Selective Epitaxial Growth of Si and SiGe using Si-Ge-H-CI System for Self-Aligned HBT Applications (Si-Ge-H-CI 계를 이용한 자기정렬 HBT용 Si 및 SiGe 의 선택적 에피성장)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2002.11a
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- pp.182-185
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- 2002