Effects of NH3 on the Growth of Oxide Film by Infrared-CVD Method
(적외선 CVD 방법을 이용한 산화막 성장에 $NH_3$ 가 미치는 영향)
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- Journal of the Korean Institute of Telematics and Electronics
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- v.25 no.11
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- pp.1329-1334
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- 1988