• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.451-452
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• 2006

According to the demand of high productivity, the interest of manufacturing skills is growing in the industrial society. Especially the long spindle becomes important these days. The rotating accuracy of the spindle concerns the centrifugal force. In detail explaining, it is influenced by the speed of the spindle. In this study, we would show changes of the distance caused by a rotating speed of the spindle using a software, $ADAMS^{(R)}$. And because of the gravity of the spindle's mass, we would find the static droop of the long spindle.

• Journal of KSNVE
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• v.10 no.6
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• pp.977-984
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• 2000

Vibration of disk drive spindle is one of the major limiting factors in achieving higher track densities in hard disk drives. Vibration of a BLDC motor is a coupled phenomenon between mechanical characteristics and magnetic origins through the motor air-gap. In this paper, radial magnetic forces for symmetric and asymmetric BLDC motor are calculated with respect to the various rotor eccentricity using analytic method. Based on the results of the radial magnetic forces, transient whirl responses of the spindle motor are analyzed using finite element and transfer matrices. Results show that an asymmetric motor has a worse effects on unbalanced magnetic forces and vibration when mechanical and magnetic coupling exists.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2006.05a
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• pp.182-189
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• 2006

현재 반도체 습식식각 공정에 사용되고 있는 방법은 batch식과 매엽식이 있다. batch식 식각방법은 매엽식보다 throughput이 많은 반면 식각균일도는 떨어진다. 매엽식은 웨이퍼를 회전시키면서 약액을 분사할 때 Boom swing을 하여 균일하게 식각할 수 있다. 본 연구에서는 Boom swing이 없는 구조의 매엽식 장비에서 약액이 상온과 고온일 때 $SiO_2$막을 식각하여 비교하였다. 각각의 조건에서 식각량의 분포와 균일도의 변화에 대해서 알아보았으며, 실험평가시 분사된 약액의 온도분포를 이론적으로 계산하여 실제 실험결과와 비교하여 보았다. 식각균일도는 batch식 보다 매엽식 스핀방식이 균일하였으며, 약액분사 방법은 boom swing을 하는 것이 더 균일하였다.

• Journal of the Semiconductor & Display Technology
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• v.19 no.1
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• pp.17-22
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• 2020

Recently, the decrease in thin film thickness has been actively studied by changing several physical elements such as the increase in revolution velocity of lower substrate equipped with AC or DC motor. In this paper, we propose a novel spin coater control system that changes AC or DC motor and common use software with limitation of velocity and position control into step motor and LABVIEW software based on GUI to control revolution velocity and position more precisely. By determining six input values of rotation velocity 1, 5, 10, 25, 50, 100 PPS, we fabricated six samples using coating target, TA(tantalum) on silicon substrate and measured their thin film thickness by SEM. Hence, this research can be applied to inferring thin film thickness of tantalum regarding any value of revolution velocity without additional experiments and for linear reference model via property analysis of thin film thickness using other thin-film materials.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.05a
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• pp.578-584
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• 2003

This paper presents a method to investigate the characteristics of a ball bearing and the dynamics of a HDD spindle system due to temperature variation. Finite element model is developed fer the rotating and stationary parts of a HDD spindle system separately to determine their thermal deformations by using ANSYS, a finite element program. Then, the relative position of the rotating part with respect to the stationary part is determined by solving the equilibrium equation of the contact force between upper and lower ball bearings. The validity of the proposed method is verified by comparing the theoretical natural frequencies of a HDD spindle system with the experimental ones before and after temperature variation. It shows that the elevated temperature results in the increase of contact angle and the decrease of bearing deformation, contact force and bearing stiffness, which result in the decrease of the natural frequencies of a HDD spindle system.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.05a
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• pp.598-604
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• 2003

In order to meet the growing demands for higher storage density as well as lower noise level, the spindles In hard disk drives are to be supported by hydrodynamic bearings in place of conventional ones. However, the existing models are inappropriate to apply to accurate Prediction or vibration characteristics because the Inn spindle tends to take quite a complex shape to secure the performance of the new type bearings. In this context, this paper treats analysis of free and forced vibrations of such-designed HDD spindles based on more sophisticated models and validation by means of experiments. Remarkably, to this end each component in the system is modeled as elastic adopting the finite element method.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.05a
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• pp.571-577
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• 2003

This research proposes a finite element method to determine the natural vibration characteristics of the spinning disk-spindle system in a HDD including the flexibility of supporting structure. Finite element equations of each substructure are derived with the introduction of consistent variables to satisfy the geometric compatibility at the internal boundaries. The natural frequencies and modes from the global asymmetric matrix equations of motion are determined by using the implicit restarted Arnoldi iteration method. The validity of the proposed method is verified by the experimental modal testing. It also shows that the flexibility of base plate plays an important role to determine the natural frequencies of the spinning disk-spindle system in a HDD.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2000.11a
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• pp.790-795
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• 2000

디스크마다 일정영역을 할당하여 위치정보를 기록하는 임베디드 서보방식 하드디스크는 데이터가 저장되는 데이터 영역사이에서 스핀들 런아웃, 공진과 디스크 플러터 등에 의하여 Gaussian 분포를 가지는 트랙에서 벗어나는 오차를 가지게 된다. 더높은 저장밀도와 빠른 기록속도를 요구함에 따라서 디스크의 회전속도가 올라감에 의한 디스크 면진동에 의한 헤드 위치오차가 중요하게 대두되고 있다. 본 연구에서는 헤드위치 오차량을 계산하기 위하여 고속탐색이 가능한 수정된 Barasch의 수치해석법, 유한요소법, 그리고 실험을 통하여 적용가능성을 확인하였으며 같은 드라이브내에서 디스크의 사이즈를 바꿈에 의한 디스크 동특성의 해석과 변환율을 이용하여 오류가 발생할 수 있는 트랙 벗어남과 저장밀도의 상관관계를 살펴보았다.

• Proceedings of the Korea Information Processing Society Conference
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• 2021.11a
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• pp.753-755
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• 2021

본 논문에서 기존의 치아가공기는 회전하는 모터를 사용하여 구성하였으나 이러한 모터는 정밀도, 반복정밀도가 50um 이하로 가공물 가공시에 치기공사나 치과의사가 사람에 맞추어 다시 작업을 해야하는 불편함과 시간적, 작업자의 피로도를 높일수 있는데 이러한 모터에 스크류나 밸트를 연결하여 선형적으로 움직일 수 있는 리니어모듈과 리니어모터를 적용하게되면 20um수준의 고정밀의 위치제어가 가능한 5축 치아가공기를 만들 수 있었다. 또한 MEMS센서를 이용하여 스핀들의 상태를 모니터링 하고 임계값을 지정하여 이상 신호 발생시 모터를 멈추어 위험상황에 대해서 인공지능기법을 이용하여 정지하거나 관리자에게 알림을 주어 효과적으로 5축치아가공기를 운영할 수 있도록 하였다.

• Journal of Ocean Engineering and Technology
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• v.29 no.1
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• pp.56-61
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• 2015

To improve the accuracy of a machine, research needs to be conducted on the relationship between the output variables and design variables of a spindle-shaped part from the thermal and static viewpoints. Therefore, research was carried out by examining the correlation of each variable to find the optimum conditions. Moreover, DOE (design of experiments) was extensively used. The model used in this study was a grinding spindle to which a hydrostatic bearing was applied. This model was used in a preliminary analysis based on the experimental results of the previous studies. The influences of the output variables and design variables were compared through a main effect analysis. Generated response surfaces were applied to the Kriging model. To optimize the model, a screening method was selected. In comparison with the initial model, the deformation of the optimized model designed by DOE decreased by 4.1 μm, while the thermal deformation decreased by 1.2 μm. Therefore, it was efficient to design a spindle-shaped part through DOE to improve the accuracy of the machine.