• 전기의세계
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• v.38 no.4
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• pp.36-45
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• 1989

보 소고에서는 1T cell을 이용한 DRAM 집적도의 향상에 따른 몇가지의 한계요인을 생각해 보았다. 특별한 물질의 획기적 방법이 없는한, Cell의 수직대 수평 Aspect Ratio가 2이상 되고, 스위칭 소자의 채널 도평이 5 * $10^{17}$/$cm^{3}$ 이상이 되는 64M DRAM에 필요한 최소 선폭은 0.3-0.4.mu.m정도로 예측되는데 실제로 최소 선폭에 관한한 한계는 이보다 훨씬 더 작아질 것이다.다.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.7 s.172
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• pp.27-37
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• 2005

Direct writing technology on the silicon wafer surface is used to reduce the size of the chip as the miniature trend in electronic circuit. In order to improve the productivity and efficiency, the real time quality estimation is very important in each semiconductor process. In laser marking, marking quality is determined by readability which is dependant on the contrast of surface, the line width, and the melting depth. Many researchers have tried to find theoretical and numerical estimation models fur groove geometry. However, these models are limited to be applied to the real system. In this study, the estimation system for the line width during the laser marking was proposed by process monitoring method. The light intensity emitted by plasma which is produced when irradiating the laser to the silicon wafer was measured using the optical sensor. Because the laser marking is too fast to measure with external sensor, we build up the coaxial monitoring system. Analysis for the correlation between the acquired signals and the line width according to the change of laser power was carried out. Also, we developed the models enabling the estimation of line width of the laser marking through the statistical regression models and may see that their estimating performances were excellent.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.14 no.7
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• pp.3474-3481
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• 2013

In this work, a new high frequency transmission line structure combined with defected ground structure (DGS) and artificial dielectric substrate (ADS) structure is proposed. DGS patterns give add the additional inductance to transmission lines and results in the increased characteristic impedance for a given line width. To the contrary, ADS presents increased capacitance and reduced line impedance. So both play a role in reducing the length of transmission lines commonly, but in preserving the line impedance complementarily. This means that the length of transmission lines can be reduced furtherly by DGS and ADS without a critical change of line width compared to the cases when one of DGS and ADS is used only. As examples, $35{\sim}100{\Omega}$ transmission lines having DGS and ADS are designed, fabricated, measured, and compared to the simulation results. A good agreement between the simulated and measured line impedances is presented. In addition, the physical lengths of the proposed transmission lines are only 55.4~76.9% of those of the normal microstrip lines for the same electrical lengths.

• Journal of computational fluids engineering
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• v.13 no.1
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• pp.1-6
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• 2008

Direct Write Technologies are being utilized in various industrial fields such as antennas, engineered structures, sensors and tissue engineering. With Direct Write Technologies, producing features have the mesoscale range, from 1 to 100 microns. One form of the Direct Write Technologies is based on aerosol dynamics. The shape of deposited aerosols determine the form of products in the Direct Write Technology based on aerosol dynamics. To predict shape of deposited aerosol, a prediction model is created. In this study, we estimated Line-Width and Line-Thickness from the prediction model. Results of prediction model is valid from comparison with experimental results.

• Proceedings of the Korean Institute of Navigation and Port Research Conference
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• 2023.05a
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• pp.134-136
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• 2023

대형 컨테이너 선박의 주요 제원 예측에 관한 과거 연구는 단순 회귀분석에 기반한 결과로 제시되었으며, 이를 현재 운항 중인 24,000TEU급 선박의 제원과 과거의 연구 결과를 비교할 경우, 선박의 전장이 과대 예측한 경향이 있었다. 본 연구에서는 선형회귀분석 및 box plot의 통계 분석기법을 활용하여 최근 20년의 신조 컨테이너선을 대상으로 연도별 주요제원의 변화량을 통해 선박의 대형화 추세를 분석하였다. 그 결과, 컨테이너선의 대형화는 시간의 흐름에 따라 점점 폭이 넓어지는 형태로 변화하고 있는 것으로 분석되었다. 그러나 선폭 위주의 대형화는 선박 운항의 측면에서 조종성능의 감소로 인해 운항난이도가 증대된다는 단점이 있다. 즉, 미래 대형화 선박을 안전하게 운항하기 위해서는 적절한 항만 인프라 구축 및 선박길이와 폭의 조화를 이루는 대형화가 필요할 것으로 판단된다.

• Korean Journal of Optics and Photonics
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• v.8 no.4
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• pp.320-326
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• 1997

Broadband sources for fiber-optic gyroscope were constructed using erbium-doped fibers. Output power, linewidth, and mean wavelength were compared between four different source configurations. Among them, double pass configuration exhibited the highest output power, as high as 5.5 mW with 25 mW pumping at 1.48 ${\mu}{\textrm}{m}$ wavelength. It also showed nearly zero sensitivity of mean wavelength for the variation of pump power when a sufficient pumping was provided. Amplifier/Source configuration resulted in the highest detected power(power received by the gyro detector) that is more than 100 times larger than those of the other configurations, though it was the lowest of source output power. As the feedback level increased, the source power decreased while the linewidth increased, and mean wavelength varied significantly which would affect the scale factor of the gyroscope.

• Proceedings of the Korea Information Processing Society Conference
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• 2022.05a
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• pp.477-480
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• 2022

반도체 성능 향상으로 신호를 전달하는 회로의 단위가 마이크로 미터에서 나노미터로 미세화되어 선폭(linewidth)이 점점 좁아지고 있다. 이러한 변화는 검출해야 할 불량의 크기가 작아지고, 정상 공정상태와 비정상 공정상태의 차이도 상대적으로 감소되어, 공정오차 및 공정조건의 허용범위가 축소되었음을 의미한다. 따라서 검출해야 할 이상징후 탐지가 더욱 어렵게 되어, 높은 정밀도와 해상도를 갖는 검사공정이 요구되고 있다. 이러한 이유로, 미세 공정변화를 파악할 수 있는 신규 검사 및 계측 공정이 추가되어 TAT(Turn-around Time)가 증가하게 되었고, 웨이퍼가 가공되어 완제품까지 도달하는데 필요한 공정시간이 증가하여 제조원가 상승의 원인으로 작용한다. 본 논문에서는 웨이퍼의 검계측 데이터가 아닌, 제조공정 과정에서 발생하는 다양한 센서 및 장비 데이터를 기반으로 웨이퍼 제조 결과가 양품인지 그렇지 않으면 불량인지 구별할 수 있는 가상계측 모델을 제안한다. 기계학습의 여러 알고리즘 중에서 다양한 장점을 갖는 XGBoost 알고리즘을 이용하여 예측모델을 구축하였고, 데이터 전처리(data-preprocessing), 주요변수 추출(feature selection), 모델 구축(model design), 모델 평가(model evaluation)의 순서로 연구를 수행하였다. 결과적으로 약 94% 이상의 정확성을 갖는 모형을 구축하는데 성공하였으나 더욱 높은 정확성을 확보하기 위해서는 반도체 공정과 관련된 Domain Knowledge 를 반영한 모델구축과 같은 추가적인 연구가 필요하다.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.47 no.11
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• pp.37-42
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• 2010

A novel hysteresis tunable monolithic comparator circuit based on a $0.35{\mu}m$ CMOS process is suggested, designed, fabricated, measured and analyzed in this paper. To tune the threshold voltage of the hysteresis in the comparator circuit, two external digital bits are used with supply voltage of 3.3V.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.16 no.6 s.97
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• pp.594-602
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• 2005

In this paper, a new type of 5-pole low pass filter(LPF) having defected ground structure(DGS) and very wide transmission line elements is proposed. The previously presented design method of 3-stage LPF using DGS is generalized to design N-pole LPFs for $N\geq5$. As an example, a 5-pole LPF having DGS is designed and measured. The accurate curve-fitting method to determine the series inductors in the prototype filter, and ultimately the size of DGS is described. The proposed 5-pole LPF has transmission line elements with a very low impedance to realize the required shunt capacitance instead of open stubs. Therefore, open stub. Therefore, open stub, Tee-junction, Cross-junction, and high impedance line are not required for the proposed LPF, while they all have been essential in conventional LPFs.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.38 no.8
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• pp.709-714
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• 2014

Reverse-offset printing is one of the technologies that can be used for patterning fine features of the order of a few micrometers for printed electronics. In reverse-offset printing, a coated ink film is transferred to a blanket made of elastomer-like poly-dimethylsiloxane. Then, the blanket is impressed onto a clich$\acute{e}$ that has intaglio patterns. The blanket is deformed by penetrating the intaglio of the clich$\acute{e}$ according to the printing pressure. Excessive deformation of the blanket can cause printing defects upon touching the bottom of the intaglio pattern, especially in large patterns. In this paper, we modelled the deformation of the blanket using the finite element method. Considering the actual printing parameters, a condition for fabricating a clich$\acute{e}$ is proposed to prevent defects by the deformation of the blanket.