• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.247-251
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• 2004

반도체 소자의 제조에 있어 실리콘 표면에 성장한 자연산화막을 제거하기 위해 일반적으로 습식 세정 기술이 이용되어 왔다. 하지만 소자의 최소 선폭(design rule)이 nano급으로 고집적화 됨에 따라 contact hole 바닥의 자연산화막을 깨끗이 제거하는데 있어서 그 한계를 나타나고 있다. 이에 대한 효과적인 대안 공정으로 가스 건식 세정 기술이 연구되고 있다. 본 논문에서는 한 번에 50매 이상의 웨이퍼를 처리함으로써 생산성 측면에서 월등한 배치식 설비에서 원거리 플라즈마(remote plasma) 장치에서 2.450Hz의 마이크로웨이브(${\mu}$-wave)에 의해 형성시킨 수소라디칼과 $NF_3$ 가스를 이용하여 실리콘에 결함을 주지 않고 자연산화막을 선택적으로 제거하는 공정에 대해 고찰하였다. AFM을 이용한 표면분석, TEM을 이용한 물성분석, 그리고 ToF-SIMS 및 XPS를 이용한 화학 분석을 습식 및 건식 세정을 비교 평가한 결과, 건식 세정 공정이 실리콘 표면에 결함을 주지 않고 자연산화막을 제거 할 수 있음을 확인하였다. 산화막$(SiO_2)$, 질화막$(Si_3N_4)$, 그리고 다결정 실리콘(Poly-Si) 등의 각 막질별 식각 특성을 고찰하였으며, $NH_3$의 캐리어 가스인 $N_2$의 주입량을 조절함으로써 수소라디칼 형성 효율의 개선이 가능하였으며, 이로부터 게이트와 소스/드레인 사이를 절연하기 위해 이용되는 질화막의 식각 선택비를 2배 정도 개선할 수 있었다. nano급 소자에 실장하여 평가한 결과에서 불산(HF)에 의한 습식 세정 방식에 비하여 약 $20{\sim}50%$ 정도의 contact 저항 감소 효과가 있음이 확인되었다.두 소자 모두 $40mA/cm^2$ 에서 이상적인 화이트 발란스와 같은(0.33,0.33)의 색좌표를 보였다.epsilon}_0=1345$의 빼어난 압전 및 유전특성과 $330^{\circ}C$의 높은 $T_c$를 보였고 그 조성의 vibration velocity는 약4.5 m/s로 나타났다.한 관심이 높아지고 있다. 그러나 고 자장 영상에서의 rf field 에 의한 SAR 증가는 중요한 제한 요소로 부각되고 있다. 나선주사영상은 SAR 문제가 근원적으로 발생하지 않고, EPI에 비하여 하드웨어 요구 조건이 낮아 고 자장에서의 고속영상방법으로 적합하다. 본 논문에서는 고차 shimming 을 통하여 불균일도를 개선하고, single shot 과 interleaving 을 적용한 multi-shot 나선주사영상 기법으로 $100{\times}100$에서 $256{\times}256$의 고해상도 영상을 얻어 고 자장에서 초고속영상기법으로 다양한 적용 가능성을 보였다. 연구에서 연구된 $[^{18}F]F_2$가스는 친핵성 치환반응으로 방사성동위원소를 도입하기 어려운 다양한 방사성의 약품개발에 유용하게 이용될 수 있을 것이다.었으나 움직임 보정 후 영상을 이용하여 비교한 경우, 결합능 변화가 선조체 영역에서 국한되어 나타나며 그 유의성이 움직임 보정 전에 비하여 낮음을 알 수 있었다. 결론: 뇌활성화 과제 수행시에 동반되는 피험자의 머리 움직임에 의하여 도파민 유리가 과대평가되었으며 이는 이 연구에서 제안한 영상정합을 이용한 움직임 보정기법에 의해서 개선되었다. 답이 없는 문제, 문제 만들기, 일반화가 가능한 문제 등으로 보고, 수학적 창의성 중 특히 확산적 사고에 초점을 맞추어 개방형 문제가 확

• Journal of the Korean Electrochemical Society
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• v.24 no.4
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• pp.120-132
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• 2021

Although the development of high-Nickel is being actively carried out to solve the capacity limitation and the high price of raw cobalt due to the limitation of high voltage use of the existing LiCoO₂, the deterioration of the battery characteristics due to the decrease in structural stability and increase of the Ni content. It is an important cause of delaying commercialization. Therefore, in order to increase the high stability of the Ni-rich ternary cathod material LiNi_0.6Co_0.2Mn_0.2O₂, precursor Ni_0.6Co_0.2Mn_0.2-x(OH)₂/xTiO₂ was prepared using a nanosized TiO₂ suspension type source for uniform Ti substitution in the precursor. It was mixed with Li₂CO₃, and after heating, the cathode active material LiNi_0.6Co_0.2Mn_0.2-xTi_xO₂ was synthesized, and the physical properties according to the Ti content were compared. Through FE-SEM and EDS mapping analysis, it was confirmed that a positive electrode active material having a uniform particle size was prepared through Ti-substituted spherical precursor and Particle Size Analyzer and internal density and strength were increased, XRD structure analysis and ICP-MS quantitative analysis confirmed that the capacity was effectively maintained even when the Ti-substituted positive electrode active material was manufactured and charging and discharging were continued at high temperature and high voltage.

• Journal of the Korean Society of Food Science and Nutrition
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• v.41 no.12
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• pp.1778-1784
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• 2012

This study was conducted to investigate the quality characteristics of red pepper paste (RPP) added with garlic during aging at $10^{\circ}C$ for 56 days. RPP was evaluated for pH, acidity, free sugar contents, Hunter's color values, flavor patterns, and sensory characteristics. The initial pH and acidity of the RPP with garlic were 5.07~5.18 and 0.33~0.35%, respectively. The pH of RPP increased as the amount of garlic added increased, whereas the acidity decreased. The pH and total acidity changed gradually until day 28, after which they changed rapidly. The initial fructose and glucose contents of the RPP with garlic decreased to 2.32~2.41% and 1.94~2.09%, respectively. The fructose and glucose contents further decreased gradually to 1.81~1.94% and 1.54~1.71%, respectively, during aging. The Hunter's L- and b-values of the RPP increased, whereas the a-value decreased as the amount of garlic added increased. The flavor patterns of the RPP with garlic noticeably differed from those of the control RPP during aging. Sensory evaluation indicated that garlic could enhance the overall flavor characteristics of RPP.

• Journal of the Korean Society of Radiology
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• v.14 no.5
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• pp.603-612
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• 2020

This study has a purpose to look into the effect of the relationship between the Tube current (mA) and SOD(Source to Object Distance), which is a parameter of lower limb angiography examination, and the dilution rate of the contrast medium concentration (300, 320, 350) on the image. To that end, using 3 mm vessel model water phantom, a vessel model custom made in the size of peripheral vessel diameter, this study measured relationships between change of parameters, such as tube current (mA), SOD and varying concentrations (300, 320, 350) of contrast medium dilution into SNR and CNR values while analyzing the coefficients of variance(cv<10). The software used to measure SNR and CNR values was Image J 1.50i from NIH (National Institutes of Health, USA). MPV (mean pixel value) and SD (standard deviation) were used after verifying numerically the image signal for region of interest (ROI) and background on phantom from the DICOM (digital imaging and communications in medicine) 3.0 file transmitted to PACS. As to contrast medium dilution by the change of tube current, when 146 mA and 102 mA were compared, For both SNR and CNR, the coefficient of variation value was less than 10 until the section of CM: N/S dilution (100% ~ 30% : 70%) but CM: N/S dilution rate (20%: 80% ~ 10% : 90%) the coefficient of variation was 10 or more. As to contrast medium dilution by concentration for SOD change, when SOD's (32.5 cm and 22.5 cm) were compared,For both SNR and CNR, the coefficient of variation value was less than 10 until the section of CM: N/S dilution (100% ~ 30% : 70%) but CM: N/S dilution rate (20%: 80% ~ 10% : 90%) the coefficient of variation was 10 or more. As to contrast medium dilution by concentration for SOD change, when SOD's (32.5 cm and 12.5 cm) were compared,For both SNR and CNR, the coefficient of variation value was less than 10 until the section of CM: N/S dilution (100% ~ 30% : 70%) but CM: N/S dilution rate (20%: 80% ~ 10% : 90%) the coefficient of variation was 10 or more. As a result, set a low tube current value in other tests or procedures including peripheral angiography of the lower extremities in the intervention, and make the table as close as possible to the image receiver, and adjust the contrast agent concentration (300) to CM: N/S dilution (30%: 70%). ) Is suggested as the most efficient way to obtain images with an appropriate concentration while simultaneously reducing the burden on the kidney and the burden on exposure.

• Korean journal of food and cookery science
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• v.31 no.5
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• pp.652-659
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• 2015

The aim of this study was to provide nutrition information to consumers by analyzing crude fat, saturated and trans fatty acids in commercial retort foods (n=70). The following sauce products of curries (n=21) and black-bean-sauces (n=16), other sauces (n=17) and instant cooking foods (n=16) were collected. Crude fat contents were quantified with the Rose-Gottlieb method using acid digestion. While saturated and trans fatty acids were examined by gas chromatography with a flame ionization detector (FID). Crude fat, saturated and trans fatty acid content ranges were $0.47{\pm}0.42{\sim}12.80{\pm}0.07g/100g$, $0.24{\pm}0.02{\sim}17.41{\pm}0.41g/100g$, $0.00{\pm}0.00{\sim}0.46{\pm}0.05g/100g$, respectively. Maximum recovery of analysis values was crude fat (119.7%), saturated fat (119%) and trans fatty acid (90%) compared the actual amounts based on the reference value indicated on the nutrition label. The analyzed samples were found to be compliant with nutrition label standard, because the contents of crude fat, saturated fatty acid, trans fatty acid were less than 120% of the reference value indicated on the nutrition label in retort foods. Therefore, the nutrition information on retort foods available to consumers was found to be trustworthy.

• Progress in Medical Physics
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• v.23 no.2
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• pp.81-90
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• 2012

The effect of setup uncertainties on CTV dose and the correlation between setup uncertainties and setup margin were evaluated by Monte Carlo based numerical simulation. Patient specific information of IMRT treatment plan for rectal cancer designed on the VARIAN Eclipse planning system was utilized for the Monte Carlo simulation program including the planned dose distribution and tumor volume information of a rectal cancer patient. The simulation program was developed for the purpose of the study on Linux environment using open source packages, GNU C++ and ROOT data analysis framework. All misalignments of patient setup were assumed to follow the central limit theorem. Thus systematic and random errors were generated according to the gaussian statistics with a given standard deviation as simulation input parameter. After the setup error simulations, the change of dose in CTV volume was analyzed with the simulation result. In order to verify the conventional margin recipe, the correlation between setup error and setup margin was compared with the margin formula developed on three dimensional conformal radiation therapy. The simulation was performed total 2,000 times for each simulation input of systematic and random errors independently. The size of standard deviation for generating patient setup errors was changed from 1 mm to 10 mm with 1 mm step. In case for the systematic error the minimum dose on CTV $D_{min}^{stat{\cdot}}$ was decreased from 100.4 to 72.50% and the mean dose $\bar{D}_{syst{\cdot}}$ was decreased from 100.45% to 97.88%. However the standard deviation of dose distribution in CTV volume was increased from 0.02% to 3.33%. The effect of random error gave the same result of a reduction of mean and minimum dose to CTV volume. It was found that the minimum dose on CTV volume $D_{min}^{rand{\cdot}}$ was reduced from 100.45% to 94.80% and the mean dose to CTV $\bar{D}_{rand{\cdot}}$ was decreased from 100.46% to 97.87%. Like systematic error, the standard deviation of CTV dose ${\Delta}D_{rand}$ was increased from 0.01% to 0.63%. After calculating a size of margin for each systematic and random error the "population ratio" was introduced and applied to verify margin recipe. It was found that the conventional margin formula satisfy margin object on IMRT treatment for rectal cancer. It is considered that the developed Monte-carlo based simulation program might be useful to study for patient setup error and dose coverage in CTV volume due to variations of margin size and setup error.

• Korean Journal of Food Science and Technology
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• v.30 no.4
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• pp.767-774
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• 1998

This study has been carried out to measure the amount of the daily intake by Korean on preservatives (Dehydroacetic acid, Benzoic acid and ρ-Hydroxybenzoic acid asters) in foods. The amounts of preservatives were determined by HPLC in foods such as butter, cheese, margarine, aloe gel, carbonated beverages, mixed beverage, ginseng beverage, red ginseng drink, soy sauce, fruit and vegetable juices (except unheated fruit-vegetable juice), vineger, seasonings, fruit and vegetables only on the peel, fruit wine, rice wine and unrefined rice wine. The recovery ranges were found to be 99.2% for dehydroacetic Acid, 95.8% for benzoic acid and $94.2{\sim}97.2%$ for ${\rho}-hydroxybenzoic$ acid in foods, respectively. The data of average food intake for each food items per capita per day were obtained from the report of national nutrition survey carried by the Ministry of Health and Welfare in 1997. The detected number of samples and average intake range of preservatives have been figured cut to $ND{\sim}290.0{\;}ppm$ for dehydroacetic acid, $ND{\sim}400.0{\;}ppm$ for benzoic acid and $ND{\sim}93.9{\;}ppm$ for ${\rho}-hydroxybenzoic$ acid esters, respectively. Estimated daily intake (EDI) of each additives per capita per day were shown as follows; 1.56 mg for dehydroacetic acid, 2.25 mg for benzoic acid and 0.44 mg for ${\rho}-hydroxybenzoic$ acid esters in total respectively and these values were evaluated to be much lower than that of FAO/WHO's acceptable daily intake (ADI) $0{\sim}5{\;}mg/kg$ b.w./day for benzoic acid and $0{\sim}10{\;}mg/kg$ b.w./day for ${\rho}-hydroxybenzoic$ acid esters.

• Journal of Intelligence and Information Systems
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• v.24 no.4
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• pp.219-240
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• 2018

Sentiment analysis, which is one of the text mining techniques, is a method for extracting subjective content embedded in text documents. Recently, the sentiment analysis methods have been widely used in many fields. As good examples, data-driven surveys are based on analyzing the subjectivity of text data posted by users and market researches are conducted by analyzing users' review posts to quantify users' reputation on a target product. The basic method of sentiment analysis is to use sentiment dictionary (or lexicon), a list of sentiment vocabularies with positive, neutral, or negative semantics. In general, the meaning of many sentiment words is likely to be different across domains. For example, a sentiment word, 'sad' indicates negative meaning in many fields but a movie. In order to perform accurate sentiment analysis, we need to build the sentiment dictionary for a given domain. However, such a method of building the sentiment lexicon is time-consuming and various sentiment vocabularies are not included without the use of general-purpose sentiment lexicon. In order to address this problem, several studies have been carried out to construct the sentiment lexicon suitable for a specific domain based on 'OPEN HANGUL' and 'SentiWordNet', which are general-purpose sentiment lexicons. However, OPEN HANGUL is no longer being serviced and SentiWordNet does not work well because of language difference in the process of converting Korean word into English word. There are restrictions on the use of such general-purpose sentiment lexicons as seed data for building the sentiment lexicon for a specific domain. In this article, we construct 'KNU Korean Sentiment Lexicon (KNU-KSL)', a new general-purpose Korean sentiment dictionary that is more advanced than existing general-purpose lexicons. The proposed dictionary, which is a list of domain-independent sentiment words such as 'thank you', 'worthy', and 'impressed', is built to quickly construct the sentiment dictionary for a target domain. Especially, it constructs sentiment vocabularies by analyzing the glosses contained in Standard Korean Language Dictionary (SKLD) by the following procedures: First, we propose a sentiment classification model based on Bidirectional Long Short-Term Memory (Bi-LSTM). Second, the proposed deep learning model automatically classifies each of glosses to either positive or negative meaning. Third, positive words and phrases are extracted from the glosses classified as positive meaning, while negative words and phrases are extracted from the glosses classified as negative meaning. Our experimental results show that the average accuracy of the proposed sentiment classification model is up to 89.45%. In addition, the sentiment dictionary is more extended using various external sources including SentiWordNet, SenticNet, Emotional Verbs, and Sentiment Lexicon 0603. Furthermore, we add sentiment information about frequently used coined words and emoticons that are used mainly on the Web. The KNU-KSL contains a total of 14,843 sentiment vocabularies, each of which is one of 1-grams, 2-grams, phrases, and sentence patterns. Unlike existing sentiment dictionaries, it is composed of words that are not affected by particular domains. The recent trend on sentiment analysis is to use deep learning technique without sentiment dictionaries. The importance of developing sentiment dictionaries is declined gradually. However, one of recent studies shows that the words in the sentiment dictionary can be used as features of deep learning models, resulting in the sentiment analysis performed with higher accuracy (Teng, Z., 2016). This result indicates that the sentiment dictionary is used not only for sentiment analysis but also as features of deep learning models for improving accuracy. The proposed dictionary can be used as a basic data for constructing the sentiment lexicon of a particular domain and as features of deep learning models. It is also useful to automatically and quickly build large training sets for deep learning models.

• Journal of the Korean Society of Food Science and Nutrition
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• v.45 no.5
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• pp.757-764
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• 2016

The purpose of this study was to investigate the salt and sodium content of lunch meals served at middle schools in Gyeongsangbuk-do. Four middle schools were investigated for their salt and sodium content and salt content contributing rate per meal. Average salt content of every lunch meal was 4.41 g, and average sodium content was 1,736.02 mg. During the investigation period, the lowest sodium content was 943.19 mg while the highest was 2,827.56 mg. Samples were classified into 16 food items and investigated for salt and sodium content. Total average salinity was 1.06%. Kimchi was the saltiest, followed by fresh-vegetables, boiled-vegetables, stir-fried foods, pan-fried foods, and hard-boiled foods. Total average salt content was 0.74 g, and most salty dishes were single dish rice noodles, followed by stews, steamed foods, broths, soups, kimchies, stir-fried foods, roasted foods, and hard-boiled foods. Samples were classified into seven menu groups, including cooked rice, single dish rice noodles, soup stew, main dish, side dish, kimchi, and desserts. Contributing rate of total average salt content was high in single dish rice noodles (40.56%), soup stew (23.23%), kimchies (20.30%), and main dish (18.13%). These results can be useful for establishing a database for sodium contents of meals in middle schools. 'SamSam foodservice' should be initiated in school foodservice to reduce sodium intake.

• Journal of the Korean Vacuum Society
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• v.22 no.5
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• pp.238-244
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• 2013

Doping process using laser is an important process in fabrication of solar cell for heat treatment. However, the process of using the furnace is difficult to form a selective emitter doping region. The case of using a selective emitter laser doping is required an expensive laser equipment and induce the wafer's structure damage due to high temperature. This study, we fabricated a new costly plasma source. Through this, we research the selective emitter doping. We fabricated that the atmospheric pressure plasma jet injected Ar gas is inputted a low frequency (a few tens kHz). We used shallow doping wafers existing PSG (Phosphorus Silicate Glass) on the shallow doping CZ P-type wafer. Atmospheric plasma treatment time was 15 s and 30 s, and current for making the plasma is 40 mA and 70 mA. We investigated a doping profile by using SIMS (Secondary Ion Mass Spectroscopy) and we grasp the sheet resistance of electrical character by using doping profile. As result of experiment, prolonged doping process time and highly plasma current occur a deeper doping depth, moreover improve sheet resistance. We grasped the wafer's surface damage after atmospheric pressure plasma doping by using SEM (Scanning Electron Microscopy). We check that wafer's surface is not changed after plasma doping and atmospheric pressure doping width is broaden by increase of plasma treatment time and current.