• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.31 no.10
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• pp.73-78
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• 2003

MEMS technology in the field of aerospace engineering is more important with light weight and high resolution. Therefore the investigation of thin films properties is issued and the residual stress of thin filrns is one of the important problems to solve. Ion implantation without thermal annealing is applied for the stress gradient relaxation of LPCVD polysilicon films used as the structural part in MEMS. He+ and Ar+ ion implantations reduce the stress gradient of polysilicon films. The property modification of polysilicon films by ion implantation is also investigated. The elastic modulus and hardness of polysilicon films with ion implantation is studied by CSM method which is an advanced nano-indentation method. Ion implantation decreases the elastic modulus and hardness of polysilicon films. However, they are improved with increasing ion dose.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.99-99
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• 2013

나노결정질 다이아몬드(Nanocrystalline Diamond: NCD) 박막은 고경도와 낮은 마찰계수를 가지고 있어 초경합금이나 고속도강과 같은 절삭공구 위에 코팅하여 공구의 성능 향상을 도모하려는 노력이 있어 왔다. 그러나 NCD 박막의 잔류응력이 크고, 초경합금과 철계 금속에 NCD가 증착되지 않는다는 문제점이 있다. 따라서 잔류응력 완화와 다이아몬드 핵생성을 위하여 제3의 중간층 재료가 필요하다. 본 연구에서는 W과 Ti을 중간층으로 하여 초경합금(WC-Co)과 고속도강(SKH51)에 NCD 박막을 코팅하고 기계적 특성을 비교하였다. 초경합금 또는 고속도강기판 위에 W 또는 Ti 중간층을 DC magnetron sputter를 이용해 각 1 ${\mu}m$의 두께로 증착하고 그 위에 MPCVD (Microwave Plasma Chemical Vapor Deposition)를 이용해 NCD 박막을 2${\mu}m$의 두께로 코팅하였다. FESEM을 이용하여 표면과 단면의 형상을 관찰하였고, XRD와 Raman spectroscopy를 통해 NCD 박막의 결정성을 확인하였다. 그리고 tribology test를 실시하여 코팅된 박막의 내마모성을 비교하였으며, Rockwell C indentation test를 이용하여 밀착력을 비교하였다. 초경합금에 적용 시, W이 Ti보다 중간층으로서 더 우수한 것으로 나타났으며 이는 열팽창계수 차이에 의한 잔류응력의 차이에 의한 것으로 여겨진다. 중간층 두께에 따른 박막의 기계적 특성 변화를 알아보기 위해 W 중간층의 두께를 1, 2, 4 ${\mu}m$로 변화를 주었다. 중간층 두께가 2 ${\mu}m$ 이상일 때 박막의 밀착력이 증가되는 것으로 나타났다. 고속도강 위에 같은 방법으로 1 ${\mu}m$의 W 또는 Ti 중간층 위에 2 ${\mu}m$의 NCD 박막을 코팅한 시편들은 초경합금에 코팅한 것과 달리 두 시편 모두 낮은 밀착력을 나타내었다. 열팽창계수 차이에 의한 잔류응력을 완화하기 위해 고속도강에 W/Ti 복합박막을 중간층으로 Ti, W순으로 각각 1 ${\mu}m$ 두께로 증착 후 그 위에 NCD 박막을 2 ${\mu}m$ 두께로 코팅 한 후 특성을 비교하였다. Ti/W 복합 중간층 위에 코팅된 NCD 박막의 밀착력이 W 혹은 Ti 단일 중간층에 코팅된 박막에 비해 우수한 것으로 나타났다. 그러나 실제 공구에 적용하기에는 박막의 밀착력 개선이 요구되며 이를 위해서 더 연구가 필요하다.

• Korean Journal of Materials Research
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• v.3 no.2
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• pp.197-204
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• 1993

Abstract The effects of the hole size and the specimen width on the fracture behavior of several fabric composite plates are experimentally investigated in tension. Tests are performed on plain woven glass/ epoxy, plain woven carbon/epoxy and satin woven glass/polyester specimens with a circular hole. It is shown in this paper that the characteristic length according to the point stress criterion depends on the hole size and the specimen width. An excellent agreement is found between the experimental results and the analytical predictions of the modified failure criterion. The notched strength increase with an increase in the damage ratio, which is explained by a stress relaxation due to the formation of damage zone. When the unstable fracture occurred, the critical crack length equivalent for the damage zone is about twice the characteristic length. The critical energy release rate $G_c$ is independent of hole size for the same specimen width. The variation of $G_c$ according to the material system, fiber volume fraction and specimen width relates to the notch sensitivity factor. $G_c$ increases with a decrease in the notch sensitivity factor, which can be explained by a stress relaxation due to the increase of damage zone.

• Journal of the Korea Institute of Military Science and Technology
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• v.6 no.4
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• pp.89-99
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• 2003

Smoothed particle hydrodynamics, SPH, is a gridless Lagrangian technique which is a useful alternative numerical analysis method to simulate high velocity deformation problems as well as astrophysical and cosmological problems. The SPH method brings about some difficulties such as tensile Instability and stress oscillation. A new SPH method, so called normalized algorithm, was introduced to overcome these difficulties. In this paper we aimed to estimate this method and have developed an one-dimensional normalized SPH program. The high velocity impact model of an aluminum bar has been analysed by using the developed program and a commercial hydrocode, LS-DYNA. The obtained numerical results showed good agreement with the results of the same model in reference. The program also showed more stable results than those of LS-DYNA in stress oscillation. We hopefully expect that the developed one-dimensional normalized SPH program can be used to solve hydrodynamic problems especially for explosive detonation analysis.

• Proceedings of the Korean Geotechical Society Conference
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• 1997.10a
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• pp.307-314
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• 1997

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2013.05a
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• pp.1387-1388
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• 2013

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.797-798
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• 2008

• Proceedings of the KWS Conference
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• 2002.05a
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• pp.139-142
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• 2002

• Proceedings of the Materials Research Society of Korea Conference
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• 2004.05a
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• pp.73-73
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• 2004

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.11a
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• pp.937-938
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• 2010