• Proceedings of the KSME Conference
• /
• 2008.11a
• /
• pp.1880-1884
• /
• 2008

Cleaning is required following CMP (chemical mechanical planarization) to remove particles. The minimization of particle residue is required with each successive technology generation, and the cleaning of wafers becomes more complicated. In copper damascene process for interconnection structure, it utilizes 2-steop CMP consists of Cu CMP and barrier CMP. Such a 2-steps CMP process leaves a lot of abrasive particles on the wafer surface, cleaning is required to remove abrasive particles. In this study, the buffing is performed various conditions as a cleaning process. The buffing process combined mechanical cleaning by friction between a wafer and a buffing pad and chemical cleaning by buffing solution consists of tetramethyl ammonium hydroxide (TMAH)/benzotriazole(BTA).

• Journal of the Korean Society for Precision Engineering
• /
• v.22 no.10 s.175
• /
• pp.90-98
• /
• 2005

A monitoring system is necessary to make the polishing process more reliable in order to ensure the high quality and performance of the final products. Generally, AE (Acoustic Emission) is known to be closely related to the material removal rate (MRR). As the surface becomes rougher, the MRR and AE increase. Therefore, the surface roughness can be indirectly estimated using the AE signal measured during the polishing. In this study, an AE sensor-based monitoring system was fabricated to detect the very small AE signal resulting from the friction between a tool and a workpiece during polishing. The performance of this monitoring system was estimated according to polishing conditions, the relation between the level of the AE RMS and the surface roughness during the polishing was investigated.

• Journal of the Korean Society of Manufacturing Process Engineers
• /
• v.13 no.1
• /
• pp.121-128
• /
• 2014

Superfinishing is essential for mirror surfaces, because among mechanical components cylindrical workpieces such as spindles must maintain precision and reliability with respect to functional characteristics. However, research on standardization of polishing film application combination to obtain mirror surfaces is insufficient. Consequently, this has been a factor in rising costs of mechanical components. Therefore, in this study, experiments have been conducted to determine efficient polishing film application combination for mirror surfaces ranging from ductile materials such as SM45C, brass, aluminium 7075, and titanium to brittle materials such as $Al_20_3$, SiC, $Si_3N_4$, and $ZrO_2$. From the experimental results, efficient polishing film application combination for metallic materials and ceramic materials is confirmed.

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.14 no.6
• /
• pp.2612-2617
• /
• 2013

This study aims to develop hair cutter with zirconia($ZrO_2$) material whose machinability, corrosion resistance, wear resistance and bio-compatibility are excellent by comparing iron hair cutter. Ultra-thin zirconia cutter with the thickness of 0.253mm is manufactured through the optimization of design, molding, sintering, grinding and grinding process. With observation result of cutter specimen by use of scanning electron microscope(SEM), formability and process of cutting face are shown to be good. It is also evaluated with sufficient merchantability by cutting test results. The cutter process technology of thin zirconia can be utilized at the development of high value-added beauty appliances like razor, beauty-razor and eye brows-razor for woman by use of study result.

• The Optical Journal
• /
• s.105
• /
• pp.49-56
• /
• 2006

한국광학기기협회에서는‘한·일 광산업 기술협력’을 보다 효율적으로 추진하기 위하여 해마다 일본 연수기관 및 기업에 대한 현장연수를 실시하고 있는 가운데, 올해는 처음으로 지난 8월에 일본정밀공학회(JSPE)에서 주최하는‘차세대 초정밀광학부품 나노가공기술연수’를 실시했다. 연수기관은 일본 센다이 소재의 동북대학(Tohoku University)으로 구리야가와 츠네모토 교수가 교육을 담당했다. 주요 연수 내용으로는 마이크로 광학부품가공/초정밀 비구면 렌즈 가공/전기점성유체를 이용한 비구면 렌즈 코아 연마/특수광학렌즈 SPDT 가공/초고속 가공/마이크로 AJM 가공/마이크로 초음파가공이며 본 고에서는 직접 연수에 참가 못한 독자들을 위해 연수내용을 번역 게재하고자 한다. 이달에는 제1장 연삭가공의 기초 게재를 시작으로 11월호에 이어서 나머지 2,3,4장 교육과정내용을 게재할 예정이다.

• Journal of Astronomy and Space Sciences
• /
• v.21 no.2
• /
• pp.141-152
• /
• 2004

Optics fabrication process for precision space optical parts includes bound abrasive grinding, loose abrasive lapping and polishing. The traditional bound abrasive grinding with bronze bond cupped diamond wheel leaves the machine marks of about $20{mu}m$ rms in height and the subsurface damage of about 1 ${mu}m$ rms in height to be removed by subsequent loose abrasive lapping. We explored an efficient quantitative control of precision CNC grinding. The machining parameters such as grain size, work-piece rotation speed and feed rate were altered while grinding the work-piece surfaces of 20-100 mm in diameter. The input grinding variables and the resulting surface quality data were used to build grinding prediction models using empirical and multi-variable regression analysis. The effectiveness of such grinding prediction models was then examined by running a series of precision CNC grinding operation with a set of controlled input variables and predicted output surface quality indicators. The experiment achieved the predictability down to ${pm}20$ nm in height and the surface roughness down to 36 nm in height. This study contributed to improvement of the process efficiency reaching directly the polishing and figuring process without the need for the loose abrasive lapping stage.

• Explosives and Blasting
• /
• v.19 no.3
• /
• pp.105-113
• /
• 2001

채석, 굴착, 가공과 같은 워터젯 응용분야에서 대상재료에 깊은 홈(kerf)을 절단할 수 있는 실험실용 회전식 슬로터(slotter)를 제작하여 암석을 대상으로 워터젯 시스템의 절단효율을 시험하였다. 고압펌프는 유율 7.5 l/min, 압력 379 MPa, 용량 75 kW급의 JETPAC을 주로 사용하였고, 암석시료는 화강석인 제천석, 거창석을 사용하였다. 시험과정에서는 물과 연마재 투입에 의한 절단 및 진동식 슬로터에 의한 슬롯절단 기초시험을 먼저 수행하고, 그 결과를 토대로 회전식 슬로터에 의한 절단시험을 실시하였다. 순수한 물에 의한 시험의 결과 고압수류의 토출압력은 절단심도에 정비례하였고, 노즐의 이송속도는 이차함수 형태의 반비례 관계를 보였다. 연마재 투입시험에서는 순수한 물에 의한 경우에 비해 연마재로 인한 충격력의 증가로 절단심도가 크게 증가하였는데, 유사한 조건하에서 3~5배 이상의 절단심도의 증가를 보였다. 진동식 슬로터에 의한 슬롯절삭에서는 생성된 슬롯의 내벽면이 바닥으로 갈수록 좁아짐으로써 넓은 폭의 슬롯형성은 가능하나 절삭심도가 제한되었다. 회전식 슬로터에 의한 시험에서 생성된 슬롯들은 평균 22 mm의 폭으로 내벽면이 바닥까지 서로 평행하여 깊은 심도까지 비트진입이 가능하였다. 절단율은 16~32 mm/sec의 속도범위에서 $40~160{\;}\textrm{mm}^2/sec$로 나타났다. 한편, 최대유율 24 l/min의 HUSKY S-200 펌프에 의한 시험결과 JETPAC 펌프에 비해 1.13~3.47 배의 절단심도를 보였다

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2005.06a
• /
• pp.629-632
• /
• 2005

ELID(ELectrolytic In-process Dressing) grinding is an excellent technique for mirror grinding of various advanced metallic or nonmetallic materials. A polishing process is also required for elimination of scratches present on ELID grinded surfaces. MAP(Magnetic Assisted Polishing) has been used as a polishing method due to its high polishing efficiency and to its resulting in a superior surface quality. This study describes an effective fabrication method combining ELID and MAP of nano-precision mirror grinding for glass-lens molding mould, such as WC-Co, which are extensively used in precision tooling material. And for the optics glass-ceramic named Zerodure, which is extensively used in precision optics components too. The experimental results show that the combined method is very effective in reducing the time required for final polishing. The best surface roughness of the polished glass-ceramic was within 1.7nm Ra in this study.

• Journal of the Korean Society for Precision Engineering
• /
• v.18 no.3
• /
• pp.61-67
• /
• 2001

The finishing process for die is an important process because it has influence on final quality of products. Recently s study on development of 5-axis die automated finishing machine has been progressed. But die must be moved from the cutting machine to the die automated finishing machine. So manufacturing cost and time increase and machining error occurs by transfer. So, in this study, a 3-axis machining center was applied to die finishing. Because cutting tool can be changed to finishing tool by ATC, both of cutting and finishing process are possible on the machine. However, this application results in the decrease of finishing for the improvement of form accuracy. So this study focused on the generation of finishing tool path suitable to 3-axis die finishing for the improvement of form accuracy. The form accuracy evaluation is performed by the measurement of removal depth using a stylus profilometer. From the result, it is confirmed that form accuracy was improved less than 2$\mu$m of removal depth error.

• Journal of the Korean Society for Precision Engineering
• /
• v.16 no.3 s.96
• /
• pp.84-90
• /
• 1999

The finishing process for dies and molds is directly related to finished surface quality, but many parts of process depend on human labor which needs much time and value. So automatic finishing machine has been produced for dies and molds, and applied widely for finishing process. Conventionally finishing machine has applied resin bonded finishing pad as a tool, but the removal ability of pad decreases greatly as finishing process goes on. In the finishing mechanism for dies and molds, finishing process is affected severely by cutting process, so can be divided into removing cusp and smoothing surface process. So, this study investigated the application of cast iron bonded diamond pellet for press dies, which is considered to have better characteristics than the other metal bonded pellets. The finishing characteristics were compared the between finishing pellet and pad. And finishing performance was appraised as the several cutting surfaces.