• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1989.06a
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• pp.66-69
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• 1989

After reviewing previous work done on two piezoelectric thin films(PZT, ZnO), ZnO thin piezofim of 1-3UM is fabricated by sputtering on the different substrates(i. e., P+Si/N-Si, SiO2/P+Si/ N-Si, Al/SiO2/ P+Si/ N+Si). The result shows that ZnO piezofilm on the Al has the best c-axis orientation. One of applications for the ZnO piezofilm as an microvalve to control liquid flow is introduced, and which can be controlled electrically and remotely.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.11a
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• pp.139-139
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• 2003

많은 압전 후막은 여러 감지소자, 통신 및 사무자동화 기기, 전기 및 전자부품, 의료장비 및 국방산업에 까지 널리 응용되어 왔다. 그 중에서도 압전특성이 뛰어난 PZT 후막은 마이크로 펌프, 밸브, 헤드, 모터, 트랜스듀서 뿐 아니라 최근 바이오칩용 센서와 액추에이터로서 널리 연구되고 있다. 또한 마이크로 센서와 액추에이터 의 제작 및 구동을 위한 MEMS 기술의 도입으로 실리콘 베이스의 소자 개발이 집중되고 있다. 스크린 프린팅 방법은수 마이크론에서 수십 마이크론 후막의 실현이 용이하고 비교적 경제적이며 소자신뢰도가 높고 대량생산에 유리하여 활발한 연구가 진행 중이다. 그러나 후막은 벌크에 비해 기공률이 높고, 또 소자응용에 있어서 고온소결 시 MEMS공정을 위한 실리콘 베이스 기판과의 확산 및 반응에 의 한 계면 및 활물질 성능의 저하가 문제가 되고 있다. 따라서 본 연구에서는 스크린 프린팅과 더불어 졸 코팅 방법의 도입으로 후막의 성형 및 소결 밀도를 높임과 동시에 여러 확산 방지 막의 증착으로 capacitor 형 PZT 후막의 물성 및 전기 적 특성을 향상시키고자 하였다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.1282-1285
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• 2004

The high voltage driving system with multi-phase shifter including piezoelectric actuators comprised a driving power unit for outputting the driving power by converting input alternate current into direct current, a frequency shifting unit for supplying the direct current power and shifting or generating a frequency, a high-voltage amplification unit for amplifying the input signal outputted from the driving power unit and the frequency shifting unit into a high-voltage signal, and a phase shifting unit for shifting the phase difference of the amplified signal applied to the high-voltage amplification unit and driving plural piezoelectric actuators sequentially. The results that the operating voltage was stable, the voltage loss ratio was low and the response velocity was fast could be obtained. An experiment on performance of the high voltage driving system with multi-phase shifter designed and manufactured as above described was conducted by using a piezoelectric pump having 3 sheets of round unimorph piezoelectric actuators laminated respectively in a rectangular case. It sucks any fluid by causing the first piezoelectric actuator to shift from the inlet porter side, the phase delay of 60$^{\circ}$ causes the second piezoelectric actuator to begin to shift, and the phase delay of 120$^{\circ}$ causes the third piezoelectric actuator to begin to shift. As a result of measuring each change in the outlet flow rate of the piezoelectric pump, it was shown that the frequency-flow rate characteristic, the voltage-flow characteristic, and the load pressure-flow rate characteristic were improved.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.91-91
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• 2009

Piezoelectric micro-pump should contain the physical running parts like check valves for acquiring the unilateral motion of fluid from the alternating motion of actuators. But the check valves raise many problems such as abrasion or exhaustive destruction by the recursive mechanical displacement To solve these problems, we propose a novle type piezoelectric valveless micro-pump using peristaltic motion due to the traveling wave excitation. Proposed pump model is consisted of two piezoelectric ceramic plates, elastic metal body, caps for covering flow path, rubber rings for sealing tightly and disk springs for the pressurization of pump body.

• Proceedings of the KIEE Conference
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• 2009.07a
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• pp.1275_1276
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• 2009

Micropump is very useful component in micro/nano fluidics and bioMEMS applications. Using the flexural vibration mode of PZT bar, a piezopump is successfully made. The PZT bar is polarized with thickness direction. The proposed structure for the piezo-pump consists of an input and an output port, piezoelectric ceramic actuator, actuator support, diaphragm. The traveling flexural wave along the bar is obtained by dividing two standing waves which are temporally and spatially phase shifted by 90 degrees from each other. Fluid is drawn into a forming chamber, eventually the forming chamber closes trapping the fluid therein.

• Proceedings of the KIEE Conference
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• 2009.07a
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• pp.1301_1302
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• 2009

Recently, there has been increased incessantly an interest in research area on micro-fluidic pump for electronic and biological applications. The proposed pump takes an unobtrusive operation into the simple displacing mechanism using peristaltic traveling waves without the physical moving valves. And, this piezopump makes up a panel type design. The ATILA simulation was performed to estimate the operating frequency of the vibrating wave mode, to optimize the design conditions of piezopump such as structure, elastic body material, piezoelectric ceramics, and to analyze the distribution of vibration displacement. The best measured value of the pumping rate is about $118{\mu}l$/min under the following parameters : 4-wave mode, 50kHz operating frequency, $200V_p$.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.215-216
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• 2008

Using the extensional vibration mode of PZT ring, a piezopump is successfully made. The PZT ring is polarized with thickness direction. The traveling extensional wave along the circumference of the ring is obtained by dividing two standing waves which are temporally and spatially phase shifted by 90 degrees from each other. The proposed piezopump is consisted of coaxial cylindrical shells that are bonded piezoelectric ceramic ring.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 1995.04a
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• pp.318-321
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• 1995

원자력 발전소의 안전성 보장 및 신뢰성 향상을 위하여 시운전 단계에서 원자력 발전소내 안전등급에 해당하는 배관계통의 상태 확인을 위하여 각종시험을 하도록 되어있다. 특히 새로운 설계기념, 크기 또는 용량을 갖는 원자로 모델에 대해서는 필수적으로 건전성 평가를 하게 되었다. 이를 위해 발전소 건설기간에 시행하는 고온 기능시험 중에 원자로 주변 주요 시스템인 원자로 냉각재 루프 계통에 대한 건전성 확인을 위해 압전형 고온 가속도 센서를 이용하여 정상운전상태의 진동을 측정하여 시스템 진동거동을 규명하였다. 배관시스템의 일상운전상태는 유체의 흐름과 기기운전이 일정한 정상상태와 펌프의 기동 또는 정지 및 밸브의 급격한 개폐등으로 발생하는 과도상태로 나눌 수 있다. 따라서 두 가지 상태의 진동을 측정해야 한다. 배관계통은 정상운전 상태로 설계수명을 유지할 수 있어야 하므로 정상진도잉 최소화 되어야 한다. 진동 평가기준은 배관재질의 응력(S/N 커브) 곡선을 참조하여 설계수명내에 손상이 일어나지 않도록 재료의 허용응력을 산정하고 이를 진동변위로 환산하여 정한 것이며 이 값에 측정 데이타를 비교하여 1차계통 배관의 건전성을 확인하였다.

• Journal of Sensor Science and Technology
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• v.15 no.1
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• pp.47-52
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• 2006

This paper describes the design, fabrication and characteristics of a buckling microvalve using a MCA (multilayer ceramic actuator). The mechanical and fluidic analysis are done by finite element method. The designed structure is normally closed microvalve using buckling effect, which is consist of three separate structures; a valve seat die, an actuator die and a small piezoelectric actuator. The flow rate of the fabricated MCA valve was 0-8.13 ml/min at the applied pressure of 0-50 kPa. Maximum non-linearity was 2.24 % FS at a duty cycle of 50 %. The maximum pressure was 230 kPa and the leak rate was $3.03{\times}10^{-8}\;Pa{\cdot}m^{3}/cm^{2}$ at a supply voltage of 100 V.

• Journal of Power System Engineering
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• v.18 no.2
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• pp.31-36
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• 2014

In this paper, pneumatic valve which consists of valve body, valve controller, nozzle and a multi-bender PZT actuator was suggested and fabricated. The fabricated pneumatic valve was experimented for performance evaluation. From the experimental results, we know that the flow rate of the suggested valve is 23 lpm at the pressure difference of 1bar and the maximum flow rate is 30 lpm at the pressure difference of 4 bar. The flow rates after endurance test of 9.8 million were 22.57 lpm and 28.62 lpm at the pressure difference of 1bar and 4bar, respectably. Finally, it was verified that the B10 life of the suggested pneumatic valve is over 50 million.