• Proceedings of the Korea Society for Energy Engineering kosee Conference
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• 1999.05a
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• pp.213-218
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• 1999

용융탄산염 연료전지 (MCFC) 스택의 운전시에 가장 문제가 되는 사항들 중의 하나는 전지 반응에 의해 생성되는 많은 열량으로서, 이로 인해 내부 온도가 상승하고 심한 온도 분포가 존재하게 되며 이는 출력 전압 또는 전류의 불균일을 초래하는 동시에 전지 성능 열화(degradation)를 가속시켜 장기 운전에 큰 장애 요인이 된다. 현재 국내에서 개발중인 100kW급 MCFC 발전 시스템의 스택은 전극 면적이 6,000 $ extrm{cm}^2$ 혹은 그 이상에 이르며 25 kW 모듈당 적층되는 전지는 40장으로서 운전시의 발열량 조절이 매우 큰 문제로 등장한다.(중략)

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2007.04a
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• pp.9-10
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• 2007

본 논문에서는 비접촉식 이온에너지 해석 방법(Noninvasive Ion Energy Analysis, NIEA)을 이용하여 이온에너지 분포함수를 계산하고, 이 분포의 정보를 몇 가지 양으로써 특성지을 수 있는 모니터링 인자를 제안 하였다. 이온 에너지 분포에 영향을 미치는 외부 조건들인 rf 전력, 압력, 전극 간격을 변화시키며 해당 에너지 분포함수의 형태 변화 및 모니터링 인자들의 변화 양상을 관찰 하였다. NIEA 방법으로 측정한 이온 에너지와 공정과의 연관성을 알아보기 위해 poly silicon etching을 수행하며 이온 에너지 분포를 측정하였으며, 이온 에너지와 etch rate이 같은 경향을 나타내는 것을 확인 하였다.

• The Korean Journal of Rheology
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• v.11 no.1
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• pp.1-8
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• 1999

This paper experimentally investigates the steady shear behaviors of electro-rheological(ER) fluids under flow mode at high pressure level. As for the ER fluid to be tested, two types of ER fluids are employed; water-based ER fluids (ERF 1, ERF 2) and water-free ER fluid(ERF 3). The water-based ER fluids are composed inhousingly, and the concentrations of dispersed particles are 20 wt% and 30 wt% for ERF 1 and ERF 2, respectively. To generate the flow mode at high pressure, an experimental apparatus operated by two-way hydraulic cylinder is constructed and utilized. The pressure difference is measured by the pressure sensor, while the flow rate is calculated using the measured data of the displacement sensor(LVDT). Consequently, the shear stress and shear rate are distilled by incorporating the measured data; the pressure difference and the flow rate.

• The Journal of Korea Institute of Information, Electronics, and Communication Technology
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• v.9 no.2
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• pp.155-161
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• 2016

This paper proposes a novel fabrication method for a capacitive type micro-accelerometer with uniform nano-gap using photo-assisted electro-chemical etching. The sensitivity of the accelerometer should be improved while the electrodes between the inertial mass and the sensing comb should be narrowed. In this paper the nano-gap trench structure is fabricated using the photo-assisted electrochemical etching method. The sensor was designed and analysed using ANSYS simulator. The characteristics of the etching were observed according to the dc bias, the light intensity, the composition of the solution, the temperature of the solution, and the pattern pitch variation. The optimum etching conditions were dc bias of 2V, Blue LED of 20mA, 49wt% HF:DMF:D.I.Water=1:20:10, the pattern pitch of $20{\mu}m$. Uniform trench structure with width of 344nm and depth of $11.627{\mu}m$ are formed using the optimum condition.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.267-267
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• 2012

최근 국내 반도체 장비 업체들에 의해서 차세대 반도체용 450 mm 웨이퍼 공정용 장비 개발이 진행 중에 있다. 반도체 산업은 계속해서 반도체 칩의 크기를 작게 하고, 웨이퍼 크기를 늘리면서 웨이퍼 당 칩수를 증가시켜 생산성을 향상해오고 있다. 현재 300 mm 웨이퍼에서 450 mm 웨이퍼를 도입하게 되면, 생산성 뿐만 아니라 30%의 비용절감과 50%의 cycle-time 단축이 기대되고 있다. 장비에 대한 이해와 공정에 대한 해석 능력을 위해 비용과 시간이 많이 들기 때문에 최근 컴퓨터를 활용한 수치 모델링이 진행되고 있다. 또한, 수치 모델링은 실험 결과와의 비교가 필수적이다. 본 연구에서는 450 mm 웨이퍼 공정용 장비의 전자밀도를 cut off probe를 통해 100 mTorr에 서 Ar 플라즈마를 파워에 따라 측정했다. 13.56 MHz 200 W, 500 W, 1,000 W로 입력 파워가 증가하면서 웨이퍼 중심에서 $6.0{\times}10^9#/cm^3$, $1.35{\times}10^{10}#/cm^3$, $2.4{\times}10^{10}#/cm^3$로 증가했다. 450 mm 웨이퍼 영역에서 전자 밀도의 불균일도는 각각 10.31%, 3.24%, 4.81% 였다. 또한, 이 450 mm 웨이퍼용 CCP 장비를 축대칭 2차원으로 형상화하고, 전극에 13.56 MHz를 직렬로 연결된 blocking capacitor ($1{\times}10^{-6}$ F/$m^2$)를 통해 인가할 수 있도록 상용 유체 모델 소프트웨어(CFD-ACE+, EXI corp)를 이용하여 계산하였다. 주요 전자-중성 충돌 반응으로 momentum transfer, ionization, excitation, two-step ionization을 고려했고, $Ar^+$와 $Ar^*$의 표면 재결합 반응은 sticking coefficient를 1로 가정했다. CFD-ACE+의 CCP 모델을 통해 Poisson 방정식을 풀어서 sheath와 wave effect를 고려하였다. Stochastic heating을 고려하지 않았을 때, 플라즈마 흡수 파워가 80 W, 160 W, 240 W에서 실험 투입 전력 200 W, 500 W, 1,000 W일 때와 유사한 반경 방향의 플라즈마 밀도 분포를 보였다. 200 W, 500 W, 1,000 W일 때의 전자밀도 분포는 수치 모델링과 전 범위에서 각각 10%, 3%, 2%의 오차를 보였다. 450 mm의 전극에 13.56 MHz의 전력을 인가할 때, 파워가 증가할수록 전자밀도의 최대값의 위치가 웨이퍼 edge에서 중심으로 이동하고 있음을 실험과 모델링을 통해 확인할 수 있었다.

• Therapeutic Science for Rehabilitation
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• v.7 no.2
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• pp.9-16
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• 2018

Objective : The aim of this research was to provide EEG (electroencephalogram) basic data in clinical areas through identifying measurement tools, measurement methods, and evaluation and analysis method of the EEG which is a neurological change measurement of patients with brain injury. Methods : Previous studies were found in an electronic database (e.g., PubMed, Science Direct). The keyword search terms were 'Electroencephalography', 'stroke', 'intervention OR training'. Results : Utilitizing brain-computer interface, the EEG, which is a tool for measuring the effects of rehabilitation through changes of brain activation state. Also, it could identify functional brain reorganization mechanism. Whenever a research utilized the EEG, which is composed of various channels, different types of electrode, and varied electrode locations. Conclusions : Through this review, we found that Electroencephalography is possible to neurologically verify the effectiveness of intervention and formulate an intervention strategy for efficient occupational therapy.

• Journal of the Korean Vacuum Society
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• v.21 no.5
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• pp.249-257
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• 2012

Nonlinear dynamical behaviors of plasma in the Pierce diode are investigated by a numerical code developed using a one dimensional fluid model. The plasma in Pierce diode is alternately stable and unstable as Pierce parameter is changed. The dynamical characteristics of neutral and non-neutral Pierce system is examined analytically and numerically. It alternately has growing and oscillatory mode as Pierce parameter varies. As Pierce parameter is decreased, each oscillatory mode undergoes a sequence of subharmonic period-doubling bifurcation and then culminate in a chaotic strange attractor. The analysis for this nonlinear behavior can be used as a model for understanding of beam-plasma interaction in more complex geometries and a data for chaos control.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.37 no.2
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• pp.139-148
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• 2013

In this study, an ejector was designed to recirculate the anodic off-gas of SOFC, and a parametric study of the system performance was conducted at various ejector entrainment ratios. Aspen Plus, a chemical engineering program, was used to calculate the operational conditions of the ejector. To minimize the calculation load of the CFD and to ensure the global optimum, a genetic algorithm and Kriging model were used for the optimization. The optimization results showed that the dominant design variables of the sonic ejector are the throat diameter and the first flow nozzle position. The designed ejector has enough flexibility for different operating conditions of a 1-kW SOFC system. When the ejector was applied to the SOFC, it reduced 56% of the steam and 8.4% of the fuel compared to the reference case.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.13 no.6
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• pp.1157-1166
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• 2009

The effect of acupuncture that occurs at Meridians, can not be defined by western science. But we can find out the electrical effects when acupuncturing by measuring the charges meridians electric potential. So instead of using a needle to acupuncture, we used a electromagnet to give the same effect. We stimulated the meridians, with a electromagnet. Then we observed the pattern of the meridians potential, that occurred at ST-39 and ST-37. After doing clinical experiments with the acupuncture stimulation and the electromagnet stimulation. We found out the acupuncture stimulation and the electromagnet stimulations electric waves were similar. From this result, we knew it was possible to give similar effects to acupuncture stimulation by using electromagnets.

• Korean Journal of Cognitive Science
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• v.20 no.2
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• pp.155-181
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• 2009

Psychophysiologists are often interested in the EEG signals that accompany certain psychological events. When one is interested in a time series of event-related changes in EEG, one focuses on examining how the waveforms recorded at individual electrode sites vary over time across one or more experimental conditions. This is an analysis of event-related potentials (ERPs). In addition to such a classical EEG analysis in the time domain, the EEG measures can be investigated in the frequency domain. Moreover, it has been demonstrated that spectral analyses can often yield significant insight into the functional cognitive correlations of the signals. Therefore, this review paper tries to summarize essential concepts (e.g. phase-locking) and conventional methods (e.g. wavelet transformation) for understanding spectral analyses of brain oscillatory activity. Phase-coherence is also introduced in relation to functional connectivity of the brain.