• Title/Summary/Keyword: 압력분포 측정

Search Result 322, Processing Time 0.028 seconds

A Measurements on the Characteristics of Electron Energy Distribution Function of Radio-Frequency Inductively Couples Plasma (고주파 유도결합 플라즈마의 전자에너지 분포함수 계측에 관한 연구)

  • 하장호;전용우;최상태;박원주;이광식
    • Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
    • /
    • v.13 no.4
    • /
    • pp.82-86
    • /
    • 1999
  • Electron Energy Distribution Function(EEDF) were treasured In Radio-Frequency Inductively Coupled Plasma(RFlCP) using a probe rrethocl Measurerrents were conducted in argon discharge for pressure from 10[mTorr] to 4O[mTorr] and input rf power from 100[W] to 600[W] and flow rate from 3[sccm] to 12[sccm]. Spatial distribution of electron energy distribution function were measured for discharge with same aspoct ratio (R/L=2). Electron energy distribution function strongly depended on both pressure and power. Electron energy distribution function increased with increasing flow rate. Radial distribution of the electron energy distribution function were peaked in the plasma center. Normal distribution of the electron energy distribution function were peaked in the center between quartz plate and substrate. From the results, we can find out the generation mechanism of Radio Frequency Inductively Coupled Plasma. And these results contribute the application of a simple Inductively Coupled Plasma(ICP).a(ICP).

  • PDF

Noninvasive monitoring of ion energy distribution function and its application to semicounductor processing (비접촉식 이온에너지 분석장치와 반도체 장치에의 응용)

  • Lee, Sang-Won;Hong, Bo-Han;Heo, Seung-Hoe;Jeong, Jin-Uk
    • Proceedings of the Korean Institute of Surface Engineering Conference
    • /
    • 2007.04a
    • /
    • pp.9-10
    • /
    • 2007
  • 본 논문에서는 비접촉식 이온에너지 해석 방법(Noninvasive Ion Energy Analysis, NIEA)을 이용하여 이온에너지 분포함수를 계산하고, 이 분포의 정보를 몇 가지 양으로써 특성지을 수 있는 모니터링 인자를 제안 하였다. 이온 에너지 분포에 영향을 미치는 외부 조건들인 rf 전력, 압력, 전극 간격을 변화시키며 해당 에너지 분포함수의 형태 변화 및 모니터링 인자들의 변화 양상을 관찰 하였다. NIEA 방법으로 측정한 이온 에너지와 공정과의 연관성을 알아보기 위해 poly silicon etching을 수행하며 이온 에너지 분포를 측정하였으며, 이온 에너지와 etch rate이 같은 경향을 나타내는 것을 확인 하였다.

  • PDF

분사액체와 운용조건이 공기충돌형 인젝터에 의해 형성되는 액적의 분무특성에 미치는 영향

  • Park, Seung-Gyu;Han, Jae-Seob;Kim, Yoo;Kim, Sun-Jin;Park, Jung-Bae
    • Proceedings of the Korean Society of Propulsion Engineers Conference
    • /
    • 1999.04a
    • /
    • pp.8-8
    • /
    • 1999
  • 2-유체 인젝터의 분무연소에 대한 통찰 및 구조에 대한 이해와 연료-공기 혼합과 연소반응의 물리적 이해에 필요한 수치적 모델의 개발 및 검증을 위해서는 2유체 시스템에서 액체 및 기체 각각의 기본적 특성인 액적크기, 액적속도, 액적의 질량플럭스(flux), 가스상의 속도측정 등이 필요하다. 특히, 액체분무에서는 액적의 크기를 예측하는 것이 매우 중요한 과제이며, 액적의 크기에 영향을 주는 인자들로는 노즐의 형태, 분사액체의 물성치(점도, 표면장력, 밀도), 주위기체의 조건(온도, 압력, 응축과 증발현상), 분사압력 등이 있다. 그러나, 실제 분무액적의 크기는 분포를 가지므로 같은 SMD를 가지더라도 그 분포의 정도는 크게 다를 수 있어 결과적으로 분무액적의 크기를 평균값만으로 표현하는 것은 불충분할 뿐만 아니라 그 적용에도 한계를 가지게 된다. 따라서 분무액적의 평균크기와 함께 그 분포의 정도 등을 함께 나타내려는 시도가 많은 과학자들에 의하여 연구되었다.

  • PDF

A Fundamental Study on Lower Duct Flow of passive anti-rolling tanks System (수동형 감요수조의 하부덕트 유동에 관한 기초연구)

  • Lee, Cheol-Jae;Lim, Jeong-Sun;Jung, Han-Sic;Jung, Hyo-Min
    • Proceedings of KOSOMES biannual meeting
    • /
    • 2006.11a
    • /
    • pp.265-269
    • /
    • 2006
  • Anti-Roll Tanks, also called Sloshing Tanks, is a rather common and sometimes an efficient method of limiting the roll angles. The important parameters, when considering using anti-roll tanks, are positioning, size, duct area, flow control device etc. Measurement by the PIV(Particle Image Velocimetry) was conducted to investigate the flow characteristics around control damper and inlet area of duct for three kind of inclined angle $(\alpha=0^*,\;10^*\;and\;20^*)$. Flow behaviors such as instantaneous and time-mean velocity vectors are investigated. Furthermore, to reveal boundaries between flowing and stagnant zones and to extract velocity profiles at any selected sections of the lower duct for passive anti-rolling tanks system.

  • PDF

Effects of 12-Week Complex Training Program on Foot-Pressure Patterns of the Elderly Women (12주간 복합운동이 여성 노인의 족저압력에 미치는 영향)

  • Lee, Joong-Sook;Yang, Jeong-Ok;Lee, Bom-Jin;Park, Sang-Mook
    • Korean Journal of Applied Biomechanics
    • /
    • v.19 no.1
    • /
    • pp.117-126
    • /
    • 2009
  • The purpose of this study was to investigate the effects of 12-week complex training program on foot pressure patterns of the elderly women. The training program consisted of aerobic exercise and muscular training for 12 weeks. Two stages of walking were given to the participants before and after treatment: (a) straight walking; and (b) turn at $45^{\circ}$ while walking. Data related to foot-pressure distribution(FPD) while walking were collected from each stage and analyzed. Results indicated that in both stage of walking, the mean of the foot pressure(FP) was significantly reduced after the participation in the program. Results also revealed that in all stages, the patterns of the FPD and the center of pressure(COP) were widely lower and more stable. Based on the results of this study, it was concluded that participating in a 12-week complex program bas impact on the gait patterns of the elderly women, reducing the foot pressure on their shoes.

Flow Analysis and Measurement of Pressure Distribution along Inclined Circular Valve Reeds of Reciprocating Compressor (왕복동형 압축기의 경사진 원판형 밸브리드에 대한 압력분포 측정 및 유동해석)

  • Yoon, Jung;Park, Jong-Ho;Kim, Tae-Min;Kim, Kyung-Chun
    • Proceedings of the KSME Conference
    • /
    • 2003.04a
    • /
    • pp.1942-1947
    • /
    • 2003
  • The valve is the key part which governs the efficiency, noise and reliability of the compressor, so the development of analytical model about valve performance is necessary. As the valve leed is opened and closed by pressure pulsation, the flow characteristic of the refrigerant passing the valve is very important. In the present study, a circular disk with inclination is assumed to be the valve reed of a reciprocating compressor and numerical analysis of three dimensional velocity fields are perfomed for the radial flow through the valve model. The effective flow and force area which are required to predict the efficiency of the valve are measured and compared with the numerical analysis in this research.

  • PDF

Spray Characteristics of Superheated Swirl Spray Vertically Introduced into Convective Cross-flow (대류유동으로 수직 분사된 과열 와류분무의 분무특성)

  • Lee, Hae-Cheon;Yoon, Woong-Sup
    • Proceedings of the Korean Society of Propulsion Engineers Conference
    • /
    • 2010.11a
    • /
    • pp.395-398
    • /
    • 2010
  • 감압비등에 의한 미립화는 더 미세한 직경의 액적을 얻을 수 있고, 분무각이 증가하며, 더 좋은 혼합특성을 갖는 다는 점에서 단순 압력식 미립화와 차이가 난다. 감압비등이란 과열된 액체를 포화 압력 이하의 대기 중으로 분사하여 급격한 비등에 의해 이루어지는 미립화이다. 본 연구는 금속 연료를 이용한 추진기관의 산화제인 물 공급기술에 감압비등과정을 이용한 와류분무를 적용시키기 위해 수행됐다. 분열길이와 같은 거시적 특성은 Charge-Couple Device(CCD) 카메라를 이용해 측정하였고, Sauter Mean Diameter(SMD)와 SMD분포와 같은 미시적 특성은 Global Sizing Velocimetry(GSV) 시스템을 이용해 측정했다. 실험은 압력과 온도, 대류 속도를 변화시키며 진행했다.

  • PDF

Combined Effects of Sideslip and AOA on the Vortical Flow of Delta Wing (삼각날개 와류장에서의 옆미끄럼과 받음각의 복합효과)

  • Lee, Gi Yeong;Son, Myeong Hwan
    • Journal of the Korean Society for Aeronautical & Space Sciences
    • /
    • v.31 no.2
    • /
    • pp.17-24
    • /
    • 2003
  • This paper presents results from steady wind tunnel test conducted on a $65^{\circ}$ delta wing at a root chord Reynolds number of $1.76{\times}10^6$. In these experiments, the wing was instrumented with 188 pressure taps, conjunction with powerful multi-channel data logging system, allowed the wing upper surface pressure distribution to be measured. Analysis indicates that the wing upper surface distribution can provide considerable insight into the comvined aerodynamic effects of angle of attack and sideslip on the wing. In a sideslip condition, the strength of the vortex on the windward side is much stronger than that of leeward side. This asymmetric pressure disstribution betwwen each side of wings result in a negative value of rolling moment. However, at a certatin range of angle of attck and sideslip angle(${\alpha}$=$24^{\circ}{\sim}36^{\circ}C$, ${\beta}$=$-5^{\circ}{\sim}-15^{\circ}C$) abrupt change of sign of rolling monent, rolling monent reversal, was observed.

Explosion Riskiness with Flying of Carbon Black Dust by Hartman (Hartman식 장치에 의한 Carbon Black 분진의 부유중 폭발 위험성 평가)

  • 현성호;김정환;이창우
    • Fire Science and Engineering
    • /
    • v.12 no.4
    • /
    • pp.13-19
    • /
    • 1998
  • We investigated the weight loss according to temperature using Thermal Gravimetric Analysis(TGA) in order to find the thermal hazard of carbon black(Hi-Black 10, Hi-Black 50L) dusts, and the properties of dust explosion in variation of the surface functional groups and specific surface area of their dust with the same particle size. Using Hartman's dust explosion apparatus which estimate dust explosion by electric ignition after making dust disperse by compressed air, dust explosion experiments have been conducted by varying concentration and size of carbon black dust. The explosion pressure of both carbon black increased as the specific surface area increased. The results indicated that Hi-Block 50L of which specific surface area was larger three to four times than that of Hi-Black 10 was much easier of dust explosion.

  • PDF

Spatial Distribution Characteristics of Small LRE-injector's Spray-droplet According to the Variation of Fuel-injection Pressure (소형 액체로켓엔진 인젝터 분무의 연료분사압력 변이에 따른 액적의 공간분포 특성)

  • Jung, Hun;Kim, Jeong-Soo
    • Journal of the Korean Society of Propulsion Engineers
    • /
    • v.12 no.5
    • /
    • pp.1-8
    • /
    • 2008
  • Dual-mode Phase Doppler Anemometry (DPDA) was used to scrutinize the spatial distribution characteristics of spray emanating from a small Liquid-Rocket Engine (LRE) injector. Droplet size and velocity were measured according to the variation of injection pressure along the plane normal to the spray stream and then the spray characteristic parameters such as Arithmetic Mean Diameter (AMD), Sauter Mean Diameter (SMD), number density, span of drop size distribution, and volume flux were deduced for an investigation of spray breakup characteristics. As the injection pressure increases, the number density, span, and volume flux of spray droplets become higher, whereas the AMD gets smaller.