• Proceedings of the Materials Research Society of Korea Conference
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• 2011.05a
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• pp.33.2-33.2
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• 2011

CMP (Chemical-Mechanical Planarization) 공정이란 화학적 반응과 기계적 힘을 동시에 이용하여 표면을 평탄화하는 공정으로, 반도체 산업에서 회로의 고집적화와 다층구조를 형성하기 위해 CMP 공정이 도입되었으며 반도체 패턴의 미세화와 다층화에 따라 CMP 공정의 중요성은 더욱 강조되고 있다. CMP 공정은 압력, 속도 등의 공정조건과, 화학적 반응을 유도하는 슬러리, 기계적 힘을 위한 패드 등에 의해 복합적으로 영향을 받는다. CMP 공정에서, 폴리우레탄 패드는 많은 기공들을 포함한 그루브(groove)를 형성하고 있어 웨이퍼와 직접적으로 접촉을 하며 공정 중 유입된 슬러리가 효과적으로 연마를 할 수 있도록 도와주는 역할을 한다. 하지만, 공정이 진행 될수록 그루브는 손상이 되어 제 역할을 하지 못하게 된다. 패드 컨디셔닝이란 컨디셔너가 CMP 공정 중에 지속적으로 패드 표면을 연마하여 패드의 손상된 부분을 제거하고 새로운 표면을 노출시켜 패드의 상태를 일정하게 유지시키는 것을 말한다. 한편, 금속박막의 CMP 공정에 사용되는 슬러리는 금속박막과 산화반응을 하기 위하여 산화제를 포함하는데, 산화제는 금속 컨디셔너 표면을 산화시켜 부식을 야기한다. 컨디셔너의 표면부식은 반도체 수율에 직접적인 영향을 줄 수 있는 scratch 등을 발생시킬 뿐만 아니라, 컨디셔너의 수명도 저하시키게 되므로 이를 방지하기 위한 노력이 매우 중요하다. 본 연구에서는 컨디셔너 표면에 연마 잔여물 흡착을 억제하고, 슬러리와 컨디셔너 표면 간에 일어나는 표면부식을 방지하기 위하여 소수성 자기조립 단분자막(SAM: Self-assembled monolayer)을 증착하여 특성을 평가하였다. SAM은 2가지 전구체(FOTS, Dodecanethiol를 사용하여 Vapor SAM 방법으로 증착하였고, 접촉각 측정을 통하여 단분자막의 증착 여부를 평가하였다. 또한 표면부식 특성은 Potentiodynamic polarization와 Electrochemical Impedance Spectroscopy (EIS) 등의 전기화학 분석법을 사용하여 평가되었다. SAM 표면은 정접촉각 측정기(Phoenix 300, SEO)를 사용하여 $90^{\circ}$ 이상의 소수성 접촉각으로써 증착여부를 확인하였다. 또한, 표면에너지 감소로 인하여 슬러리 내의 연마입자 및 연마잔여물 흡착이 감소하는 것을 확인 하였다. Potentiodynamic polarization과 EIS의 결과 분석으로부터 SAM이 증착된 표면의 부식전위와 부식전류밀도가 감소하며, 임피던스 값이 증가하는 것을 확인하였다. 본 연구에서는 컨디셔너 표면에 SAM을 증착 하였고, CMP 공정 중 발생하는 오염물의 흡착을 감소시킴으로써 CMP 연마 효율을 증가하는 동시에 컨디셔너 금속표면의 부식을 방지함으로써 내구성이 증가될 수 있음을 확인 하였다.

• Progress in Medical Physics
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• v.4 no.2
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• pp.9-17
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• 1993

The purpose of this paper is to develop a simple system to measure dose distribution in small fields of NEC LINAC 6 MVX using film and solid water instead of ion chamber and water phantom. Specific quantities measured include percent depth dose (PDD), off-axis ratio (OAR). We produced square fields of 1 to 3cm in perimeter in 1cm steps measured at SAD of 80cm. The PDD and OAR measured by film was compared with measurement made with ion chamber. We calculated the TMR from the basic PDD data using the conversion formula. The trends of our measured beam data and philips LINAC are similar each other. The measurement for the small field using film and solid water was simple. Hand-made film phantom was especially useful to measure OARs for the stereotactic radiosurgery.

• Composites Research
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• v.25 no.3
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• pp.70-75
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• 2012

Interfacial durability and electrical properties of CNT, ITO or xGnP coated PVDF nanocomposites were investigated for acoustic actuator applications. The xGnP coated PVDF nanocomposite exhibited better electrical conductivity than CNT and ITO case due to the unique electrical property of xGnP, and this nanocomposite also showed good sound characteristics. Interfacial adhesion durability between either neat CNT or plasma treated CNT and plasma treated PVDF were measured by static contact angle, surface energy, work of adhesion, and spreading coefficient tests. The optimum acoustic actuation performance of xGnP coated PVDF nanocomposite was measured using sound level meter with changing radius of curvature and coating conditions. As compared to CNT and ITO, the xGnP was known as more appropriate acoustic actuator due to the characteristic electrical property. It is the most appropriate condition when the radius of curvature is 15 degree. Although sound characteristics were different with various coating thicknesses, it is possible to manufacture transparent actuator with good sound quality.

• Polymer(Korea)
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• v.32 no.3
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• pp.270-275
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• 2008

Crack growth characteristics of elastomeric materials are an important factor determining the strength and durability. In this study, the fatigue crack growth characteristic of filled EPDM compounds with different reinforcing fillers, such as silica and carbon black, was investigated using a newly designed tester. Frequency and test temperature had significant effects on the fatigue crack growth. The crack growth rate decreased with increasing frequency and the rate increased with increasing temperature. A power law relationship between the tearing energy and crack growth was observed for filled EPDM compounds. The crack growth rate reduced with increasing filler contents. Silica filled EPDM showed a better fatigue resistance than carbon black filled EPDM. The crack growth rate of silica filled EPDM decreased up to 30 phr and increased again at 50 phr. The formation of microductile type pits was observed on the fatigue-failure surface of unfilled EPDM, and relatively coarse surface with randomly distributed tear lines was observed on the failure surface of silica filled EPDM.

• Proceedings of the Korea Water Resources Association Conference
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• 2016.05a
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• pp.108-108
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• 2016

스마트워터그리드(Smart Water Grid; 이하 SWG)란 현재 직면에 있는 물 부족, 물 안보, 물 복지 등 물에 대한 문제를 ICT 기술을 활용하여 물관리의 새로운 패러다임을 제시할 수 있는 융합 기술이다. 즉, SWG는 기존의 수자원 관리 시스템의 한계를 극복하기 위해 첨단 정보통신기술을 이용하는 고효율의 차세대 인프라 시스템으로 다양한 수원을 활용하고 물을 효율적으로 배분 관리 운송하여 수자원의 불균형을 해소하고, 첨단센서네트워크를 이용해 용수관리 전분야에 걸쳐 양방향 실시간으로 용수정보를 감시 대응하여 용수관리와 에너지 효율의 최적화된 메가시티(mega-city)에 적합한 지능형 물관리가 가능할 것으로 예상되는 시스템이다. 따라서 국토교통부 과제로 추진중인 SWG 연구단에서 개발한 스마트 워터 기술을 영종도 112 블록에 적용하여 지역주민의 물복지 향상 및 물 사용자에 대한 소비자 만족도를 높이는데 목적을 두고 데모플랜트를 구축 방안을 수립하였다. 영종도 112블록(인천 운서동 및 운북동 일원)은 인천 공촌정수장에서 해저관로를 지나 영종통합 가압장에서 가압 후 공항신도시배수지에서 물을 공급받고 있는 지역으로 면적은 $17.41km^2$, 인구는 약 17,000명, 물사용량 $8,000m^3$/일, 총관로연장 약 55km, 유수율이 겨우 73.2% 지역이다. SWG 적용성 평가를 위해 영종도 112 블록에 유수율 제고 및 운영비용 저감을 목적으로 데모플랜트를 구축하였다. 스마트 계측을 위해 스마트미터 469개(15~20mm), 디지털미터 172개(25~200mm), 누수유무센서 1개소, 다항목 수질측정기 1개소, 유량계 3개소, 수압계 5개소, AMI 시스템 641개 및 물효율 운영프로그램과 물정보 App서비스 기능으로 구성하였다. 물효율 운영프로그램은 실시간 수요량 예측, 배수지 운영에 따른 취수량, 송수량, 펌프 대수조합 및 운전스케줄링이 가능한 경제적 물공급 스케줄링, 관망상태 감시 및 제어(실시간 유량/수압 분석을 통한 누수분석) 기능이 탑재되어 통합운영센터에서 운영할 계획이다. 데모플랜트 운영을 통해 수자원의 효율적인 배분 및 공급, 유지관리 향상, 운영 비용 최소화 등의 결과를 바탕으로 신도시 및 기존도시의 물관리 정책수립에 활용할 수 있을 뿐만아니라 시간적 공간적 불균형 해소 및 물시장 발전에 크게 기여할 것으로 사료된다.

• The Journal of Korean Society for Radiation Therapy
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• v.16 no.2
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• pp.69-79
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• 2004

In the process of photon treatments, linear accelerators with energies higher than 10 MV produce neutrons through the (${\gamma}$, n) interactions with the composite materials of the linac head md these materials further produce the induced radiations. We investigate the possible risks from these induced radiations especially in the wedge filters to the radiation workers. Wedge filters are used to modify the isodose profiles in the radiation treatment using the linear accelerator and always be handled by the radiation workers. For the background radiation, we measured the radiation in both the waiting room and the outside of the building for two hospitals, S and H. The results of S hospital were $0.11\;{\mu}Sv/hr$ and $0.10\;{\mu}Sv/hr$ for waiting room and outside respectively, and in the case of H hospital, they were $0.12\;{\mu}Sv/hr$ and $0.11\;{\mu}Sv/hr$. Using a survey meter, we measured the radiation from wedge filters inserted in 10 MV and 15 MV Siemens linear accelerators. The time series measurements were done in ${\sim}1$ minutes after exposure of 5 Gy of monitor units for the field size of $25{\times}25cm^2$. The starting value of 10 MV machine was about $3.26\;{\mu}Sv/hr$, which was three times higher than that of 10 MV. The measured radiation was from $^{28}Al$ and $^{53}Fe$ with a half life of 3.5 min. If the treatment patients are $20{\sim}50$ per day and the number of process of wedge filter change per patient is one or two, the annual dose equivalent is $0.08{\sim}0.4\;mSv$ for 10 MV, and $0.27{\sim}1.36\;mSv$ for 15 MV, which are in the range of dose equivalent limits of radiation workers.

• Journal of the Korean Society of Radiology
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• v.5 no.5
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• pp.237-244
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• 2011

Generally, X-ray examinations for dentistry use low energy radiation. It explains that the radiations are mainly absorbed to a human body because of the weak permeability. We made up some counterplans for decrease in radiation exposure, when guardians and radiologists are overexposed owing to unavoidable circumstances. The equipments for the test are GX-770 and CRANEX TOME CEPH which are used for various exams. Besides we measured the radiations in the projection room and in the control room using model 2026c and 20X6-1800. According to the test, the measurement value in the control room was low dose below $20{\mu}R$, the maximum dose in the projection room was $702.8{\mu}R$ and the measurement value of back dose was higher than lateral one. As the result, if we use a shielding door, it's effective for radioprotection and when we didn't prepare protectors, we should secure appropriate distance and be situated at the side area($90{\sim}135^{\circ}$) on the basis of centeral radiation. That way will provide valuable aid for radioprotection.

• Journal of Radiation Protection and Research
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• v.11 no.1
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• pp.51-56
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• 1986

It is important to measure and protect from the radiation space dose and induced activity at the high energy medical linear accelerator facilities. These are to consider the additional risk to patients undergoing treatment, machine operators and staff members. Measurements of the space dose distribution and induced radioactivity at the 18 MeV medical linear accelerator facility in the Yonsei Cancer Center. 1. Exposure space dose for 300 rads monitor doses of 18 MeV electron are measured as 50 mR at 1 meter from patients. 2. Exposure space dose for 300 rads monitor doses of 10 MV X-ray are detected as 350 mR at 1 meter from phantom. 3. Induced radioactivity by photonuclear reaction was measured as 0.65 mR/hr from collimater after 30 Gy(3,000 rads) irradiated. 4. Analyzing the decay curves and energy spectrum of induced radioactivity, detected a few materials to be activated by photoneutron reaction, $^{65}Cu({\gamma}{\cdot}n)\;^{64}Cu,\;^{186}W({\gamma}{\cdot}n)\;^{185}W,\;^{181}Ta({\gamma}{\cdot}n)\;^{180}Ta,\;^{199}Au({\gamma}{\cdot}n)\;^{198}Au$.

• Korean Journal of Agricultural and Forest Meteorology
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• v.11 no.4
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• pp.233-246
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• 2009

The partitioning of evapotranspiration (ET) into evaporation (E) and transpiration (T) is critical in understanding the water cycle and the couplings between the cycles of energy, water, and carbon. In forests, the total ET measured above the canopy consists of T from both overstory and understory vegetation, and E from soil and the intercepted precipitation. To quantify their relative contributions, we have measured ET from the floors of deciduous and coniferous forests in Gwangneung using eddy covariance technique from 1 June 2008 to 31 May 2009. Due to smaller eddies that contribute to turbulent transfer near the ground, we performed a spectrum analysis and found that the errors associated with sensor separation were <10%. The annual sum of the understory ET was 59 mm (16% of total ET) in the deciduous forest and 43 mm (~7%) in the coniferous forest. Overall, the understory ET was not negligible except during the summer season when the plant area index was near its maximum. In both forest canopies, the decoupling factor ($\Omega$) was about ~0.15, indicating that the understory ET was controlled mainly by vapor pressure deficit and soil moisture content. The differences in the understory ET between the two forest canopies were due to different environmental conditions within the canopies, particularly the contrasting air humidity and soil water content. The non-negligible understory ET in the Gwangneung forests suggests that the dual source or multi-level models are required for the interpretation and modeling of surface exchange of mass and energy in these forests.

• Journal of Naturopathy
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• v.8 no.2
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• pp.71-77
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• 2019

Purpose: The purpose of this study was to investigate the far-infrared emissivity of patented ocher quilt cotton fabrics and to investigate the microorganisms that survived the washing of cotton fabrics up to 20 times. Methods: A 16S rRNA assay was performed using a far-infrared radiometer and a single colony in which microorganisms grew in nutrient media. Results: The far-infrared emissivity of ocher quilt was 0.902 (90.2%) at 5~20 ㎛ at 40℃, and the radiation energy was 3.63 × 10² w/m². The number of viable cells was 2.0 × 10² cells/ml in ocher duvet cotton fabric, and no viable bacteria found in regular cotton fabric. The base sequence of 16S rRNA of B-2 strain isolated into single colonies was 1,419 bases, and the base sequence of strain A-4 was 1,284 bases. The base sequence of 16S rRNA of these two strains showed high homology with Bacillus spp. The B-2 bacteria showed high homology with 99.0% of the 16S rRNA sequence of B. aryabhattai EF114313 and 99.0% of the A-4 bacteria of B. bingmayongensis AKCS01000011. Consequently the colony strain B-2 finally identified as B. aryabhattai BJ-2 and A-4 as B. bingmayongensis BJ-4 strain. Concusions: Soil Bacillus strains survived in ocher quilt cotton fabric after 20 washing. The material can be useful because quilt cotton fabric emits a large amount of far-infrared and far-infrared radiation energy.