• Title/Summary/Keyword: 열 전달 해석

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열분해 반응기 내에서의 Si 오염입자에 관한 수치해석적 연구

  • U, Dae-Gwang;Kim, Tae-Seong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.363-363
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    • 2011
  • 열분해 반응기 내에서 실리콘 필름을 성장시키는 것은 반도체/디스플레이, 태양전지, 신소재 등 다양한 분야에서 중요한 공정이다. 더욱이 반도체 소자 선폭이 줄어들면서 나노입자의 오염 제어가 더불어 중요해지고 있다. 생산 공정 기술의 집적화에 따라 패턴 사이 거리가 작아지고, 이에 불과 수 십 나노미터크기의 오염입자에 의해서 패턴불량이 발생하고 생산수율을 감소시킨다. 일반적으로 반도체 공정 중 발생한 오염입자는 반응기 내의 가스가 물리/화학적 공정에 의해 핵생성(nucleation)이 일어나 핵(nuclei)이 생성되고, 이 때 표면반응 및 응집(coagulation)에 의해 성장하게 된다. 이에 본 연구에서는 열분해 반응기 내에서 사일렌(SiH4) 가스를 열분해하여 발생되는 실리콘 오염입자의 핵생성과 성장 모델을 정립하고, 생성된 오염입자의 거동과 전달 현상을 이론적으로 고찰하였다. 열분해 반응기와 같은 기상공정(Gas to particle conversion)에서 오염입자가 생성될 때, 그 성질과 크기 등에 물리/화학적 영향을 주는 요소는 전구체/이송기체의 농도 및 유량, 작동 압력, 작동 온도와 반응기 고유 특성 등이 있다. 수치해석의 정당성과 빠른 계산을 위해 단순화시킨 0D 모델인 Batch 반응기와 1D모델인 plug flow 반응기 등에서 SiH4 가스의 열분해 과정시 생성되는 Si cluster를 상용코드인 CHEMKIN 4.1.1을 이용하여 계산하였으며, 2D모델인 Shear flow 반응기로 확장시켜 Si 오염입자가 생성특성을 연구하였다.

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Thermal Design and Analysis for Space Imaging Sensor on LEO (지구 저궤도에서 운용되는 영상센서를 위한 열설계 및 열해석)

  • Shin, So-Min;Oh, Hyun-Ung
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.39 no.5
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    • pp.474-480
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    • 2011
  • Space Imaging Sensor operated on LEO is affected from the Earth IR and Albedo as well as the Sun Radiation. The Imaging Sensor exposed to extreme environment needs thermal control subsystem to be maintained in operating/non-operating allowable temperature. Generally, units are periodically dissipated on spacecraft panel, which is designed as radiator. Because thermal design of the imaging sensor inside a spacecraft is isolated, heat pipes connected to radiators on the panel efficiently transfer dissipation of the units. First of all, preliminary thermal design of radiating area and heater power is performed through steady energy balance equation. Based on preliminary thermal design, on-orbit thermal analysis is calculated by SINDA, so calculation for thermal design could be easy and rapid. Radiators are designed to rib-type in order to maintain radiating performance and reduce mass. After on-orbit thermal analysis, thermal requirements for Space Imaging Sensor are verified.

Heat Transfer Simulation of the Vehicle Heater (차량용 무시동 히터의 열전달 해석)

  • Lee, Jun-Sun;Park, Sung-Young
    • Proceedings of the KAIS Fall Conference
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    • 2010.05b
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    • pp.1004-1006
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    • 2010
  • 차량에 사용되는 무시동 히터 열교환기의 효율 개선을 위하여 열전달 해석을 수행하였다. 연구에 사용된 히터는 연료 공급관을 통해 연소부로 연료를 공급하고 연소시켜, 열교환기에 열을 전달한다. 열전달 효율을 증대시키기 위하여 열전달면 및 연소면의 형상을 해석적으로 개발하였다. 개선된 열교환기 모델은 외부 형상을 기존 제품과 동일하게 설계하여 단품상으로 교체가 가능하도록 설계 하였다. 해석 결과 기존 모델에 대비 개선된 모델에서 열전달 효율이 약 5.6배 향상되었다.

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A Numerical Study of Heat and Mass Transfer Phenomena for Thermal Protection Material (열보호재료의 열 및 물질전달 현상에 관한 수치해석적 연구)

  • Kim, Jung-Hoon;Kwon, Chang-Oh;Seo, Jeong-Il;Bai, Cheol-Ho;Song, Dong-Joo
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.23 no.9
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    • pp.1201-1212
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    • 1999
  • A numerical analysis is performed to predict the thermal response and ablation rate for charring or non-charring material which is designed to be used as thermal protection system (TPS). The numerical program composed of in-depth energy balance equation and the aerotherm chemical equilibrium (ACE) program. The ACE program calculates various thermochemical state from ablation products. The developed numerical program is verified by comparing the reported results from literature. The sensitivity tests for input parameters are performed. The thermal behavior of ablating material is mainly affected by density of ablating material, convective heat transfer coefficient and recovery enthalpy of flow field.

Thermodynamic Analysis of the Diabatic Efficiency of Turbines and Compressors (터빈과 압축기의 비단열 효율에 대한 열역학적 해석)

  • Park, Kyoung Kuhn
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.40 no.3
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    • pp.139-148
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    • 2016
  • Thermodynamic analysis is conducted on the first-order approximation model for turbines and compressors. It is shown that the adiabatic efficiency could be greater than unity, depending on the entropic mean temperature, entropy generation, thermal reservoir temperature, and heat transfer. Therefore, adiabatic efficiency applied to a diabatic control volume results in an error overestimating its performance. To resolve this overestimation, it is suggested that a reversible diabatic process be referred to as an ideal process to evaluate diabatic efficiency. The diabatic efficiency suggested in this work is proven to always be less than unity and it is smaller than the exergy efficiency in most cases. The diabatic efficiency could be used as a more general definition of efficiency, which would include adiabatic efficiency.

The Effect of Ultrasonic Vibration on Heat Transfer Augmentation of Forced Convective Flow in Circular Pipes (초음파 진동이 관내 강제대류 유동의 열전달 증진에 미치는 영향)

  • Jeong Ji Hwan
    • Journal of Energy Engineering
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    • v.13 no.4
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    • pp.275-280
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    • 2004
  • Augmentation of heat transfer by ultrasonic vibration in pipes are investigated. Measurements of convective heat transfer coefficients on circular pipe walls are made with and without ultrasonic vibration applied to water. These data are compared with each other to quantify the effects of ultrasonic vibration on heat transfer enhancement. Numerical analysis has been also performed in order to extend the ranges of examined temperature and flow rate. FLUENT Ver.6.1 is used to simulate velocity and temperature fields and evaluate heat transfer coefficient with and without ultrasonic vibration. The results show that the ultra- sonic vibration enhances the Nusselt number of forced convection flow and the increase rate strongly depends on flow rate.

Thermoacoustic Analysis Model for Combustion Instability Prediction - Part 1 : Linear Instability Analysis (연소 불안정 예측을 위한 열음향 해석 모델 - Part 1 : 선형 안정성 해석)

  • Kim, Daesik;Kim, Kyu Tae
    • Journal of the Korean Society of Propulsion Engineers
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    • v.16 no.6
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    • pp.32-40
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    • 2012
  • For predicting eigenfrequency and initial growth rate of combustion instabilities in lean premixed gas turbine combustor, linear thermoacoustic analysis model was developed in the current paper. A model combustor was selected for the model validation, which has well-defined inlet and outlet conditions and a relatively simple geometry, compared to the combustor in the previous works. Analytical linear equations for thermoacoustic waves were derived for a given combustion system. It was found that the prediction results showed a good agreement with the measurements, even though there was underestimation for instability frequencies. This underestimation was more obvious for a longer flame (i.e. wider temperature distribution) than for a shorter flame.

Numerical Analysis of Conjugate Heat Transfer for Various Ice-Ball Shapes (다양한 아이스 볼 형상에 대한 복합열전달의 수치해석)

  • Park, Seo Won;Kim, Myoung Soo;Jeon, Byoung Jin;Choi, Hyoung Gwon
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.40 no.9
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    • pp.605-612
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    • 2016
  • In this study, numerical simulations were conducted for conjugate heat transfer around ice balls in an encapsulated ice thermal storage system. Four shapes of ice balls were modeled; the default one was a sphere, and the other three shapes were designed to enhance convective heat transfer through the ball surface. The flow around the ball was laminar, for which the Reynolds number was 300, and both forced and natural convections inside and outside the balls were considered. The simulations revealed that the magnitude of convective heat transfer for the different shapes decreased in the following order: bone, dimple, hole, and sphere. For the entire simulation, the maximum difference in the average temperatures of water inside the capsules was found to be $0.9^{\circ}C$. Therefore, it can be said that the effect of ice-ball shape on the performance of the ice thermal storage system is significant, considering that more than 0.3 million balls are used in this system.

Heat Transfer by Heat Generation in Electrochemical Reaction of PEMFC (고분자 전해질 연료전지에서 전기화학반응 열생성에 의한 열전달특성)

  • Han, Sang-Seok;Lee, Pil-Hyong;Lee, Jae-Young;Park, Chang-Soo;Hwang, Sang-Soon
    • Journal of the Korean Electrochemical Society
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    • v.11 no.4
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    • pp.273-283
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    • 2008
  • GDL(Gas Diffusion Layer) is one of the main components of PEM fuel cell. It transports reactants from the channel to the catalyst and removes reaction products from the catalyst to the channels in the flow filed plate. It is known that higher permeability of GDL can make it possible to enhance the gas transport through GDL, leading to better performance. And MEA's temperature is determined by gas and heat transport. In this paper, three dimensional numerical simulation of PEM fuel cell of parallel channel and serpentine channel by the permeability of GDL is presented to analysis heat and mass transfer characteristics using a FLUENT modified to include the electrochemical behavior. Results show that in the case of parallel channel, performance variation with change of permeability of GDL was not so much. This is thought because mass transfer is carried out by diffusion mechanism in parallel channel. Also, in the case of serpentine channel, higher GDL permeability resulted in better performance of PEM fuel cell because of convection flow though GDL. And mass transfer process is changed from convection to diffusion when the permeability becomes low.

A Numerical Study on the Performance and Transfer Characteristics of Phosphoric Acid Fuel Cell (인산형 연료전지의 성능 및 전달현상에 관한 연구)

  • 전동협;채재우
    • Proceedings of the Korea Society for Energy Engineering kosee Conference
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    • 1994.11a
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    • pp.9-13
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    • 1994
  • 인산형 연료전지내 열 및 물질전달 특성에 대하여 FDM과 시행착오법에 의하여 3차원 해석이 이루어졌다. Z병행류와 Z대향류를 대상으로 냉각공기 유입방향을 바꿔가며 전류밀도가 평균온도, 전압, 온도분포차, 전류밀도분포차에 미치는 영향에 대하여 고찰하였다. 본 연구의 결과로 Stack에서의 최적조건을 도출하여 연료전지의 성능향상에 도움이 되리라 기대된다.

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