A Measurements on the Characteristics of Electron Energy Distribution Function of Radio-Frequency Inductively Couples Plasma (고주파 유도결합 플라즈마의 전자에너지 분포함수 계측에 관한 연구)
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- Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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- v.13 no.4
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- pp.82-86
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- 1999