• Proceedings of the Materials Research Society of Korea Conference
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• 2012.05a
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• pp.84-84
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• 2012

소자가 고집적화 됨에 따라, 비저항이 낮고 electro migration (EM), Stress Migration (SM) 특성이 우수한 구리(Cu)를 배선재료로서 사용하고 있다. 그러나, 구리는 Si과 $SiO_2$의 내부로 확산이 빠르게 일어나, Si 소자 내부에 deep donor level을 형성하고, 누설 전류를 증가시키는 등 소자의 성능을 저하시킬 수 있는 문제점을 가지고 있다. 그러나, electroplating 을 이용하여 증착한 Cu 박막은 일반적으로 확산 방지막으로 쓰이는 TiN, TaN, 등의 물질과의 접착 (adhesion) 특성이 나쁘다. 따라서, Cu CMP 에서 증착된 Cu 박막의 벗겨지거나(peeling), EM or SM 저항성 저하 등의 배선에서의 reliability 문제를 야기하게된다. 따라서 Cu 와 접착 특성이 좋은 새로운 확산방지막 또는 adhesion layer의 필요성이 대두되고 있다. 본 연구에서는 이러한 Cu 배선에서의 접착성 문제를 해결하고자 Metal organic chemical vapor deposition (MOCVD)을 이용하여 제조한 코발트(Co) 박막을 $Cu/TaN_x$ 사이의 접착력 개선을 위한 adhesion layer로 적용하려는 시도를 하였다. Co는 비저항이 낮고, Cu 와 adhesion이 좋으며, Cu direct electroplating 이 가능하다는 장점을 가지고 있다. 하지만, 수소 분위기에서 $C_{12}H_{10}O_6(Co)_2$ (dicobalt hexacarbonyl tert-butylacetylene, CCTBA) 전구체에 의한 MOCVD Co 박막의 경우 탄소, 산소와 같은 불순물이 다량 함유되어 있어, 비저항, surface roughness 가 높아지게 된다. 따라서 구리 전착 초기에 구리의 핵 생성(nucleation)을 저해하고 핵 생성 후에도 응집(agglomeration)이 발생하여 연속적이고 얇은 구리막 형성을 방해한다. 이를 해결하기 위해, MOCVD Co 박막 증착 시 수소 반응 가스에 암모니아를 추가로 주입하여, 수소/암모니아의 분압을 1:1, 1:6, 1:10으로 변화시켜 $Co/TaN_x$ 박막의 특성을 비교 분석하였다. 각각의 수소/암모니아 분압에 따른 $Co/TaN_x$ 박막을 TEM (Transmission electron microscopy), XRD (X-ray diffraction), AES (Auger electron spectroscopy)를 통해 물성 및 조성을 분석하였고, AFM (Atomic force microscopy)를 이용하여, surface roughness를 측정하였다. 실험 결과, $Co/TaN_x$ 박막은 수소/암모니아 분압 1:6에서 90 ${\mu}{\Omega}-cm$의 낮은 비저항과 0.97 nm 의 낮은 surface roughness 를 가졌다. 뿐만 아니라, MOCVD 에 의해 증착된 Co 박막이4-6 % concentration 의 탄소 및 산소 함량을 가지는 것으로 나타났고, 24nm 크기의 trench 기판 위에 약 6nm의 $Co/TaN_x$ 박막이 매우 균일하게 형성된 것을 확인 할 수 있었다. 이러한 결과들은, 향후 $Co/TaN_x$ 박막이 Cu direct electroplating 공정이 가능한 diffusion barrier로서 성공적으로 사용될 수 있음을 보여준다.

• KSBB Journal
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• v.14 no.3
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• pp.358-364
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• 1999

The effect of hydrogen peroxide on pretreatment of oakwood was investigated. Reaction temperature was $170^{\circ}C$ and reaction solutions used in pretreatment were aqueous ammonia, sulfuric acid and pure water. When 10% ammonia solution was used, the extents of delignification and hemicellulose recovery were 55% and 26%, respectively. These values were significantly higher as delinigfication and lower as hemicellulose recovery than those of acid hydrolysis. To overcome this problem, hydrogen peroxide was added into ammonia solution stream to increase hemicellulose recovery. But delignification and hemicellulose recovery were not increased as much as hydrogen peroxide loading was increased. And as hydrogen peroxide loading was increased, the decomposition of sugars solubilized from hemicellulose and cellulose were increased. So there were significant differences between the total amount in solid residue and liquid hydrolyzate, and the total amount in the original biomass. It was found that hydrogen peroxide added was reacted with substrate packed mostly in the front part of reactor. In order to increase hemicellulose recovery, it was necessary to treat with acidic solution than with alkali solution. Effect of hydrogen peroxide was higher in water than acid solution.

• Clean Technology
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• v.18 no.4
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• pp.410-418
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• 2012

The performance of the ammonia injection gun (AIG) used for maximizing the utilization of reducing agent in the selective catalytic reduction (SCR) system is decided by several parameters such as the pattern of flow distribution, geometry of the air distribution manifold (ADM) and the array and geometry of nozzles. In the study, the uniformity of jet flows from the nozzles in AIG was analyzed statistically by using the computational fluid dynamics (CFD) method to evaluate the role of design parameters on the performance of the SCR system. The uniformity of jet flows from the nozzles is being deteriorated with increasing the supplying flow rate to the AIG. Distribution rates to each branch pipe become lower with decreasing distance to the header, and flow rates from nozzle are also reduced with decreasing distance to the header. The uniformity of jet flows from nozzles becomes stable significantly when the ratio of summative area of nozzles to each sectional area of the branch pipe is below 0.5.

• Proceedings of the Korea Water Resources Association Conference
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• 2011.05a
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• pp.251-251
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• 2011

해양 투기가 금지되면서 혐기소화를 통해 최종적으로 발생되는 폐기물 양을 줄이고 메탄 등의 바이오 가스를 얻어 이를 에너지로 얻기 위한 많은 공정들이 현장에 적용되고 있다. 하지만 혐기 소화 과정을 마친 후 유출되는 유출액은 고농도의 유기물질 및 암모니아성 질소, 인산염 등을 다량으로 함유하고 있어 적은 양이라도 하천이나 호수 등에 유입되면 수질 악화와 부영양화를 초래할 위험성이 크다. 이번 연구에서는 음식물류 폐기물로부터 바이오가스를 생산하기 위한 혐기소화 공정에서 발생하는 유출액의 방류수 수질기준 확보와 경제성을 만족시킬 수 있는 처리공정의 상용화 기술을 개발하기 위해 생물학적 처리， 물리 화학적 처리를 통합한 공정을 적용하였다. P건설사 혐기소화 유출액 pilot plant(1 ton/day) 운전 결과 50~70% 로 $NO_2$-N 이 약 1,000 mg/$\ell$정도로 축적되는 현상을 보였으며 상대적으로 $COD_{Cr}$의 농도는 400~600 mg/$\ell$로 C/N 비가 낮아 탈질이 어려울 것으로 판단하였다. 이에 실험실 규모에서의 실험을 진행하였다. $NO_2$-N와 $NO_3$-N을 기준으로 McCarty 양론비 기준 80% 에서 300%까지 메탄올을 주입해 제조 폐수와 실제폐수로 실험을 진행하였고 제조폐수로 실행된 실험에서 아질산 탈질의 효율을 확인하였다. 미생물이 메탄올에 순응 후 완전 탈질에 걸리는 시간은 약 2.5 일로 확인 되었으며 메탄올이 추가로 주입되지 않은 반응조의 $NO_2$-N의 탈질량은 메탄올이 이론값 100% 주입 된 반응조에 비해 30% 이하의 처리 효율을 나타냈다. 이론값을 기준으로 메탄올이 100% 주입된 반응조는 약 96.1%의 탈질 효율을 보였으며 메탄올 순응 후에 약 1.5 일의 HRT가 단축되었기 때문에 메탄올에 장시간 순응 시 탈질 효율이 더 좋아질 것으로 보인다. 아질산탈질에 대한 실험실 규모 연구결과를 토대로 pilot plant에서 재현성 검토를 목적으로 운전을 수행하였다. 무산소조의 HRT는 2.7 일 이었으며 호기조의 HRT는 4.1 일 이었다. 유입수의 평균 $COD_{Cr}$ 농도는 2,878 mg/L, T - N 농도는 2,723 mg/L로 나타났으며 $NO_2$-N 기준 C/N비 1.2-1.8의 메탄올을 주입하였을 때 96% 이상의 탈질율을 보였다.

• Clean Technology
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• v.28 no.4
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• pp.316-322
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• 2022

The flow pattern at the inlet of the catalyst layer in a selective catalytic reduction (SCR) system is one of the key parameters influencing the performance of the denitrification process. In the curved diffusing parts between the ammonia injection grids and the catalyst layers, guide vanes are installed to improve flow uniformity. In the present study, a numerical simulation has been performed to investigate the effect of the geometrical configuration of the guide vanes on the aerodynamic characteristics of a denitrification facility. This application has been made to the existing SCR process in a large-scaled coal-fired power plant. The flow domain to be solved covers the whole region of the flow passages from the exit of the ammonia injection gun to the exit of the catalyst layers. ANSYS-Fluent was used to calculate the three-dimensional steady viscous flow fields with the proper turbulence model fitted to the flow characteristics. The root mean square of velocity and the pressure drop inside the flow passages were chosen as the key performance parameters. Four types of guides vanes were proposed to improve the flow quality compared to the current configuration. The numerical results showed that the type 4 configuration was the most effective at improving the aerodynamic performance in terms of flow uniformity and pressure loss.

• Journal of the Korean Chemical Society
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• v.66 no.3
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• pp.202-208
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• 2022

In this study, we tried to obtain the optimal conditions to reduce odors generated from pig wastewater using magnesia (MgO) through in-situ test after producing a reactor for removing odors. For this purpose, the filling amount of magnesia, the injection amount of pig wastewater, the aeration method, the aeration amount and the aeration time were considered. The field experiment was conducted at Cheongwoon Livestock Farm, which has a pig wastewater reservoir. As the amount of magnesia added to the weight of wastewater (500 kg) increases, the amount of ammonia (NH₃) and hydrogen sulfide (H₂S) generated tended to gradually decrease. As a result of the test, ammonia and hydrogen sulfide in the pig wastewater decreased up to 65% and 77%, respectively, for 2 days aeration after 0.8% of magnesia was added to the reaction tank. The initial pH of the pig wastewater in the reactor was 8.2, and the pH was found to be 9.2 when magnesia was added up to 0.8%. In the light of this trend, it can be known that magnesia gradually increases the pH in the pig wastewater and makes it weakly alkaline. As the pH increases, part of the ammonia gas present in the pig wastewater vaporizes into the air and the remaining part is removed by precipitation after chemical bonding with dissolved magnesium ions and phosphate ions. In order to remove the odor of pig wastewater and turn it into compost, most of the existing livestock farms go through a six-month aeration process using microorganisms. In contrast, the current study proved the effect of removing odors from pig wastewater within 2 days through chemical reactions that do not affect microbial activity.

• KSCE Journal of Civil and Environmental Engineering Research
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• v.32 no.1B
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• pp.79-84
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• 2012

Nitrate is a common contaminant in groundwater aquifer. The present study investigates the performance of the bipolar zero valent iron (ZVI, $Fe^0$) packed bed electrolytic cell in removing nitrate in different operating conditions. The packing mixture consists of ZVI as electronically conducting material and silica sand as non-conducting material between main cathode and anode electrodes. In the continuous experiments for the simulated wastewater (contaminated groundwater, initial nitrate about 30 mg/L as N and electrical conductivity about 300 ${\mu}S/cm$), over 99% removal of nitrate was achieved in the applied voltage 600 V and at the flow rate of 20 mL/min. The optimum packing ratio (v/v) and flow rate were determined to be 1:1~2:1 (silica sand to ZVI), 30 mL/ min respectively. Effluent pH was proportional to nitrate influx concentration, and ammonia which is the final product of nitrate reduction was about 60% of nitrate influx. Magnetite was observed on the surface of the used ZVI as major oxidation product.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.38 no.2
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• pp.165-172
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• 2014

Experiments were conducted to identify basic characteristics of $CO_2$ capture using a spray tower with a single nozzle. Results were evaluated in terms of $CO_2$ saturation which is the main determining factor of regeneration energy, and capture efficiency under various operating conditions. Changes in the capture efficiency under various conditions are well expressed as a monotone increasing function of the relative solvent $(NH_3):CO_2$ flow rate. Although changes in $CO_2$ saturation are also well described as a function of the $NH_3/CO_2$ flow rate ratio, these are expressed as a monotone decreasing function, in contrast with the increasing function of $CO_2$ efficiency. In recent research on the relationship between $CO_2$ saturation and capture efficiency, $CO_2$ saturation was found to decrease when capture efficiency increased. In conclusion, the results show that the amount of solvent used for achieving high capture efficiencies is excessive, as is the amount of regeneration energy needed.

• Proceedings of the KSME Conference
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• 2001.06d
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• pp.979-984
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• 2001

As a preceding process for developing design technology and establishing operation technology, the design procedure of the SCR(Selective Catalytic Reduction) pilot plant that can handle $1,000Nm^{3}/hr$ of flue gas was reported in this paper. And we also considered several factors that might cause abnormality of the plant in the designing process. The plant was designed and fabricated to test the $DeNO_{x}$ performances in variable operating conditions in the range of $3,000{\sim}36,000hr^{-1}/hr$ in space velocities, $1.67{\sim}6\;m/s$ in linear velocities, $200{\sim}500^{\circ}C$ temperatures, $300{\sim}1,000Nm^{3}/hr$ flow rates, and $0{\sim}1.4:1\;NH_{3}/NO$ ratios. In order to maintain the flow uniformity, the guide vanes and flow straightener were designed and constructed in the plant. The SCR pilot plant can be operated by the automatic control system, which enable to obtain performance data in real time and to set up the operating technology. The catalyst reactor consists of 4 catalyst layers and surface area of each layer can be adjusted to be of small size. Arrangement of catalysts per layer is $3{\times}6$ with the catalyst dimensions of $150{\times}150{\times}500mm(L{\times}W{\times}H)$.

• Journal of the Korea Organic Resources Recycling Association
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• v.21 no.2
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• pp.71-78
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• 2013

This study examined the feasibility of phosphorus removal from dewatering centrate/filtrate in wastewater treatment by struvite formation. Since dewatering centrate/filtrate obtained after anaerobic digestion contains a high content of ammonia, magesium addition and pH adjustment could remove phosphorous. The optimum magnesium dose, reaction time, settling time, and pH value was found at 2 mol Mg/mol $PO_4^{3-}$, 10 min, 120 min, and 8.5, respectively. A bench-scale continuous operation at the optimum condition showed 80% of total phosphorus removal and 82% of phosphate removal in dewatering centrate. The elemental composition and crystal structure of the chemical precipitate was similar to the reported values of struvite.