Electrical and optical properties of hydrogenated nano-crystalline and amorphous silicon thin films deposited by HDP PECVD (HDP PECVD로 증착된 수소화된 나노결정립과 비정질 실리콘 박막의 전기적, 광학적 특성)
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- Proceedings of the Materials Research Society of Korea Conference
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- 2003.03a
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- pp.41-41
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- 2003