• Title/Summary/Keyword: 이중스테이지

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Ultra high precision Dual stage system Using Air bearing and VCM for Nano level Scanning (VCM을 이용한 나노 정밀도 스캐닝 용 초정밀 이중 스테이지)

  • Kim Ki-Hyun;Gweon Dae-Gab;Choi Young-Man;Kim Dong-Min;Nam Byoung-Uk;Lee Suk-Won;Lee Moon-Gu
    • Journal of the Korean Society for Precision Engineering
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    • v.22 no.5 s.170
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    • pp.103-112
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    • 2005
  • This paper presents one-axis high precision scanning system and illustrates the design of modified $X-Y-{\theta}$ stage as a tracker using VCM and commercialized air bearings for it. The scanning system for 100nm resolution is composed of the 3-axis stage and one axis long stroke linear motor stage as a follower. In this study a previous proposed and presented structure of VCM for the fine stage is modified. The tracker has 3 DOF($X-Y-{\theta}$ motions by four VCM actuators which are located on the same plane. So 4 actuating forces are suggested and designed to create least pitch and roll motions. This article will show about the design especially about optimal design. The design focus of this fine stage is to have high acceleration to accomplish high throughput. The optimal design of maximizing acceleration is performed in restrained size. The most sensitive constraint of this optimal design is heat dissipation of coil. There are 5 design variables. Because the relationship between design variables and system parameters are quite complicated, it is very difficult to set design variables manually. Due to it, computer based optimal design procedure using MATLAB is used. Then, this paper also describes the procedures of selecting design variables for the optimal design and a mathematical formulation of the optimization problem. Based on the solution of the optimization problem, the final design of the stage is also presented. The results can be verified by MAXWELL. The designed stage has the acceleration of about 5 $m/s^{2}$ with 40kg total mass including wafer chuck and interferometer mirror. And the temperature of coil is increased $50^{\circ}C$. In addition, the tracker is controlled by high precision controller system with HP interferometer for it and linear scaler for the follower. At that time, the scanning system has high precision resolution about 5nm and scanning resolution about 40nm in 25mm/s constant speed

Design of a Delayed Dual-Core Lock-Step Processor with Automatic Recovery in Soft Errors (소프트 에러 발생 시 자동 복구하는 이중 코어 지연 락스텝 프로세서의 설계)

  • Juho Kim;Seonghyun Yang;Seongsoo Lee
    • Journal of IKEEE
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    • v.27 no.4
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    • pp.683-686
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    • 2023
  • In this paper, we designed a Delayed Dual Core Lock-Step (D-DCLS) processor where two cores operate same instructions with delay and the result is compared to mitigate soft errors and common mode failures in automotive electronic systems. Because D-DCLS does not know which core an error occurred in, each core must be recovered to the point before the error occurred, but complex hardware modifications are required to return all intermediate values on the pipeline stage. In this paper, in order for easy hardware implementation, all register values are saved to a buffer whenever a branch instruction is executed. When an error is detected, the saved register values are automatically restored, and then 'BX LR' instruction is executed to return to the last branch point. The proposed D-DCLS processor was designed using Verilog HDL and was confirmed to continue normal operation after automatically recovering error.

Characteristics of domestic coals and efficient control of coal dust (국내 석탄광 분진의 특성과 효율적 제어)

  • Kim, Soo Hong;Kwon, Jun Wook;Kim, Sun Myung;Kim, Yun kwang;Jang, Yun Ho
    • Journal of Korean Tunnelling and Underground Space Association
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    • v.19 no.4
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    • pp.589-609
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    • 2017
  • This study carried out the density and energy dispersive X-ray spectroscopy and particle size analysis which are the physical characteristics of coal dust by collecting samples of coal dust in the five domestic mines to control the coal dust through ventilation in the workplace for coal mining in the country. This will contribute to a more comfortable working environment by understanding the physical characteristics of the coal dust which is derived from any hard coal produced domestically. In particular, the result of PSA analysis showed that the size of coal dust sample for this study ranged from $0.007{\sim}88.614{\mu}m$ were the particles less than $3.5{\mu}m$, the size range responsible for pneumoconiosis. To observe the flow of coal dust collected on the wind speed, the fallout of coal dust produced by the wind tunnel for the wind was measured and the particle size analysis of coal dust fallout was carried out. In addition, airborne dust is measured according to the mine velocity by using a multi-stage Anderson sampler in the mine where fine dust is generated in a large amount and the wind speed is found out to control the coal dust below $3.5{\mu}m$. In addition, natural ventilation pressure of A mine was calculated to prevent over design of the main fan.

The comparison and chronology of the lower marine terraces in the mid-eastern coast of Korean peninsula (韓反島 中部東海岸 低位海成段丘의 對比와 編年)

  • ;Choi, Seong-Gil
    • Journal of the Korean Geographical Society
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    • v.30 no.2
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    • pp.103-119
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    • 1995
  • This Paper aims to compare the lower marine terraces distributed from Muckho to Gangneung in the mid-eastern coast of Korean peninsula by the geomorphic method of using characteristies of terrace features and terrace deposits, paleosol, and fossil cryogenic structures, and to estimate the age of the lower marine terraces on the basis of the comparisons of those with the characteristics of thalassostatic terrace in adjacent rivers. The 1ower marine terraces in this area can be classified into two levels, i.e., lower marine terrace I and II surfaces, in desending order, according to the difference of former shoreline altitude. The former shoreline heights of the lowerm marine terrace I and II surfaces are 18m and 10m, respectiveiy. The width of the I surface is broader and distributed more continuousiy than that of II surface. Daejin I surface in Muckho coast, and Myeongju and Anin terrace in Gangneung coast could be classified into the lower marine terrace I surface, and Daejin II surfaCe into II surface. The Surface of ancient shore platform of the lower marine terrace I and II surfaces were weathered, and the color of the terrace deposit ranges from red to reddish brown. And this terrace deposit is covered with slope deposit of Last Glacial or fossil periglacial structures (platy structure and vecicle) of Last Glacial are formed in terrace deposit. These facts indicate that the lower marine terrace I and II surfaces had been formed before the Last Glacial, and then affected by chemical weathering under warm environment, finally followed by cold period. But the deposit of the lower marine terrace I surface is more weathered than that of II surface. And pseudogleyed red soil, which is developed in I but not in II surface, could be judged to have been formed in the Last Interglacial culmination stage (Oxygen isotope stage 5e). Therefore, in terms of the degree of weathering of the terrace deposit and the existence of pseudogleyed red soil, the age of both terrace is thought to be a little different. And the characteristics of the above mentioned II surface are accord with those of thalassostatic terrace formed in middle or late period of the Last Interglacial (5e or 5a). Thus on the basis of above all points, the lower marine terrace I and II surfaces in this area could be seen to have formed in the Last Interglacial culmination stage and middle or late period of the Last Interglacial, respectively. Because the lower mamine terrace I surface is broadry distributed in the eastern coast of Korea nPeninsula, the surface could be used to be a key surface in studying Quaternary marine terraces.

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