• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.247-251
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• 2004

반도체 소자의 제조에 있어 실리콘 표면에 성장한 자연산화막을 제거하기 위해 일반적으로 습식 세정 기술이 이용되어 왔다. 하지만 소자의 최소 선폭(design rule)이 nano급으로 고집적화 됨에 따라 contact hole 바닥의 자연산화막을 깨끗이 제거하는데 있어서 그 한계를 나타나고 있다. 이에 대한 효과적인 대안 공정으로 가스 건식 세정 기술이 연구되고 있다. 본 논문에서는 한 번에 50매 이상의 웨이퍼를 처리함으로써 생산성 측면에서 월등한 배치식 설비에서 원거리 플라즈마(remote plasma) 장치에서 2.450Hz의 마이크로웨이브(${\mu}$-wave)에 의해 형성시킨 수소라디칼과 $NF_3$ 가스를 이용하여 실리콘에 결함을 주지 않고 자연산화막을 선택적으로 제거하는 공정에 대해 고찰하였다. AFM을 이용한 표면분석, TEM을 이용한 물성분석, 그리고 ToF-SIMS 및 XPS를 이용한 화학 분석을 습식 및 건식 세정을 비교 평가한 결과, 건식 세정 공정이 실리콘 표면에 결함을 주지 않고 자연산화막을 제거 할 수 있음을 확인하였다. 산화막$(SiO_2)$, 질화막$(Si_3N_4)$, 그리고 다결정 실리콘(Poly-Si) 등의 각 막질별 식각 특성을 고찰하였으며, $NH_3$의 캐리어 가스인 $N_2$의 주입량을 조절함으로써 수소라디칼 형성 효율의 개선이 가능하였으며, 이로부터 게이트와 소스/드레인 사이를 절연하기 위해 이용되는 질화막의 식각 선택비를 2배 정도 개선할 수 있었다. nano급 소자에 실장하여 평가한 결과에서 불산(HF)에 의한 습식 세정 방식에 비하여 약 $20{\sim}50%$ 정도의 contact 저항 감소 효과가 있음이 확인되었다.두 소자 모두 $40mA/cm^2$ 에서 이상적인 화이트 발란스와 같은(0.33,0.33)의 색좌표를 보였다.epsilon}_0=1345$의 빼어난 압전 및 유전특성과 $330^{\circ}C$의 높은 $T_c$를 보였고 그 조성의 vibration velocity는 약4.5 m/s로 나타났다.한 관심이 높아지고 있다. 그러나 고 자장 영상에서의 rf field 에 의한 SAR 증가는 중요한 제한 요소로 부각되고 있다. 나선주사영상은 SAR 문제가 근원적으로 발생하지 않고, EPI에 비하여 하드웨어 요구 조건이 낮아 고 자장에서의 고속영상방법으로 적합하다. 본 논문에서는 고차 shimming 을 통하여 불균일도를 개선하고, single shot 과 interleaving 을 적용한 multi-shot 나선주사영상 기법으로 $100{\times}100$에서 $256{\times}256$의 고해상도 영상을 얻어 고 자장에서 초고속영상기법으로 다양한 적용 가능성을 보였다. 연구에서 연구된 $[^{18}F]F_2$가스는 친핵성 치환반응으로 방사성동위원소를 도입하기 어려운 다양한 방사성의 약품개발에 유용하게 이용될 수 있을 것이다.었으나 움직임 보정 후 영상을 이용하여 비교한 경우, 결합능 변화가 선조체 영역에서 국한되어 나타나며 그 유의성이 움직임 보정 전에 비하여 낮음을 알 수 있었다. 결론: 뇌활성화 과제 수행시에 동반되는 피험자의 머리 움직임에 의하여 도파민 유리가 과대평가되었으며 이는 이 연구에서 제안한 영상정합을 이용한 움직임 보정기법에 의해서 개선되었다. 답이 없는 문제, 문제 만들기, 일반화가 가능한 문제 등으로 보고, 수학적 창의성 중 특히 확산적 사고에 초점을 맞추어 개방형 문제가 확

• The Sea:JOURNAL OF THE KOREAN SOCIETY OF OCEANOGRAPHY
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• v.2 no.2
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• pp.53-68
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• 1997

Lake Shihwa, artificially constructed since 1988, shows a typical two-layered system depending on strong haline density stratification. Sill of the water gate at 6 m depth greatly restricts physical mixing with outer seawater and circulation in the lake, and contributes to the enhancement of anoxic environment in the deeper layer. With this enclosed physical environment, Lake Shihwa receives enormous amounts of organics, ammonia, and other pollutants from the neighboring municipal and industrial complexes through six major streams, thus developing biogeochemical differentiation of anoxic to suboxic environment in the high saline bottom water and highly eutrophicated brackish surface water. This study investigated vertical structures, biogeochemical behaviors and processes of various organic and inorganic compounds around oxic-anoxic interface. Nitrite and nitrate rapidly decreased below the pycnocline where about $1{\times}10^8$ tons of hypoxic bottom water exist. In this bottom layer, ammonium ranged from 75 to 360 ${\mu}M$ mainly resulting from deamination of dissolved organic nitrogen and ammonification of precipitated organic particles. Despite large amounts of surface water discharge and dilution by outer seawater inflow about $3{\times}10^8$ tons from April to August, 1996, bottom layer did not show any improvement of water quality and maintained highly reduced environment. The main reason seems to be imbalance between ineffectiveness of dilution due to shallow depth and large surface area, overloaded POC influx from the eutrophicated surface biological activity, and poor replenishment of oxygen in this artificial lake system. Therefore, as long as current salinity dependent two-layered system maintains with its physical limitations, any improvement of water quality cannot be foreseen in Lake Shihwa.

• Economic and Environmental Geology
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• v.34 no.1
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• pp.25-38
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• 2001

Contrasts in the style of the gold-silver mineralization in geologic and tectonic settings in Korea, together with radiometric age data, reflect the genetically different nature of hydrothermal activities, coinciding with the emplacement age and depth of Mesozoic magmatic activities. It represents a clear distinction between the plutonic settings of the Jurassic Daebo orogeny and the subvolcanic environments of the Cretaceous Bulgugsa igneous activities. During the Daebo igneous activities (about 200-130 Ma) coincident with orogenic time, gold mineralization took place between 197 and 127 Ma. The Jurassic deposits commonly show several characteristics: prominent association with pegmatites, low Ag/Au ratios in the ore-concentrating parts, massive vein morphology and a distinctively simple mineralogy including Fe-rich sphalerite, galena, chalcopyrite, Au-rich eIectrum. pyrrhotite and/or pyrite. During the Bulgugsa igneous activities (120-60 Ma), the precious-metal deposits are generally characterized by such features as complex vein morphology, medium to high AgiAu ratios in the ore concentrates, and abundance of ore minerals including base-metal sulfides, Ag sulfides, native silver, Ag sulfosalts and Ag tellurides. Vein morphology, mineralogical, fluid inclusion and stable isotope results indicate the diverse genetic natures of hydrothermal systems. The Jurassic Au-dominant deposits were formed at the relatively high temperature (about 300 to 450$^{\circ}$C) and deep-crustal level (>3.0 kb) from the hydrothermal fluids containing more amounts of magmatic waters (3180; 5-10 %0). It can be explained by the dominant ore-depositing mechanisms as CO2 boiling and sulfidation, suggestive of hypo/mesothermal environments. In contrast, mineralization of the Cretaceous Au-Ag type (108-71 Ma) and Agdominant type (98-71 Ma) occurred at relatively low temperature (about 200 to 350$^{\circ}$C) and shallow-crustal level «1.0 kb) from the ore-fonning fluids containing more amounts of less-evolved meteoric waters (15180; -10-5%0). These characteristics of the Cretaceous precious-metal deposits can be attributed to the complexities in the ore-precipitating mechanisms (mixing, boiling, cooling), suggestive of epilmesothermal environments. Therefore, the differences of the emplacement depth between the Daebo and the Bulgugsa igneous activities directly influence the unique temporal and spatial association of the deposit type.

• Economic and Environmental Geology
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• v.32 no.5
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• pp.435-444
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• 1999

The antimony deposits of the Hyundong mine, located in the northeastern part of the Sobaegsan massif, occur as hydrothermal quartz+carbonate veins and stockworks which fill the fault fractures developed in Precambrian metamOlphic rocks (mainly, granitic gneiss). Hydrothermal alteration occurs commonly in the vicinity of mineralized veins and is characterized by sericitization and silicification. A K-Ar age of alteration sericite is 139.2$\pm$ 4.4 Ma, implying the early Cretaceous age of mineralization, possibly in association with intrusion of nearby acidic dikes (mainly, quartz porphyry). The hydrothermal mineralization occurred in five mineralization stages. These are: (I) stage I, characterized by deposition of chalcedonic quartz; (2) stage II, deposition of quartz with base-metal sulfides and stibnite; (3) stage III, deposition of quartz and carbonates (calcite, dolomite, ankerite, rhodochrosite) with various antimony-bearing minerals such as stibnite, polybasite, berthierite, native antimony, gudmundite and ullmannite; (4) stage IV, deposition of calcite with stibnite; and (5) stage V, deposition of barren calcite. Antimony occurs mostly as stibnite within stages II to IV veins, which has various habits including disseminated, veinlets and euhedral coarse crystals. Fluid inclusion studies indicate that hydrothermal mineralization at Hyundong occurred from the fluids with temperature and salinity of $330^{\circ}$C to 120 and 5.3 wI. % equiv. NaCI. The temperature and salinity of ore fluids systematically decreased with elapsed time in the course of mineralization, possibly due to the influx of larger amounts of meteoric groundwater. The deposition of antimony-bearing minerals occurred at low temperatures «$250^{\circ}$C), mainly due to the cooling and dilution of fluids. Based on the evidence of fluid boiling during the early stage II mineralization, the mineralization occurred under low pressure conditions (about 80 bars, corresponding to depths of about 350 m under hydrostatic pressure regime). Thermodynamic considerations of ore . mineral assemblages indicate that antimony deposition also occurred as the results of decreases in temperature and sulfur fugacity of hydrothermal fluids. Calculated sulfur isotope composition of ore fluids ($\delta^{34}S_{\Sigma s}$=5.4 to 7.8$\textperthousand$) indicates an igneous source of sulfur.

• Economic and Environmental Geology
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• v.36 no.1
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• pp.27-38
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• 2003

Arsenic contamination around Au-Ag mining areas occurs mainly from the oxidation of arsenopyrite which is frequently contained in mine tailings. In weathered tailings, oxidation of sulfide minerals typically results in the formation of abundant ferric (oxy)hydroxides or (oxy)hydroxysulfates near the tailings surface, and arsenic may be associated with these secondary precipitates. In this study, solid phases of arsenic in weathered tailings of some Au-Ag mines were investigated through the SEM/EDS and sequential extraction analyses. The stability of As solid phases and the leaching potential were assessed with the variation of pH and Eh conditions. Oxidation of sulfides in the tailings samples was indicated by depletion of S molar concentrations compared to As and heavy metals. Under XRD examinations, jarosite as an Fe-oxyhydroxysulfate was found in the tailings of Deokeum, Dongil and Dadeok, and scorodite as an As-bearing crystalline mineral was identified from Dadeok which has the highest concentration of As (4.36 wt.%). Beudantite-like phases and some Pb-arsenates were also found under SEM/EDS analysis, and most of As phases were associated with Fe-(oxy)hydroxides and (oxy)hydroxysulfates despite a few arsenopyrite from Samgwang and Gubong. Sequential extraction analysis also showed that As was present predominantly as coprecipitated with Fe hydroxides from Dongil, Dadeok and Myungbong (72∼99%), and as sulfides (58%) and Fe hydroxide-associated forms (40%) from Samgwang and Gubong. In the tailings leaching experiment, As was released with high amounts by the dissolution of As-bearing Fe(oxy)hydroxysulfates in the lowest pH (2.7) conditions of Deokeum, and by desorption under alkaline conditions of Samgwang and Gubong. Higher leaching rates of arsenite(+3) were found under acidic conditions, which pose a higher risk to water quality. Changes in pH and Eh conditions coupled with microbial processes could influence the stabilities of the As solid phases, and thus, time amendments or landfilling of weathered tailings may result in enhanced As mobilization.

• Korean Journal of Environmental Biology
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• v.34 no.1
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• pp.18-29
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• 2016

The effects of water temperature, salinity, water column nutrient contents, and phytoplankton primary productivity on pigment composition and concentration, as well as primary productivity of Pyropia yezoensis Ueda purple lavers were studied at the primary cultivation areas in the Manho (Jindo-Haenam) region on the southwestern coast of Korea in March 2014. The water temperature was $9.1{\sim}9.6^{\circ}C$, salinity was 32.5~33.1, and transparency was 0.7~1.5 m. The shallow euphotic depth resulted from the high turbidity. Water column dissolved inorganic nitrogen (DIN), dissolved inorganic phosphorus (DIP), and silicate concentrations were $3.59{\sim}5.73{\mu}M$, $0.16{\sim}0.41{\mu}M$, and $12.41{\sim}13.94{\mu}M$, respectively. Chlorophyll a (Chl a) concentration was $0.51{\sim}1.25{\mu}g\;L^{-1}$. Nanoplankton ($0.7{\sim}20{\mu}m$ size class) accounted for 58% of the total Chl a concentration. Fucoxanthin was the dominant photosynthetic pigment at all sites. Microplankton ($20{\sim}200{\mu}m$ size class) accounted for 64% of the total fucoxanthin concentration. The primary productivity of phytoplankton was $57.72{\pm}4.67(51.05{\sim}66.71)mg\;C\;m^{-2}d^{-1}$. The nanoplankton ($0.7{\sim}20{\mu}m$ size class) accounted for 77% of the total phytoplankton primary productivity. The calculated phytoplankton primary productivity was $11,337kg\;C\;d^{-1}$. The primary productivity of Pyropia blades was $1,926{\pm}192(1,102{\sim}2,597)mg\;C\:m^{-2}d^{-1}$, i.e., calculated as $39,295kg\;C\;d^{-1}$. The total primary productivity of phytoplankton and Pyropia blades was $50,632kg\;C\;d^{-1}$. The primary productivity of Pyropia blades was 3.5 times greater than that of phytoplankton in the Manho region on the southwestern coast of Korea.

• Korean Journal of Soil Science and Fertilizer
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• v.41 no.1
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• pp.26-33
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• 2008

Soil nutrient status in an organic apple farm was evaluated in relation to a conventional farm to better understand the effects of organic farming system on soil fertility. Soil organic matter, total and mineral N, available P, exchangeable cations, and available micronutrients were monitored at depth of 5-20 cm from May to October in 2006. Average soil organic matter content was 63.3 and $31.0g\;kg^{-1}$ in organic and conventional farm, respectively. Total N content was 3.3 and $1.7g\;kg^{-1}$ in average for organic and conventional farm, respectively. Ammonium and nitrate N in organic farming were maintained at relatively stable levels, but in the conventional farm the levels were very high in early season due to the chemical fertilizer application. In the organic apple farm, available P content in May was lower than that found in the conventional farm, but during the growing season available P content was continuously increased and in August the content was more than $1000mg\;P_2O_5\;kg^{-1}$. The organic farm maintained relatively greater exchangeable K, Ca, and Mg levels than the conventional farm. Available Cu, Fe, and Mn contents in the conventional farm were relatively greater than those found in the organic farm. However, available Zn extracted in 0.1 M HCl was much greater in the organic farm. Nutrient levels above crop needs were observed in both conventional and organic apple farm suggesting a more appropriate management of soil nutrients in organic farming to secure its fundamental functions for the sustainable agriculture.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.57-58
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• 2011

III-V족 화합물 반도체의 일종인 InSb는 77 K에서 0.23 eV의 작은 밴드 갭을 가지며 높은 전하 이동도를 가지고 있기 때문에 대기권에서 전자파 흡수가 일어나지 않는 3~5 ${\mu}m$범위의 장파장 적외선 감지가 가능하여 중적외선 감지 소자로 이용되고 있다. 하지만 InSb는 밴드 갭이 매우 작기 때문에, 소자 제작시 누설전류에 의한 소자 특성의 저하가 문제시 되고 있다. 또한 다른 화합물 반도체에 비해 녹는점이 낮고, 휘발성이 강한 5족 원소인 Sb의 승화로 기판의 화학양론적 조성비(stoichiometry)가 변하기 쉬워, 계면특성 저하의 원인이 된다. 따라서 우수한 특성을 가지는 적외선 소자의 구현을 위해서, 저온에서 계면 특성이 우수한 고품질의 절연막 증착 연구가 필수적이다. 본 연구에서는 InSb 기판 위에 $SiO_2$, $Si_3N_4$의 절연막 형성시 증착온도의 변화에 따른 계면 트랩 밀도를 분석하였다. $SiO_2$, $Si_3N_4$ 절연막은 플라즈마 화학 기상 증착법(PECVD)을 이용하여 n형 InSb 기판 위에 증착하였으며, 증착온도를 $120^{\circ}C$부터 $240^{\circ}C$까지 변화시켰다. Metal oxide semiconductor(MOS) 구조 제작을 통하여, 커패시턴스-전압(C-V)분석을 진행하였으며, 절연막과 InSb 사이의 계면 트랩 밀도를 Terman method를 이용하여 계산하였다[1]. 또한, $SiO_2$와 $Si_3N_4$의 XPS 분석과 TOF-SIMS 분석을 통하여 계면 트랩 밀도의 원인을 밝혀 보았다. $120{\sim}240^{\circ}C$ 온도 범위에서 계면 트랩 밀도는 $Si_3N_4$의 경우 $2.4{\sim}4.9{\times}10^{12}cm^{-2}eV^{-1}$, $SiO_2$의 경우 $7.1{\sim}7.3{\times}10^{11}cm^{-2}eV^{-1}$ 값을 나타냈고, 두 절연막 모두 증착 온도가 증가할수록 계면 트랩 밀도가 증가하는 경향을 보였다. 그러나 모든 샘플에서 $Si_3N_4$의 경우, flat band voltage가 음의 전압으로 이동한 반면, $SiO_2$의 경우, 양의 전압으로 이동하는 것을 확인할 수 있었다. 계면 트랩 밀도 증가의 원인을 확인하기 위해서, oxide를 $120^{\circ}C$, $240^{\circ}C$에서 증착시킨 샘플을 XPS 분석을 통하여 깊이에 따른 성분분석을 하였고, 그 결과, $240^{\circ}C$에서 증착된 샘플에서 계면에서 $In_2O_3$와 $Sb_2O_3$ 피크의 증가를 확인하였다. 이는 계면에서 oxide양이 증가함을 의미하며, 이렇게 생성된 oxide는 계면 트랩으로 작용하므로, 계면 특성을 저하시키는 원인으로 작용함을 알 수 있었다. Nitride 절연막을 증착시킨 샘플은 TOF-SIMS 분석을 통해, 계면에서의 성분 분석을 하였고, 그 결과, $240^{\circ}C$에서 증착된 샘플에서 In-N, Sb-N, Si-N 결합의 감소를 확인하였다. 이렇게 분해된 결합들의 dangling 결합이 늘어 계면 트랩으로 작용하므로, 계면 특성을 저하시키는 원인으로 작용함을 알 수 있었다. 최종적으로, 소자특성을 확인 하기 위하여 계면 트랩 밀도가 가장 낮게 측정된 $200^{\circ}C$ 조건에서 $SiO_2$ 절연막을 증착하여 InSb 적외선 소자를 제작하였다. 전류-전압(I-V) 분석 결과 -0.1 V에서 16 nA의 누설 전류 값을 보였으며, $2.6{\times}10^3{\Omega}cm^2$의 RoA(zero bias resistance area)를 얻을 수 있었다. 절연막 증착조건의 최적화를 통하여, InSb 적외선 소자의 특성이 개선됨을 확인할 수 있었다.

• Journal of Life Science
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• v.27 no.10
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• pp.1152-1160
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• 2017

A unicellular green alga was axenically isolated from a tidal pool on Ulleung-do, Korea. Morphological, molecular, and biochemical analyses revealed that the isolate belonged to Auxenochlorella protothecoides. The current study is the first record of this species in Korea. The microalgal strain was named as A. protothecoides MM0011 and its growth, lipid and pigment compositions, and biomass properties were investigated. The strain is able to thrive in a wide range of temperatures ($5{\sim}35^{\circ}C$) and to withstand up to 1.5 M NaCl. The results of GC/MS analysis showed that the isolate was rich in nutritionally important polyunsaturated fatty acids (PUFAs). Its major fatty acids were linoleic acid (27.6%) and ${\alpha}-linolenic$ acid (39.6%). Thus, this indigenous microalga has potential as an alternative source of ${\omega}3$ and ${\omega}6$ PUFAs, which currently come from fish and plant oils. Also, the HPLC analysis revealed that the value-added antioxidant, lutein, was biosynthesized as the accessory pigments by the microalga. A proximate analysis showed that the volatile matter content was 85.6% and an ultimate analysis indicated that the gross calorific value was $20.3MJ\;kg^{-1}$. Since 40.5% of total nitrogen and 27.9% of total phosphorus were removed from the medium, respectively, it also has potential as a feedstock for biofuel applications which could be coupled to wastewater treatment. In addition, the biomass may also serve as an excellent animal feed because of its high protein content (51.4%). Therefore, A. protothecoides MM0011 shows promise for application in production of microalgae-based biochemicals and as a biomass feedstock.

• Korean Journal of Agricultural and Forest Meteorology
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• v.9 no.2
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• pp.149-160
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• 2007

KoFlux Gwangneung Supersite comprises complex topography and diverse vegetation types (and structures), which necessitate complementary multi-disciplinary measurements to understand energy and matter exchange. Here, we report the results of this ongoing research with special focuses on carbon/water budgets in Gwangneung forest, implications of inter-dependency between water and carbon cycles, and the importance of hydrology in carbon cycling under monsoon climate. Comprehensive biometric and chamber measurements indicated the mean annual net ecosystem productivity (NEP) of this forest to be ${\sim}2.6\;t\;C\;ha^{-1}y^{-1}$. In conjunction with the tower flux measurement, the preliminary carbon budget suggests the Gwangneung forest to be an important sink for atmospheric $CO_2$. The catchment scale water budget indicated that $30\sim40%$ of annual precipitation was apportioned to evapotranspiration (ET). The growing season average of the water use efficiency (WUE), determined from leaf carbon isotope ratios of representative tree species, was about $12{\mu}mol\;CO_2/mmol\;H_2O$ with noticeable seasonal variations. Such information on ET and WUE can be used to constrain the catchment scale carbon uptake. Inter-annual variations in tree ring growth and soil respiration rates correlated with the magnitude and the pattern of precipitation during the growing season, which requires further investigation of the effect of a monsoon climate on the catchment carbon cycle. Additionally, we examine whether structural and functional units exist in this catchment by characterizing the spatial heterogeneity of the study site, which will provide the linkage between different spatial and temporal scale measurements.