• Title/Summary/Keyword: 원형배열

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Development of an Atmospheric Pressure Plasma Source for Resist Removal on 12 Inch Si Wafers

  • Yu, Seung-Yeol;Seok, Dong-Chan;Park, Jun-Seok;Yu, Seung-Min;No, Tae-Hyeop
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.488-488
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    • 2012
  • 상압에서 12인치 실리콘 웨이퍼 표면처리가 가능한 장치를 개발하였다. 배치타입 공정으로 플라즈마 발생 전극은 직경 340 mm의 대면적 원형 형태을 가지고 있다. 시스템은 탈부착이 가능한 플라즈마 모듈부와 공정챔버로 나누어지며 균일도를 높이기 위해 웨이퍼스테이지는 가열, 회전 및 축간 조절이 가능하게 설계하였다. 플라즈마발생은 DBD 전극방식을 채용하고 있으며 공정가스흐름 및 전극배열 등을 연구하였다. 또한, 기판 온도, 가스 조합 등의 공정파리미터를 변화시켜가며 높은 애슁 속도 및 균일도를 얻기 위한 실험이 진행되었다. 주파수 15 kHz, 인가 파워 7 kW, 시편 가열 온도 95도, 60 rpm, 80 spm에서 분당 200 nm의 PR제거율을 확인하였다.

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Analysis and Implementation of the Stacked Cavity-Backed Circular Microstrip Patch Antenna (적층형 Cavity-Backed 원형 마이크로스트립 안테나 해석 및 구현에 관한 연구)

  • 박경빈;정영배;최동혁;박성욱;문영찬;전순익
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.11 no.1
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    • pp.37-45
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    • 2000
  • Though microstrip antenna has several advantages, it makes engineers struggle against the difficulties of narrow bandwidth and scan-blindness with probe-feeding and array configuration. To overcome these disadvantages, stacked patch and cavity-backed structure had been proposed. But this structure can not be analyzed easily because we have no concrete means to analyze it. So the algorithm to analyze the structure should be established to make it useful. This paper explained the algorithm of moment method to analyze the structure and verified it by comparing the calculated and measured results.

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Design of Annular Finned Heat Transfer Tube Using Robust Optimization (원형 확장 휜 열 교환기의 치수 강건최적설계)

  • Jhong, Woo-Jin;Yoon, Ji-Won;Lee, Jong-Soo
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.27 no.9
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    • pp.1437-1443
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    • 2003
  • Most optimization problems do not consider tolerance of design variables and design parameters. Ignorance of these tolerances may not fit for the practical problems and can lead to an unexpected conclusion. That is why we suggest robust optimization considering tolerances in both design variables and problem parameters. Using robust optimization, we designed minimum weight annular finned heat transfer tube subject to constraints on limitation of pressure difference and minimum value of total heat transfer. Consequently, robust optimization satisfies tolerance considered practical problems.

Beamforming Power Allocation Method of Multiple Nodes with UCA for Increasing SIR (SIR 향상 다중 노드용 UCA 빔 형성 전력 할당 방법)

  • Park, Seongho;Park, Chul;Kim, Hanna;Chung, Jaehak
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.40 no.1
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    • pp.16-22
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    • 2015
  • This paper proposes a power allocation method for multiple node beamforming with uniform circular array antennas to increase SIR of nodes in wireless mesh network. The proposed method calculates beamforming power allocation vectors that maximizes SIR satisfied with power constraint of HPA. The simulation results demonstrate the proposed method achieves the enhanced SIR of nodes than that of beamforming method.

Soil Improvement Effect of Waste Lime Sludge Using Prefabricated Vertical Drains (연직배수재를 이용한 폐석회 슬러지의 지반개량 효과)

  • Shin, Eun-Chul;Park, Jeong-Jun;Kim, Jong-In
    • Journal of the Korean GEO-environmental Society
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    • v.6 no.2
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    • pp.51-60
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    • 2005
  • The disposal problem of waste lime which is a residual product of lime industry have caused a lots of arguments in the past few years. Further more, waste lime contains a high moisture content which causes the disposal of waste lime is a great difficulty. The purpose of this study is to investigate for the effective dewatering solutions by placing various prefabricated vertical drains. The moisture content and degree of consolidation, pore water pressure, changes of settlement, bearing capacity with various vertical drains in waste lime were analyzed. The laboratory test results indicate that PBD is 2 times higher than circular drain in coefficient of consolidation. Based on the laboratory test results, settlement, pore water pressure, and dewatering measurements are shown in similar tendency. It is considered that PBD can drain primitive pore water much efficiently. The picture of SEM shows that circular drain filter has a serious clogging problem in comparison with PBD. In conclusion, PBD holds a superiority in waste lime's ground improvement and dewatering pore water pressure from the waste lime sludge. Also, circular drain is desired for some modification in its filtering system.

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Stabilization of Short Juxta-articular Fractures Using a Circular External Skeletal Fixator System in Dogs (개에서 원형외고정장치를 이용한 관절주위 골절의 안정화)

  • Cheong, Hye-Yeon;Kim, Joo-Ho;Cha, Jae-Gwan;Seol, Jae-Won;Kim, Min-Su;Lee, Hae-Beom
    • Journal of Veterinary Clinics
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    • v.31 no.6
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    • pp.523-526
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    • 2014
  • Three dogs were admitted for repair of bone fracture. Case 1 (Maltese, 1.8 kg, intact female, 5-month-old) and case 2 (poodle, 3.0 kg, intact female, 6-month-old) had non-weight bearing lameness in the left pelvic limb, and case 3 (mixed, 3.3 kg, intact female, age unknown) had non-weight-bearing lameness in the left thoracic limb. On orthopedic examination, there was pain, crepitus, palpable instability and substantial soft tissue swelling on the affected side. No neurological deficits were identified. Radiographs revealed left proximal metaphyseal tibial and fibular fractures in cases 1 and 2, and left proximal metaphyseal radial and ulnar fractures in case 3. All cases had closed long-bone fractures with short juxta-articular fracture segments. Under fluoroscopic guidance, proper placement of the ring fixation elements was confirmed during surgery. Two or three rings were used to stabilize fractures with traditional circular external skeletal fixators (CESF). Postoperative radiographs showed acceptable alignment and apposition of the previously identified fracture. Time to radiographic union ranged from 5 to 14 weeks and there were no signs of implant failure or pin tract infection. Functional outcomes were excellent in all cases. CESF can be successfully used to reduce short juxta-articular fractures in which bone plates or external skeletal fixation cannot be applied.

Germinability, Morphological Development during Germination and Anatomical Observation Gentiana scabra Bunge var. buergeri Max. (자생 용담의 발아성 및 발아과정 중의 형태 형성과 조직의 해부학적 관찰)

  • Son, Byung-Gu;Choi, Young-Hwan;An, Jong-Gil;Cho, Dong;Kang, Jum-Soon;Jung, Yong-Mo;Kwon, Oh-Chang
    • Journal of Life Science
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    • v.9 no.2
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    • pp.127-135
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    • 1999
  • Gentiana scabra Bunge var buergeri Max, can be widely used such as cut-flower, ornamental and medicinal plant among the native plants. Microscopic and Scanning electron microscopic observation plant were carried out to estimates the characteristics correlated with germinability and germination process, and the results were as follows. The seeds were germinated just after harvest, and it means that there is no or little dormancy of the seeds. Matured seeds showed higher germinability than those of immatured. As the storage period was longer, immatured seeds showed shorter longevity than those of matured. The average longevity was about 190 days. According to the observation results of morphological changes during the germination, seed coat was expanded with water absorption immediately after seeding, and radicals were observed 2 days after seeding. Root hairs were formed behind the growing tip of the root on 4 days after seeding and cotyledon were unfolded on 6 days after seeding. In the microscopic observation of leaf tissues, it could be easily distinguished between midrib, and leaf blade, and also observed upper epidermis, palisade parenchyma and spongy parenchyma consisted as a sing1e layer. Palisade parenchyma was consisted of a single layer of cell. Stomata were restricted lower surface, arranged as anamocytic type, and surrounded by guard cells. In the microscopic anatomy of stem were consisted of cortical layer, forming a single layer of epidermis and parenchyma, and vascular bundle which was consisted of continuous cylinder of vascular tissues.

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Studios on Intestinal Trematodes in Korea X. Scanning Electron Microscopic Observation on the Tegument of Fibricola seoulensis (한국의 간흡충에 관한 연구 X. Fibricola seoulensis 표피의 전자현미경적 관찰)

  • 서병설;이순향
    • Parasites, Hosts and Diseases
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    • v.22 no.1
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    • pp.21-29
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    • 1984
  • A scanning eletron microscopic study was performed to observe the tegumental surface of adult Fibricola seoulensis. The adult worms were collected from the small intestine of mice 5 days to 3 weeks after experimental infection with the metacercariae. The metacercariae were obtained from the viscera of the snakes, Matrix tigrina lateralis, by artificial digestion technique. The results were as follows: 1. The tegument of anterior body was covered with cobblestone-like cytoplasmic processes and that of posterior body showed finger-like processes. The posterior body had 4-5 large transverse wrinklings which formed many discontinued shallow rugae. 2. The entire surface of anterior body was regularly arranged with the spines of which tips diverged into 3 to 4 points. They were densely packed in anterior mid-median portion of dorsal surface where appeared a few spines indented upto 5 points. Farther laterally and posteriorly from this portion, the pointed spines were more sparse and became single tipped and extended to anterior one-third of posterior body, 3. The posterior surface of oral sucker was armed with 50-60 spines having 2-3 tips and ventral sucker also covered with such spines. On anteriormost dorsal surface arranged 60-70 spade-shaped spines. The tribocytic organ was armed with many stout recurved pile-like spines arranged radially. 4. There were 3 types of sensory papillae. The ciliated knob-like (Type I) papillae were almost bilaterally symmetrical in ventral and dorsal surfaces of anterior body, and abundant especially aroundbases of oral and ventral suckers, tribocytic organ, and in lateral margins of anterior body. About 24 non-ciliated round swellings (Type II) were observed around each lip of oral and ventral suckers. The plate-like elevated papilla without cilium (Type III) was found to distribute only in posterior body. These 3 types of papillae seem to be tangoreceptive and/or rheoreceptive in function when their morphology and distributions are considered.

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A Numerical Analysis of Flow Characteristics in a Heat Recovery Steam Generator with the Change of Inlet Flow Conditions (배열회수보일러(HRSG)의 입구유동 경계조건에 따른 유동특성 변화에 관한 연구)

  • Kim, Tae-Kwon;Lee, Boo-Yoon;Ha, Ji-Soo
    • Journal of the Korean Institute of Gas
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    • v.15 no.3
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    • pp.53-57
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    • 2011
  • The present study has been carried out to analyze the flow characteristics of a heat recovery steam generator with the change of inlet flow conditions by using numerical flow analysis. The inlet of HRSG corresponds the outlet of gas turbine exit and the flow after gas turbine has strong swirl flow and turbulence. The inlet flow condition of HRSG should be included the exit flow characteristics of gas turbine. The present numerical analysis adopted the flow analysis result of gas turbine exit flow as a inlet flow condition of HRSG analysis. The computational flow analysis result of gas turbine exit shows that the maximum axial velocity appears near circular duct wall and the maximum turbulent kinetic energy and dissipation rate exist relatively higher gradient region of axial velocity. The comparison of flow analysis will be executed with change of inlet turbulent flow condition. The first case is using the inlet turbulent properties from the result of computational analysis of gas turbine exit flow, and the second case is using the assumed turbulent intensity with the magnitude proportional to the velocity magnitude and length scale. The computational results of flow characteristics for two cases show great difference especially in the velocity field and turbulent properties. The main conclusion of the present study is that the flow inlet condition of HRSG should be included the turbulent properties for the accurate computational result of flow analysis.

X-Band 6-Way Waveguide Power Divider Using Inductive Post (유도성 포스트를 활용한 X-Band 6-Way 도파관 전력 분배기)

  • Kim, Dong-Hyun;Oh, Soon-Soo;Min, Kyeong-Sik;Kang, Suk-Youb
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.21 no.4
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    • pp.417-426
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    • 2010
  • This paper describes the 6-way power divider to be used as a feeding structure of the waveguide array antenna generating the plane wave at the near distance. The SMA connector has been connected at the center of the power divider in order to feed the radiating element. The six output ports made of waveguide are positioned on the peripheral of the divider. This paper proposes the method utilizing the inductive post in order to decrease the return loss. The height of the feeding pin, the diameter of the inductive post, and the distance between the feeding pin and inductive post have been investigated, and as a result, the power divider has been optimized. The simulated and measured results show the low return loss of about -40 dB. The calculated and measured transmission coefficients are -7.78 dB and -8.06 dB, respectively. The output power of the six waveguide port show equal-amplitude and equal-phase distribution. Since the power divider proposed in this paper can be expanded to the divider having several output ports, it could be easily applied to the various array antennas.