• KIPS Transactions on Software and Data Engineering
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• v.12 no.3
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• pp.141-148
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• 2023

Accurate overlay metrology is essential to achieve high yields of semiconductor products. Overlay metrology performance is greatly affected by overlay target design and measurement method. Therefore, in order to improve the performance of the overlay target, measurement methods applicable to various targets are required. In this study, we propose a new algorithm that can measure image-based overlay. The proposed measurement algorithm can estimate the sub-pixel position by using a motion vector. The motion vector may estimate the position of the sub-pixel unit by applying a quadratic equation model through polynomial expansion using pixels in the selected region. The measurement method using the motion vector can calculate the stacking error in all directions at once, unlike the existing correlation coefficient-based measurement method that calculates the stacking error on the X-axis and the Y-axis, respectively. Therefore, more accurate overlay measurement is possible by reflecting the relationship between the X-axis and the Y-axis. However, since the amount of computation is increased compared to the existing correlation coefficient-based algorithm, more computation time may be required. The purpose of this study is not to present an algorithm improved over the existing method, but to suggest a direction for a new measurement method. Through the experimental results, it was confirmed that measurement results similar to those of the existing method could be obtained.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.47 no.8
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• pp.1-6
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• 2010

We report on the electrical properties of Ti/Al/Ni/Au (20 nm/ 150 nm/ 30 nm/ 100 nm) Ohmic contacts and the anisotropic conductivity of n-type ${\alpha}$-plane ([11-20]) GaN grown on $\gamma$-plane ([1-102]) sapphire substrates. The Ti/Al/Ni/Au Ohmic contacts and their sheet resistances are characterized by using the transfer length method (TLM) as a function of azimuthal angles. It is found that the specific contact resistance does not depend on the axis orientation and there are significant electrical anisotropy in ${\alpha}$-plane GaN films on $\gamma$-plane sapphire substrates, and the sheet resistance varies with azimuthal angles. The sheet resistance values in the direction parallel to m-axis [1-100] are 25% ~ 75% lower than those parallel to c-axis [0001] directions. Thus, Basal stacking faults (BSFs) are offered as a feasible source of the anisotropic mobility in defected m-axis direction because the band-edge discontinuities owing to the differential band gap structure.

• Restorative Dentistry and Endodontics
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• v.34 no.4
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• pp.350-355
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• 2009

Bond strength depends on characteristics of bonding surface and restorative technique. The majority of studies dealing with dentin bond strength were carried out on flat bonding surface, therefore, difference of bond strength between axial wall and pulpal wall is not clear yet. This study evaluated bonding difference between cavity walls in class I composite resin restoration with different filling techniques. Twenty extracted caries-free human third molars were used. Cavities were prepared in 6 ${\times}$4 ${\times}$3 mm box-type and divided into four groups according to filling technique and bonding surface: Group I; bulk filling - pulpal wall, Group II; bulk filling - axial wall, Group III; incremental filling - pulpal wall, Group IV; incremental filling - axial wall. Cavities were filled with Filtek $Z250^{(R)}$(3M/ESPE., USA) and Clearfill SE $bond^{(R)}$(Kuraray, Japan). After 24 hour-storage in $37^{\circ}C$water, the resin bonded teeth were sectioned bucco-lingualy at the center of cavity. Specimens were vertically sectioned into 1.0 ${\times}$1.0 mm thick serial sticks perpendicular to the bond surface using a low-speed diamond saw (Accutom 50, Struers, Copenhagen, Denmark) under water cooling. The trimmed specimens were then attached to the testing device and in turn, was placed in a universal testing machine (EZ test, Shimadzu Co., Kyoto, Japan) for micro-tensile testing at a cross-head speed of 1 mm/min. The results obtained were statistically analyzed using 2-way ANOVA and t-test at a significance level of 95%. The results were as follows: 1. There was no significant difference between bulk filling and incremental filling. 2. There was no significant difference between pulpal wall and axial wall, either. Within the limit of this study, it was concluded that microtensile bond strength was not affected by the filling technique and the site of cavity walls.

• Composites Research
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• v.33 no.5
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• pp.296-301
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• 2020

Laminated composite materials have excellent in-plane properties, but are vulnerable in thickness directions, making it easy to delamination when bending and torsion loads are applied. Thickness directional reinforcement methods of composite materials that delay delamination include Z-pinning, Stitching, Tufting, etc., and typically Z-pinning and Stitching method are commonly used. The Z-pinning is reinforcement method by inserting metal or carbon pin in the thickness direction of prepreg, and the conventional stitching process is a method of reinforcing the mechanical properties in the thickness direction by intersecting the upper and lower fibers on the preform. In this paper, I-fiber stitching method, which complement and improve weakness of Z-pinning and Stitching method, was proposed, and the static strength of composite single-lap joints using I-fiber stitching process were evaluated. The single-lap joints were fabricated by a co-curing method using an autoclave vacuum bag process. The thickness of the composite adherend was fixed, and 5 types of specimens were manufactured with varying the stitching pattern (5×5, 7×7) and angle (0°, 45°). From the test, the failure load of the specimen reinforced by the I-fiber stitching process was increased by up to 143% compared to that of specimen without reinforcement.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.39 no.6
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• pp.567-573
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• 2015

This paper aims to evaluate the variation in the mechanical properties of carbon/epoxy composites under in situ low- and high-temperature environments. In situ low- and high-temperature environments were simulated with temperature ranging from $-40^{\circ}C$ to $220^{\circ}C$ using an environmental chamber and furnace. The variation in the mechanical properties of the composites was measured for longitudinal and transverse tensile properties, in-plane shear properties and interlaminar shear strength. Under the low temperature of $-40^{\circ}C$, all mechanical properties increased moderately compared to the baseline properties measured at room temperature. The changes in the longitudinal tensile properties decreased moderately with increasing temperature. However, transverse tensile properties, in-plane shear properties and interlaminar shear strength each showed a significant drop due to the glass transition behavior of the matrix after $140^{\circ}C$. Notably, the tensile property value near $100^{\circ}C$ increased compared to baseline property value, which was an unusual occurrence. This behavior was a direct result of post-curing of the epoxy resin due to its exposure to high temperature.

• Composites Research
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• v.34 no.4
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• pp.233-240
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• 2021

VaRI(Vacuum assisted Resin Infusion) process, which is cost effective and suitable for manufacturing large-sized composites, is an OoA(Out-of Autoclave) process. For rapid resin infusion in the VaRI process, a DM(distribution media) is placed on top of the fabric. The resin is rapidly supplied in plane direction of the fiber along the DM, and then the supplied resin is impregnated in the out-of-plane direction of fiber. It is difficult to predict the flow of resin because the flow of in-plane direction and the out-of-plane direction occur together, and a 3D numerical analysis program is used to simulate the resin infusion process. However, in order to analyze in 3D, many elements are required in the out-of-plane direction of fabric. And the product size is larger, the longer the analysis time needs. Therefore, in this study, a method was suggested to reduce the time required for flow analysis by simplifying the 3D flow analysis to 2D flow analysis. The usefulness was verified by comparing the 3D flow analysis with the simplified 2D flow analysis at the same conditions. The filling time error was about 7% and the reduction of flow analysis time was about 95%. In addition, by utilizing the constant difference in the flow front between the top, middle, and bottom of the fabric of the 3D analysis, the flow front of the top, middle, and bottom of the fabric can be also predicted in the 2D flow analysis.

• Korean Journal of Materials Research
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• v.2 no.4
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• pp.298-305
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• 1992

The carbonization behaviors of CFRP fabricated with 2D-woven fabric and matrix phenolic resin have been studied. The changes in dimension were observed in the temperature range of 365-37$0^{\circ}C$ in the thickness direction, 118-12$0^{\circ}C$ in the normal direction each other by TMA analysis. Observation with the optical microscope shows that the formed cracks and pores during the fabrication of CFRP were propagated with the increase of pyrolysis temperaure. New cracks and pores were formed in the pyrolysis temperature range of 400-50$0^{\circ}C$ In line with the formation and propagation of cracks, porosity was increased and density was decreased rapidly in the pyrolysis temperature range of from 40$0^{\circ}C$ to 70$0^{\circ}C$. Therefore heating rate in the carbonization process need to be controlled carefully by intervals.

• Journal of the Korean Institute of Gas
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• v.15 no.6
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• pp.57-62
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• 2011

In this study, the optimized design for 130 liter storage fuel tank with 70MPa filling pressure has been investigated using a FEM technique and Taguchi design method. The strength safety of a composite fuel tank in which is fabricated by an aluminum liner of 6061-T6 material and carbon fiber wound composite layers of T800-24K has been analyzed based on the criterion of design safety of US DOT-CFFC and Korean Standard. The FEM computed results on the stress safety of 70MPa hydrogen gas tank were compared with a criterion of a stress ratio, 2.4 of US DOT-CFFC and Korean Standard, and indicated the safety. Thus, the optimized design elements based on the Taguchi's method were recommended as an aluminum liner thickness of 6.4mm, a carbon fiber laminate thickness in hoop direction of 31mm and a carbon fiber laminate thickness in helical direction of 10.2mm, which is represented by a design model of No. 5.

• Korean Journal of Crystallography
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• v.3 no.2
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• pp.98-110
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• 1992

B-SiC thin films were fabricated on Si(100) substrate under 1 atom by fVD. The effects of deposition conditions on the growth and the properties especially crystallinity and prefer ential alignment of these thin films were investigated. SiH4 and CH4 were used as source gases and H2 as Carrier gas. Th9 growth Of B-SiC thin films with changing parameters such as the growth temperature, the ratio of source gases (SiH4/CH4 ) and the total amount of source gases. The grown thin films were characterized by using SEM, a -step, XRD, Raman Spectro- scopy and TEM. Chemical conversion process improved the quality of thin films due to the formation of SiC buffer layer. The crystallinity of SiC thin films was improved when the growth temperature was higher than l150t and the amount of CH4 exceeded that of SiH4. The better crystallinity, the better alignment to the crystalline direction of substates. TEM analyses of the good quality thin films showed that the grain size was bigger at the surface than at the interface and the defect density is not depend on the ratio of the source gases.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.37 no.4
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• pp.415-421
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• 2013

This study describes the aerodynamic design procedure for the axial turbines of a small heavy-duty gas turbine engine being developed by Doosan Heavy Industries. The design procedure mainly consists of three parts: namely, flowpath design, airfoil design, and 3D performance calculation. To design the optimized flowpath, through-flow calculations as well as the loss estimation are widely used to evaluate the effect of geometric variables, for example, shape of meridional plane, mean radius, blades axial gap, and hade angle. During the airfoil design procedure, the optimum number of blades is calculated by empirical correlations based on the in/outlet flow angles, and then 2D airfoil planar sections are designed carefully, followed by 2D B2B NS calculations. The designed planar sections are stacked along the spanwise direction, leading to a 3D surfaced airfoil shape. To consider the 3D effect on turbine performance, 3D multistage Euler calculation, single row, and multistage NS calculations are performed.