• Journal of the Korean Vacuum Society
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• v.20 no.1
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• pp.22-29
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• 2011

An infrared thermographic imaging module of [$320{\times}256$] focal-plane array (FPA) based on [InAs/GaSb] strained-layer superlattice (SLS) was fabricated, and its images were demonstrated. The p-i-n device consisted of an active layer (i) of 300-period [13/7]-ML [InAs/GaSb]-SLS and a pair of p/n-electrodes of (60/115)-period [InAs:(Be/Si)/GaSb]-SLS. FTIR photoresponse spectra taken from a test device revealed that the peak wavelength (${\lambda}_p$) and the cutoff wavelength (${\lambda}_{co}$) were approximately $3.1/2.7{\mu}m$ and $3.8{\mu}m$, respectively, and it was confirmed that the device was operated up to a temperature of 180 K. The $30/24-{\mu}m$ design rule was applied to single pixel pitch/mesa, and a standard photolithography was introduced for [$320{\times}256$]-FPA fabrication. An FPA-ROIC thermographic module was accomplished by using a $18/10-{\mu}m$ In-bump/UBM process and a flip-chip bonding technique, and the thermographic image was demonstrated by utilizing a mid-infrared camera and an image processor.

• Journal of the Korean GEO-environmental Society
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• v.15 no.9
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• pp.37-45
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• 2014

An embedded length of monopile caused by a scouring should be evaluated to monitor the stability of offshore foundations, because offshore foundations are affected by horizontal load. The objective of this study is to evaluate the scouring around offshore foundation by using electrical resistivity and to estimate ground stiffness by using shear wave tomography. The electrical resistivity profiles and shear wave tomography were measured according to the scour depth of model ground prepared with sand and cement. Several electrodes and bender elements were used to measure the electrical resistivity and shear waves, respectively. The electrode sets are attached on the monopile surface and bender elements are arranged in $7{\times}7$ arrays by using nylone frames. The electrical resistivity profiles and shear wave tomography are acquired by laboratory experiment. Maximum scour depth was estimated by electrical resistivity profiles and the ground stiffness of model ground was estimated by shear wave tomography. This study suggests that the electrical resistivity profiles and shear wave tomography may be useful for monitoring the stability of the offshore foundations.

• Journal of the Korean earth science society
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• v.24 no.4
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• pp.361-368
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• 2003

We have investigated the electric resistivity structure of the fault zone located in the Hongseong area where a big earthquake with M 5.0 occurred in 1978. Usually, Electric and Electromagnetic methods are broadly operated in the field of engineering works since these methods are effective to understand the distribution of geological weak zones - fault or fracture zones. We have conducted the dipole-dipole array resistivity method and MT(magnetotelluric) method and interpreted the resistivity distribution of the fault zone with the aid of various inversion methods. An MT survey was performed at 18 points along a 2.9 km survey line perpendicular to the fault line and a magnetic dipole source was used to enhance the S/N ratio in the high frequency. A Electric dipole-dipole array resistivity survey with the dipole length of 50 meters was carried out perpendicular to the fault. In view of two survey results, the fault marks the boundary between two opposite resistivity structures, especially the low resistivity zone is exhibited deeply through the prospective fault line. The result that the low resistivity zone is located at the center of the fault zone corresponds with the fact that the fault zone of the Hongseong area is active. We expect these results to provide basic information about the physical properties of fault zones in Korea.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.195-195
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• 2000

TFT-LCD의 제조공정은 박막층의 식각 공정에 대해 기존의 습식 공정을 대치하는 건식식각이 선호되고 있다. 건식 식각 공정은 반도체 공저에 응용되면서 소자의 최소 선폰(CD)이 감소함에 따라 유도결합셩 프라즈마를 비롯한 고밀도 플라즈마 이용한 플라즈마 장비 사용이 증가하는 추세이다. 여기에 평판디스플레이의 공정을 위해서는 대면적과 사각형 기판에 대한 균일도를 보장할 수 있는 고밀도의 균일한 플라즈마 유지가 중요하다. 본 실험에서는 자장강화된 유도결합형 플라즈마의 플라즈마 밀도 및 균일도를 살펴보고 TFT-LCD에 gate 전극으로 사용되는 Al-Nd 박막의 식각을 통하여 식각균일도와 식각속도 및 식각 선택도 등의 건식 식각 특성을 보고자 한다. 영구자석 및 전자석의 설치는 사각형의 유도결합형 플라즈마는 소형 영구자석을 배열하여 부착하였으며, 외부에는 chamber와 같이 사각형태의 전자석을 500mm$\times$500mm의 크기를 갖는 z축 방향의 Helmholtz형으로 제작하였다. 더. 영구자석 배열에 대해서는 자석간의 거리와 세기 변화를 조합하여 magnetic cusping의 변화를 주었으며 전자석의 세기는 전류값을 기준으로 변화시켜 보았다. 실험을 통하여 플라즈마 균일도를 5% 이하로 개선하고 이러한 균일도를 유지하며 플라즈마 밀도를 높일 수 있는 조건을 찾을 수 있었다. 이러한 적합화된 조건에서 저장강화된 유도결합형 프라즈마를 Al-Nd 박막 식각에 응용한 결과, Al-Nd의 식각속도 및 식각 선택도는 유도결합형 프라즈마에 비해 크게 증가하였으며, 식각균일도가 개선되는 것을 관찰하였다. 또한 electrostatic probe(Hiden, Analytical)를 이용하여 Al-Nd 식각에 사용된 반응성 식각가스에 대한 저장강화된 유도결합형 플라즈마의 특성 분석을 수행하였다.c recoil detection, Rutherford backscattering spectroscopy, X-ray diffraction, secondary electron microscopy, atomic force microscoy, $\alpha$-step, Raman scattering spectroscopu, Fourier transform infrared spectroscopy 및 micro hardness tester를 이용하여 기판 bias 전압이 DLC 박막의 특성에 미치는 영향을 조사하였다. 분석결과 본 연구에서 제작된 DLC 박막은 탄소와 수소만으로 구성되어 있으며, 비정질 상태임을 알 수 있었다. 기판 bias 전압의 증가에 따라 박막의 두께가 감소됨을 알 수 있었고, -150V에서는 박막이 거의 만들어지지 않았으며, -200V에서는 기판 표면이 식각되었다. 이것은 기판 bias 전압과 ECR 플라즈마에 의한 이온충돌 효과 때문으로 판단되며, 150V 이하에서는 증착되는 양보다 re-sputtering 되는 양이 더 많을 것으로 생각된다. 기판 bias 전압을 증가시킬수록 플라즈마에 의한 이온충돌 현상이 두드러져 탄소와 결합하고 있던 수소원자들이 떨어져 나가는 탈수소화 (dehydrogenation) 현상을 확인할 수 있었으며, 이것은 C-H 결합에너지가 C-C 결합이나 C=C 결합보다 약하여 수소 원자가 비교적 해리가 잘되므로 이러한 현상이 일어난다고 판단된다. 결합이 끊어진 탄소 원자들은 다른 탄소원자들과 결합하여 3차원적 cross-link를 형성시켜 나가면서 내부 압축응력을 증가시키는 것으로 알려져 있으며, hardness 시험 결과로 이것을 확인할 수 있었다. 그리고 표면거칠기는 기판 bias 전압을 증가시킬수록 더 smooth 해짐을 확인하였다.인하였다.을 알 수 있

• Journal of Environmental Impact Assessment
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• v.29 no.3
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• pp.219-229
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• 2020

This study evaluated the applicability of the convergence technology by deriving the optimum conditions about operating factors of electrical resistance heating to enhance the soil flushing effect on soil contaminated with bunker C oil in the coastal landfill area. As a result of the batch scale experiment, the flushing efficiency of the VG-2020 was higherthan that of the Tween-80, and the flushing efficiency increased by about 1.4 times at 60℃ compared to room temperature. As a result of the electrical resistance heating box experiment, soil temperature rose to 100℃ in about 40~80 minutes in soil with water content of 20~40%, and it was found that the heat transfer efficiency is excellent when the pipe-shaped electrode rod with STS 316 material is located in a triangular arrangement in saturated soil. In addition, it was confirmed that the interval between the electrode rods to maintain the soil temperature above 60℃ under the optimum conditions was 1.5 m, and the soil flushing box experiment accompanying electrical resistance heating showed TPH reduction efficiency of about 55% at 5 Pore Volume, and satisfied the Korean standard for the conservation of soil (less than TPH 2,000 mg/kg) at 10 Pore Volume.

• 한국지구물리탐사학회:학술대회논문집
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• 1999.08a
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• pp.92-116
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• 1999

Tomographic approaches to image underground structure using electrical properties, can be divided into DC resistivity, electromagnetic, and radar tomography, based on the operating frequency. DC resistivity and radar tomography methods have been recently applied to site investigation for engineering purpose in Korea. This paper review these two tomography methods, through the case histories acquired in Korea. As another method of borehole radar survey, borehole radar reflection method is included, and its inherent problem and solution are discussed, how to find the azimuth angle of reflector using direction-finding-antenna. Since the velocity anisotropy of radar wave has been commonly encountered in field data, anisotropic radar tomography is discussed in this paper. In DC resistivity tomography, two subjects are focussed, electrode arrays, and borehole effect owing to the conductive fluid in borehole. Using the numerical modeling data, various kinds of electrode ways are compared, and borehole effect is illustrated. Most of the case histories presented in this paper are compared with known geology, core logging data, and/or Televiewer images.

• Journal of Sensor Science and Technology
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• v.6 no.1
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• pp.1-5
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• 1997

Highly sensitive pyroelectric IR sensors were fabricated with La-modified $PbTiO_{3}(PLT)$ thin plates compensating for piezoelectric effect. The device was fabricated in a dual form by placing two PLT cells, each of $1{\times}2\;mm^{2}$, side by side with appropriate electrode configuration. The dual element sensor had a signal to noise ratio of about 350 that was much larger than that of single element sensors. Further the dual element sensors exhibited excellent pyroelectric properties such as a large voltage responsivity of 2400 V/W, a pyro-coefficient of $4.6{\times}10^{-8}\;C/cm^{2}K$, a voltage figure of merit of $4.2{\times}10^{-11}\;Ccm/J$, and a small thermal time constant of 8.7 msec. It was confirmed through experiments that the dual element sensor was applicable to detect the two-dimensional moving direction of human beings.

• Journal of the Korea Concrete Institute
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• v.21 no.2
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• pp.153-158
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• 2009

Using non-invasive surface measurement method, the corrosion state of steel embedded inside concrete can be measured by placing four electrodes on the surface of concrete. Modeling of such measurements can provide valuable information as how interfacial impedance between corroded steel and surrounding concrete results in measured impedance on the concrete surface. In this paper, the modeling of surface measurement technique is used for the determination of the sensitivity of the measurements with respect to steel bar size embedded inside concrete and cover thickness. Modeling results indicated that steel bar sizes varied from D10 to D35 could be identified. Concrete cover thickness changes from 0.02 m to 0.1 m was also distinguished using the modeling scheme. The results confirm this modeling technique is capable of determining steel bar sizes and cover thickness, as well as simulating corrosion responses.

• Journal of the Mineralogical Society of Korea
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• v.16 no.1
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• pp.107-123
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• 2003

The objective of this study was to investigate mineral precipitates, which derived from the zero valent iron (ZVI) corrosion during TCE dechlorination and to find the controlling factors in mineral precipitates. A series of column experiemnts were conducted to evaluate the location of ZVI and the effects of electrode arrangements in electro-enhanced permeable reactive barrier (E2PRB) systems. Based on mineralogical study, ZVI samples near the influent port had more lepidocrocite, ferrihydrite or Fe (oxy)hydroxide, and (phospho)siderite while backward samples had more akaganeite, magnetite/maghemite, and intermediate green rust (GR) I and GR II. A suite of mineral distribution was preferabley related to the dissolved oxygen and the increased pH. Controlling factors of mineral precipitates in an E2PRB system were found to be (1) pH, (2) dissolved oxygen, (3) the types of Fe intermediates, and (4) anionic species to form complex strongly.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.18 no.1
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• pp.52-59
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• 2004

Recently, many researches for fine particles plasma have been focused on the fabrication of the new devices and materials in micro-electronic industry, although reduction or elimination of fine particles was interested in plasma processing until now on. In order to enhance their utilization, it is necessary to control and analyze fine particle behavior. Therefore, we developed simulation model of fine particles in RF Ar plasmas. This model consists of the calculation parts of plasma structure using a two-dimensional fluid model and of fine particle behavior. The motion of fine particles was derived from the charge amount on the fine particles and forces applied to them. In this paper, Ar plasma properties using two-dimensional fluid model without fine particles were calculated at power source voltage 15[V] and pressure 0.5[Torr]. Time-averaged spatial distributions of Ar plasma were shown. The process on the formation of Coulomb crystal of fine particles was investigated and it was explained by combination of ion drag and electrostatic forces. And also analysis on the forces of fine particles was presented.