• Journal of Institute of Control, Robotics and Systems
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• v.7 no.4
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• pp.334-343
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• 2001

Polishing a die that has free-form surfaces is a time-consuming and tedious job, and requires a considerable amount of high-precision skill. Some workers tend to gradually avoid the polishing work because of the poor environment caused by dust and noise. In order to reduce the polishing time and cope with the shortage of skilled workers, a user-friendly automatic polishing system was developed in this research. The polishing system with five degrees of freedom is able to keep the polishing tool normal to the die surface. The polishing system is controlled by a PC-NC controller. To easily operate the developed polishing robot system, this study developed an integrated program in the Windows environment. This program consists of four modules: the polishing module, the graphic simulator, the polishing data generation module, and the teaching module. Also, the automatic teaching system was developed to easily obtain teaching data and it consists of a three dimensional joystick and a proximity sensor. The joystick is used to simultaneously drive the polishing system to an arbitrary orientation and the proximity sensor is used to obtain teaching points precisely. Also, to evaluate the stability of the driving program and the teaching system, polishing experiments of a die of saddle shape were carried out.

• Journal of Dental Rehabilitation and Applied Science
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• v.24 no.3
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• pp.283-298
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• 2008

The purpose of this study was to evaluate mechanical fit of fixture- abutment-screw interface in the internal connection implant systems. In this study, each two randomly selected internal implant fixture- abutment assemblys from Certain, Xive, Replace, Ankylos, SS II. were used. The implants were perpendicularly mounted in liquid unsaturated polyester by use of dental surveyor. Each abutment was connected to the implant with recommended torque value using a torque controller. All samples were cross-sectioned with grinder-polisher unit after embeded in liquid unsaturated polyester, and then fixture-abutment-screw interfaces of all samples by using optical microscope and scanning electron microscope were analyzed. Conclusively, although a little variation in machining accuracy and consistency was noted in the samples, important features of all internal connection systems were the deep, internal fixture-abutment connections which provides intimate contact with the implant walls to resist micromovement, resulting in a strong stable interface.

• Journal of the Korean Society of Radiology
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• v.6 no.6
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• pp.477-481
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• 2012

An X-ray diffractometer which has various X-ray optics can give qualitative and quantitative information for a sample using a nondestructive analysis method. A parallel beam optic passes the parallel beam and removes divergent beam generated from an X-ray tube. The parallel beam optic used in the X-ray diffractometer was fabricated by wire cut and grading of stainless steel plates and was evaluated its performance using an X-ray imaging system. The measured parallelization of 6.6 mrad for the fabricated the parallel beam optic was a very close to the expected value of 6 mrad. An X-ray imaging technique for evaluating the parallel beam optics can estimate parallelization for each plate and can be used to other X-ray optics.

• Journal of Digital Contents Society
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• v.5 no.4
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• pp.251-256
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• 2004

The flatness of a silicon wafer concerned with ULSI chip is one of the most critical parameters ensuring high yield of wafers. That is necessary to constitute the circuit with high quality for he surface of silicon wafer, which comes to be base to make the direct circuit of the semiconductor, Flatness, therefore, is the most important factor to guarantee it wafer with high quality. The process of polishing is one of the most crucial production line among 10 processing stages to change the rough surface into the flatnees with best quality. Currently at this process, it is general for an engineer in charge to observe, judge and control the model of wafer from the monitor of measuring equipment with his/her own eyes to enhance the degree of flatness. This, however, is quite a troublesome job for someone has to check of process by one's physical experience. The purpose of this study is to approach the model of wafer with digital contents and to apply the result of the research for an algorithm which enables to control the polishing process by means of measuring the degree of flatness automatically, not by person, but by system. In addition, this paper shows that this algorithm proposed for the whole wafer flatness enables to draw an estimated algorithm which is for the thickness of sites to measure the degree of flatness for each site of wafer.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.28 no.12
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• pp.776-780
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• 2015

In this paper, we have studied the effect of mechanical polishing to Ga-polar face for reducing the wafer bowing and strain in free-standing GaN. After the mechanical polishing to Ga-polar face, the bowing of the free-standing GaN substrate significantly decreased with increasing the size of diamond slurry, and eventually changed the bowing direction from concave to convex. Furthermore, the full width at half maximum (FWHM) of high-resolution X-ray diffraction (HR-XRD) were decreased, especially the FWHM of (1 0 2) reflection for $1.0{\mu}m$ size of diamond slurry was significantly decreased from 630 to 203 arcsec. In the case, we confirmed that the compressive strain in Ga-polar face was fully released by Raman measurement.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2016.11a
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• pp.145-145
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• 2016

해양환경용 구조물은 극심한 부식 환경에 노출되어 있고 부식손상으로 인한 직간접적 경제적 손실이 발생하고 있는 상황이다. 이에 대한 방식대책으로써 음극방식법이 선박, 교량, 각종 화학장비에 널리 이용되고 있으며, 이러한 산업분야에 가장 흔히 적용되고 있는 음극방식 중 하나가 피방식체에 일정 전류 또는 음극 전위를 인가하는 외부전원법이다. 이는 전도성 부식환경인 해수환경 하에서 철강 및 해양환경용 구조 재료의 내식성을 월등히 향상시킬 수 있기 때문에 설계에 있어서 고급 내식재료 대신 경제적인 상용 재료를 적용할 수 있어 비용 절감효과를 가질 수 있다. 한편 적정 방식전위에서는 부식손상으로부터 강재를 보호하지만, 과방식 전위에서는 취성이 발생함으로써 내구성 감소의 역효과가 나타날 수도 있기 때문에 최적 방식전위의 규명은 반드시 필요하다. 따라서, 본 연구에서는 S355ML강에 대하여 천연해수 용액에서 다양한 정전위를 조건으로 전기화학실험을 실시하여 최적 방식전위를 규명하고자 하였다. 시험편은 에머리 페이퍼로 2000번까지 연마하였고, 아세톤과 증류수로 세척하여 실험하였다. 전기화학(정전위) 실험은 천연해수 속에서 $1.28cm^2$의 면적만을 노출시켜 진행하였으며, OCP로부터 -2.0V까지의 음극분극 곡선을 분석하여 정전위 조건들을 선정하였다. 그리고 외부 직류전원장치를 이용하여 1,200초 동안 다양한 정전위를 인가하였으며, 기준전극은 Ag/AgCl 전극을 이용하였다. 실험 후에는 주사전자현미경과 3D 현미경을 통해 시험편 표면을 관찰하였으며, 그 결과 일부 음극분극 구간에서 강재 표면에 전착물에 의한 뷸균일한 피막이 형성되었다. 또한, 일정 전위구간에서 용해 및 과전압에 대하여 표면손상 정도를 관찰하여, 해수환경 하에서 S355ML강의 최적 방식전위를 규명하였다.

• Journal of Digital Contents Society
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• v.14 no.1
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• pp.35-40
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• 2013

The use of slurry with a mix of abrasives and coolant for making Wire Saw in the photovoltaic industry has sharply increased with the semiconductor wafer. In this paper, the slurry was isolated, purified and dried by microwave drying method with high-purity silicon carbide powder obtained through chemical processing. Dried slurry bulk was first pulverized and chemical treatment was applied to produce powder. The produced slurry powder was then analyzed by going through the following analysis; thermal analysis, particle size analyses: SEM shots, elemental analysis, XRF and XRD. The results of this study found the recovery rate of the power obtained though the chemical processing to be higher than the one obtained from mineral processing. The results anticipate infrastructure building and active responses to increasingly stronger domestic and international environmental regulations through the integration and recycling of large amounts of slurry in the photovoltaic industry.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.8 no.6
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• pp.1369-1375
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• 2007

The recent, a large capacity of telecommunication networks is required in order to it is in proportion to capacity of information communication increase and to satisfy a demand because of the demand about Internet, a multimedia service of internet, Video of internet protocol(VoIP), Audio/Video streaming. As a result, DWDM(Dense Wavelength Division Multiplexing)technologies are emerging to be a prevailing the method of solving it without additional optical fiber network building and high-speed equipment. Therefore this thesis proposed the optical filter of fiber/multilayer slab coupled structure combining it to multilayer slab waveguide by polishing the cladding of one side of fiber to design the optical filter having these functions. When a separation distance of fiber and slab was $3{\mu}m$, The optical filter proposed as the simulation result was satisfied with a DWDM filter characteristic with FWHM of 0.1nm on TM mode and TE mode as 32nm polarization independence in a communication window of $1.3{\mu}m$ when center wavelength was each ${\lambda}_0=1.274755{\mu}m$ and ${\lambda}_0=1.30591{\mu}m$.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.329-329
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• 2010

반도체 및 디스플레이의 진공부품은 알루미늄 모제에 전해연마법(electrolytic polishing), 양극산화피막법(Anodizing), 플라즈마 용사법(Plasma spray) 등을 사용하여 $Al_2O_3$ 피막을 성장시켜 사용되고 있다. 반도체 제조공정 중 30~40% 이상의 비중을 차지하는 식각(etching) 및 증착(deposition) 공정은 대부분 플라즈마를 사용하고 있다. 플라즈마에 의해 화학적, 물리적 침식이 발생하여 코팅막에 손상을 일으켜 코팅막이 깨지거나 박리되면서 다량의 Particle을 생성함으로써 생산수율에도 문제를 야기 시킨다고 알려져 있다. 하지만 이들 코팅막을 평가하는 방법은 거의 전무하여 산업계에서 많은 애로를 겪고 있다. 이러한 코팅부품의 내플라즈마 성능평가 방법과 기준이 없어 적절한 교체시기를 파악하기 위한 코팅부품의 손상정도를 정량화 및 평가 방법의 표준화를 구축하는 연구를 수행하였다. 본 연구에서는 이러한 소재의 특성평가를 위해 공정에서 사용 중 손상되어 교체된 샘플의 모폴로지 관찰하고 내전압 측정으로 전기적 특성을 분석하여 손상 전, 후의 변화를 관찰하였다. 또한 플라즈마의 영향에 따른 코팅 막 형태 변화 및 전기적 특성의 변화를 알아보기 위하여 양극산화피막법(Anodizing)으로 $Al_2O_3$를 성장시킨 평가용 샘플을 제작한 후, Plasma chamber 장비를 이용하여 플라즈마 처리에 따른 코팅막의 내전압, 식각율, 표면 미세구조의 변화를 측정하였고 이를 종합적으로 고려하여 진공 장비용 코팅부품의 공정영향에 의한 내플라즈마 특성평가방법 개발에 관하여 연구하였다. 이러한 실험을 통해 플라즈마 처리 후 코팅 막에 크랙이 발생되는 것을 확인할 수 있었고 코팅 막의 손상으로 전기적 특성이 감소를 것을 확인할 수 있었다. 또한 ISPM 장비를 이용하여 진공 장비용 코팅부품이 플라즈마 공정에서 발생하는 오염 입자를 측정할 수 있는 방법을 연구하였다. 이러한 결과를 이용하여 진공공정에서 사용되는 코팅부품이 플라즈마에 의한 손상정도를 정량화 하고 평가방법을 개발하여 부품 양산업체의 진공장비용 코팅부품 개발 신뢰성 향상이 가능할 것으로 본다.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.11 no.7
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• pp.1359-1366
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• 2007

The recent, a large capacity of communication is required in order to it is in proportion to capacity of information communication increase and to satisfy a demand because of the demand about Internet, a multimedia service of Video of internet protocol(VoIP), Audio/Video steaming. DWDM(Dense Wavelength Division Multiplexing) technique has been emerged as the method of solving it without additional optical fiber network building and hish-speed equipment. Therefore this thesis proposed the optical filter of fiber/multilayer slab coupled structure combining it to multilayer slab waveguide by polishing the cladding of one side of fiber to design the optical filter having these functions. The optical filter proposed as the simulation result satisfies DWDM filter characteristic; 1) when the separation distance between fiber and slab is $4.15{\mu}m$ at the communication window of $1.5{\mu}m$, the polarization independence is 65nm, 2) when the center wavelengths about TM mode and TE mode are each ${\lambda}_0=1.54946\;{\mu}m$ and ${\lambda}_0=1.6144\;{\mu}m$ and, FWHM(Full at Half Maximun) is 0.1nm.