• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.342-342
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• 2007

원자층 증착(Atomic Layer Deposition: ALD) 방법은 반응물질들을 펄스형태로 챔버에 공급하여 기판 표면에 반응물질의 표면 포화반응에 의한 화학적 흡착과 탈착을 이용한 박막증착기술이다. ALD법은 박막의 조성 정밀제어가 쉽고, 파티클 발생이 없으며, 대면적의 박막 증착시 균일성이 우수하고, 박막 두께의 정밀 조절이 용이한 장점이 있다. 원자층 증착 공정에서 짧은 시간 안에 소스를 충분히 공급하기 위한 방법으로는 소스 온도를 증가시켜 전구체의 증기압을 높여 반응기로의 유입량을 증가시키는 방법, 전구체의 공급시간을 늘리는 방법 등을 들 수 있다. 그러나 전구체 온도를 상승시키는 경우, 공정 조건의 변화가 요구되며 전구체의 변질에 의하여 형성된 막이 의도하는 막 특성을 만족시키지 못하게 되는 문제점이 발생될 우려가 있다. 그리고 전구체를 충분히 공급하기 위하여 전구체의 공급시간을 늘이는 방법을 사용하면, 원하는 두께의 막을 형성하기 위하여 소요되는 공정시간이 증가된다. 이를 해결하기 위해 수송가스를 이용한 버블러 형태의 전구체 공급 장치를 사용하지만 이 또한 전구체의 수명을 단축시키는 단점을 가지고 있다. 본 논문에서는 위의 문제점을 극복할 수 있는 새로운 개념의 수송가스 도움 전구체 공급 장치를 소개한다. 본 연구에서 사용된 수송가스 도움 전구체 공급 장치를 가지는 ALD 장비는 Lucida-D200 (NCD Technology사)이며 기판으로는 8인치 실리콘 웨이퍼를 사용하였으며 (TEMA)Zr을 사용하여 ZrO2 박막을 성장하였다. 수송가스 도움 전구체 공급 장치를 사용한 경우, 그렇지 않은 경우 보다 $30^{\circ}C$ 이상 전구체 온도를 낮출 수 있으며, 또한 증착 속도를 약 2배정도 증가시킬 수 있었다. 이들 박막들은 XRD, XPS, AFM 등을 이용하여 결정구조, 결합에너지, 표면 거칠기 등의 특성을 관찰하였다. 그리고 C-V, I-V 측정을 이용해 정전용량, 유전율, 누설전류 등의 전기적 특성을 평가하였다.

• Journal of Biomedical Engineering Research
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• v.19 no.2
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• pp.143-152
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• 1998

In this paper, we present the performances of a Doppler system using single channel RF(Radio Frequency) sampling. This technique consists of undersampling the ultrasonic blood backscattered RF signal on a single channel. Conventional undersampling method in Doppler imaging system have to use a minimum of two identical parallel demodulation channels to reconstruct the multigate analytic Doppler signal. However, this system suffers from hardware complexity and problem of unbalance(gain and phase) between the channels. In order to reduce these problems, we have realized a multigate pulsed Doppler system using undersampling on a single channel, It requires sampling frequency at $4f_o$(where $f_o$ is the center frequency of the transducer) and 12bits A/D converter. The proposed " single-Channel RF Sampling" method aims to decrease the required sampling frequency proportionally to $4f_o$/(2k+1). To show the influence of the factor k on the measurements, we have compared the velocity profiles obtained in vitro and in vivo for different intersequence delays time (k=0 to 10). We have used a 4MHz center frequency transducer and a Phantom Doppler system with a laminar stationary flow. The axial and volumetric velocity profiles in the vessel have been computed according to factor k and have been compared. The influence of the angle between the ultrasonic beam and the flow axis direction, and the fluid viscosity on the velocity profiles obtained for different values of k factor is presented. For experiment in vivo on the carotid, we have used a data acquisition system with a sampling frequency of 20MHz and a dynamic range of 12bits. We have compared the axial velocity profiles in systole and diastole phase obtained for single channel RF sampling factor.ng factor.

• Journal of Digital Convergence
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• v.16 no.12
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• pp.309-315
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• 2018

In this paper, propose an efficient arc detection and control method to achieve fast machining speed, improved precision and surface roughness in discharge machining, especially for carbide and hard material processing and metal processing using discharge phenomenon as energy. A single discharge waveform is divided into three sections of Td (Time-Delay), Ton (Time-on) and Toff (Time-off) and the gate control timing is simulated using the HDL language. In this paper, we analyze the effect of the gap between the electrode and the workpiece on the machining results by determining the operation of the servo mechanism by sampling the Td section through the comparator circuit. As a result of the analysis, the Td section of the formed waveform was more precisely sampled at a high speed and the results were improved when applied to the gap control between the electrode and the workpiece.

• Journal of the Korean Recycled Construction Resources Institute
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• v.10 no.4
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• pp.386-394
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• 2022

In this study, the mechanical properties and frost resistance of concrete with steel and nylon fibers were experimentally investigated. Both of OPC concrete with 100 % ordinary portland cement and SGC concrete replaced with 50 % GGBFS were manufactured to evaluate effects of fibers to the performance of concrete. Compressive and split tensile strength, ultrasonic pulse velocity and surface electric resistivity measurements of concrete were carried out at a predetermined interval. In addition, the freezing & thawing resistance of concrete in accordance with ASTM C666 standard was also examined. As a result, it is seemed that the effect of fibers was remarkable to improve the mechanical properties and frost resistance of concrete, especially for the concrete incorporating steel fiber.

• Journal of Oral Medicine and Pain
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• v.23 no.2
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• pp.101-108
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• 1998

본 연구는 두 가지 관점, 즉 다이오드레이저를 구강연조직에 접촉식으로 조사하여 조직을 절제할 경우 첫째 심부조직에서의 온도 상승 정도에 대한 분석 평가, 둘째 절제에 따른 조직의 열적 응고에 대한 조직학적 분석 평가를 위해 시도되었다. 연구를 위해 도축된 소의 혀 배면으로부터 5.0mm깊이에 T형 열전대(type T thermocouple)를 설치하고 조사조건에 따른 레이저절제 도주의 온도변화를 측정하고, 또한 해당조사부위의 조직을 대상으로 통법에 의한 H-E염색 후 조직학적 측면에서 열적 응고상을 검색하여 Nd:YAG레이저의 경우에서와 비교하였다. 즉 파장815nm의 다이오드레이저를 0-10W의 출력, 50Hz와 연속파의 주파수조건에서 접촉식으로 조사하였으며, 또한 파장1064nm의 Nd:YAG레이저를 0-10W의 출력, 50Hz와 100Hz의 주파수 조건에서 접촉식으로 조사하였다. 레이저의 접촉조사시 레이저광섬유 첨단부에서 10(10gm의 일정한 압력과 25mm/sec의 이동속도로 조직을 절제하였다. 레이저가 접촉조사된 조직부위를 통법에 의해 조직학적으로 H-E염색을 시행하였으며, 계측현미경을 이용하여 10배율 아래에서 조직절제의 폭과 깊이, 측방 및 하방 쪽으로 열적 응고의 폭을 계측하였다. 계측치에 대한 통계학적 처리결과 조직절제의 폭과 측방쪽으로 열적응고의 폭은 다이오드레이저에와 Nd:YAG레이저에서 같은 정도를 나타냈다. 조직절제의 깊이는 Nd:YAG레이저에서에 비해 다이오드레이저에서 더 깊었다. 하방쪽으로의 열적응고의 폭은 Nd:YAG레이저를 10Hz의 조건에서 조사한 경우에서 가장 넓었으며, 다이오드레이저를 50Hz와 연속파의 조건에서 조사한 경우에서 가장 좁았다. 레이저절제 도중 심부조직에서의 온도변화는 다이오드 레이저에서와 Nd:YAG레이저에서 모두 출력이 증가함에 따라 상승되었으며, 다이오드레이저에서 보다 Nd:YAG레이저에서 더 높이 상승되었다. 결론적으로 본 연구에서 시도된 조사조건 범위 이내에서는 구강연조직 절제시 다이오드레이저가 펄스형 광섬유 전달식 Nd:YAG레이저 보다 심부조직에서의 낮은 온도상승과 하방쪽으로의 좁은 열적 응고의 폭을 보이면서 우수한 조직절제효과를 나타냈다.

• Progress in Medical Physics
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• v.23 no.3
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• pp.177-187
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• 2012

Magnetic resonance angiography (MRA) techniques are widely used in diagnosis of vascular disorders such as hemadostenosis and aneurism. Especially, phase contrast (PC) MRA technique, which is a typical non contrast-enhanced MRA technique, provides not only the anatomy of blood vessels but also flow velocity. In this study, we developed the 2- and 3-dimensional PC MRA pulse sequences for a low magnetic field MRI system. Vessel images were acquired using 2D and 3D PC MRA and the velocities of the blood flow were measured in the superior sagittal sinus, straight sinus and the confluence of the two. The 2D PC MRA provided the good quality of vascular images for large vessels but the poor quality for small ones. Although 3D PC MRA gave more improved visualization of small vessels than 2D PC MRA, the image quality was not enough to be used for diagnosis of the small vessels due to the low SNR and field homogeneity of the low field MRI system. The measured blood velocities were $25.46{\pm}0.73cm/sec$, $24.02{\pm}0.34cm/sec$ and $26.15{\pm}1.50cm/sec$ in the superior sagittal sinus, straight sinus and the confluence of the two, respectively, which showed good agreement with the previous experimental values. Thus, the developed PC MRA technique for low field MRI system is expected to provide the useful velocity information to diagnose the large brain vessels.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.40 no.1
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• pp.9-16
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• 2016

A position control system composed of the PMLSM(Permanent Magnet Linear Synchronous Motor), unlike conventional linear permanent magnet synchronous motor is fixed to the permanent magnet moving coil rails (permanent magnet = stator, coil = mover), the coil is fixed, moving the permanent magnet, we propose a position control system (permanent magnet = mover, coil = stator) structure. Position is measured not using conventional encoder or resolver but by adopting vector control method using 2 hall sensors generating rectangular signal. This method estimate the velocity and position of mover by using the quadruple of two hall sensor signal instead of encoder signal. Vector control of PMLSM using 2 hall sensor generating rectangular wave is proved to control the system stable and efficiently through simulation. Also hardware experiment reveals that the position control performance is measured within the range of $30{\sim}50{\mu}m$ in the accuracy of $10{\sim}20{\mu}m$, which is improved twice to the conventional method. The proposed method exhibits its economical efficiency and practical usefulness. The vector control technique using two hall sensors can be installed in narrow place, accordingly it can be implemented on the system where the conventional encoder or resolver cannot operate.

• Journal of Advanced Marine Engineering and Technology
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• v.35 no.4
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• pp.436-442
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• 2011

To obtain the engine output correctly is basically very important factor for estimating a engine performance. But, it has been reported that the IHP measured from electronic indicator such as MIPS(Mean Indication Pressure System) has a deviation compared to mechanical indicator. It was reported by authors that the uncertainty of crank angle for TDC position could be one of the reasons. In this paper, the uncertainty of crank angle for TDC position and its influence to engine output were investigated respectively about M/E and G/E for marine diesel engines. For the purpose, two sampling methods of pressure in cylinder were considered which were 'angle base sampling' and 'time base sampling'. Angle base sampling is real crank angle acquired from angle encoder which is attached to crank shaft and time base sampling is crank angle calculated by detected revolution with Z-pluse of encoder. Time base sampling is same method of MIPS. This paper concluded that time base sampling method is not suitable for obtaining the output of marine diesel engine on board because of instantaneous speed variation and load fluctuation. Also it is verified that the variation of engine speed by load fluctuation should be one of reasons additionally in case of M/E.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.10 no.6
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• pp.1237-1244
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• 2009

In this paper, we proposed a mobile phone payment system using light signal containing payment related information. The digicard system we proposed creates virtual mobile card such as credit numbers and the created information is loaded in mobile phone. The virtual card information should be changed to pulse signal by light signal devices of mobile phone and the specific digicard system reader is able to read light signal. In recent years, a mobile phone payment system has been developed in order to provide user's convenience. But the mobile phone payment system has problems such as the production costs and complex and large size. In order to solve the aforementioned problems, we proposed mobile phone payment system being implemented by updating software without additional hardware modules. Therefore it is possible to apply the proposed digicard system to all kinds of mobile phone. Also encryption module is implemented to solve the problem of the security and privacy. According to an aspect of the present invention, there is provided a mobile phone payment system using a light signal containing payment-related information, comprising: a mobile phone; a photo receiver: and a control server.

• Journal of Korean Society of Environmental Engineers
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• v.27 no.10
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• pp.1114-1122
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• 2005

This research investigates the effects of sonication mode, reaction temperature and volume on sonolysis of 1,4-dioxane in order to increase the degradation efficiency and kinetics. The degradation efficiency in case with pulse mode was about 10 % higher than that in case with continuous mode. The degradation profiles in both cases, which were performed without the control of reaction temperature and in 1000 mL, were composed of three steps. However, 1,4-D was mainly degraded in the initiation step as the first portion and the acceleration step as the second portion. The initial step agreed with zero-order expression well, while the acceleration step could be fitted with pseudo 1st-order expression. The kinetic model in case with $5^{\circ}C$ and 300 mL conformed to pseudo 1st-order, while that in cases with $10^{\circ}C$ to $40^{\circ}C$ agreed with zero-order expression. The degradation efficiency and profile of 1,4-D in the experiment with $20^{\circ}C$ and 300 mL was higher and simpler than that in case with $20^{\circ}C$ and 1000 mL. The reaction temperature and volume influence bubble intensity, which was produced in sonication. The increase of bubble intensity induced to augment the production of OH radical in sonication.