Characterization of AlN Thin Films Grown by Plasma Assisted Molecular Beam Epitaxy on Si Substrate (실리콘 기판위에 플라즈마 분자선 에피택시를 이용하여 성장된 질화알루미늄 박막의 특성분석)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.13 no.10
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- pp.828-833
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- 2000