Thermoelectric Properties and Crystallization of $(Bi1-xSbx)_2Te_3 $ Thin Films Prepared by Magenetron Sputtering Process
(마그네트론 스퍼터링법으로 제조한 $(Bi1-xSbx)_2Te_3 $ 박막의 결정성과 열전특성)
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- Proceedings of the Korean Vacuum Society Conference
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- 2000.02a
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- pp.62-62
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- 2000