual-mode ADC which operates in the ADC mode or in the count mode. Firstly, the readout circuit counts pulse rate for 4 seconds in the count mode using the dual-mode ADC. Health condition is examined after the counted pulse rate is accumulated for 1 minute in the discriminator. If the pulse rate is out of the preset normal range, the dual-mode ADC operates in the ADC mode where pulse waveform is converted into 10-bit digital data with the sampling frequency of 1 kHz. These data are stored in a buffer and transmitted by 620 kbps to an external monitor through a RF transmitter. The data transmission period of the RF transmitter depends on the operation mode. It is generally 1 minute in the normal situation or 1 ms in the emergency situation. The proposed readout circuit was designed with $0.11{\mu}m$ process technology. The chip area is $460{\times}800{\mu}m^2$. According to measurement, the power consumption is $161.8{\mu}W$ in the count mode and $507.3{\mu}W$ in the ADC mode with the operating voltage of 1 V.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.19 no.12
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• pp.1375-1382
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• 2008

Frequency adjustable D-CRLH(dual-composite right/left handed) transmission lines, which solve the problem of design complexity and uncontrolled frequency of the existing structures, are proposed in this paper. The first design(type I), consisting of defected ground structure(DGS), island pattern in DGS, fixed stub and varactor diodes, controls $C_L$ in the parallel resonant circuit, while the second structure(type 2) composed of fixed DGS, shunt stub and diode adjusts $C_R$ in the series resonant circuit. The dual band frequency points which correspond to the meaningful electrical length of +/-90 degree in the RH/LH region are adjustable according to the bias voltage. The measurement shows that the LH frequency point which has -90 degree of electrical length are adjusted over $4.22{\sim}5.39\;GHz$ and $4.21{\sim}5.05\;GHz$ for type 1 and type 2, respectively, under $1{\sim}12\;V$ of bias voltage. In addition, the frequency Woo where RH turns over LH is controled over $3.26{\sim}4.22\;GHz$ for type 2 with the same bias condition.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.21 no.4
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• pp.443-451
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• 2010

This paper describes a fully integrated CMOS low-IF mobile-TV RF tuner for Band-III T-DMB/DAB applications. All functional blocks such as low noise amplifier, mixers, variable gain amplifiers, channel filter, phase locked loop, voltage controlled oscillator and PLL loop filter are integrated. The gain of LNA can be controlled from -10 dB to +15 dB with 4-step resolutions. This provides a high signal-to-noise ratio and high linearity performance at a certain power level of RF input because LNA has a small gain variance. For further improving the linearity and noise performance we have proposed the RF VGA exploiting Schmoock's technique and the mixer with current bleeding, which injects directly the charges to the transconductance stage. The chip is fabricated in a 0.18 um mixed signal CMOS process. The measured gain range of the receiver is -25~+88 dB, the overall noise figure(NF) is 4.02~5.13 dB over the whole T-DMB band of 174~240 MHz, and the measured IIP3 is +2.3 dBm at low gain mode. The tuner rejects the image signal over maximum 63.4 dB. The power consumption is 54 mW at 1.8 V supply voltage. The chip area is $3.0{\times}2.5mm^2$.

• Journal of the Korean Society of Safety
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• v.12 no.4
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• pp.214-219
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• 1997

The mechanical seals, which are installed in rotating machines like pump and compressor, are generally used as sealing devices in the many fields of industries. The failure of mechanical seals such as leakage, crack, breakage, fast and severe wear, excessive torque, and squeaking results in big problems. To identify abnormal phenomena on mechanical seals and to propose the proper monitoring parameter for the failure of mechanical seals, sliding wear experiments were conducted. Acoustic emission, torque, and temperature were measured during experiments. Optical microstructure was observed for the wear processing after every 10 minute sliding at rotation speed of 1750 rpm and scanning electron microscopy was also observed. Except for the initial part of every experiment, the variation of acoustic emission was well coincided with torque variation during the experiments. This study concludes that acoustic emission and torque are proper monitoring parameters for the failure of mechanical seals. The intensity of acoustic emission signals is measured in root mean square voltage. Temperature of sealing face will be used as a parallel parameter for increasing the reliability of monitoring system.

• Journal of Navigation and Port Research
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• v.35 no.8
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• pp.631-636
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• 2011

Stable power supply to a light mounted on a navigational buoy is indispensable factor because unstable power can lead to fatal marine accident. Despite the difference lies between onshore and offshore environment, as well as the power output characteristics, the PV(Photovoltaic) power generation system is designed by the independent onshore power generation system standards. Furthermore, the capacity of PV power generation system does not take into account the structural characteristics of the buoy in the sea. Therefore, the faulty design makes battery over-discharge owing to lack of the power generation and the battery can not supply stable power to the light. This paper introduces a design method for a power system of the PV powered buoy. The data has been acquired for 3 months period, which includes PV-generated electricity, power consumption and battery voltage from experimental buoy. Further, a power management features of the buoy has been analyzed based on the acquired data. From the analysis of the acquired data, it was evident that PV power generation system produces different electric power output depend on its installed environment - land and sea. Based on the analytical result, a design criterion has been proposed for the power system in the navigational buoy.