• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.571-572
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• 2006

Tungsten CMP needs interconnect of semiconductor device ULSI chip and metal plug formation, CMP technology is essential indispensable method for local planarization. This Slurry development also for tungsten CMP is important, slurry of metal wiring material that is used present is depending real condition abroad. It is target that this research makes slurry of efficiency that overmatch slurry that is such than existing because focus and use colloidal silica by abrasive particle to internal production technology development. Compared selectivity of slurry that is developed with competitor slurry using 8" tungsten wafer and 8" oxide wafer in this experiment. And removal rate measures about density change of $H_2O_2$ and Fe particle. Also, corrosion potential and current density measure about Fe ion and Fe particle. As a result, selectivity find 83:1, and expressed similar removal rate and corrosion potential and current density value comparing with competitor slurry.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.561-562
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• 2006

The purpose of this study was to investigate the root cause of adhesion of silica and ceria particles during Poly-Si, TEOS, and SiN CMP process, respectively. The zeta-potentials of abrasive particles and wafers were observed negative surface charges in the alkaline solutions. SAC and STI patterned wafers have intermediate values of their composition surface's zeta potentials. The theoretical interaction force and adhesion force of silica and ceria particle were calculated in solution with acidic, neutral and alkaline pH. A stronger attractive force was calculated for silica and ceria particles on wafers in acidic solutions than in alkaline solutions. The theoretical interaction forces of the SAC and STI patterned wafers have intermediate values of their constitution wafer's values. The adhesion forces is observed lower values in alkaline solutions than in acidic solutions. And the ceria particle has lower adhesion than that of the silica particle.

• Journal of Korean Society of Occupational and Environmental Hygiene
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• v.22 no.3
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• pp.184-190
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• 2012

Objectives: This study aimed to characterize the nanoparticles produced by welding and grinding processes. Methods: The number concentrations of particles were mapped to determine the distribution of welding fumes in a workplace atmosphere using a hand-held condensation particle counter. An electrical low-pressure impactor was used for measuring the number concentration and particle size distribution. Results: High number concentrations were found around arc cutting and welding (grinding) processes. In the worker's breathing zone, the mean number concentration was 655,000 particles/cm3 and the count median diameter (CMD) was 84 nm with several multi peak distributions (~20, 70, 300 nm). However, at a distance of 3 m from the welding position, the number concentration decreased to 153,000 particles/cm3 with a 70 nm single peak size distribution. During a grinding process, peaks with high concentrations of nanoparticles were temporarily observed. The mean number concentration was 1,520,000 particles/cm3, and the CMD was 30 nm. Nanoparticles (<100 nm) made up 58% and 92% of the aerosols produced by welding and grinding processes, respectively.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.6 s.171
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• pp.109-117
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• 2005

In case of fine machining processes, the cutting state monitoring by a skilled operator is impossible because the physical changes generated during fine machining are very weak. To realize the high efficient and precise fine machining, it is necessary to develop the sensor based monitoring system which is able to detect the fine changes of cutting state. In this paper, the fine acoustic emission monitoring system is developed to monitor the state of the fine machining process. The developed system consists of the AE sensor and the AE signal processing unit. And this has the high-sensitivity and bandwidth which can detect fine AE signal generated during fine machining process. In order to investigate the feasibility of the developed system, evaluation experiments were performed in the fine fixed-abrasive machining processes such as polishing and glass ferrule slicing. Experimental results show that the developed monitoring system possesses an excellent real-time monitoring capability at fine machining processes.

• Journal of agriculture & life science
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• v.44 no.6
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• pp.141-146
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• 2010

In this study, Agrobacterium-mediated transformation was tested to the mycelium culture of Flamulina velutipes which is very popular as an edible mushroom in Korea. Particularly, aluminum oxide particles were used to generate wounds in F. velutipes mycelia via vigorous shaking prior to agro-infiltration. The result showed that transformants resistant to hygromycin could be obtained only from the mycelia with physical wounds. Gene transfer was verified by genomic DNA PCR. This study suggested a convenient tool to improve Agrobacterium-mediated transformation of F. velutipes.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.17 no.6
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• pp.91-97
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• 2018

Chemical mechanical polishing(CMP) realizes a surface planarity through combined mechanical and chemical means. In CMP process, Preston equation is known as one of the most general approximation of the removal rate. Effects of pressure and relative speed on the mechanical property of Cu CMP has been investigated. On the other hand, The amount of abrasion also increased with changes in pressure and speed, resulting in a proportional increase of temperature during CMP. Especially this temperature is an important factor to change chemical reaction in a Cu CMP. However, when the slurry temperature became higher than $70^{\circ}C$, the removal rate went lower due to abrasives aggregation and scratching occurred on the Cu film. Therefore, it was found that the slurry temperature should not exceed $70^{\circ}C$ during Cu CMP. Finally, authors could increase the pressure, speed and slurry temperature up to a ceratin level to improve the removal rate without surface defects.

• Journal of the Korea Organic Resources Recycling Association
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• v.30 no.3
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• pp.5-12
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• 2022

This study suggests the effective recycling method of sludge waste from various industrial fields to synthesize uniform colloidal silica nanoparticles. In detail, polymers are removed from the sludge waste to attain sludge-extracted silica (s-SiO₂) micron-sized particles, and ammonia assisted sonication is applied to s-SiO₂, which has effectively extracted the silanol precursor. The nano-sized silica (n-SiO₂) particles are successfully synthesized by a typical sol-gel method using silanol precursor. Also, the yield amounts of n-SiO₂ are determined by the function of s-SiO₂ etching time. Finally, n-SiO₂-based slurry is synthesized for the practical CMP application. As a result, rough-surfaced semiconductor chip is successfully polished by the n-SiO₂-based slurry to exhibit the mirror-like clean surface. In this regard, sludge wastes are successfully prepared as valuable semicondutor grade materials.

• Journal of Dental Rehabilitation and Applied Science
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• v.25 no.4
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• pp.361-374
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• 2009

For successful osteogenesis around the implants, interaction between implant surface and surrounding tissue is important. Biomechanical bonding and biochemical bonding are considered to influence the response of adherent cells. But the focus has shifted surface chemistry. The purpose of this study is to evaluate the MC3T3-E1 osteoblast like cell responses of magnesium (Mg) ion implanted titanium surface produced using a plasma source ion implantation method. Commercially pure titanium disc was used as substrates. The discs were prepared to produce four different surface, A: Machine turned surface, B: Mg implanted surface, C: sandblasted surface, D: sandblasted and Mg implanted surface. MC3T3 El osteoblastic like cells were cultured on the disc specimens. Cell adhesion, proliferation, differentiation, and synthesis of extracellular matrix were evaluated. The cell adhesion morphology was evaluated by SEM. RT PCR assay was used for assessment of cell adhesion, proliferation and differentiation. ALP activity was measured for cell differentiation. The results of this study were as follows: 1. SEM showed that cell on Mg ion groups was more proliferative than that of non Mg ion groups. On the machine turned surface, cell showed some degree of contact guidance in aligning with the machining grooves. 2. In RT PCR analysis, osteonectin and c-fos mRNA were more expressed on sandblasted and Mg ion implanted group. 3. ALP activity was not significantly different among all groups. Within the limitations of this study, the following conclusions were drawn: It might indicate Mg ion implanted titanium surface induce better bone response than non Mg ion groups.

• Restorative Dentistry and Endodontics
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• v.32 no.3
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• pp.180-190
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• 2007

The purpose of this study was to evaluate the abrasion resistance of surface penetrating sealant which was applied on a composite resin restoration and to provide proper time to reapply sealant on composite resin surface. Two hundred rectangular specimens, sized $8\times3\times2mm$, were made of Micronew (Bisco, Inc., Schaumburg, IL, U.S.A) and divided into two groups; F group (n = 10) was finished with coarse and medium grit of Sof-Lex discs and BisCoverwas applied B group (n = 190) after finishing with discs. B group was again subdivided into nineteen subgroups From B-1 group to B-18 group were subjected to toothbrush abrasion test using a distilled water-dentifrice slurry and toothbrush heads B-IM group was not subjected to toothbrush abrasion test. Average surface roughness (Ra) of each group was calculated using a surface roughness tester (Surfcorder MSE-1700: Kosaka Laboratory Ltd., Tokyo, Japan) . A representative specimen of each group was examined by FE-SEM (S-4700: Hitachi High Technologies Co., Tokyo, Japan). The data were analysed using cluster analysis, paired t-test, and repeated measure ANOVA. The results of this study were as follows; 1. Ra off group was $0.898{\pm}0.145{\mu}m$ and B-IM group was $0.289{\pm}0.142{\mu}m$. Ra became higher from B-1 group $(0.299{\pm}0.48{\mu}m$ to B-18 group $(0.642{\pm}0.313{\mu}m$. 2. Final cluster center of Ra was $0.361{\mu}m$ in cluster 1 $(B-IM\simB-7)$, $0.511{\mu}m$ in cluster 2 $(B-8\simB-14)$ and $0.624{\mu}m$ in cluster 3 ($(B-15\simB-18)$. There were significant difference among Ra of three clusters. 3 Ra of B-IM group was decreased 210.72% than Ra of F group. Ra of B-8 group and B-15 group was increased 35.49% and 51.35% respectively than Ra of B-IM group. 4. On FE-SEM, B-IM group showed the smoothest resin surface. B-8 group and B-15 group showed vertically shallow scratches , and wide and irregular vertical scratches on composite resin surface respectively. Within a limitation of this study, finished resin surface will be again smooth and glazy if BisCover would be reapplied within 8 to 14 months after applying to resin surface.

• Journal of the Korean earth science society
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• v.21 no.2
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• pp.174-187
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• 2000

The Quaternary coarse-grained sandy sediments are distributed along the channels of Seomjin River. The fluvial sediments were sedimentologically studied in horizontal and vertical distributions. To analyze depositional environments and facies changes in the sediments, sediment sampling from river mouth to upper stream and desctriptive approaches to the sediment profiles outcropped near Kurye were carried out. The sediments along the stream lines of the river are assigned to very coarse to coarse sand in grain size. The sediment grains are widely scattered in sorting and moderately sorted in average. For skewness and kurtosis, the sediments ranges from very fine to very coarse skewed and from very lepto-kurtic to extremelyl epto-kurtic states, respectively. The sediments are divided into slightly gravelly sand, gravelly sand and sandy gravel in sediment type. The pain shape in the sandy sediments are dominant in equant and tabular forms showing wide varieties. The sandy sediments are mostly poorly sorted and are highly variable in surface texture with SEM. Some smaller grains in the sediments ordinarily show polished surfaces. Of those grains, quartz ones are commonly angular to surounded. On the basis of facies changes and sedimentary structures, outcropped fluvial sediment profiles in Kurye are classified into xGyS, mGyS, gGyS, xSM, xS, mS, mGyM, IgM in facies. These eight facies are reformed as facies assemblage I and ll. The facies assemblage I and II are interpreted as the products of the channel deposits in braided stream and flood plain ones besides channels, respectively. The change facies assemblage I with facies assemblage ll imply that depositional environments hadbeen migrated from braied sream to flood plain ones.