• Proceedings of the Korean Magnestics Society Conference
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• 2002.12a
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• pp.58-59
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• 2002

고밀도 자기기록 매체의 재생 헤드로 응용되기 위해서는 높은 자기 저항비와 소자 제조 및 작동시 발생되어지는 열에 대해서 안정해야한다. 일반적으로 스핀밸브에서 나타나는 열화현상 중 가장 주된 원인은 반강자성체에 사용된 Mn이 고정층 및 비자성층으로의 확산으로 인해 반강자성체/강자성체 산이의 교환결합력의 감소와 스핀의존산란이 감소되어 자기적 특성이 열화 되는 것이다[1]. 이러한 상호확산은 거칠기, 결정성, 결정립 크기와 같은 미세구조에 크게 의존한다[2]. (중략)

• Journal of the Korean Magnetics Society
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• v.6 no.4
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• pp.242-250
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• 1996

The effects of annealing in magnetic field after deposition on electromagnetic properties of $Ni_{81}Fe_{19}$ thin($400\;{\AA}$) films prepared by RF-magnetron sputtering were investigated in terms of microstructure and surface morphology. The coercivity of the films was decreased below $300^{\circ}C$ due to stress relief and recrystallization, while increased at $400^{\circ}C$ due to grain growth and increasing the surface roughness. And then, $4{\pi}M_{s}$, was almost independent of annealing temperatures. Increasing the annealing temperature. the electrical resistivity of films was decreased from $37\;{\mu}{\Omega}cm$ to $24\;{\mu}{\Omega}cm$, the magnetoresistance was nearly a constant of about $0.6\;{\mu}{\Omega}cm$, and the MR ratio was increased from 1.5 % to 3.1 %. Therefore, It was shown that increasing the magnetoresistive ratio was mainly affected by decreasing the electrical resistivity. Considering the practical application of the films for magnetoresistive heads, optimal annealing conditions was obtained after one hour annealing at $300^{\circ}C$ in 400 Oe unidirectional magnetic field.

• Proceedings of the Korean Magnestics Society Conference
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• 2002.12a
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• pp.154-155
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• 2002

스핀밸브형 GMR(Giant magnetoresistance) 소자는 낮은 자장범위에서 큰 자기저항변화가 생기는 높은 민감도의 소자로서, 고밀도 자기기록매체의 재생헤드 및 MRAM(Magnetoresistance Random Access Memory) 등의 실제 응용에 있어 큰 자기저항비와 열적 안정성을 가지는 재료들을 필요로 한다. NiO, a-$Fe_2O_3$, NiO/a-$Fe_2O_3$ 등과 같은 산화물의 경우, 높은 Tn(Neel temperature)을 가지므로 이를 이용한 Bottom형 스핀밸브에 대한 연구가 활발히 진행되어 왔다. (중략)

• Journal of the Korean Magnetics Society
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• v.4 no.3
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• pp.239-243
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• 1994

$NiFe/TbCo/Si_3N_4$ thin films were fabricated, which can be employed as dualOongitudinal and transverse) biased magnetoresistive elements utilizing surface magnetic exchange at the interface of NiFe/TbCo films. When Tb area percent was 36 % and substrate bias was not applied, magnetic exchange fields of 100~180 Oe were obtained. The thicknesses of NiFe, TbCo and $Si_3N_4$(Protective layer) were $470\;{\AA},\;2400\;{\AA}\;and\;600\;{\AA}$, respectively. Magnetoresistance ratio of 1.45 % was obtained using NiFe films fabricated with 1000 W power and 2.5 mTorr of Ar pressure. The MR ratio of microstructured elements was reduced to 1.31 % and the MR response curves were shown not to saturate due to demagnetizing fields of the elements. When elements were fabricated with $36^{\circ}$ of misalignment with respect to the exchange field direction using films having 150 Oe exchange field, MR response curve was shifted by 85 Oe, and the operating point of the device shifted to the linear region of the response. Also, the Barkhausen noise was eiminated due to longitudinal bias field originating from the exchange field.

• Journal of the Korean Magnetics Society
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• v.3 no.4
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• pp.293-297
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• 1993

Exchange coupled $NiFe/TbCo/Sio_{2}$ thin films for magnetoresistive heads were sputter deposited using RF diode sputtering method, and their magnetic characteristics were measured. TbCo films were deposited using a composite target, which is composed of Tb chips epoxied on a Co target. NiFe($400\AA$)/TbCo($1500\AA$)/$SiO_{2}$($500\AA$) films were deposited using a TbCo target having 30 % of Tb area ratio, which showed 25 Oe of the exchange field without substrate bias and 12 Oe with -55 V of substrate bias. The effective in-plane coercivities of the three layer films fabricated with less than -55 V of substrate bias were approximately proportional to the perpendicular coercivities of the TbCo layer only. The films fabricated with a Theo target of 28 % area ratio showed the same trend. However, the exchange field decreased to 4 Oe without the substrate bias and 7 Oe with -55 V of substrate bias. In the films fabricated with 1000 W of power and the target of 36 % area ratio exhibited 100 Oe of exchange field and 3 Oe of coercivity. As the thickness of NiFe layer increased, the exchange field decreased.

• Proceedings of the Korean Magnestics Society Conference
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• 2002.12a
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• pp.48-49
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• 2002

기존의 TMR소자는 NRAM이나 TMR헤드 등의 상용목적을 위해 균일하면서도 치밀한 절연층을 제작하여 목적하는 MR비와 기준저항을 만들기 위해 주로 플라즈마산화법과 고밀도플라즈마를 채용한 성막장비를 사용한다. 완성된 TMR소자는 후열처리하거나 2개 이상의 절연막층을 형성하는 등 여러 가지 방안이 제시되고 있으나 각 방안별로 공정조건이 좁아 양산에 적용하기 곤란하거나, MR비가 급격히 저하하는 등의 문제를 가지고 있다. (중략)

• Journal of the Korean Magnetics Society
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• v.6 no.5
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• pp.323-328
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• 1996

NiFe($60\;{\AA}$)/Cu($60\;{\AA}$)/Co($30\;{\AA}$) trilayers were formed on the $4^{\circ}$ tilt-cut Si(111) substrate by rf magnetron sputtering method. With a Cu($50\;{\AA}$) underlayer, NiFe($60\;{\AA}$)/Cu($60\;{\AA}$)/Co($30\;{\AA}$) trilayers developed in-plane magnebc anisotropy and in-plane perpendicular alignment of easy axes in two magnetic components of NiFe($60\;{\AA}$)/Cu($60\;{\AA}$)/Co($30\;{\AA}$) trilayers has been found. The easy axis of Co layer consisbng of NiFe($60\;{\AA}$)/Cu($60\;{\AA}$)/Co($30\;{\AA}$) trilayers turned out to be along $4^{\circ}$ tilt Si <112> direcbon and that of NiFe layer along Si <110> direction. [NiFe($60\;{\AA}$)/Cu($60\;{\AA}$)/Co($30\;{\AA}$)]/Cu($50\;{\AA}$)/Si(111, $4^{\circ}$ tiIt-cut) trilayers showed about 2.2 % MR ratio at room temperature and large plateau in MR curves, which are more improved MR characteristics than those in [NiFe($60\;{\AA}$)/Cu($60\;{\AA}$)/Co($30\;{\AA}$)]/Cu($50\;{\AA}$)/glass trilayers with no appreciable magnetic anisotropy.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.11a
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• pp.221-221
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• 2003

본 연구에서는 스핀밸브 다층박막에서 교환 바이어스에 영향을 끼치는 요인 중 하나인 강자성층과 반강자성층사이의 접합 계면에서의 표면 거칠기 [1,2]를 줄이기 위해 현재 반도체 공정에 사용되고 있는 이온빔 에칭 장비를 사용하여 스핀 밸브 다층박막의 씨앗층 에칭에 따른 교환 바이어스를 알아보고자 하였다. 스핀밸브 구조는 강자성층/비자성층/강자성층의 기본구조를 갖는데 이중 하나의 강자성층의 스핀방향이 반강자성층에 의해 고정되는 구조[3]로써 이러한 고정 효과를 교환 바이어스(exchange bias)라 부른다. 교환 바이어스(exchange bias)현상은 강자성과 반강자성의 접합계면에서 강한 상호 교환결합력에 의해 나타나는 현상으로 이러한 교환 바이어스 특성은 하드드라이브의 고밀도 자기헤드소자 및 비휘발성 자기 메모리소자에 응용되어 기존의 자기저항 소자의 특성을 크게 향상시킬 수 있게 되었다.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.5 no.4
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• pp.21-26
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• 2006

Characteristics of texture and groove precision lapping plate are experimentally investigated by Measuring frictional forces. It is found that the frictional coefficient decreases as the embedding of diamond particles progresses. The groove precision lapping plate with concentric micro-channels indicates superior capability in embedding micrometer-sized diamond particles and uniformity in diamond embedding compared with the texture precision lapping plate with a series of circular micro-channels.

• Journal of the Korean Magnetics Society
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• v.6 no.1
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• pp.1-6
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• 1996

To simulate the characteristics of magnetic exchange coupling at the interface of MR/TbCo thin films, the directions of magnetizations were calculated by minimizing energy in the films. Newton method and Gauss-Seidel method were used. The width of M-H curve increased with TbCo anisotropy constant, and with the thickness of the transition region of TbCo layer. Hysteresis loop width became extremely narrow (less than 10 Oe of coercivity), when the TbCo transition region length was $400\;\AA$. Also the hysteresis loop of films with low interfacial exchange coupling constant was similiar to that of short transition region length. When interfacial exchange coupling constant was 1/100 of perfect coupling, hysteresis loop showed a coercivity of less than 10 Oe. Comparing the measured hysteresis loop of a fabricated sample with that of simulated one, exchange coupling con¬stant could be estimated.