• Title/Summary/Keyword: 이상적 변화

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A Study on Batch-Type Remote Plasma Dry Cleaning Process for Native Oxide Removal (배치식 플라즈마 세정 설비를 이용한 자연산화막 제거 공정)

  • Park, Jae-Young;Yi, Wook-Yeol;Hyung, Yong-Woo;Nam, Seok-Woo;Lee, Hyeon-Deok;Song, Chang-Lyong;Kang, Ho-Kyu;Roh, Yong-Han
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.11a
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    • pp.247-251
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    • 2004
  • 반도체 소자의 제조에 있어 실리콘 표면에 성장한 자연산화막을 제거하기 위해 일반적으로 습식 세정 기술이 이용되어 왔다. 하지만 소자의 최소 선폭(design rule)이 nano급으로 고집적화 됨에 따라 contact hole 바닥의 자연산화막을 깨끗이 제거하는데 있어서 그 한계를 나타나고 있다. 이에 대한 효과적인 대안 공정으로 가스 건식 세정 기술이 연구되고 있다. 본 논문에서는 한 번에 50매 이상의 웨이퍼를 처리함으로써 생산성 측면에서 월등한 배치식 설비에서 원거리 플라즈마(remote plasma) 장치에서 2.450Hz의 마이크로웨이브(${\mu}$-wave)에 의해 형성시킨 수소라디칼과 $NF_3$ 가스를 이용하여 실리콘에 결함을 주지 않고 자연산화막을 선택적으로 제거하는 공정에 대해 고찰하였다. AFM을 이용한 표면분석, TEM을 이용한 물성분석, 그리고 ToF-SIMS 및 XPS를 이용한 화학 분석을 습식 및 건식 세정을 비교 평가한 결과, 건식 세정 공정이 실리콘 표면에 결함을 주지 않고 자연산화막을 제거 할 수 있음을 확인하였다. 산화막$(SiO_2)$, 질화막$(Si_3N_4)$, 그리고 다결정 실리콘(Poly-Si) 등의 각 막질별 식각 특성을 고찰하였으며, $NH_3$의 캐리어 가스인 $N_2$의 주입량을 조절함으로써 수소라디칼 형성 효율의 개선이 가능하였으며, 이로부터 게이트와 소스/드레인 사이를 절연하기 위해 이용되는 질화막의 식각 선택비를 2배 정도 개선할 수 있었다. nano급 소자에 실장하여 평가한 결과에서 불산(HF)에 의한 습식 세정 방식에 비하여 약 $20{\sim}50%$ 정도의 contact 저항 감소 효과가 있음이 확인되었다.두 소자 모두 $40mA/cm^2$ 에서 이상적인 화이트 발란스와 같은(0.33,0.33)의 색좌표를 보였다.epsilon}_0=1345$의 빼어난 압전 및 유전특성과 $330^{\circ}C$의 높은 $T_c$를 보였고 그 조성의 vibration velocity는 약4.5 m/s로 나타났다.한 관심이 높아지고 있다. 그러나 고 자장 영상에서의 rf field 에 의한 SAR 증가는 중요한 제한 요소로 부각되고 있다. 나선주사영상은 SAR 문제가 근원적으로 발생하지 않고, EPI에 비하여 하드웨어 요구 조건이 낮아 고 자장에서의 고속영상방법으로 적합하다. 본 논문에서는 고차 shimming 을 통하여 불균일도를 개선하고, single shot 과 interleaving 을 적용한 multi-shot 나선주사영상 기법으로 $100{\times}100$에서 $256{\times}256$의 고해상도 영상을 얻어 고 자장에서 초고속영상기법으로 다양한 적용 가능성을 보였다. 연구에서 연구된 $[^{18}F]F_2$가스는 친핵성 치환반응으로 방사성동위원소를 도입하기 어려운 다양한 방사성의 약품개발에 유용하게 이용될 수 있을 것이다.었으나 움직임 보정 후 영상을 이용하여 비교한 경우, 결합능 변화가 선조체 영역에서 국한되어 나타나며 그 유의성이 움직임 보정 전에 비하여 낮음을 알 수 있었다. 결론: 뇌활성화 과제 수행시에 동반되는 피험자의 머리 움직임에 의하여 도파민 유리가 과대평가되었으며 이는 이 연구에서 제안한 영상정합을 이용한 움직임 보정기법에 의해서 개선되었다. 답이 없는 문제, 문제 만들기, 일반화가 가능한 문제 등으로 보고, 수학적 창의성 중 특히 확산적 사고에 초점을 맞추어 개방형 문제가 확

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Full mouth Rehabilitation with Orthognathic Surgery in Facial Asymmetry Patient : Case Report (안면 비대칭환자의 악교정 수술을 동반한 완전구강회복)

  • Im, So-Min;Shin, Hyoung-Joo;Kim, Dae-Gon;Park, Chan-Jin;Cho, Lee-Ra
    • Journal of Dental Rehabilitation and Applied Science
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    • v.26 no.3
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    • pp.359-371
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    • 2010
  • Facial asymmetry has been found with a higher frequency (70~84%) in skeletal class III malocclusion patients. Anticipating the poor prognosis of prosthesis due to malocclusion, occlusal stability must be obtained by orthodontic treatment. Moreover, orthodontic surgery would be needed in some severe cases for better functional and esthetic results. The orthognathic surgery is performed on one jaw or two jaw depending on the results of facial diagnosis. Genioplasty may change the vertical, horizontal, sagittal position of chin by osteotomy or augmentation using implants, also. This case is about a 24 year-old male patient who visited our clinic to solve the facial asymmetry and mandibular prognathism. Skeletal class III malocclusion, maxillary canting and menton deviation to left by 13 mm were detected. Multiple ill-fitting prostheses, unesthetic maxillary anterior prostheses, and several dental caries were found. After pre-operative orthodontic treatment, Le-Fort I osteotomy, sagittal split ramus osteotomy, genioplasty, right mandibular angle augmentation were done for the correction of jaw relation and asymmetry. By diagnostic wax-up after post-operative orthodontic treatment, maxillary full mouth rehabilitation and mandibular posterior restorations were planned out. For better result, clinical crown lengthening procedure was done on #11, 12 and implant was placed on left mandibular first molar area. The patient was satisfied with the final prostheses. Because of his high caries risk, long-term prognosis will depend on the consistent maintenance of oral hygiene and periodic follow-up.

Integrated Study on the Factors Influencing Sustainable Innovation Cluster of Pangyo Techno Valley (판교테크노벨리의 지속가능한 혁신 클러스터 영향요인에 관한 통합연구)

  • Park, Jeong Sun;Park, Sang Hyeok;Hong, Sung Sin
    • Asia-Pacific Journal of Business Venturing and Entrepreneurship
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    • v.15 no.1
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    • pp.71-94
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    • 2020
  • Korea's innovation cluster policy has been implemented since 2005 with the goal of balanced regional development. The purpose of this study is to investigate the factors affecting the sustainability of innovative cluster tenants by using Pangyo Techno Valley as an example. Pangyo Techno Valley was established under the leadership of the local government (Gyeonggi-do) rather than the central government and it is called "Silicon Valley of Korea" and "Asia Silicon Valley" and is becoming more representative. The growing number of companies in Pangyo Techno Valley decreased in 2017 compared to 2016. This is because Pangyo Techno Valley's business ecosystem will change from 2019. In this paper, quantitative and qualitative studies were conducted to investigate the influencing factors. Quantitative research was conducted based on the survey and qualitative research was applied through interviews. The quantitative research examined the factors affecting the sustainability of Pangyo Techno Valley, and the qualitative research examined the specific reasons and additional factors for the quantitative research results. The quantitative results showed that factors affecting sustainability in terms of changes in corporate internal conditions, human and physical infrastructure, cooperation and synergy, and occupancy patterns. The specific reason for the impact appeared in the qualitative research process. The support category of local governments did not show any significant factors in quantitative research. In addition, qualitative research suggested 'Good image of Pangyo Techno Valley' as the category that has the greatest impact on sustainability. It is shown that companies are passive and expect the role of local governments in activating cooperation network in Pangyo Techno Valley. In this paper, based on the results of the study, Pangyo Techno Valley is presented with a realistic plan based on real estate issues and an ideal plan with a long-term perspective.

Hepatitis B Virus Infection Rate of Medical School Students in Taegu (대구시내(大邱市內) 의과대학생(醫科大學生)들의 B형(型)바이러스성(性) 간염감염율(肝炎感染率))

  • Park, Jung-Han;Youn, Tae-Hyun;Chun, Byung-Yeol;Song, Jung-Hup
    • Journal of Preventive Medicine and Public Health
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    • v.20 no.1 s.21
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    • pp.129-136
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    • 1987
  • To determine the hepatitis 8 virus infection rate of the medical school students and appropriate time for immunization with hepatitis B vaccine,355 students in the 1st, 2nd and 3rd grades of Medical School of Kyungpook National University who had not been vaccinated and volunteered to participate in this study were tested for HBsAg, anti-HBs and anti-HBc with radioimmunoassay method (Abbott Lab. kit). A questionnaire was administered to ask the history of transfusion, acupuncture and surgery. HBsAg positive students were retested 16 months after the initial test. Overall HBsAg positive rate was 6.8% and the age adjusted rate for male (7.2%) was higher than that for female (4.9%). Anti-HBs positive rate was 35.3% (36.1% for male, 37.9% for female) and anti-HBc positive rate was 45.5% (46.5% for male,44.7% for female). Overall hepatitis B virus (HBV) infection rate was 49.1% and the infection rate for male (50.3%) was slightly higher than that for female (46.5%). HBsAg positive rate and infection rate were increased as the grade increased but it was attributed to the age distribution of the students. HBaAg positive rate for 20 years old students was 1.7%; 21 years, 6.6%; 22 years, 6.1%; 23 years, 12.2%; and 24 years and older, 6.4%. HBV infection rate showed an increasing trend as age increased; 45.8% for 20 years,41.5% for 21 years, 49.5% for 22 years, 55.5% for 23 years and 59.6% for 24 years and older. The age differences in HBsAg positive rates and HBV infection rates did not reach the statistical significance level of 0.05. However, these findings and similar age differences in HBsAg positive rates and HBV infection rates observed in other study suggest that there is a significant age differences. Study of the same age group in other schools and different social classes is warranted to confirm the age difference. Clarification of the reason for such differences would provide a clue to identify the major route of HBV transmission in this age group. Among 26 HBsAg positive students in the initial test, only one student was active hepatitis patient. Out of 24 students who had follow-up test after 16 months 22 students were positive for HBaAg and two students became HBsAg negative and anti-HBs positive. It is obvious that nearly one-half of the medical school students were infected with HBV before 20 years of age and the HBV infection occurs in medical school. Thus, it is recommended to test all the students for HBV infection soon after the admission to the medical school and immunize all the susceptible students with hepatitis B vaccine and give booster as they start to practice at a hospital.

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A Study on the Comparison of the Backfill Loads Obtained by the Marston-Spangler에s Theory and by the Finite Element Analysis for the Metal-Polyethylene Composite Pipes (금속-폴리에틸렌 복합관에 대해서 Marston-Spagler이론과 유한요소해석에 의해 구해진 뒤채움하중의 비교에 관한 연구)

  • 정진호
    • Geotechnical Engineering
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    • v.14 no.5
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    • pp.89-110
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    • 1998
  • Variations of backfill load on the metal-polyethylene composite( MPC ) pipes buried in various trenches backfill afterward were investigated in this paper. The backfill loads obtained by the finite element method( FBM ) were compared with those calculated by the well-known MarstonBpangler(M-5) theory. The reliability of the finite element analysis used in this study was examined by an inaitu best for the buried pipe. The backfill lords and deflections on the real-size pipe buried on-site were measured while increasing the backfill height. In addition, further investigations were made for the variations of the backfill loads as a function of several important parameters such as the backfill soil type, bach. height$(\leq4.0m)$, diameter of the pipe$(B.$1.0m)$, and trench width($\leq 3.0 B_c$). It is confirmed that the M-S theory predicts reasonably well the backfill loafs of the MPC of the M-S backfill coils be 0.13 and 0.15 for the SC and SM coils in the D unman soil model, respectively. The load ratio, Wu-s/WwgM for a narrow trench varies negligibly with the back(111 height but fiends to increase for a wide trench. The ratio increases with increasing diameter of the pipe for a narrow trench while decreasing for a wide trench. It is also found that the ratio generally decreases as the degree of compaction increases and BM soil exhibits larger load ratio than that of SC soil.

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CHEMICAL DEGRADATION OF LIGHT-CURED DENTAL COMPOSITE RESINS (수종 치과용 광중합형 복합레진의 화학적 분해)

  • Yang, Kuy-Ho;Choi, Nam-Ki;Park, Mi-Ran;Park, Eun-Hae
    • Journal of the korean academy of Pediatric Dentistry
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    • v.28 no.3
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    • pp.403-411
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    • 2001
  • The aim of this study was to evaluate the resistance to degradation of four commercial composite resins in an alkaline solution. The brands studied were Unifil(GC, Japan), Palfique(Tokuyama Japan). Definite$Degussa-H\ddot{u}ls$ AG, Germany). Revolution(Kerr, U.S.A.). Preweighed discs of each brand were exposed 0.1N NaOH solution at $60^{\circ}C$. After 14 days they were removed, neutralized with HCl, washed with water and dried. Resistance to degradation was evaluated on the basis of following parameters: (a) mass loss(%) - determined from pre-and post-exposed specimen weights; (b) Si loss(ppm) - obtained from ICP-AE analysis of solution exposed to specimens; and (c) degradation depth$({\mu}m)$ - measured microscopically (SEM) from polished circular sections of exposed specimens. The results were follows: 1. The mass loss of Unifil was 3.21%, it was the highest of materials. But, there was no significant difference among the materials. 2. The degree of degradation layer depth was $107.69\sim47.40{\mu}m$, the sequence of the degree pf degradation layer depth was in descending order by Unifil, Palfique, Revolution, Definite. There was significant difference among the materials except Palfique and Definite. 3. The Si loss of Paltique was 8940.0ppm, it was the highest. There was significant difference among the materials, except Revolution and Definite(p<0.05). 4. The correlation coefficient between mass loss and degradation depth was relatively high(r = 0.06, p<0.05). 5. There was no significant coefficient correlation between Si loss and mass loss, and/or the degree of degradation layer depth and Si loss. 6. When observed with SEM, destruction of bonding is observed between resin matrix and filler. Above results suggested that the hydrolytic degradation is considered as evaluation factor of composite resins.

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The Use of Autogenous Periosteal Grafts for the Periodontal Regeneration in Mandibular Class II Furcation Defects in the Dog (성견의 2급 치근 분지부 결손에서 자가골막 이식에 의한 치주조직 재생)

  • Nam, Seung-Ji;Chung, Hyun-Ju;Kim, Young-Jun
    • Journal of Periodontal and Implant Science
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    • v.30 no.2
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    • pp.241-257
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    • 2000
  • Autogenous periosteal grafts are an attractive alternative to existing barrier membrane materials since they meet the reqiurements of an ideal material. But no histological data are available on the effectiveness of periosteal membranes in the treatment of periodontal defects. The purpose of this study was to evaluate effect of autogenous periosteal graft on periodontal regeneration histologically. Class II furcation defects were surgically created on the second, third and the fourth premolars bilaterally in the mandibules of six mongrel dogs. The experimental sites were divided into three groups according to the treatment modalities; control group - surgical debridement only; Group I- autogenous periosteal membrane placement after surgical debridement; Group II-autogenous periosteal membrane placement after surgical debridement and bone grafting. The animals were sacrificed at 2, 4 and 12 weeks after periodontal surgery and the decalcified and undecalcified specimens were prepared for histological and histometrical analysis. Clinically all treated groups healed without significant problems. Under light microscope, at 2 weeks, control group showed significant apical epithelial migration and bone remodelling only below the notch area. But for the group I, II with autogenous periosteal graft, less apical migration of epithelium appeared and large amount of osteoid tissue showed above the notch area. Grafted periosteal membrane was indiscernable at 4 weeks, so periosteal membrane might be organized to surrounding tissues. Histometrically, at 4 and 12 weeks, all the test and control groups didn't show significant change of epithelial zone but new attachment level tended to be gained in the test groups than control group. These results suggest that autogenous periosteal grafts should be a good alternative for guided tissue regeneration.

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Application of Predictive Microbiology for Shelf-life Estimation of Tteokgalbi Containing Dietary Fiber from Rice Bran (예측미생물학을 활용한 미강 식이섬유 함유 떡갈비의 유통기한 설정)

  • Heo, Chan;Kim, Hyoun-Wook;Choi, Yun-Sang;Kim, Cheon-Jei;Paik, Hyun-Dong
    • Food Science of Animal Resources
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    • v.28 no.2
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    • pp.232-239
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    • 2008
  • The objective of this study is to estimate the shelf-life of Tteokgalbi containing dietary fiber extracted from rice bran by using the predictive microbiology. This Tteokgalbi was made with 0%, 1%, 2%, and 3% dietary fiber. The number of total viable cells, anaerobic, psychrotrophic, and heat-stable bacteria and coliforms was calculated during 15 days of storage under $4{\pm}1^{\circ}C$ and the obtained data was applied to Baranyi function. The evaluation of fitness between predicted and observed data showed that these were matched in a satisfactory way. Heat-stable bacteria was detected lower than <1 log CFU/g and coliforms were not detected during the storage. The changes of total viable cells and psychrotrophic bacteria in Tteokgalbi were increased gradually, but dramatically increased after 3 days of storage. The models of total viable cells and anaerobic bacteria showed very similar growth trends and values of growth parameters each other. The estimated shelf-life of each Tteokgalbi was calculated from the predictive model of total viable cells and the estimated shelf-life was 1.7, 2.3, 2.3, and 2.4 days, respectively. The results suggested that the prediction of bacteria growth could be used to evaluate the microbiological safety and determine the shelf-life of Tteokgalbi as ready-to-eat food in the local market.

Simultaneous Multiple Transmit Focusing Method with Orthogonal Chirp Signal for Ultrasound Imaging System (초음파 영상 장치에서 직교 쳐프 신호를 이용한 동시 다중 송신집속 기법)

  • 정영관;송태경
    • Journal of Biomedical Engineering Research
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    • v.23 no.1
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    • pp.49-60
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    • 2002
  • Receive dynamic focusing with an array transducer can provide near optimum resolution only in the vicinity of transmit focal depth. A customary method to increase the depth of field is to combine several beams with different focal depths, with an accompanying decrease in the frame rate. In this Paper. we Present a simultaneous multiple transmit focusing method in which chirp signals focused at different depths are transmitted at the same time. These chirp signals are mutually orthogonal in a sense that the autocorrelation function of each signal has a narrow mainlobe width and low sidelobe levels. and the crossorelation function of any Pair of the signals has values smaller than the sidelobe levels of each autocorrelation function. This means that each chirp signal can be separated from the combined received signals and compressed into a short pulse. which is then individually focused on a separate receive beamformer. Next. the individually focused beams are combined to form a frame of image. Theoretically, any two chirp signals defined over two nonoverlapped frequency bands are mutually orthogonal In the present work. however, a tractional overlap of adjacent frequency bands is permitted to design more chirp signals within a given transducer bandwidth. The elevation of the rosscorrelation values due to the frequency overlap could be reduced by alternating the direction of frequency sweep of the adjacent chirp signals We also observe that the Proposed method provides better images when the low frequency chirp is focused at a near Point and the high frequency chirp at a far point along the depth. better lateral resolution is obtained at the far field with reasonable SNR due to the SNR gain in Pulse compression Imaging .

CO2 Exchange in Kwangneung Broadleaf Deciduous Forest in a Hilly Terrain in the Summer of 2002 (2002년 여름철 경사진 광릉 낙엽 활엽수림에서의 이산화탄소 교환)

  • Choi, Tae-jin;Kim, Joon;Lim, Jong-Hwan
    • Korean Journal of Agricultural and Forest Meteorology
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    • v.5 no.2
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    • pp.70-80
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    • 2003
  • We report the first direct measurement of $CO_2$ flux over Kwangneung broadleaf deciduous forest, one of the tower flux sites in KoFlux network. Eddy covariance system was installed on a 30 m tower along with other meteorological instruments from June to August in 2002. Although the study site was non-ideal (with valley-like terrain), turbulence characteristics from limited wind directions (i.e., 90$\pm$45$^{\circ}$) was not significantly different from those obtained at simple, homogeneous terrains with an ideal fetch. Despite very low rate of data retrieval, preliminary results from our analysis are encouraging and worthy of further investigation. Ignoring the role of advection terms, the averaged net ecosystem exchange (NEE) of $CO_2$ ranged from -1.2 to 0.7 mg m$^{-2}$ s$^{-1}$ from June to August in 2002. The effect of weak turbulence on nocturnal NEE was examined in terms of friction velocity (u*) along with the estimation of storage term. The effect of low uf u* NEE was obvious with a threshold value of about 0.2 m s$^{-1}$ . The contribution of storage term to nocturnal NEE was insignificant; suggesting that the $CO_2$ stored within the forest canopy at night was probably removed by the drainage flow along the hilly terrain. This could be also an artifact of uncertainty in calculations of storage term based on a single-level concentration. The hyperbolic light response curves explained >80% of variation in the observed NEE, indicating that $CO_2$ exchange at the site was notably light-dependent. Such a relationship can be used effectively in filling up the missing gaps in NEE data through the season. Finally, a simple scaling analysis based on a linear flow model suggested that advection might play a significant role in NEE evaluation at this site.