• Title/Summary/Keyword: 센서기반 시스템

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플라즈마 공정 진단을 위한 공간 분해 발광 분광 분석법 소개

  • Park, Chang-Hui;Kim, Dong-Hui;Choe, Seong-Won;Lee, Chang-Seok
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.81-81
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    • 2013
  • 반도체, LCD, MEMs 등 미세 전자소자의 제작과 깊은 관련이 있는 IT 산업은 자동차 산업과 함께 세계 경제를 이끌고 있는 핵심 산업이며, 그 발전 가능성이 크다고 할 수 있다. 이 중 반도체, LCD 공정 기술에 관해서 대한민국은 세계를 선도하여 시장을 이끌어 나가고 있는 실정이다. 이들의 공정기술은 주로 높은 수율(yield)을 기반으로 한 대량 생산 기술에 초점이 맞추어져 있기 때문에, 현재와 같은 첨예한 가격 경쟁력이 요구되는 시대에서 공정 기술 개발을 통해 수율을 최대한으로 이끌어 내는 것이 현재 반도체를 비롯한 미세소자 산업이 직면하고 있는 하나의 중대한 과제라 할 수 있다. 특히 반도체공정에 있어 발전을 거듭하여 현재 20 nm 수준의 선폭을 갖는 소자들의 양산이 계획 있는데 이와 같은 나노미터급 선폭을 갖는 소자 양산과 관련된 CD (critical dimension)의 감소는 공차의 감소를 유발시키고 있으며, 패널의 양산에 있어서 생산 효율 증가를 위한 기판 크기의 대형화가 이루어지고 있다. 또한, 소자의 집적도를 높이기 위하여 높은 종횡비(aspect ratio)를 요구하는 공정이 일반화됨에 따라 단일 웨이퍼 내에서의 공정의 균일도(With in wafer uniformity, WIWU) 및 공정이 진행되는 시간에 따른 균일도(Wafer to wafer uniformity)의 변화 양상에 대한 파악을 통한 공정 진단에 대한 요구가 급증하고 있는 현실이다. 반도체 및 LCD 공정에 있어서 공정 균일도의 감시 및 향상을 위하여 박막, 증착, 식각의 주요 공정에 널리 사용되고 있는 플라즈마의 균일도(uniformity)를 파악하고 실시간으로 감시하는 것이 반드시 필요하며, 플라즈마의 균일도를 파악한다는 것은 플라즈마의 기판 상의 공간적 분포(radial direction)를 확인하여 보는 것을 의미한다. 현재까지 플라즈마의 공간적 분포를 진단하는 대표적인 방법으로는 랭뮤어 탐침(Langmuir Probe), 레이저 유도 형광법(Laser Induced Fluorescence, LIF) 그리고 광섬유를 이용한 발광분광법(Optical Emission Spectroscopy, OES)등이 있으나 랭뮤어 탐침은 플라즈마 본연의 상태에서 섭동(pertubation) 현상에 의한 교란, 이온에너지 측정의 한계로 인하여 공정의 실시간 감시에 적합하지 않으며, 레이저 유도 형광법은 측정 물질의 제한성 때문에 플라즈마 내부에 존재하는 다양한 종의 거동을 살필 수 없다는 단점 및 장치의 설치와 정렬(alignment)이 상대적으로 어려워 산업 현장에서 사용하기에 한계가 있다. 본 연구에서는 최소 50 cm에서 최대 400 cm까지 플라즈마 내 측정 거리에서 최대 20 mm 공간 분해가 가능한 광 수광 시스템 및 플라즈마 공정에서의 라디칼의 상태 변화를 분광학적 비접촉 방법으로 계측할 수 있는 발광 분광 분석기를 접목하여 플라즈마 챔버 내의 라디칼 공간 분포를 계측할 수 있는 진단 센서를 고안하고 이를 실 공정에 적용하여 보았다. 플라즈마 증착 및 식각 공정에서 형성된 박막의 두께 및 식각률과 공간 분해발광 분석법을 통하여 계측된 결과와의 매우 높은 상관관계를 확인하였다.

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Analysis of acoustic emission parameters according to failure of rock specimens (암석시편 파괴에 따른 acoustic emission 특성인자 분석)

  • Lee, Jong-Won;Oh, Tae-Min;Kim, Hyunwoo;Kim, Min-Jun;Song, Ki-Il
    • Journal of Korean Tunnelling and Underground Space Association
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    • v.21 no.5
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    • pp.657-673
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    • 2019
  • A monitoring method based on acoustic emission (AE) sensor has been widely used to evaluate the damage of structures in underground rock. The acoustic emission signal generated from cracking in material is analyzed as various acoustic emission parameters in time and frequency domain. To investigate from initial crack generation to final failure of rock material, it is important to understand the characteristics of acoustic emission parameters according to the stress ratio and rock strength. In this study, uniaxial compression tests were performed using very strong and weak rock specimen in order to investigate the acoustic emission parameters when the failure of specimen occurred. In the results of experimental tests, the event, root-mean-square (RMS) voltage, amplitude, and absolute energy of very strong rock specimen were larger than those of the weak rock specimen with an increase of stress ratio. In addition, the acoustic emission parameters related in frequency were more affected by specification (e.g., operation and resonant frequency) of sensors than the stress ratio or rock strength. It is expected that this study may be meaningful for evaluating the damage of underground rock when the health monitoring based on the acoustic emission technique will be performed.

Heart Rate Signal Extraction by Using Finger vein Recognition System (지정맥 인식 시스템을 이용한 심박신호 검출)

  • Bok, Jin Yeong;Suh, Kun Ha;Lee, Eui Chul
    • Asia-pacific Journal of Multimedia Services Convergent with Art, Humanities, and Sociology
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    • v.9 no.6
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    • pp.701-709
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    • 2019
  • Recently, heart rate signal, which is one of biological signals, have been used in various fields related to healthcare. Conventionally, most of the proposed heart rate signal detection methods are contact type methods, but there is a problem of discomfort that the subject have to contact with the device. In order to solve the problem, detection study by non-contact method has been progressed recently. The detected heart rate signal can be used for finger vein liveness detection and various application using heart rate. In this paper, we propose a method to obtain heart rate signal by using finger vein imaging system. The proposed method detected the signal from the changes of the brightness value in the time domain of the infrared finger vein images and converted it into the frequency domain using the image processing algorithm. After the conversion, we removed the noise not related to the heart rate signal through band-pass filtering. In order to evaluate the accuracy of the signal, we analyzed the correlation with the signal obtained simultaneously with the finger vein acquisition device and contact type PPG sensor approved by KFDA. As a result, it was possible to confirm that the heart rate signal detected in non-contact method through the finger vein image coincides with the waveform of actual heart rate signal.

Transparent Near-infrared Absorbing Dyes and Applications (투명 근적외선 흡수 염료 및 응용 분야)

  • Hyocheol Jung;Ji-Eun Jeong;Sang-Ho Lee;Jin Chul Kim;Young Il Park
    • Applied Chemistry for Engineering
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    • v.34 no.3
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    • pp.207-212
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    • 2023
  • Near-infrared (NIR) absorbing dyes have been applied to various applications such as optical filters, biotechnology, energy storage and conversion, coating additive, and traditionally information-storage materials. Because image sensors used in cellphones and digital cameras have sensitivity in the NIR region, the NIR cut-off filter is essential to achieving more clear images. As energy storage and conversion have been important, diverse NIR absorbing materials have been developed to extend the absorption region to the NIR region, and NIR absorbing materials-based research has proceeded to improve device performances. Adding NIR-absorbing dye with a photo-thermal effect to a self-healable coating system has been attractive for future mobility technology, and more effective self-healing properties have been reported. In this report, the chemical structures of representative NIR-absorbing dyes and state of the art research based on NIR-absorbing dyes are introduced.

Implementation of Electrical and Optical characteristics based on new packaging in UV LED (UV LED의 광효율 및 방열성능 향상을 위한 new packaging 특성 연구)

  • Kim, Byoung Chol;Park, Byeong Seon;Kim, Hyeong-Jin;Kim, Yong-Kab
    • Smart Media Journal
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    • v.11 no.9
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    • pp.21-29
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    • 2022
  • Ultra Violet(UV) is gradually being replaced with LED instead of general UV lamps. However, the light efficiency of UV LED is still lower than that of the general lamp, and the light efficiency is also low. Due to the current environment and technical problems of UV lamps, the LED replacements are gradually being made. In this study, a new package design and analysis were performed to increase the lifetime and performance of UV LEDs. A new packaging for UV LED were designed and implemented. The new packaging for UV LED was constructed to improve light efficiency. And the electrical and optical characteristics were analyzed respectively. To improve the optical efficiency in UV LED package, the Al has been used based on high reflectivity and applying the optimal lens focusing. Compared to the existing silver Ag, the light efficiency was improved by about 30% or more, and it was confirmed that the light output degradation characteristic was improved by about 10% in the newly applied optical device chip.

Analyzing Contextual Polarity of Unstructured Data for Measuring Subjective Well-Being (주관적 웰빙 상태 측정을 위한 비정형 데이터의 상황기반 긍부정성 분석 방법)

  • Choi, Sukjae;Song, Yeongeun;Kwon, Ohbyung
    • Journal of Intelligence and Information Systems
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    • v.22 no.1
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    • pp.83-105
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    • 2016
  • Measuring an individual's subjective wellbeing in an accurate, unobtrusive, and cost-effective manner is a core success factor of the wellbeing support system, which is a type of medical IT service. However, measurements with a self-report questionnaire and wearable sensors are cost-intensive and obtrusive when the wellbeing support system should be running in real-time, despite being very accurate. Recently, reasoning the state of subjective wellbeing with conventional sentiment analysis and unstructured data has been proposed as an alternative to resolve the drawbacks of the self-report questionnaire and wearable sensors. However, this approach does not consider contextual polarity, which results in lower measurement accuracy. Moreover, there is no sentimental word net or ontology for the subjective wellbeing area. Hence, this paper proposes a method to extract keywords and their contextual polarity representing the subjective wellbeing state from the unstructured text in online websites in order to improve the reasoning accuracy of the sentiment analysis. The proposed method is as follows. First, a set of general sentimental words is proposed. SentiWordNet was adopted; this is the most widely used dictionary and contains about 100,000 words such as nouns, verbs, adjectives, and adverbs with polarities from -1.0 (extremely negative) to 1.0 (extremely positive). Second, corpora on subjective wellbeing (SWB corpora) were obtained by crawling online text. A survey was conducted to prepare a learning dataset that includes an individual's opinion and the level of self-report wellness, such as stress and depression. The participants were asked to respond with their feelings about online news on two topics. Next, three data sources were extracted from the SWB corpora: demographic information, psychographic information, and the structural characteristics of the text (e.g., the number of words used in the text, simple statistics on the special characters used). These were considered to adjust the level of a specific SWB. Finally, a set of reasoning rules was generated for each wellbeing factor to estimate the SWB of an individual based on the text written by the individual. The experimental results suggested that using contextual polarity for each SWB factor (e.g., stress, depression) significantly improved the estimation accuracy compared to conventional sentiment analysis methods incorporating SentiWordNet. Even though literature is available on Korean sentiment analysis, such studies only used only a limited set of sentimental words. Due to the small number of words, many sentences are overlooked and ignored when estimating the level of sentiment. However, the proposed method can identify multiple sentiment-neutral words as sentiment words in the context of a specific SWB factor. The results also suggest that a specific type of senti-word dictionary containing contextual polarity needs to be constructed along with a dictionary based on common sense such as SenticNet. These efforts will enrich and enlarge the application area of sentic computing. The study is helpful to practitioners and managers of wellness services in that a couple of characteristics of unstructured text have been identified for improving SWB. Consistent with the literature, the results showed that the gender and age affect the SWB state when the individual is exposed to an identical queue from the online text. In addition, the length of the textual response and usage pattern of special characters were found to indicate the individual's SWB. These imply that better SWB measurement should involve collecting the textual structure and the individual's demographic conditions. In the future, the proposed method should be improved by automated identification of the contextual polarity in order to enlarge the vocabulary in a cost-effective manner.

Analysis of the growth environment and fruiting body quality of Pleurotus eryngii cultivated by Smart Farming (큰느타리(새송이)버섯 스마트팜 재배를 통한 생육환경 분석 및 자실체 품질 특성)

  • Kim, Kil-Ja;Kim, Da-Mi;An, Ho-Sub;Choi, Jin-Kyung;Kim, Seon-Gon
    • Journal of Mushroom
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    • v.17 no.4
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    • pp.211-217
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    • 2019
  • Currently, cultivation of mushrooms using the Information and Communication Technology (ICT)-based smart farming technique is increasing rapidly. The main environmental factors for growth of mushrooms are temperature, humidity, carbon dioxide (CO2), and light. Among all the mentioned factors, currently, only temperature has been maintained under automatic control. However, humidity and ventilation are controlled using a timer, based on technical experience.Therefore, in this study, a Pleurotus eryngii first-generation smart farm model was set up that can automatically control temperature, humidity, and ventilation. After installing the environmental control system and the monitoring device, the environmental condition of the mushroom cultivation room and the growth of the fruiting bodies were studied. The data thus obtained was compared to that obtained using the conventional cultivation method.In farm A, the temperature during the primordia formation stage was about 17℃, and was maintained at approximately 16℃ during the fruiting stage. The humidity was initially maintained at 95%, and the farm was not humidified after the primordia formation stage. There was no sensor for CO2 management, and the system was ventilated as required by observing the shape of the pileus and the stipe. It was observed that, the concentration of CO2 was between 700 and 2,500 ppm during the growth period. The average weight of the mushrooms produced in farm A was 125 g, and the quality was between that of the premium and the first grade.In farm B. The CO2 sensor was in use for measurement purposes only; the system was ventilated as required by observing the shape of the pileus and the stipe. During the growth period, the CO2 concentration was observed to be between 640 and 4,500 ppm. The average weight of the mushrooms produced in farm B was 102 g.These results indicate that the quality of the king oyster mushroom is determined by the environmental conditions, especially by the concentration of CO2. Thus, the data obtained in this study can be used as an optimal smart farm model, where, by improving the environmental control method of farm A, better quality mushrooms were obtained.

Comparison of Wind Vectors Derived from GK2A with Aeolus/ALADIN (위성기반 GK2A의 대기운동벡터와 Aeolus/ALADIN 바람 비교)

  • Shin, Hyemin;Ahn, Myoung-Hwan;KIM, Jisoo;Lee, Sihye;Lee, Byung-Il
    • Korean Journal of Remote Sensing
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    • v.37 no.6_1
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    • pp.1631-1645
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    • 2021
  • This research aims to provide the characteristics of the world's first active lidar sensor Atmospheric Laser Doppler Instrument (ALADIN) wind data and Geostationary Korea Multi Purpose Satellite 2A (GK2A) Atmospheric Motion Vector (AMV) data by comparing two wind data. As a result of comparing the data from September 2019 to August 1, 2020, The total number of collocated data for the AMV (using IR channel) and Mie channel ALADIN data is 177,681 which gives the Root Mean Square Error (RMSE) of 3.73 m/s and the correlation coefficient is 0.98. For a more detailed analysis, Comparison result considering altitude and latitude, the Normalized Root Mean Squared Error (NRMSE) is 0.2-0.3 at most latitude bands. However, the upper and middle layers in the lower latitudes and the lower layer in the southern hemispheric are larger than 0.4 at specific latitudes. These results are the same for the water vapor channel and the visible channel regardless of the season, and the channel-specific and seasonal characteristics do not appear prominently. Furthermore, as a result of analyzing the distribution of clouds in the latitude band with a large difference between the two wind data, Cirrus or cumulus clouds, which can lower the accuracy of height assignment of AMV, are distributed more than at other latitude bands. Accordingly, it is suggested that ALADIN wind data in the southern hemisphere and low latitude band, where the error of the AMV is large, can have a positive effect on the numerical forecast model.

A 12b 200KHz 0.52mA $0.47mm^2$ Algorithmic A/D Converter for MEMS Applications (마이크로 전자 기계 시스템 응용을 위한 12비트 200KHz 0.52mA $0.47mm^2$ 알고리즈믹 A/D 변환기)

  • Kim, Young-Ju;Chae, Hee-Sung;Koo, Yong-Seo;Lim, Shin-Il;Lee, Seung-Hoon
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.43 no.11 s.353
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    • pp.48-57
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    • 2006
  • This work describes a 12b 200KHz 0.52mA $0.47mm^2$ algorithmic ADC for sensor applications such as motor controls, 3-phase power controls, and CMOS image sensors simultaneously requiring ultra-low power and small size. The proposed ADC is based on the conventional algorithmic architecture with recycling techniques to optimize sampling rate, resolution, chip area, and power consumption. The input SHA with eight input channels for high integration employs a folded-cascode architecture to achieve a required DC gain and a sufficient phase margin. A signal insensitive 3-D fully symmetrical layout with critical signal lines shielded reduces the capacitor and device mismatch of the MDAC. The improved switched bias power-reduction techniques reduce the power consumption of analog amplifiers. Current and voltage references are integrated on the chip with optional off-chip voltage references for low glitch noise. The employed down-sampling clock signal selects the sampling rate of 200KS/s or 10KS/s with a reduced power depending on applications. The prototype ADC in a 0.18um n-well 1P6M CMOS technology demonstrates the measured DNL and INL within 0.76LSB and 2.47LSB. The ADC shows a maximum SNDR and SFDR of 55dB and 70dB at all sampling frequencies up to 200KS/s, respectively. The active die area is $0.47mm^2$ and the chip consumes 0.94mW at 200KS/s and 0.63mW at 10KS/s at a 1.8V supply.

Effect of the Configuration of Contact Type Textile Electrode on the Performance of Heart Activity Signal Acquisition for Smart Healthcare (스마트 헬스케어를 위한 심장활동 신호 검출용 접촉식 직물전극의 구조가 센싱 성능에 미치는 영향)

  • Cho, Hyun-Seung;Koo, Hye-Ran;Yang, Jin-Hee;Lee, Kang-Hwi;Kim, Sang-Min;Lee, Jeong-Hwan;Kwak, Hwy-Kuen;Ko, Yun-Su;Oh, Yun-Jung;Park, Su-Youn;Kim, Sin-Hye;Lee, Joo-Hyeon
    • Science of Emotion and Sensibility
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    • v.21 no.4
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    • pp.63-76
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    • 2018
  • The purpose of this study was to investigate the effect of contact type textile electrode structure on heart activity signal acquisition for smart healthcare. In this study, we devised six contact type textile electrodes whose electrode size and configuration were manipulated for measuring heart activity signals using computerized embroidery. We detected heart activity signals using a modified lead II and by attaching each textile electrode to the chest band in four healthy male subjects in a standing static posture. We measured the signals four times repeatedly for all types of electrodes. The heart activity signals were sampled at 1 kHz using a BIOPAC ECG100, and the detected original signals were filtered through a band-pass filter. To compare the performance of heart activity signal acquisition among the different structures of the textile electrodes, we conducted a qualitative analysis using signal waveform and size as parameters. In addition, we performed a quantitative analysis by calculating signal power ratio (SPR) of the heart activity signals obtained through each electrode. We analyzed differences in the performance of heart activity signal acquisition of the six electrodes by performing difference and post-hoc tests using nonparametric statistic methods on the calculated SPR. The results showed a significant difference both in terms of qualitative and quantitative aspects of heart activity signals among the tested contact type textile electrodes. Regarding the configurations of the contact type textile electrodes, the three-dimensionally inflated electrode (3DIE) was found to obtain better quality signals than the flat electrode. However, regarding the electrode size, no significant difference was found in performance of heart signal acquisition for the three electrode sizes. These results suggest that the configuration method (flat/3DIE), which is one of the two requirements of a contact type textile electrode structure for heart activity signal acquisition, has a critical effect on the performance of heart activity signal acquisition for wearable healthcare. Based on the results of this study, we plan to develop a smart clothing technology that can monitor high-quality heart activity without time and space constraints by implementing a clothing platform integrated with the textile electrode and developing a performance improvement plan.