• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.05d
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• pp.105-108
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• 2003

CMP(chemical mechanical polishing) process has been attracted as an essential technology of multi-level interconnection. However, the COO(cost of ownership) is very high, because of high consumable cost. Especially, among the consumables, slurry dominates more than 40 %. So, we focused how to reduce the consumption of raw slurry. In this paper, We have studied the CMP (chemical mechanical polishing) characteristics of slurry by adding of raw alumina abrasive and annealed alumina abrasive. As a experimental results, we obtained the comparable slurry characteristics compared with original silica slurry in the view point of high removal rate and low non-uniformity. Therefore, we can reduce the cost of consumables(COC) of CMP process for ULSI applications.

• Proceedings of the Korean Operations and Management Science Society Conference
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• 2005.05a
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• pp.528-532
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• 2005

한국 프로야구 일정계획은 SLSP(Sports League Scheduling Problem)분야의 문제로서 전형적인 조합최적화 문제이다. 본 연구는 한국 프로야구 일정계획 문제의 제약 조건을 분석하고, 다양한 목적함수에 대해 검토하였다. 또한 이를 효과적으로 풀기 위하여 TTSA(Simulated Annealing for the Traveling Tournament)을 사용하였다. TTSA는 TTP(Traveling Tournament Problem) 문제를 풀기 위해 제안된 방법으로 가능해와 비가능해 영역을 동시에 탐색하여 빠른 시간 안에 좋은 해를 구할 수 있다. 실험은 2005년도 한국 프로야구 리그 일정을 바탕으로 하였으며, 그 결과 팀들의 이동 거리의 총합 최소화, 가장 이동거리가 긴 팀의 이동거리 최소화, 팀 간의 이동거리차이 최소화 측면에서 각각 14%, 22%, 21% 더 좋은 일정을 얻을 수 있었다.

• Journal of the Korean Society for Heat Treatment
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• v.21 no.1
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• pp.26-32
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• 2008

Effects of annealing treatment on microstructure and mechanical property of co-sputtered TiNi thin films were studied. As-deposited films showed amorphous state. However, above annealing temperature of $500^{\circ}C$ martensite phase (B19'), precipitate phase ($Ti_2Ni$) and a small amount of parent phase ($B_2$) were present, and phase transformation behaviors were three multi-step phase transformations $B19^{\prime}{\rightarrow}B_2$ and $B_2{\rightarrow}R-phase$ and $R-phase{\rightarrow}B19^{\prime}$. Increase of martensite transformation temperature, increase of microhardness and Young's modulus of TiNi films annealed above $500^{\circ}C$ were discussed in terms of precipitate phase.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.13 no.1
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• pp.75-79
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• 2000

In this study, we investigated the pretilt angle generation and liquid crystal (LC) alignment by ultravi-olet (UV) light irradiation during imidization of polymide. The generated pretilt angle of nematic (N) LC by using the in-situ photo-alignment method was smaller than that of the conventional UV photo-alignment method. Also, generated pretilt angle of NLC tends to increase by annealing. In case of using the polymer(AL-3046), we found that the in-situ Uv photo-alignment method has higher thermal stability of LC alignment, but it has a disadvantage to control pretilt angle.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2009.05a
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• pp.189-189
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• 2009

다양한 증착 조건에서 마그네트론 2원 동시 방전법을 이용하여 유리기판위에 ITO (10wt% $SnO_2$ 타겟과 $Yb_{2}O_{3}$ 타겟을 사용하여 증착한 ITO:Yb 박막의 구조적, 전기적 특성을 연구하였다. 스퍼터 가스로서는 Ar 가스를 사용하였고, RF power가 0W이고 어닐링온도가 $200^{\circ}C$일 때, 가장 낮은 비저항 $2.442{\times}10^{-4}{\Omega}cm$을 나타내었다. ITO:Yb 박막의 전기적 특성은 Hall 효과 측정장비, 박막의 결정구조는 X-선 회절(XRD), 광학적 특성은 UV 측정장비를 사용하여 측정하였다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1999.11a
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• pp.533-536
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• 1999

In this study, we investigated pretilt angle generation and liquid crystal alignment by UV light irradiation during imidization of polyimide. Generated pretilt angle of NLC by using in-situ UV photo-alignment method was smaller than that of the conventional UV photo-alignment method. Also, generated pretilt angle of NLC tends to increase by annealing. We found that in-situ UV photo-alignment method has higher thermal stability of LC alignment, but it has a disadvantage to control pretilt angle.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.07a
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• pp.336-339
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• 2000

Effects of liquid crystal (LC) alignment using an in-situ photo-alignment method by linearly polarized UV exposure during imidization of polyirnide (PI) on the two kinds of PI surfaces with side chain were investigated. The generated pretilt angle in nematic (N) LC using an in-situ photo-alignment method was smaller than that of a conventional photo-alignment method for short UV exposure time. Also, the pretilt angle of the NLC using an in-situ photo-alignment method increases with increasing UV exposure time on the two kinds of the PI surfaces. Finally, the pretilt angle of NLC can be improved by annealing treatment.

• The Transactions of the Korean Institute of Electrical Engineers
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• v.43 no.5
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• pp.789-794
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• 1994

In this study, the structural and microwave dilelectric properties of 0.15BaO-0.15SmS12TOSI3T-0.7TiOS12T ceramics with sintering and annealing conditions were investigated. In the specimen sintered at 1350 [$^{\circ}C$], dielectric constant and quality factor were good values of 80.19,2006 (fS10T=4.6851[GHz]). To improve the $\tau$S1fT of specimen which was manufactured by the optimumsintering condition (1350[$^{\circ}C$],2[Hr.]), annealed from 2[hr.] to 16[hr.] at the annealing temperature of 1200 [$^{\circ}C$]. Increasing the annealing time, dielectric constant was almost constant and quality factor was increased. In the specimen of 4[hr.] annealed, the temperature coefficient of resonant frequency was minimum value, and increased with increasing the annealing time.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1992.05a
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• pp.34-38
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• 1992

Low temperature device processing has become of great interest within the last few years. In such low temperature processes, SiO$_2$films formed by Plasma-enhanced chemical vapor deposition (PECVD) have been studied. PECVD SiO$_2$films were formed with substrate temperature, and annealing time and temperature of RTP changed, and its'characteristics were obsreved by C-V measurement. We found that the quality of SiO$_2$films formed by PECVD depended on annealing time rather than substrate temperature.

• Proceedings of the KIEE Conference
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• 2003.07c
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• pp.1517-1519
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• 2003

A novel technique of alternating magnetic field (AMF) is investigated to improve the electrical conducting properties of pentacene. By applying AMF to pentacene layer, the electrical conductivity of pentacene was enhanced, which can be applied for characteristic improvements of pentacene-based thin-film transistors. In this study, the annealing effects of pentacene layer using AMF will be discussed.